Abstract

This paper presents the calculation of the perceived color of dielectric films on silicon. A procedure is shown for computing the perceived color for an arbitrary light source, light incident angle, and film thickness. The calculated color is converted into RGB parameters that can be displayed on a color monitor, resulting in the generation of electronic color charts for dielectric films. This paper shows generated electronic color charts for both silicon dioxide and silicon nitride films on silicon.

© 2004 Optical Society of America

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References

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  11. �??BYU Cleanroom �?? Electronic Color Charts,�?? <a href="http://www.ee.byu.edu/cleanroom/color_chart.phtml">http://www.ee.byu.edu/cleanroom/color_chart.phtml</a>.

Appl. Opt. (1)

IBM J. (1)

W.A. Pliskin and E.E. Conrad, �??Nondestructive Determination of Thickness and Refractive Index of Transparent Films,�?? IBM Journal, p. 48, January 1964.

Other (9)

B. Dawes, �??Metal Halide and Fluorescent Lamp Spectra,�?? <a href="http://www.colorpro.com/info/data/lamps.html">http://www.colorpro.com/info/data/lamps.html</a>.

E. Hecht and A Zajac, Optics (Addison-Wesley, 1975).

E. D. Palik, Handbook of Optical Constants of Solids (Academic Press, 1998).

J. Walker, �??Colour rendering of spectra,�?? (1996), <a href="http://www.fourmilab.ch/documents/specrend/">http://www.fourmilab.ch/documents/specrend/</a>

D. Post, �??Colorimetric measurement, calibration, and characterization of self-luminous displays,�?? in Color in Electronic Displays, (Plenum Press, 1992).

B Lindbloom �??XYZ to RGB,�?? <a href="http://www.brucelindbloom.com">http://www.brucelindbloom.com</a>.

C. A. Poynton, A Technical Introduction to Digital Video, (John Wiley and Sons, New York, 1996).

M. Stokes, M. Anderson, S. Chandrasekar, R. Motta, �??A Standard Default Color Space for the Internet �??sRGB,�?? (1996). <a href="http://www.w3.org/Graphics/Color/sRGB">http://www.w3.org/Graphics/Color/sRGB</a>.

�??BYU Cleanroom �?? Electronic Color Charts,�?? <a href="http://www.ee.byu.edu/cleanroom/color_chart.phtml">http://www.ee.byu.edu/cleanroom/color_chart.phtml</a>.

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