Abstract

Astigmatism exists in a focused-ion-beam (FIB) system and causes the shape of a beam spot to change from a normal circle to an ellipse. This variation influences the fabrication of diffractive structures �?�by use of programmable controlled milling of a FIB. It is analyzed combined with the fabrication of blazed gratings and Fresnel diffractive lenses. Fabrication errors caused by a beam spot with astigmatism is discussed in detail for four cases of the long axis of an ellipse (a) in accordance with the X axis, (b) in accordance with the Y axis, (c) at 45º with the X axis, and (d) at �??45º with the X axis. Finally, a method is given for correction of the astigmatism and how to determine the circularity of the beam spot qualitatively.

© 2004 Optical Society of America

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References

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Appl. Opt. (2)

IEEE Photon. Technol. Lett. (1)

Y. Fu, �??Investigation of microdiffractive lens with continuous relief with vertical-cavity surface-emitting lasers using focused ion beam direct milling,�?? IEEE Photon. Technol. Lett. 13, 424�??426 (2001).
[CrossRef]

J. Micromech. Microeng. (1)

A. A Tseng, �??Recent developments in micromilling using focused ion beam technology,�?? J. Micromech. Microeng. 14, R15�??R34 (2004).
[CrossRef]

Opt. Eng. (1)

Y. Fu and N. K. A. Bryan. �??Investigation of diffractive�??refractive microlens array fabricated by focused ion beam technology,�?? Opt. Eng. 40, 511�??516 (2001).
[CrossRef]

Opt. Express (3)

Other (2)

P. D. Prewett and G. L. R. Mair, eds., Focused Ion Beam from Liquid Metal Ion Sources (Research Studies Press, Baldock, Hertfordshire, UK, 1991).

J. Orloff, ed., Handbook of Charged Particle Optics (CRC Press, Boca Raton, Fla., 1997), pp. 438�??455.

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