Abstract

We demonstrate a method of fabricating varied-line-spacing grating by employing elastic medium with variable vertical section. The advantages of this technique include continuous variation of line spacing, high fabrication efficiency, low cost, etc. It is very difficult or impractical to produce this variation of line spacing by traditional interference lithography. This kind of grating can be used in an optical position sensor to improve the precision of the sensor.

© 2004 Optical Society of America

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References

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Appl. Opt. (4)

Chem. Mater. (1)

J. L. Wilbur, R. J. Jackman, and G. M. Whitesides, �??Elastomeric optics,�?? Chem. Mater. 8, 1380-1385(1996).
[CrossRef]

Opt. Express (4)

Science (1)

R. J. Jackman, S. T. Brittain, A. Adams, M. G. Prentiss, and G. M. Whitesides, �??Design and fabrication of topologically complex, three-dimensional microstructures,�?? Science 280, 2091-2098 (1998).
[CrossRef]

Other (1)

C. Chen, C.-H. Chang, C. Joo, P. Konkola, J. Montoya, and R. Heilmann, �??Interference Lithography for Patterning Variable-Period Gratings,�?? MIT Microsystems Technology Laboratories annual research report 2003, 175-176, <a href="http://www-mtl.mit.edu/mtlhome/. ">http://www-mtl.mit.edu/mtlhome/.</a>

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Figures (3)

Fig. 1.
Fig. 1.

Schematic of the fabrication of variable-line-spacing grating.

Fig.2 .
Fig.2 .

implified model of the physics of the deformation.

Fig. 3.
Fig. 3.

Microscopic view of the varied-line-spacing grating.

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