Abstract

A valid optical system with a computer-generated hologram fabricated on a concave lens surface, for measuring large-aperture convex surface, is demonstrated experimentally. The CGH employed in this system has been constructed using a new technology that combines laser direct writing and lithography. This technology allows precise alignment, superior linear profile and high resolution of the gratings that compose the CGH. The particular characteristics of this new type of CGH could derive higher accuracy, efficiency and lower cost for testing aspherics in comparison to other CGH employed previously by other authors. We have designed and fabricated one system and measured a 110 mm-diameter convex surface of errors 300.6 nm P-V after compensating the alignment errors. It is believed that this kind of system can be used to measure even large aperture convex surface.

© 2004 Optical Society of America

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References

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    [CrossRef]
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Appl. Opt.

Opt. Acta.

A. F. Fercher, ???Computer-generated hologram for testing optical elements: error analysis and error compensation,??? Opt. Acta. 23, 347-365 (1976)
[CrossRef]

Opt. Commun.

R. Mercier and S. Lowenthal, ???Comparison of in-line and carrier frequency holograms in aspheric testing,??? Opt. Commun. 33, 251-256 (1980)
[CrossRef]

Opt. Express

Proc. SPIE

J.H. Burge and D.S. Anderson, ???Full aperture interferometeric test of convex secondary mirrors using holographic test plates,??? Proc. SPIE. 2199, 181-192 (1994)
[CrossRef]

Proc.SPIE

J.H. Burge, ???Fizeau interferometery for large convex surface,??? Proc.SPIE. 2536, 127-137 (1995)
[CrossRef]

J.H. Burge, ???Applications of computer-generated holograms for interferometric measurement of large aspheric optics,??? Proc.SPIE. 2576, 258-269 (1955)

SPIE

J.H. Burge, D.S. Anderson, T.D. Milster, C.L. Vernold, ???Measurement of a convex secondary mirror using a holographic test plate,??? SPIE 2199, 193-198 (1994)
[CrossRef]

R.Mercier, ???Holographic testing of aspherical surfaces,??? SPIE. 136, 208-214 (1977)
[CrossRef]

James C. Wyant, ???Interferometric testing of aspheric surfaces,??? SPIE. 816, 19-39 (1987)
[CrossRef]

J.H. Burge, ???Measurement of large convex aspheres,??? SPIE 2871, 362-373 (1996)

Other

A.Offner and D. Malacara, Null tests using compensators, (Wiley, New York, 1992), Chap. 12

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Figures (4)

Fig. 1.
Fig. 1.

Layout for measuring convex surface with diffractive optical element.

Fig. 2.
Fig. 2.

Schematic of the laser writer system.

Fig. 3.
Fig. 3.

Interferogram

Fig. 4.
Fig. 4.

Phase map of the convex surface under test

Equations (4)

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Δ W ( x , y ) = m λ ε ( x , y ) s ( x , y )
i th ring defined where ϕ CGH ( r ) { i λ D 2 λ i λ + D 2 λ
I 1 R = 1 cos 2 π m ( 1 a d ) 2 π 2 m 2 · 40 %
I 0 T = ( a d ) 2 · 96 % · 4 % · 96 % · ( a d ) 2

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