Abstract

We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2).

© 2004 Optical Society of America

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Appl. Opt. (1)

Appl. Phys. A - Mater (1)

C. Schaffer, J. Garcia and E. Mazur �??Bulk heating of transparent materials using a high repetition-rate femtosecond laser,�?? Appl. Phys. A - Mater 76, 351-354 (2003).

J. Appl. Physics (1)

K. Awazu, H. Kawazoe, �??Strained Si �?? O �?? Si bonds in amorphous SiO2 materials: A family member of active centers in radio, photo, and chemical responses,�?? J. Appl. Physics 94, 6243-6262 (2003).
[CrossRef]

J. Non-Cryst. Solids (1)

A. Agarwal and M. Tomozawa, �??Correlation of silica glass properties with the infrared spectra,�?? J. Non-Cryst. Solids 209, 166-174 (1997).
[CrossRef]

J. Opt. Soc. Am. B (1)

Jpn. J. Appl. Phys. (1)

Y. Kondo, T. Suzuki, H. Inouye, K. Miura, T. Mitsuyu, and K. Hirao, �??Three-Dimensional Microscopic Crystallization in Photosensitive Glass by Femtosecond Laser Pulses at Nonresonant Wavelength,�?? Jpn. J. Appl. Phys. 37, L94 - L96 (1998).
[CrossRef]

MRS Proceedings (1)

Y. Bellouard, A. Said, M. Dugan, P. Bado, �??Monolithic Three-Dimensional Integration of Micro-Fluidic Channels and Optical Waveguides in Fused Silica,�?? MRS Proceedings, vol. 782, Boston 2003 (in press).

NFOEC (1)

P. Bado, A. Said, M. Dugan, T. Sosnowski, and S. Wright, �??Dramatic improvements in waveguide manufacturing with femtosecond lasers,�?? in NFOEC, Dallas, Sept. 2002.

Opt. Express (1)

Opt. Lett. (2)

Photonics West, Proc. SPIE (1)

R. Gattass, I. Maxwell, J. Ashcom, and E. Mazur, �??Transition from repetitive to cumulative thermal processing in femtosecond laser induced machining of embedded waveguides�?? in Photonics West, Proc. SPIE 4978, 43 (2004).

Phys. Rev. B (1)

C. Fiori, R.A.B. Devine, �??Evidence for a wide continuum of polymorphs in a-SiO2,�?? Phys. Rev. B 33, 2972-2974 (1986).
[CrossRef]

Solid State Commun. (1)

F. L. Galeener, �??Planar rings in glass,�?? Solid State Commun. 44, 1037-1040 (1982).
[CrossRef]

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