Abstract

We present what we believe to be a new method for correcting the joint error of a laser writer without reduction of throughput. By digitization, we optimize the intensity data of the incident beam at the vicinity of the start point and the end point. The joint error will not be sensitive to lengthening of the start or end point by optimization. The advantage of this method over multipass writing and error scattering is that it requires only a single pass, and thus 80% of the fabrication time will be saved. Experimentation shows the method to be effective.

© 2003 Optical Society of America

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References

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  2. D. Bauerle, Laser Processing and Chemistry, 2nd. ed. (Springer-Verlag, Berlin, 1996).
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Appl. Opt. (1)

Laser-Assisted Micro-Technology (1)

S. M. Metev and V. P. Veiko, Laser-Assisted Micro-Technology, 2nd, ed. (Springer-Verlag, Berlin, 1998)
[CrossRef]

Opt. Express (2)

Proc. SPIE (2)

W. H. Hamaker, G. Burns, and P. Buch, �??Optimizing the use of multipass printing to minimize printing errors in advanced laser reticle-writing systems,�?? in 15th Annual BACUS Symposium on Photomask Technology and Management, G. Shelden and J. Wiley, eds., Proc. SPIE 2621, 319-328 (1995).
[CrossRef]

A. Poleshchuk and J. Burge, �??Polar coordinate writing systems: error analysis of fabricated DOEs,�?? in Lithographic and Micromachining Techniques for Optical component Fabrication, E.-B. Kley and H. Peter Herzig, eds., Proc. SPIE 4440, 161-172 (2001).
[CrossRef]

Sience (1)

D. B. Chrisey, �??The power of direct writing,�?? Science 289, 879-881 (2000).
[CrossRef]

Other (1)

D. Bauerle, Laser Processing and Chemistry, 2nd. ed. (Springer-Verlag, Berlin, 1996).

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Figures (7)

Fig. 1.
Fig. 1.

Phenomena of joint error.

Fig. 2.
Fig. 2.

Three instances of the joint. (a) Correct lengthening. (b) Insufficient lengthening. (c) Excessive lengthening.

Fig. 3.
Fig. 3.

Schematic of the correction process. (a) Writing one circle by a single pass. (b) Light intensity control of writing one circle by a single pass before digitization. (c) Light intensity control of writing one circle by a single pass after digitization.

Fig. 4.
Fig. 4.

Schematic of our laser direct writer.

Fig. 5.
Fig. 5.

Experimentation of lengthening before digitization. (a) Insufficient lengthening. (b) Excessive lengthening.

Fig. 6.
Fig. 6.

Correcting the line by digitization. Two-dimensional profile of the line. Three-dimensional profile of the line.

Fig. 7.
Fig. 7.

Correcting the circle by digitization. (a) Two-dimensional profile of the circle. (b) Three-dimensional profile of the circle.

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