Abstract

We report a simple method for forming surface corrugation of microlenses based on a volume growth effect of sol-gel glass. The volume growth effect was fully calibrated with a high-energy beam-sensitive grayscale mask, where the amount of growth was determined as a function of electron-beam-induced optical densities in the mask. This technique provides an excellent surface smoothness compared with other development based fabrication techniques. For example, a refractive microlens with a diameter of 140 µm and a sag height of 2.13 µm was demonstrated.

© 2003 Optical Society of America

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References

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  1. P. Coudray, P. Etienne, Y. Moreau, J. Porque, S. I. Najafi, �??Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,�?? Opt. Commun. 143, 199-202 (1997).
    [CrossRef]
  2. J. T. Rantala, P. �?yräs, R. Levy, S. Honkanen, M. R. Descour, N. Peyghambarian, �??Binary-phase zoneplate arrays based on hybrid sol-gel glass,�?? Opt. Lett. 23, 1939-1941 (1998).
    [CrossRef]
  3. S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A. V. Tishchenko, O. Parriaux, �??Single-step UV recording of sinusoidal surface gratings in hybrid sol-gel glasses,�?? Appl. Opt. 38, 6744-6748 (1999).
    [CrossRef]
  4. J. T. Rantala, A. H. O. Kärkkäinen, J. A. Hiltunen, M. Keränen, T. Kololuoma, M. R. Descour, �??UV light induced surface expansion phenomenon of hybrid glass thin films,�?? Opt. Express 8, 682-687 (2001), <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-8-13-682">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-8-13-682</a>
    [CrossRef] [PubMed]
  5. D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, M. P. Andrews, �??Self-processing of surface relief gratings in photosensitive hybrid sol-gel glasses,�?? Adv. Mater. 11, 1508-1511 (1999).
    [CrossRef]
  6. J. Neumann, K. S. Wieking, D. Kip, �??Direct laser writing of surface reliefs in dry, self-developing photopolymer films,�?? Appl. Opt. 38, 5418-5421 (1999).
    [CrossRef]
  7. X.-C. Yuan, W. X.Yu, N. Q. Ngo, W. C. Cheong, �??Cost-effective fabrication of microlenses on hybrid solgel glass with a high-energy beam�??sensitive gray-scale mask,�?? Opt. Express 10, 303-308 (2002). <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-10-7-303">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-10-7-303</a>.
    [CrossRef] [PubMed]
  8. W. X. Yu, X.-C. Yuan, N. Q. Ngo, W. X. Que, W. C. Cheong, K. V. Koudriachov, �??Single step fabrication of continuous micro-optical elements in hybrid sol-gel glass by laser direct writing,�?? Opt. Express 10, 443-448 (2002), <a href="http://www.opticsexpress.org/abstract.cfm?URI=OPEX-10-10-443">http://www.opticsexpress.org/abstract.cfm?URI=OPEX-10-10-443</a>
    [CrossRef] [PubMed]
  9. H. S. Alhokai, �??Fabrication of photoresist microlens arrays,�?? Microelectronics, 1998. ICM '98. Proceedings of the Tenth International Conference on. 49-52 (1998).
  10. R. R. A. Syms, A. S. Holmes, W. Huang, V. M. Schneider, M. Green, J. Sol-Gel Sci. Technol. 13, 509 (1998).
    [CrossRef]
  11. W. Däschner, P. Long, R. Stein, C. Wu, S. H. Lee, �??Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a grayscale mask on high-energy beamsensitive glass,�?? Appl. Opt. 36, 4675-4680 (1997).
    [CrossRef] [PubMed]

Adv. Mater.

D. Blanc, S. Pelissier, K. Saravanamuttu, S. I. Najafi, M. P. Andrews, �??Self-processing of surface relief gratings in photosensitive hybrid sol-gel glasses,�?? Adv. Mater. 11, 1508-1511 (1999).
[CrossRef]

Appl. Opt.

J. Sol-Gel Sci. Technol.

R. R. A. Syms, A. S. Holmes, W. Huang, V. M. Schneider, M. Green, J. Sol-Gel Sci. Technol. 13, 509 (1998).
[CrossRef]

Opt. Commun.

P. Coudray, P. Etienne, Y. Moreau, J. Porque, S. I. Najafi, �??Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,�?? Opt. Commun. 143, 199-202 (1997).
[CrossRef]

Opt. Express

Opt. Lett.

Other

H. S. Alhokai, �??Fabrication of photoresist microlens arrays,�?? Microelectronics, 1998. ICM '98. Proceedings of the Tenth International Conference on. 49-52 (1998).

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Figures (5)

Fig.1.
Fig.1.

Schematic diagram of the experimental setup for calibration with a gray-scale mask.

Fig. 2.
Fig. 2.

Electron-beam dosage versus surface relief thickness.

Fig. 3.
Fig. 3.

Three-dimensional profile of the microlens fabricated in self-developed sol-gel glass.

Fig. 4.
Fig. 4.

Two-dimensional surface profile of the microlens; dotted and solid curves, theoretical and measured profiles, respectively

Fig. 5.
Fig. 5.

Surface roughness measured in the top area of the fabricated microlens.

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