Abstract

This letter presents a method to fabricate high quality, high refractive index titanium oxide thin films by applying liquid phase spin-on deposition combined with low temperature annealing. The synthesis of the liquid form titanium oxide material is carried out using a sol-gel synthesis technique. The material can be annealed at low temperature (150 C°) to achieve relatively high refractive index of 1.94 at 632.8 nm wavelength, whereas annealing at 350 C° results in index of 2.03 at 632.8 nm. Film depositions are demonstrated on silicon substrates with 0.5% uniformity in thickness. Refractive indices and extinction coefficients are characterized over a broad wavelength range to demonstrate the optical performance of this novel aqueous phase spin-on deposited hybrid titanium oxide material.

©2003 Optical Society of America

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References

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  1. S. Toyoda, N. Ooba, M. Hikita, T. Kurihara, and S. Imamura, “Propagation loss and birefringence properties around 1.55 µm of polymeric optical waveguides fabricated with cross-linked silicone,” Thin Solid Films 370, 311 (2000).
    [Crossref]
  2. R. R. A. Syms and A. S. Holmes, “Deposition of thick silica-titania sol-gel films on Si substrates,” J. Non-Cryst. Solids 170, 223 (1994).
    [Crossref]
  3. J. T. Rantala, P. Äyräs, R. Levy, S. Honkanen, M. R. Descour, and N. Peyghambarian, “Binary phase zone-plate arrays based on hybrid sol-gel glass,” Opt. Lett. 23, 1939 (1998).
    [Crossref]
  4. M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
    [Crossref]
  5. A. H. O. Kärkkäinen, J. T. Rantala, A. Maaninen, G. E. Jabbour, and M. R. Descour, “Siloxane based hybrid glass materials for binary and gray-scale mask photoimaging,” Adv. Mat. 14, 535 (2002).
    [Crossref]
  6. M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
    [Crossref]
  7. P. Belleville, P. Prené, and B. Lambert, “A UV-cured sol-gel broadband antireflective and scratch-resistant coating for CRT,” Proc. SPIE - Int. Soc. Opt. Eng. 3943, 67 (2000).

2002 (2)

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

A. H. O. Kärkkäinen, J. T. Rantala, A. Maaninen, G. E. Jabbour, and M. R. Descour, “Siloxane based hybrid glass materials for binary and gray-scale mask photoimaging,” Adv. Mat. 14, 535 (2002).
[Crossref]

2001 (1)

M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
[Crossref]

2000 (2)

P. Belleville, P. Prené, and B. Lambert, “A UV-cured sol-gel broadband antireflective and scratch-resistant coating for CRT,” Proc. SPIE - Int. Soc. Opt. Eng. 3943, 67 (2000).

S. Toyoda, N. Ooba, M. Hikita, T. Kurihara, and S. Imamura, “Propagation loss and birefringence properties around 1.55 µm of polymeric optical waveguides fabricated with cross-linked silicone,” Thin Solid Films 370, 311 (2000).
[Crossref]

1998 (1)

1994 (1)

R. R. A. Syms and A. S. Holmes, “Deposition of thick silica-titania sol-gel films on Si substrates,” J. Non-Cryst. Solids 170, 223 (1994).
[Crossref]

Anslyn, E. V.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

Äyräs, P.

Belleville, P.

P. Belleville, P. Prené, and B. Lambert, “A UV-cured sol-gel broadband antireflective and scratch-resistant coating for CRT,” Proc. SPIE - Int. Soc. Opt. Eng. 3943, 67 (2000).

Burgos, M.

M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
[Crossref]

Coutier, C.

M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
[Crossref]

Descour, M. R.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

A. H. O. Kärkkäinen, J. T. Rantala, A. Maaninen, G. E. Jabbour, and M. R. Descour, “Siloxane based hybrid glass materials for binary and gray-scale mask photoimaging,” Adv. Mat. 14, 535 (2002).
[Crossref]

J. T. Rantala, P. Äyräs, R. Levy, S. Honkanen, M. R. Descour, and N. Peyghambarian, “Binary phase zone-plate arrays based on hybrid sol-gel glass,” Opt. Lett. 23, 1939 (1998).
[Crossref]

Dupuis, R. D.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

Hikita, M.

S. Toyoda, N. Ooba, M. Hikita, T. Kurihara, and S. Imamura, “Propagation loss and birefringence properties around 1.55 µm of polymeric optical waveguides fabricated with cross-linked silicone,” Thin Solid Films 370, 311 (2000).
[Crossref]

Holmes, A. S.

R. R. A. Syms and A. S. Holmes, “Deposition of thick silica-titania sol-gel films on Si substrates,” J. Non-Cryst. Solids 170, 223 (1994).
[Crossref]

Honkanen, S.

Imamura, S.

S. Toyoda, N. Ooba, M. Hikita, T. Kurihara, and S. Imamura, “Propagation loss and birefringence properties around 1.55 µm of polymeric optical waveguides fabricated with cross-linked silicone,” Thin Solid Films 370, 311 (2000).
[Crossref]

Jabbour, G. E.

A. H. O. Kärkkäinen, J. T. Rantala, A. Maaninen, G. E. Jabbour, and M. R. Descour, “Siloxane based hybrid glass materials for binary and gray-scale mask photoimaging,” Adv. Mat. 14, 535 (2002).
[Crossref]

Jimenez, C.

M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
[Crossref]

Kärkkäinen, A. H. O.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

A. H. O. Kärkkäinen, J. T. Rantala, A. Maaninen, G. E. Jabbour, and M. R. Descour, “Siloxane based hybrid glass materials for binary and gray-scale mask photoimaging,” Adv. Mat. 14, 535 (2002).
[Crossref]

Kilic, B.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

Kurihara, T.

S. Toyoda, N. Ooba, M. Hikita, T. Kurihara, and S. Imamura, “Propagation loss and birefringence properties around 1.55 µm of polymeric optical waveguides fabricated with cross-linked silicone,” Thin Solid Films 370, 311 (2000).
[Crossref]

Lambert, B.

P. Belleville, P. Prené, and B. Lambert, “A UV-cured sol-gel broadband antireflective and scratch-resistant coating for CRT,” Proc. SPIE - Int. Soc. Opt. Eng. 3943, 67 (2000).

Langlet, M.

M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
[Crossref]

Levy, R.

Liang, C.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

Maaninen, A.

A. H. O. Kärkkäinen, J. T. Rantala, A. Maaninen, G. E. Jabbour, and M. R. Descour, “Siloxane based hybrid glass materials for binary and gray-scale mask photoimaging,” Adv. Mat. 14, 535 (2002).
[Crossref]

Madenci, E.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

Manzo, M.

M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
[Crossref]

Morant, C.

M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
[Crossref]

Ooba, N.

S. Toyoda, N. Ooba, M. Hikita, T. Kurihara, and S. Imamura, “Propagation loss and birefringence properties around 1.55 µm of polymeric optical waveguides fabricated with cross-linked silicone,” Thin Solid Films 370, 311 (2000).
[Crossref]

Peyghambarian, N.

Prené, P.

P. Belleville, P. Prené, and B. Lambert, “A UV-cured sol-gel broadband antireflective and scratch-resistant coating for CRT,” Proc. SPIE - Int. Soc. Opt. Eng. 3943, 67 (2000).

Rantala, J. T.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

A. H. O. Kärkkäinen, J. T. Rantala, A. Maaninen, G. E. Jabbour, and M. R. Descour, “Siloxane based hybrid glass materials for binary and gray-scale mask photoimaging,” Adv. Mat. 14, 535 (2002).
[Crossref]

J. T. Rantala, P. Äyräs, R. Levy, S. Honkanen, M. R. Descour, and N. Peyghambarian, “Binary phase zone-plate arrays based on hybrid sol-gel glass,” Opt. Lett. 23, 1939 (1998).
[Crossref]

Richards-Kortum, R. R.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

Rogers, J. D.

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

Syms, R. R. A.

R. R. A. Syms and A. S. Holmes, “Deposition of thick silica-titania sol-gel films on Si substrates,” J. Non-Cryst. Solids 170, 223 (1994).
[Crossref]

Toyoda, S.

S. Toyoda, N. Ooba, M. Hikita, T. Kurihara, and S. Imamura, “Propagation loss and birefringence properties around 1.55 µm of polymeric optical waveguides fabricated with cross-linked silicone,” Thin Solid Films 370, 311 (2000).
[Crossref]

Adv. Mat. (1)

A. H. O. Kärkkäinen, J. T. Rantala, A. Maaninen, G. E. Jabbour, and M. R. Descour, “Siloxane based hybrid glass materials for binary and gray-scale mask photoimaging,” Adv. Mat. 14, 535 (2002).
[Crossref]

IEEE J. Quantum Electron. (1)

M. R. Descour, A. H. O. Kärkkäinen, J. D. Rogers, C. Liang, B. Kilic, E. Madenci, J. T. Rantala, R. R. Richards-Kortum, E. V. Anslyn, and R. D. Dupuis, “Toward the development of miniaturized imaging systems for detection of pre-cancer,” IEEE J. Quantum Electron. 38, 122 (2002).
[Crossref]

J. Non-Cryst. Solids (1)

R. R. A. Syms and A. S. Holmes, “Deposition of thick silica-titania sol-gel films on Si substrates,” J. Non-Cryst. Solids 170, 223 (1994).
[Crossref]

J. Sol-gel Sci. Tech. (1)

M. Langlet, M. Burgos, C. Coutier, C. Jimenez, C. Morant, and M. Manzo, “Low temperature preparation of high refractive index and mechanically resistant sol-gel TiO2 films for multilayer antireflective coating applications,” J. Sol-gel Sci. Tech. 22, 139 (2001).
[Crossref]

Opt. Lett. (1)

Proc. SPIE - Int. Soc. Opt. Eng. (1)

P. Belleville, P. Prené, and B. Lambert, “A UV-cured sol-gel broadband antireflective and scratch-resistant coating for CRT,” Proc. SPIE - Int. Soc. Opt. Eng. 3943, 67 (2000).

Thin Solid Films (1)

S. Toyoda, N. Ooba, M. Hikita, T. Kurihara, and S. Imamura, “Propagation loss and birefringence properties around 1.55 µm of polymeric optical waveguides fabricated with cross-linked silicone,” Thin Solid Films 370, 311 (2000).
[Crossref]

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Figures (3)

Fig. 1.
Fig. 1. Extinction co-efficiency of titanium oxide films annealed at 150 °C and 350 °C. The extinction co-efficiency saturates to “zero-level” at 390 nm range (see insert) and no attenuation is detectable at visible and NIR regions.

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Fig. 2.
Fig. 2. Refractive index of titanium oxide films as a function of wavelength for 150 C° (solid) and 350 C° (dashed) annealed films.

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Fig. 3.
Fig. 3. Surface-topography measurement of the deposited films. Part (a) shows a 3D image of the film treated at 150 °C. The rms surface roughness was measured to be 1.43nm. Part (b) shows a 3D image of the film treated at 350 °C. The rms surface roughness was measured to be 0.97nm. See text for measurement details.

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Tables (1)

Tables Icon

Table 1. Refractive indices (at 633 nm) of the film at various processing temperatures and corresponding film thicknesses based on reflectomer measurements.

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