Abstract

Formulation of the Fourier modal method for multilevel structures with spatially adaptive resolution is presented, using a slightly reformulated representation for the spatial coordinates. Projections to Fourier base in boundary value problem are used allowing extensions to multilayer profiles with differently placed transitions. We evade the eigenvalue problem in homogeneous regions demanded in the original formulation of the Fourier modal method with adaptive spatial resolution.

© Optical Society of America

PDF Article

References

  • View by:
  • |

  1. K. Knop, "Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves," J. Opt. Soc. Am. 68, 1206-1210 (1978).
  2. P. Lalanne and G. M. Morris, "Highly improved convergence of the coupled-wave method for TM polarization," J. Opt. Soc. Am. A 13, 779-784 (1996).
  3. G. Granet and B. Guizal, "Efficient implementation for the coupled-wave method for metallic lamellar gratings in TM polarization," J. Opt. Soc. Am. A 13, 1019-1023 (1996).
  4. L. Li, "Use of Fourier series in the analysis of discontinuous periodic structures," J. Opt. Soc. Am. A 13, 1870-1876 (1996).
  5. G. Granet,"Reformulation of the lamellar grating problem through the concept of adaptive spatial resolution," J. Opt. Soc. Am. A 16, 2510-2516 (1999).
  6. R. Petit, ed., Electromagnetic theory of gratings (Springer-Verlag, Berlin, 1980).
  7. J. Turunen, "Diffraction theory of microrelief gratings," Chap 2 in Micro-Optics: Elements, Systems and Applications, H. P. Herzig, ed. (Taylor & Francis, Cornwall, 1997)
  8. G. Granet, J. Chandezon, J.-P. Plumey, and K. Raniriharinosy, "Reformulation of the coordinate transformation method through the concept of adaptive spatial resolution. Application to trapezoidal gratings," J. Opt. Soc. Am. A 18, 2102-2108 (2001).
  9. L. Li, "Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings," J. Opt. Soc. Am. A 13, 1024-1035 (1996).
  10. R. H. Morf, "Exponentially convergent and numerically efficient solution of Maxwell's equations for lamellar gratings," J. Opt. Soc. Am. A 12, 1043-1056 (1995).
  11. D. Nyyssonen and C. P. Kirk, "Optical microscope imaging of lines patterned in thick layers with variable edge geometry," J. Opt. Soc. Am. A 5, 1270-1280 (1988).

Other (11)

K. Knop, "Rigorous diffraction theory for transmission phase gratings with deep rectangular grooves," J. Opt. Soc. Am. 68, 1206-1210 (1978).

P. Lalanne and G. M. Morris, "Highly improved convergence of the coupled-wave method for TM polarization," J. Opt. Soc. Am. A 13, 779-784 (1996).

G. Granet and B. Guizal, "Efficient implementation for the coupled-wave method for metallic lamellar gratings in TM polarization," J. Opt. Soc. Am. A 13, 1019-1023 (1996).

L. Li, "Use of Fourier series in the analysis of discontinuous periodic structures," J. Opt. Soc. Am. A 13, 1870-1876 (1996).

G. Granet,"Reformulation of the lamellar grating problem through the concept of adaptive spatial resolution," J. Opt. Soc. Am. A 16, 2510-2516 (1999).

R. Petit, ed., Electromagnetic theory of gratings (Springer-Verlag, Berlin, 1980).

J. Turunen, "Diffraction theory of microrelief gratings," Chap 2 in Micro-Optics: Elements, Systems and Applications, H. P. Herzig, ed. (Taylor & Francis, Cornwall, 1997)

G. Granet, J. Chandezon, J.-P. Plumey, and K. Raniriharinosy, "Reformulation of the coordinate transformation method through the concept of adaptive spatial resolution. Application to trapezoidal gratings," J. Opt. Soc. Am. A 18, 2102-2108 (2001).

L. Li, "Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings," J. Opt. Soc. Am. A 13, 1024-1035 (1996).

R. H. Morf, "Exponentially convergent and numerically efficient solution of Maxwell's equations for lamellar gratings," J. Opt. Soc. Am. A 12, 1043-1056 (1995).

D. Nyyssonen and C. P. Kirk, "Optical microscope imaging of lines patterned in thick layers with variable edge geometry," J. Opt. Soc. Am. A 5, 1270-1280 (1988).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics