Abstract
We report on the production and characterisation of optical microring resonators and optical channel waveguides by using fluorine-ion implantation and planar structuring in lithium niobate. We demonstrate the production of single-mode planar waveguides by low fluence fluorine-ion implantation (ϕ=2.5·1014 ions/cm2) into lithium niobate wafers. The waveguides are strongly confined by the amorphous 2-µm wide optical barrier induced by the implantation process. A refractive index contrast of Δno=0.17 at the telecom wavelength λ=1.5 µm has been determined between the waveguide and the barrier. Planar structuring with ridge height of up to 1.2 µm has been achieved by laser lithography masking and Ar+ sputtering. For TE waves, the channel waveguides exhibit propagation losses lower than 8 dB/cm. First ring resonators with 80-µm radius have been fabricated by planar structuring in fluorine-ion implanted lithium niobate. The measured resonance curves show an extinction ratio of 14 dB, a free spectral range of 2.0 nm and a finesse of 4.
©2008 Optical Society of America
Full Article | PDF ArticleMore Like This
Yang Tan, Feng Chen, Milutin Stepić, Vladimir Shandarov, and Detlef Kip
Opt. Express 16(14) 10465-10470 (2008)
Fei Lu, Gang Fu, Chuanlei Jia, Keming Wang, Hongji Ma, and Dingyu Shen
Opt. Express 13(23) 9143-9148 (2005)
Michael Waldow, Tobias Plötzing, Martin Gottheil, Michael Först, Jens Bolten, Thorsten Wahlbrink, and Heinrich Kurz
Opt. Express 16(11) 7693-7702 (2008)