Abstract

We describe how spectrally-resolved white-light phase-shifting interference microscopy with a windowed 8-step algorithm can be used for rapid and accurate measurements of the thickness profile of transparent thin film layers with a wide range of thicknesses deposited upon patterned structures exhibiting steps and discontinuities. An advantage of this technique is that it can be implemented with readily available hardware.

©2006 Optical Society of America

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References

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    [Crossref] [PubMed]
  3. P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
    [Crossref]
  4. P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
    [Crossref]
  5. S. W. Kim and G. H. Kim, “Thickness profile measurement of transparent thin-film layers by white-light scanning interferometry,” Appl. Opt. 38, 5968–5973 (1999).
    [Crossref]
  6. D. Kim and S. Kim, “Direct spectral phase function calculation for dispersive interferometric thickness profilometry,” Opt. Express,  12, 5117–5124 (2004).
    [Crossref] [PubMed]
  7. D. Kim, S. Kim, H. Kong, and Y. Lee, “Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter,” Opt. Lett. 27, 1893–1895 (2002).
    [Crossref]
  8. J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
    [Crossref]
  9. P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
    [Crossref]
  10. S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
    [Crossref]
  11. S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
    [Crossref]
  12. P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504–2506 (1987).
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  14. J. Schmit and K. Creath, “Window function influence on phase error in phase-shifting algorithms,” Appl. Opt. 35, 5642–5649 (1996).
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    [Crossref]

2005 (1)

S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
[Crossref]

2004 (1)

2002 (1)

2001 (1)

S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]

2000 (1)

1999 (1)

1996 (4)

J. Schmit and K. Creath, “Window function influence on phase error in phase-shifting algorithms,” Appl. Opt. 35, 5642–5649 (1996).
[Crossref] [PubMed]

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]

P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]

P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
[Crossref]

1995 (1)

1994 (1)

P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
[Crossref]

1990 (2)

1987 (1)

Born, M.

M. Born and E. Wolf, Principles of Optics, 7th Ed. (Cambridge University Press, 1999), pp. 752–758.

Calatroni, J.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]

Chim, S. S. C.

Creath, K.

Debnath, S. K.

S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
[Crossref]

Eiju, T.

Escalona, R.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]

Guerrero, A. L.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]

Harasaki, A.

Hariharan, P.

P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
[Crossref]

P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
[Crossref]

P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504–2506 (1987).
[Crossref] [PubMed]

Helen, S. S.

S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]

Kim, D.

Kim, G. H.

Kim, S.

Kim, S. W.

Kino, G. S.

Kong, H.

Kothiyal, M. P.

S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
[Crossref]

S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]

Lee, B. S.

Lee, Y.

Oreb, B. F.

Perrin, H.

P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]

Roy, M.

P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
[Crossref]

P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
[Crossref]

Sainz, C.

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]

Sandoz, P.

P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]

Schmit, J.

Sirohi, R. S.

S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]

Strand, T. C.

Tribillon, G.

P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]

Wolf, E.

M. Born and E. Wolf, Principles of Optics, 7th Ed. (Cambridge University Press, 1999), pp. 752–758.

Wyant, J. C.

Appl. Opt. (6)

J. Mod. Opt. (3)

P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
[Crossref]

P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
[Crossref]

P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]

Opt. Eng. (2)

S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]

S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
[Crossref]

Opt. Express (1)

Opt. Laser Technol. (1)

J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]

Opt. Lett. (2)

Other (1)

M. Born and E. Wolf, Principles of Optics, 7th Ed. (Cambridge University Press, 1999), pp. 752–758.

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Figures (5)

Fig. 1.
Fig. 1.

Schematic of the spectrally-resolved phase-shifting interference profilometer.

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Fig. 2.
Fig. 2.

Cross section of a patterned surface with a transparent film deposited on it.

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Fig. 3.
Fig. 3.

Simulated phase ψ for a 1.5 µm SiO2 film on Si.

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Fig. 4.
Fig. 4.

Phase ϕ(x,σ) vs. wave number σ at a point on the surface for four Si samples with SiO2 films of different thicknesses.

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Fig. 5.
Fig. 5.

Line profiles of the top surface of the film and substrate.

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Equations (6)

Equations on this page are rendered with MathJax. Learn more.

tam ϕ = − I 1 − 5 I 2 + 11 I 3 + 15 I 4 − 15 I 5 − 11 I 6 + 5 I 7 + I 8 I 1 − 5 I 2 − 11 I 3 + 15 I 4 + 15 I 5 − 11 I 6 − 5 I 7 + I 8
I ( x , σ ) = I 0 ( x , σ ) [ 1 + V ( x , σ ) cos ϕ ( x , σ ) ]
ϕ ( x , σ ) = 4 π σ z ( x ) + ψ ( σ , x , d , n 2 ) ,
ϕ ( x , σ ) = 4 π σ z + 4 π n 2 σ d + ϕ nl
η ( z , d ) = ∑ [ ϕ mod el ( σ , z , d ) − ϕ measured ( σ ) ] 2
( z + n 2 d ) = slope ⁄ ( 4 π )

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