S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
[Crossref]
S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]
J. Schmit and K. Creath, “Window function influence on phase error in phase-shifting algorithms,” Appl. Opt. 35, 5642–5649 (1996).
[Crossref]
[PubMed]
P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
[Crossref]
J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]
P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]
P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
[Crossref]
M. Born and E. Wolf, Principles of Optics, 7th Ed. (Cambridge University Press, 1999), pp. 752–758.
J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]
S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
[Crossref]
J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]
J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]
P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
[Crossref]
P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
[Crossref]
P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504–2506 (1987).
[Crossref]
[PubMed]
S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]
D. Kim and S. Kim, “Direct spectral phase function calculation for dispersive interferometric thickness profilometry,” Opt. Express, 12, 5117–5124 (2004).
[Crossref]
[PubMed]
D. Kim, S. Kim, H. Kong, and Y. Lee, “Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter,” Opt. Lett. 27, 1893–1895 (2002).
[Crossref]
D. Kim and S. Kim, “Direct spectral phase function calculation for dispersive interferometric thickness profilometry,” Opt. Express, 12, 5117–5124 (2004).
[Crossref]
[PubMed]
D. Kim, S. Kim, H. Kong, and Y. Lee, “Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter,” Opt. Lett. 27, 1893–1895 (2002).
[Crossref]
S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
[Crossref]
S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]
P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]
P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
[Crossref]
P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
[Crossref]
J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]
P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]
S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]
P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]
M. Born and E. Wolf, Principles of Optics, 7th Ed. (Cambridge University Press, 1999), pp. 752–758.
B. S. Lee and T. C. Strand, “Profilometry with a coherence scanning microscope,” Appl. Opt. 29, 3784–3788 (1990).
[Crossref]
[PubMed]
S. W. Kim and G. H. Kim, “Thickness profile measurement of transparent thin-film layers by white-light scanning interferometry,” Appl. Opt. 38, 5968–5973 (1999).
[Crossref]
A. Harasaki and J. C. Wyant, “Fringe modulation skewing effect in white light vertical scanning interferometry,” Appl. Opt. 39, 2101–2106 (2000).
[Crossref]
J. Schmit and K. Creath, “Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry,” Appl. Opt. 34, 3610–3619 (1995).
[Crossref]
[PubMed]
J. Schmit and K. Creath, “Window function influence on phase error in phase-shifting algorithms,” Appl. Opt. 35, 5642–5649 (1996).
[Crossref]
[PubMed]
P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504–2506 (1987).
[Crossref]
[PubMed]
P. Hariharan and M. Roy, “White-light phase-stepping interferometry for surface profiling,” J. Mod. Opt. 41, 2197–2201 (1994).
[Crossref]
P. Hariharan and M. Roy, “Interferometric surface profiling with white light: effect of surface films,” J. Mod. Opt. 43, 1797–1800 (1996).
[Crossref]
P. Sandoz, G. Tribillon, and H. Perrin, “High resolution profilometry by using phase calculation algorithms for spectroscopic analysis of white light interferograms,” J. Mod. Opt. 43, 701–708 (1996).
[Crossref]
S. S. Helen, M. P. Kothiyal, and R. S. Sirohi, “Analysis of spectrally resolved white light interferograms: use of a phase shifting technique,” Opt. Eng. 40, 1329–1336 (2001).
[Crossref]
S. K. Debnath and M. P. Kothiyal, “Optical profiler based on spectrally resolved white light interferometry,” Opt. Eng. 44, 013606 (2005).
[Crossref]
J. Calatroni, A. L. Guerrero, C. Sainz, and R. Escalona, “Spectrally resolved white-light interferometry as a profilometry tool,” Opt. Laser Technol. 28, 485–489 (1996).
[Crossref]
M. Born and E. Wolf, Principles of Optics, 7th Ed. (Cambridge University Press, 1999), pp. 752–758.