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Tailored anomalous group-velocity dispersion in silicon channel waveguides

Amy C. Turner, Christina Manolatou, Bradley S. Schmidt, Michal Lipson, Mark A. Foster, Jay E. Sharping, and Alexander L. Gaeta

Open Access Open Access

Abstract

We present the first experimental demonstration of anomalous group-velocity dispersion (GVD) in silicon waveguides across the telecommunication bands. We show that the GVD in such waveguides can be tuned from -2000 to 1000 ps/(nm·km) by tailoring the cross-sectional size and shape of the waveguide.

©2006 Optical Society of America

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Figures (3)
Fig. 1.
Fig. 1. Group-velocity dispersion D as a function of wavelength for a fixed aspect ratio of 1:1.5 (height to width) and for cross-sectional areas of 0.09 µm2, 0.20 µm2, 0.40 µm2, and 0.56 µm2.

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Fig. 2.
Fig. 2. Group-velocity dispersion as a function of wavelength for varying aspect ratios and fixed cross sectional areas of (a) 0.09 µm2 and (b) 0.56 µm2.

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Fig. 3.
Fig. 3. Simulated (lines) and experimental (symbols) (a) group index data and (b) groupvelocity dispersion as a function of wavelength for four different waveguides. Ellipsometric measurements are done on the PECVD over-cladding and then fitted with a Sellmeier function to provide the upper-cladding material dispersion data for the simulated curves.

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