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Fast thermo-optical modulators with doped-silicon heaters operating at 2 μm

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Abstract

The 2-μm-waveband has been recognized as a potential telecommunication window for next-generation low-loss, low-latency optical communication. Thermo-optic (TO) modulators and switches, which are essential building blocks in a large-scale integrated photonic circuit, and their performances directly affect the energy consumption and reconfiguration time of an on-chip photonic system. Previous TO modulation based on metallic heaters at 2-μm-waveband suffer from slow response time and high power consumption. In this paper, high-performance thermo-optical Mach–Zehnder interferometer and ring resonator modulators operating at 2-μm-waveband were demonstrated. By embedding a doped silicon (p++-p-p++) junction into the waveguide, our devices reached a record modulation efficiency of 0.17 nm/mW for Mach–Zehnder interferometer based modulator and its rise/fall time was 3.49 μs/3.46 μs which has been the fastest response time reported in a 2-μm-waveband TO devices so far. And a lowest Pπ power of 3.33 mW among reported 2-μm TO devices was achieved for a ring resonator-based modulator.

© 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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Corrections

Chuyu Zhong, Hui Ma, Chunlei Sun, Maoliang Wei, Yuting Ye, Bo Tang, Peng Zhang, Ruonan Liu, Junying Li, Lan Li, and Hongtao Lin, "Fast thermo-optical modulators with doped-silicon heaters operating at 2 µm: erratum," Opt. Express 30, 10084-10086 (2022)
https://opg.optica.org/oe/abstract.cfm?uri=oe-30-6-10084

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Data availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Figures (6)

Fig. 1.
Fig. 1. (a) Schematic cross-section of the p++-p-p++ structure. (b) Simulated temperature distribution in the p-type-doped heater at a driving voltage of 5.8 V. (c) Simulated temperature in the waveguide under different voltages. (d) Voltage-dependent effective refractive index change and phase shift. The dashed line denotes the π-shift position.
Fig. 2.
Fig. 2. Schematic of the measurement system: a fiber coupling setup is used for light coupling. DAQ: data acquisition equipment, PC: polarization controller, DUT: device under test, AWG: arbitrary waveform generator, PD: photodetector, PMT: photomultiplier tube, PFA: pulse forming amplifier.
Fig. 3.
Fig. 3. (a) The structure of the MZI-based TO modulator. (b) Normalized transmission spectra of the modulator under varying applied voltages. (c) Measured Current-Voltage (I-V, light-blue) and Transmission-Power (O-P, red) curves of the p++-p-p++ junction in the modulator. (d) The wavelength shift of the interference dip of the modulator with the heating power.
Fig. 4.
Fig. 4. Time response of the MZI-based 2-μm-waveband TO modulator.
Fig. 5.
Fig. 5. (a) The structure of the MRR-based TO with p-doped heaters. (b) Normalized transmission spectra of the modulator under varying applied voltage. (c) I-V and O-P curves of the p++-p-p++ junction in the modulator. (d) Resonant peak shift of the modulator with the heating power.
Fig. 6.
Fig. 6. Time response of the MRR-based TO modulator.

Tables (1)

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Table 1. Performance of Some Reported Silicon TO Modulation Devices

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