Abstract

Structural color filters based on all-dielectric materials are considered to be promising alternatives to metal nanostructures due to significant advantages, such as high-quality resonance effects and low losses of Ohmic effects. We demonstrate a polarization tunable color filter based on all-dielectric metasurfaces, which is based on the arrays of asymmetric monocrystalline silicon nanoblocks on the flexible substrate. By adjusting the physical dimensions of nanoblocks, the filter can exhibit a variety of bright transmission colors. Furthermore, the designed dielectric metasurfaces are sensitive to the linear polarization direction of the incident light, thus a wide range of color images can be created by changing the polarization angles. All of the color filter including the dielectric silicon nanoblocks, the overcladding, and the flexible substrate can be delaminated from the handler substrates and the optical property is reconfigurable, which will find applications in the functional color display, polarization detection and imaging, and secured optical tag.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2020 (4)

D. Wang, M. R. Bourgeois, J. Guan, A. K. Fumani, G. C. Schatz, and T. W. Odom, “Lasing from Finite Plasmonic Nanoparticle Lattices,” ACS Photonics 7(3), 630–636 (2020).
[Crossref]

Y. Zhou, H. Zheng, I. I. Kravchenko, and J. Valentine, “Flat optics for image differentiation,” Nat. Photonics 14(5), 316–323 (2020).
[Crossref]

X. Guo, M. Pu, Y. Guo, X. Ma, X. Li, and X. Luo, “Flexible and Tunable Dielectric Color Meta-hologram,” Plasmonics 15(1), 217–223 (2020).
[Crossref]

Y. Intaravanne and X. Z. Chen, “Recent advances in optical metasurfaces for polarization detection and engineered polarization profiles,” Nanophotonics 9(5), 1003–1014 (2020).
[Crossref]

2019 (6)

S. Gao, C. S. Park, S. S. Lee, and D. Y. Choi, “All-dielectric metasurfaces for simultaneously realizing polarization rotation and wavefront shaping of visible light,” Nanoscale 11(9), 4083–4090 (2019).
[Crossref]

J. Burch and A. D. Falco, “Holography Using Curved Metasurfaces,” Photonics 6(1), 8 (2019).
[Crossref]

C. Park, I. Koirala, S. Gao, V. R. Shrestha, S. Lee, and D. Choi, “Structural color filters based on an all-dielectric metasurface exploiting silicon-rich silicon nitride nanodisks,” Opt. Express 27(2), 667–679 (2019).
[Crossref]

X. Zhang, T. Pan, J. Zhang, L. Zhang, S. Liu, and W. Xie, “Color-Tunable, Spectra-Stable Flexible White Top-Emitting Organic Light-Emitting Devices Based on Alternating Current Driven and Dual-Microcavity Technology,” ACS Photonics 6(9), 2350–2357 (2019).
[Crossref]

J. Zhang, M. ElKabbash, R. Wei, S. C. Singh, B. Lam, and C. Guo, “Plasmonic metasurfaces with 42.3% transmission efficiency in the visible,” Light: Sci. Appl. 8(1), 53 (2019).
[Crossref]

H. Jia, Q. J. Wu, C. Jiang, H. Wang, L. Q. Wang, J. Z. Jiang, and D. X. Zhang, “High-transmission polarization-dependent active plasmonic color filters,” Appl. Opt. 58(3), 704–711 (2019).
[Crossref]

2018 (11)

J. Burch and A. D. Falco, “Surface Topology Specific Metasurface Holograms,” ACS Photonics 5(5), 1762–1766 (2018).
[Crossref]

L. Li, H. Lin, S. Qiao, Y. Huang, J. Li, J. Michon, T. Gu, C. Alosnoramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

I. Koirala, S. S. Lee, and D. Y. Choi, “Highly transmissive subtractive color filters based on an all-dielectric metasurface incorporating TiO2 nanopillars,” Opt. Express 26(14), 18320–18330 (2018).
[Crossref]

W. Chen, Y. Li, R. Li, A. Thean, and Y. Guo, “Bendable and Stretchable Microfluidic Liquid Metal-Based Filter,” IEEE Microw. Wirel. Compon. Lett. 28(3), 203–205 (2018).
[Crossref]

Z.-J. Zhao, M. Lee, H. Kang, S. Hwang, S. Jeon, N. Park, S.-H. Park, and J.-H. Jeong, “Eight Inch Wafer-Scale Flexible Polarization-Dependent Color Filters with Ag–TiO2 Composite Nanowires,” ACS Appl. Mater. Interfaces 10(10), 9188–9196 (2018).
[Crossref]

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
[Crossref]

M. Kim, I. Kim, J. Jang, D. Lee, K. T. Nam, and J. Rho, “Active Color Control in a Metasurface by Polarization Rotation,” Appl. Sci. 8(6), 982 (2018).
[Crossref]

J. Bohn, T. Bucher, K. E. Chong, A. Komar, D. Choi, D. N. Neshev, Y. S. Kivshar, T. Pertsch, and I. Staude, “Active tuning of spontaneous emission by Mie-resonant dielectric metasurfaces,” Nano Lett. 18(6), 3461–3465 (2018).
[Crossref]

X. F. Zang, F. L. Dong, F. Y. Yue, C. M. Zhang, L. H. Xu, Z. W. Song, M. Chen, P. Y. Chen, G. S. Buller, Y. M. Zhu, S. L. Zhuang, W. G. Chu, S. Zhang, and X. Z. Chen, “Polarization Encoded Color Image Embedded in a Dielectric Metasurface,” Adv. Mater. 30(21), 1707499 (2018).
[Crossref]

R. Z. Zhao, L. L. Huang, C. C. Tang, J. J. Li, X. W. Li, Y. T. Wang, and T. Zentgraf, “Nanoscale Polarization Manipulation and Encryption Based on Dielectric Metasurfaces,” Adv. Opt. Mater. 6(19), 1800490 (2018).
[Crossref]

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization-Sensitive Structural Colors with Hue-and-Saturation Tuning Based on All-Dielectric Nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
[Crossref]

2017 (9)

B. Wang, F. L. Dong, D. Yang, Z. W. Song, L. H. Xu, W. G. Chu, Q. H. Gong, and Y. Li, “Polarization-controlled color-tunable holograms with dielectric metasurfaces,” Optica 4(11), 1368–1371 (2017).
[Crossref]

X. Y. Duan, S. Kamin, and N. Liu, “Dynamic plasmonic colour display,” Nat. Commun. 8(1), 1 (2017).
[Crossref]

D. Franklin, R. Frank, S. Wu, and D. Chanda, “Actively addressed single pixel full-colour plasmonic display,” Nat. Commun. 8(1), 15209 (2017).
[Crossref]

B. Hwang, S. H. Shin, S. H. Hwang, J. Y. Jung, J. H. Choi, B. K. Ju, and J. H. Jeong, “Flexible Plasmonic Color Filters Fabricated via Nanotransfer Printing with Nanoimprint-Based Planarization,” ACS Appl. Mater. Interfaces 9(33), 27351–27356 (2017).
[Crossref]

Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing Beyond sRGB Color Gamut by Mimicking Silicon Nanostructures in Free-Space,” Nano Lett. 17(12), 7620–7628 (2017).
[Crossref]

Y. Horie, S. Han, J. Y. Lee, J. Kim, Y. Kim, A. Arbabi, C. Shin, L. Shi, E. Arbabi, S. M. Kamali, H.-S. Lee, S. Hwang, and A. Faraon, “Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies,” Nano Lett. 17(5), 3159–3164 (2017).
[Crossref]

V. Vashistha, G. Vaidya, P. Gruszecki, A. Serebryannikov, and M. Krawczyk, “Polarization tunable all-dielectric color filters based on cross-shaped si nanoantennas,” Sci. Rep. 7(1), 8092 (2017).
[Crossref]

Y. Nagasaki, M. Suzuki, and J. Takahara, “All-Dielectric Dual-Color Pixel with Subwavelength Resolution,” Nano Lett. 17(12), 7500–7506 (2017).
[Crossref]

I. Koirala, V. R. Shrestha, C. S. Park, S.-S. Lee, and D.-Y. Choi, “Polarization-Controlled Broad Color Palette Based on an Ultrathin One-Dimensional Resonant Grating Structure,” Sci. Rep. 7(1), 1 (2017).
[Crossref]

2016 (9)

B.-G. Léo, H. Cruguel, E. Lacaze, and O. Pluchery, “Plasmonic properties of gold nanoparticles on silicon substrates: understanding fano-like spectra observed in reflection,” Appl. Phys. Lett. 109(11), 111901 (2016).
[Crossref]

X. Li, L. Chen, Y. Li, X. Zhang, M. Pu, Z. Zhao, X. Ma, Y. Wang, M. Hong, and X. Luo, “Multicolor 3D meta-holography by broadband plasmonic modulation,” Sci. Adv. 2(11), e1601102 (2016).
[Crossref]

C. Yang, W. Shen, J. Zhou, X. Fang, D. Zhao, X. Zhang, C. Ji, B. Fang, Y. Zhang, X. Liu, and L. J. Guo, “Angle Robust Reflection/Transmission Plasmonic Filters Using Ultrathin Metal Patch Array,” Adv. Opt. Mater. 4(12), 1981–1986 (2016).
[Crossref]

Z. Li, A. W. Clark, and J. M. Cooper, “Dual color plasmonic pixels create a polarization controlled nano color palette,” ACS Nano 10(1), 492–498 (2016).
[Crossref]

C. Min, J. Liu, T. Lei, G. Si, Z. Xie, J. Lin, L. Du, and X. Yuan, “Plasmonic nano-slits assisted polarization selective detour phase meta-hologram,” Laser Photonics Rev. 10(6), 978–985 (2016).
[Crossref]

M. Miyata, H. Hatada, and J. Takahara, “Full-color Subwavelength Printing with Gap-plasmonic Optical Antennas,” Nano Lett. 16(5), 3166–3172 (2016).
[Crossref]

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. W. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
[Crossref]

M. Khorasaninejad, A. Ambrosio, P. Kanhaiya, and F. Capasso, “Broadband and chiral binary dielectric meta-holograms,” Sci. Adv. 2(5), e1501258 (2016).
[Crossref]

2015 (3)

F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
[Crossref]

Y. F. Yu, Z. Y. Alexander, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref]

2014 (4)

K. T. Lee, S. Seo, J. Y. Lee, and L. J. Guo, “Ultrathin metal-semiconductor-metal resonator for angle invariant visible band transmission filters,” Appl. Phys. Lett. 104(23), 231112 (2014).
[Crossref]

Y. Montelongo, J. O. Tenorio-Pearl, C. Williams, S. Zhang, W. I. Milne, and T. D. Wilkinson, “Plasmonic nanoparticle scattering for color holograms,” Proc. Natl. Acad. Sci. U. S. A. 111(35), 12679–12683 (2014).
[Crossref]

L. Li, H. Lin, S. Qiao, Y. Zou, S. Danto, K. Richardson, J. D. Musgraves, N. Lu, and J. Hu, “Integrated flexible chalcogenide glass photonic devices,” Nat. Photonics 8(8), 643–649 (2014).
[Crossref]

Y. Montelongo, J. O. Tenoriopearl, W. I. Milne, and T. D. Wilkinson, “Polarization Switchable Diffraction Based on Subwavelength Plasmonic Nanoantennas,” Nano Lett. 14(1), 294–298 (2014).
[Crossref]

2012 (1)

J. G. Ok, H. Youn, M. K. Kwak, K. Lee, Y. J. Shin, L. J. Guo, A. Greenwald, and Y. S. Liu, “Continuous and scalable fabrication of flexible metamaterial films via roll-to-roll nanoimprint process for broadband plasmonic infrared filters,” Appl. Phys. Lett. 101(22), 223102 (2012).
[Crossref]

2011 (1)

T. V. Amotchkina, J. S. Parramon, V. Janicki, M. K. Trubetskov, H. Zorc, and A. V. Tikhonravov, “Design of multilayer coatings containing metal island films,” Proc. SPIE 8168, 816809 (2011).
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2010 (1)

A. D. Falco, M. Ploschner, and T. F. Krauss, “Flexible metamaterials at visible wavelengths,” New J. Phys. 12(11), 113006 (2010).
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2009 (1)

A. Pinyol, B. Meylan, D. Gillieron, V. Mewani, Y. Leterrier, and J. A. Manson, “Electro-fragmentation analysis of dielectric thin films on flexible polymer substrates,” Thin Solid Films 517(6), 2000–2006 (2009).
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2008 (1)

X. Sun, Z. Liu, K. Welsher, J. T. Robinson, and A. Goodwin, “Nano-graphene oxide for cellular imaging and drug delivery,” Nano Res. 1(3), 203–212 (2008).
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2005 (1)

K. Jain, M. Klosner, M. Zemel, and S. Raghunandan, “Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production,” Proc. IEEE 93(8), 1500–1510 (2005).
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F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
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Alexander, Z. Y.

Y. F. Yu, Z. Y. Alexander, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
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Alosnoramos, C.

L. Li, H. Lin, S. Qiao, Y. Huang, J. Li, J. Michon, T. Gu, C. Alosnoramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
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M. Khorasaninejad, A. Ambrosio, P. Kanhaiya, and F. Capasso, “Broadband and chiral binary dielectric meta-holograms,” Sci. Adv. 2(5), e1501258 (2016).
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Amotchkina, T. V.

T. V. Amotchkina, J. S. Parramon, V. Janicki, M. K. Trubetskov, H. Zorc, and A. V. Tikhonravov, “Design of multilayer coatings containing metal island films,” Proc. SPIE 8168, 816809 (2011).
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Arbabi, A.

Y. Horie, S. Han, J. Y. Lee, J. Kim, Y. Kim, A. Arbabi, C. Shin, L. Shi, E. Arbabi, S. M. Kamali, H.-S. Lee, S. Hwang, and A. Faraon, “Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies,” Nano Lett. 17(5), 3159–3164 (2017).
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A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
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Y. Horie, S. Han, J. Y. Lee, J. Kim, Y. Kim, A. Arbabi, C. Shin, L. Shi, E. Arbabi, S. M. Kamali, H.-S. Lee, S. Hwang, and A. Faraon, “Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies,” Nano Lett. 17(5), 3159–3164 (2017).
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Bagheri, M.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
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Bedu, F.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
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J. Bohn, T. Bucher, K. E. Chong, A. Komar, D. Choi, D. N. Neshev, Y. S. Kivshar, T. Pertsch, and I. Staude, “Active tuning of spontaneous emission by Mie-resonant dielectric metasurfaces,” Nano Lett. 18(6), 3461–3465 (2018).
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J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
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D. Wang, M. R. Bourgeois, J. Guan, A. K. Fumani, G. C. Schatz, and T. W. Odom, “Lasing from Finite Plasmonic Nanoparticle Lattices,” ACS Photonics 7(3), 630–636 (2020).
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J. Bohn, T. Bucher, K. E. Chong, A. Komar, D. Choi, D. N. Neshev, Y. S. Kivshar, T. Pertsch, and I. Staude, “Active tuning of spontaneous emission by Mie-resonant dielectric metasurfaces,” Nano Lett. 18(6), 3461–3465 (2018).
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X. F. Zang, F. L. Dong, F. Y. Yue, C. M. Zhang, L. H. Xu, Z. W. Song, M. Chen, P. Y. Chen, G. S. Buller, Y. M. Zhu, S. L. Zhuang, W. G. Chu, S. Zhang, and X. Z. Chen, “Polarization Encoded Color Image Embedded in a Dielectric Metasurface,” Adv. Mater. 30(21), 1707499 (2018).
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J. Burch and A. D. Falco, “Holography Using Curved Metasurfaces,” Photonics 6(1), 8 (2019).
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J. Burch and A. D. Falco, “Surface Topology Specific Metasurface Holograms,” ACS Photonics 5(5), 1762–1766 (2018).
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Capasso, F.

M. Khorasaninejad, A. Ambrosio, P. Kanhaiya, and F. Capasso, “Broadband and chiral binary dielectric meta-holograms,” Sci. Adv. 2(5), e1501258 (2016).
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F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
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D. Franklin, R. Frank, S. Wu, and D. Chanda, “Actively addressed single pixel full-colour plasmonic display,” Nat. Commun. 8(1), 15209 (2017).
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X. Li, L. Chen, Y. Li, X. Zhang, M. Pu, Z. Zhao, X. Ma, Y. Wang, M. Hong, and X. Luo, “Multicolor 3D meta-holography by broadband plasmonic modulation,” Sci. Adv. 2(11), e1601102 (2016).
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X. F. Zang, F. L. Dong, F. Y. Yue, C. M. Zhang, L. H. Xu, Z. W. Song, M. Chen, P. Y. Chen, G. S. Buller, Y. M. Zhu, S. L. Zhuang, W. G. Chu, S. Zhang, and X. Z. Chen, “Polarization Encoded Color Image Embedded in a Dielectric Metasurface,” Adv. Mater. 30(21), 1707499 (2018).
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X. F. Zang, F. L. Dong, F. Y. Yue, C. M. Zhang, L. H. Xu, Z. W. Song, M. Chen, P. Y. Chen, G. S. Buller, Y. M. Zhu, S. L. Zhuang, W. G. Chu, S. Zhang, and X. Z. Chen, “Polarization Encoded Color Image Embedded in a Dielectric Metasurface,” Adv. Mater. 30(21), 1707499 (2018).
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B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization-Sensitive Structural Colors with Hue-and-Saturation Tuning Based on All-Dielectric Nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
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W. Chen, Y. Li, R. Li, A. Thean, and Y. Guo, “Bendable and Stretchable Microfluidic Liquid Metal-Based Filter,” IEEE Microw. Wirel. Compon. Lett. 28(3), 203–205 (2018).
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Y. Intaravanne and X. Z. Chen, “Recent advances in optical metasurfaces for polarization detection and engineered polarization profiles,” Nanophotonics 9(5), 1003–1014 (2020).
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X. F. Zang, F. L. Dong, F. Y. Yue, C. M. Zhang, L. H. Xu, Z. W. Song, M. Chen, P. Y. Chen, G. S. Buller, Y. M. Zhu, S. L. Zhuang, W. G. Chu, S. Zhang, and X. Z. Chen, “Polarization Encoded Color Image Embedded in a Dielectric Metasurface,” Adv. Mater. 30(21), 1707499 (2018).
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Cheng, H.

B. Yang, W. Liu, Z. Li, H. Cheng, S. Chen, and J. Tian, “Polarization-Sensitive Structural Colors with Hue-and-Saturation Tuning Based on All-Dielectric Nanopixels,” Adv. Opt. Mater. 6(4), 1701009 (2018).
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Choi, D.

C. Park, I. Koirala, S. Gao, V. R. Shrestha, S. Lee, and D. Choi, “Structural color filters based on an all-dielectric metasurface exploiting silicon-rich silicon nitride nanodisks,” Opt. Express 27(2), 667–679 (2019).
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J. Bohn, T. Bucher, K. E. Chong, A. Komar, D. Choi, D. N. Neshev, Y. S. Kivshar, T. Pertsch, and I. Staude, “Active tuning of spontaneous emission by Mie-resonant dielectric metasurfaces,” Nano Lett. 18(6), 3461–3465 (2018).
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Choi, D. Y.

S. Gao, C. S. Park, S. S. Lee, and D. Y. Choi, “All-dielectric metasurfaces for simultaneously realizing polarization rotation and wavefront shaping of visible light,” Nanoscale 11(9), 4083–4090 (2019).
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I. Koirala, S. S. Lee, and D. Y. Choi, “Highly transmissive subtractive color filters based on an all-dielectric metasurface incorporating TiO2 nanopillars,” Opt. Express 26(14), 18320–18330 (2018).
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I. Koirala, V. R. Shrestha, C. S. Park, S.-S. Lee, and D.-Y. Choi, “Polarization-Controlled Broad Color Palette Based on an Ultrathin One-Dimensional Resonant Grating Structure,” Sci. Rep. 7(1), 1 (2017).
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Choi, J. H.

B. Hwang, S. H. Shin, S. H. Hwang, J. Y. Jung, J. H. Choi, B. K. Ju, and J. H. Jeong, “Flexible Plasmonic Color Filters Fabricated via Nanotransfer Printing with Nanoimprint-Based Planarization,” ACS Appl. Mater. Interfaces 9(33), 27351–27356 (2017).
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J. Bohn, T. Bucher, K. E. Chong, A. Komar, D. Choi, D. N. Neshev, Y. S. Kivshar, T. Pertsch, and I. Staude, “Active tuning of spontaneous emission by Mie-resonant dielectric metasurfaces,” Nano Lett. 18(6), 3461–3465 (2018).
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Chu, W. G.

X. F. Zang, F. L. Dong, F. Y. Yue, C. M. Zhang, L. H. Xu, Z. W. Song, M. Chen, P. Y. Chen, G. S. Buller, Y. M. Zhu, S. L. Zhuang, W. G. Chu, S. Zhang, and X. Z. Chen, “Polarization Encoded Color Image Embedded in a Dielectric Metasurface,” Adv. Mater. 30(21), 1707499 (2018).
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B. Wang, F. L. Dong, D. Yang, Z. W. Song, L. H. Xu, W. G. Chu, Q. H. Gong, and Y. Li, “Polarization-controlled color-tunable holograms with dielectric metasurfaces,” Optica 4(11), 1368–1371 (2017).
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Clark, A. W.

Z. Li, A. W. Clark, and J. M. Cooper, “Dual color plasmonic pixels create a polarization controlled nano color palette,” ACS Nano 10(1), 492–498 (2016).
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Cooper, J. M.

Z. Li, A. W. Clark, and J. M. Cooper, “Dual color plasmonic pixels create a polarization controlled nano color palette,” ACS Nano 10(1), 492–498 (2016).
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M. Cousoulis, Handbook of Digital Imaging (John Wiley & Sons, Inc., 2015).

Cruguel, H.

B.-G. Léo, H. Cruguel, E. Lacaze, and O. Pluchery, “Plasmonic properties of gold nanoparticles on silicon substrates: understanding fano-like spectra observed in reflection,” Appl. Phys. Lett. 109(11), 111901 (2016).
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Danto, S.

L. Li, H. Lin, S. Qiao, Y. Zou, S. Danto, K. Richardson, J. D. Musgraves, N. Lu, and J. Hu, “Integrated flexible chalcogenide glass photonic devices,” Nat. Photonics 8(8), 643–649 (2014).
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Dong, F. L.

X. F. Zang, F. L. Dong, F. Y. Yue, C. M. Zhang, L. H. Xu, Z. W. Song, M. Chen, P. Y. Chen, G. S. Buller, Y. M. Zhu, S. L. Zhuang, W. G. Chu, S. Zhang, and X. Z. Chen, “Polarization Encoded Color Image Embedded in a Dielectric Metasurface,” Adv. Mater. 30(21), 1707499 (2018).
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B. Wang, F. L. Dong, D. Yang, Z. W. Song, L. H. Xu, W. G. Chu, Q. H. Gong, and Y. Li, “Polarization-controlled color-tunable holograms with dielectric metasurfaces,” Optica 4(11), 1368–1371 (2017).
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Dong, Z.

Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing Beyond sRGB Color Gamut by Mimicking Silicon Nanostructures in Free-Space,” Nano Lett. 17(12), 7620–7628 (2017).
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K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. W. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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Du, L.

C. Min, J. Liu, T. Lei, G. Si, Z. Xie, J. Lin, L. Du, and X. Yuan, “Plasmonic nano-slits assisted polarization selective detour phase meta-hologram,” Laser Photonics Rev. 10(6), 978–985 (2016).
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X. Y. Duan, S. Kamin, and N. Liu, “Dynamic plasmonic colour display,” Nat. Commun. 8(1), 1 (2017).
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ElKabbash, M.

J. Zhang, M. ElKabbash, R. Wei, S. C. Singh, B. Lam, and C. Guo, “Plasmonic metasurfaces with 42.3% transmission efficiency in the visible,” Light: Sci. Appl. 8(1), 53 (2019).
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Falco, A. D.

J. Burch and A. D. Falco, “Holography Using Curved Metasurfaces,” Photonics 6(1), 8 (2019).
[Crossref]

J. Burch and A. D. Falco, “Surface Topology Specific Metasurface Holograms,” ACS Photonics 5(5), 1762–1766 (2018).
[Crossref]

A. D. Falco, M. Ploschner, and T. F. Krauss, “Flexible metamaterials at visible wavelengths,” New J. Phys. 12(11), 113006 (2010).
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Fang, B.

C. Yang, W. Shen, J. Zhou, X. Fang, D. Zhao, X. Zhang, C. Ji, B. Fang, Y. Zhang, X. Liu, and L. J. Guo, “Angle Robust Reflection/Transmission Plasmonic Filters Using Ultrathin Metal Patch Array,” Adv. Opt. Mater. 4(12), 1981–1986 (2016).
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Fang, X.

C. Yang, W. Shen, J. Zhou, X. Fang, D. Zhao, X. Zhang, C. Ji, B. Fang, Y. Zhang, X. Liu, and L. J. Guo, “Angle Robust Reflection/Transmission Plasmonic Filters Using Ultrathin Metal Patch Array,” Adv. Opt. Mater. 4(12), 1981–1986 (2016).
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Faraon, A.

Y. Horie, S. Han, J. Y. Lee, J. Kim, Y. Kim, A. Arbabi, C. Shin, L. Shi, E. Arbabi, S. M. Kamali, H.-S. Lee, S. Hwang, and A. Faraon, “Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies,” Nano Lett. 17(5), 3159–3164 (2017).
[Crossref]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
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Frank, R.

D. Franklin, R. Frank, S. Wu, and D. Chanda, “Actively addressed single pixel full-colour plasmonic display,” Nat. Commun. 8(1), 15209 (2017).
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Franklin, D.

D. Franklin, R. Frank, S. Wu, and D. Chanda, “Actively addressed single pixel full-colour plasmonic display,” Nat. Commun. 8(1), 15209 (2017).
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Fu, Y. H.

Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing Beyond sRGB Color Gamut by Mimicking Silicon Nanostructures in Free-Space,” Nano Lett. 17(12), 7620–7628 (2017).
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Y. F. Yu, Z. Y. Alexander, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
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Fumani, A. K.

D. Wang, M. R. Bourgeois, J. Guan, A. K. Fumani, G. C. Schatz, and T. W. Odom, “Lasing from Finite Plasmonic Nanoparticle Lattices,” ACS Photonics 7(3), 630–636 (2020).
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Gallas, B.

J. Proust, F. Bedu, B. Gallas, I. Ozerov, and N. Bonod, “All-dielectric colored metasurfaces with silicon mie resonators,” ACS Nano 10(8), 7761–7767 (2016).
[Crossref]

Gao, S.

S. Gao, C. S. Park, S. S. Lee, and D. Y. Choi, “All-dielectric metasurfaces for simultaneously realizing polarization rotation and wavefront shaping of visible light,” Nanoscale 11(9), 4083–4090 (2019).
[Crossref]

C. Park, I. Koirala, S. Gao, V. R. Shrestha, S. Lee, and D. Choi, “Structural color filters based on an all-dielectric metasurface exploiting silicon-rich silicon nitride nanodisks,” Opt. Express 27(2), 667–679 (2019).
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Gao, Y. S.

S. Sun, W. H. Yang, C. Zhang, J. X. Jing, Y. S. Gao, X. Y. Yu, Q. H. Song, and S. M. Xiao, “Real-Time Tunable Colors from Microfluidic Reconfigurable All-Dielectric Metasurfaces,” ACS Nano 12(3), 2151–2159 (2018).
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F. Aieta, M. A. Kats, P. Genevet, and F. Capasso, “Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science 347(6228), 1342–1345 (2015).
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Gillieron, D.

A. Pinyol, B. Meylan, D. Gillieron, V. Mewani, Y. Leterrier, and J. A. Manson, “Electro-fragmentation analysis of dielectric thin films on flexible polymer substrates,” Thin Solid Films 517(6), 2000–2006 (2009).
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Gong, Q. H.

Goodwin, A.

X. Sun, Z. Liu, K. Welsher, J. T. Robinson, and A. Goodwin, “Nano-graphene oxide for cellular imaging and drug delivery,” Nano Res. 1(3), 203–212 (2008).
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J. G. Ok, H. Youn, M. K. Kwak, K. Lee, Y. J. Shin, L. J. Guo, A. Greenwald, and Y. S. Liu, “Continuous and scalable fabrication of flexible metamaterial films via roll-to-roll nanoimprint process for broadband plasmonic infrared filters,” Appl. Phys. Lett. 101(22), 223102 (2012).
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V. Vashistha, G. Vaidya, P. Gruszecki, A. Serebryannikov, and M. Krawczyk, “Polarization tunable all-dielectric color filters based on cross-shaped si nanoantennas,” Sci. Rep. 7(1), 8092 (2017).
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L. Li, H. Lin, S. Qiao, Y. Huang, J. Li, J. Michon, T. Gu, C. Alosnoramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
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Guan, J.

D. Wang, M. R. Bourgeois, J. Guan, A. K. Fumani, G. C. Schatz, and T. W. Odom, “Lasing from Finite Plasmonic Nanoparticle Lattices,” ACS Photonics 7(3), 630–636 (2020).
[Crossref]

Guo, C.

J. Zhang, M. ElKabbash, R. Wei, S. C. Singh, B. Lam, and C. Guo, “Plasmonic metasurfaces with 42.3% transmission efficiency in the visible,” Light: Sci. Appl. 8(1), 53 (2019).
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Guo, L. J.

C. Yang, W. Shen, J. Zhou, X. Fang, D. Zhao, X. Zhang, C. Ji, B. Fang, Y. Zhang, X. Liu, and L. J. Guo, “Angle Robust Reflection/Transmission Plasmonic Filters Using Ultrathin Metal Patch Array,” Adv. Opt. Mater. 4(12), 1981–1986 (2016).
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K. T. Lee, S. Seo, J. Y. Lee, and L. J. Guo, “Ultrathin metal-semiconductor-metal resonator for angle invariant visible band transmission filters,” Appl. Phys. Lett. 104(23), 231112 (2014).
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X. Guo, M. Pu, Y. Guo, X. Ma, X. Li, and X. Luo, “Flexible and Tunable Dielectric Color Meta-hologram,” Plasmonics 15(1), 217–223 (2020).
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W. Chen, Y. Li, R. Li, A. Thean, and Y. Guo, “Bendable and Stretchable Microfluidic Liquid Metal-Based Filter,” IEEE Microw. Wirel. Compon. Lett. 28(3), 203–205 (2018).
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Y. Horie, S. Han, J. Y. Lee, J. Kim, Y. Kim, A. Arbabi, C. Shin, L. Shi, E. Arbabi, S. M. Kamali, H.-S. Lee, S. Hwang, and A. Faraon, “Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies,” Nano Lett. 17(5), 3159–3164 (2017).
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Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing Beyond sRGB Color Gamut by Mimicking Silicon Nanostructures in Free-Space,” Nano Lett. 17(12), 7620–7628 (2017).
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Hong, M.

X. Li, L. Chen, Y. Li, X. Zhang, M. Pu, Z. Zhao, X. Ma, Y. Wang, M. Hong, and X. Luo, “Multicolor 3D meta-holography by broadband plasmonic modulation,” Sci. Adv. 2(11), e1601102 (2016).
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Y. Horie, S. Han, J. Y. Lee, J. Kim, Y. Kim, A. Arbabi, C. Shin, L. Shi, E. Arbabi, S. M. Kamali, H.-S. Lee, S. Hwang, and A. Faraon, “Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies,” Nano Lett. 17(5), 3159–3164 (2017).
[Crossref]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
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Hu, J.

L. Li, H. Lin, S. Qiao, Y. Huang, J. Li, J. Michon, T. Gu, C. Alosnoramos, L. Vivien, A. Yadav, K. Richardson, N. Lu, and J. Hu, “Monolithically integrated stretchable photonics,” Light: Sci. Appl. 7(2), 17138 (2018).
[Crossref]

L. Li, H. Lin, S. Qiao, Y. Zou, S. Danto, K. Richardson, J. D. Musgraves, N. Lu, and J. Hu, “Integrated flexible chalcogenide glass photonic devices,” Nat. Photonics 8(8), 643–649 (2014).
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Huang, K.

K. Huang, Z. Dong, S. Mei, L. Zhang, Y. Liu, H. Liu, H. Zhu, J. Teng, B. Luk’yanchuk, J. K. W. Yang, and C.-W. Qiu, “Silicon multi-meta-holograms for the broadband visible light,” Laser Photonics Rev. 10(3), 500–509 (2016).
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Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing Beyond sRGB Color Gamut by Mimicking Silicon Nanostructures in Free-Space,” Nano Lett. 17(12), 7620–7628 (2017).
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C. Min, J. Liu, T. Lei, G. Si, Z. Xie, J. Lin, L. Du, and X. Yuan, “Plasmonic nano-slits assisted polarization selective detour phase meta-hologram,” Laser Photonics Rev. 10(6), 978–985 (2016).
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X. F. Zang, F. L. Dong, F. Y. Yue, C. M. Zhang, L. H. Xu, Z. W. Song, M. Chen, P. Y. Chen, G. S. Buller, Y. M. Zhu, S. L. Zhuang, W. G. Chu, S. Zhang, and X. Z. Chen, “Polarization Encoded Color Image Embedded in a Dielectric Metasurface,” Adv. Mater. 30(21), 1707499 (2018).
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X. Li, L. Chen, Y. Li, X. Zhang, M. Pu, Z. Zhao, X. Ma, Y. Wang, M. Hong, and X. Luo, “Multicolor 3D meta-holography by broadband plasmonic modulation,” Sci. Adv. 2(11), e1601102 (2016).
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Figures (7)

Fig. 1.
Fig. 1. Schematic diagram of the proposed structural color filter.
Fig. 2.
Fig. 2. (a) Calculated polarization-dependent transmission spectra and (b) the corresponding color responses with the width ${w_y}$ changed from 70 nm to 120 nm.
Fig. 3.
Fig. 3. Electric and magnetic field distribution in (x, y) plane: (a) λ=609 nm, TM incident wave and (b) λ=540 nm, TE incident wave.
Fig. 4.
Fig. 4. (a) Calculated transmission spectra with different pitch and (b) the corresponding color responses for the TM incident polarizations. The nanoblock’s size is wx=150 nm and wy=80 nm.
Fig. 5.
Fig. 5. (a) Schematic of the fabrication process flow for the stretchable color filters. (b) The SEM image of fabricated metasurface and (c) the photos of the whole flexible device.
Fig. 6.
Fig. 6. (a) Measured transmission spectra and (b) the corresponding color responses for different polarization angles. (c) Calculated color responses. The nanoblock’s size is wx=150 nm, wy=80 nm and p=300 nm.
Fig. 7.
Fig. 7. Different colors are visible under optical microscope in transmission mode when φ is equal to 0°, 45°, and 90°.

Tables (1)

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Table 1. Different periods of the nanoblocks for three cases.

Equations (1)

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T ( φ , λ ) = T x ( λ ) ( c o s φ ) 2 + T y ( λ ) ( s i n φ ) 2

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