Abstract

We demonstrate waveguide-detector coupling through the integration of GaAs p-i-n photodiodes (PDs) on top of silicon nitride grating couplers (GCs) by means of transfer-printing. Both single device and arrayed printing is demonstrated. The photodiodes exhibit dark currents below 20 pA and waveguide-referred responsivities of up to 0.30 A/W at 2V reverse bias, corresponding to an external quantum efficiency of 47% at 860 nm. We have integrated the detectors on top of a 10-channel on-chip arrayed waveguide grating (AWG) spectrometer, made in the commercially available imec BioPIX-300 nm platform.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]
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2020 (4)

2019 (2)

G. Muliuk, K. Van Gasse, J. Van Kerrebrouck, A. J. Trindade, B. Corbett, D. Van Thourhout, and G. Roelkens, “4 A-25 Gbps polarization diversity silicon photonics receiver with transfer printed III-V photodiodes,” IEEE Photonics Technol. Lett. 31(4), 287–290 (2019).
[Crossref]

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

2018 (9)

G. Chen, J. Goyvaerts, S. Kumari, J. Van Kerrebrouck, M. Muneeb, S. Uvin, Y. Yu, and G. Roelkens, “Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposers,” Opt. Express 26(5), 6351 (2018).
[Crossref]

S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, and R. G. Baets, “Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm,” Laser Photonics Rev. 12(2), 1700206 (2018).
[Crossref]

T. van Leeuwen, I. Akca, N. Angelou, N. Weiss, M. Hoekman, A. Leinse, and R. G. Heideman, “On-chip Mach-Zehnder interferometer for OCT systems,” Adv. Opt. Technol. 7(1-2), 103–106 (2018).
[Crossref]

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

M. S. Murib, D. Martens, and P. Bienstman, “Label-free real-time optical monitoring of DNA hybridization using SiN Mach-Zehnder interferometer-based integrated biosensing platform,” J. Biomed. Opt. 23(12), 1 (2018).

K. Sun, D. Jung, C. Shang, A. Liu, J. Morgan, J. Zang, Q. Li, J. Klamkin, J. E. Bowers, and A. Beling, “Low dark current III-V on silicon photodiodes by heteroepitaxy,” Opt. Express 26(10), 13605 (2018).
[Crossref]

H. Zhao, S. Clemmen, A. Raza, and R. Baets, “Stimulated Raman spectroscopy of analytes evanescently probed by a silicon nitride photonic integrated waveguide,” Opt. Lett. 43(6), 1403 (2018).
[Crossref]

J. Zhang, B. Haq, J. O’Callaghan, A. Gocalinska, E. Pelucchi, A. J. Trindade, B. Corbett, G. Morthier, and G. Roelkens, “Transfer-printing-based integration of a III-V-on-silicon distributed feedback laser,” Opt. Express 26(7), 8821 (2018).
[Crossref]

2017 (5)

B. Corbett, R. Loi, W. Zhou, D. Liu, and Z. Ma, “Transfer print techniques for heterogeneous integration of photonic components,” Prog. Quantum Electron. 52, 1–17 (2017).
[Crossref]

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

D. Geuzebroek, R. Dekker, and P. van Dijk, “Photonics Packaging Made Visible,” Opt. Photonik 12(5), 34–38 (2017).
[Crossref]

J. Zhang, A. De Groote, A. Abbasi, R. Loi, J. O’Callaghan, B. Corbett, A. J. Trindade, C. A. Bower, and G. Roelkens, “Silicon photonics fiber-to-the-home transceiver array based on transfer-printing-based integration of III-V photodetectors,” Opt. Express 25(13), 14290 (2017).
[Crossref]

2016 (4)

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

A. Dhakal, F. Peyskens, S. Clemmen, A. Raza, P. Wuytens, H. Zhao, N. Le Thomas, and R. Baets, “Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy,” Interface Focus 6(4), 20160015 (2016).
[Crossref]

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

Y. Chen, R. Halir, I. Molina-Fernández, P. Cheben, and J.-J. He, “High-efficiency apodized-imaging chip-fiber grating coupler for silicon nitride waveguides,” Opt. Lett. 41(21), 5059 (2016).
[Crossref]

2015 (2)

R. Wang, S. Sprengel, M. Muneeb, G. Boehm, R. Baets, M.-C. Amann, and G. Roelkens, “2 μm wavelength range InP-based type-II quantum well photodiodes heterogeneously integrated on silicon photonic integrated circuits,” Opt. Express 23(20), 26834 (2015).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

2013 (2)

C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, “Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics,” Nat. Commun. 4(1), 1577 (2013).
[Crossref]

S. Keyvaninia, M. Muneeb, S. Stanković, P. J. Van Veldhoven, D. Van Thourhout, and G. Roelkens, “Ultra-thin DVS-BCB adhesive bonding of III-V wafers, dies and multiple dies to a patterned silicon-on-insulator substrate,” Opt. Mater. Express 3(1), 35 (2013).
[Crossref]

Abbasi, A.

Akca, I.

T. van Leeuwen, I. Akca, N. Angelou, N. Weiss, M. Hoekman, A. Leinse, and R. G. Heideman, “On-chip Mach-Zehnder interferometer for OCT systems,” Adv. Opt. Technol. 7(1-2), 103–106 (2018).
[Crossref]

Alemany, R.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Amann, M.-C.

Angelou, N.

T. van Leeuwen, I. Akca, N. Angelou, N. Weiss, M. Hoekman, A. Leinse, and R. G. Heideman, “On-chip Mach-Zehnder interferometer for OCT systems,” Adv. Opt. Technol. 7(1-2), 103–106 (2018).
[Crossref]

Anton, B.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

Artundo, I.

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

Baets, R.

H. Zhao, B. Baumgartner, A. Raza, A. Skirtach, B. Lendl, and R. Baets, “Multiplex volatile organic compound Raman sensing with nanophotonic slot waveguides functionalized with a mesoporous enrichment layer,” Opt. Lett. 45(2), 447 (2020).
[Crossref]

H. Zhao, S. Clemmen, A. Raza, and R. Baets, “Stimulated Raman spectroscopy of analytes evanescently probed by a silicon nitride photonic integrated waveguide,” Opt. Lett. 43(6), 1403 (2018).
[Crossref]

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

A. Dhakal, F. Peyskens, S. Clemmen, A. Raza, P. Wuytens, H. Zhao, N. Le Thomas, and R. Baets, “Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy,” Interface Focus 6(4), 20160015 (2016).
[Crossref]

R. Wang, S. Sprengel, M. Muneeb, G. Boehm, R. Baets, M.-C. Amann, and G. Roelkens, “2 μm wavelength range InP-based type-II quantum well photodiodes heterogeneously integrated on silicon photonic integrated circuits,” Opt. Express 23(20), 26834 (2015).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Baets, R. G.

S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, and R. G. Baets, “Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm,” Laser Photonics Rev. 12(2), 1700206 (2018).
[Crossref]

Banos, R.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Baumgartner, B.

Becker, H.

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

Beling, A.

Bienstman, P.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

M. S. Murib, D. Martens, and P. Bienstman, “Label-free real-time optical monitoring of DNA hybridization using SiN Mach-Zehnder interferometer-based integrated biosensing platform,” J. Biomed. Opt. 23(12), 1 (2018).

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Bockstaele, R.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

Boehm, G.

Bogaerts, W.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Boller, K. J.

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

Bonafede, S.

C. A. Bower, M. A. Meitl, S. Bonafede, D. Gomez, A. Fecioru, and D. Kneeburg, “Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing,” Proc. - Electron. Components Technol. Conf.963–967 (2015).

Bower, C. A.

J. Zhang, A. De Groote, A. Abbasi, R. Loi, J. O’Callaghan, B. Corbett, A. J. Trindade, C. A. Bower, and G. Roelkens, “Silicon photonics fiber-to-the-home transceiver array based on transfer-printing-based integration of III-V photodetectors,” Opt. Express 25(13), 14290 (2017).
[Crossref]

C. A. Bower, M. A. Meitl, S. Bonafede, D. Gomez, A. Fecioru, and D. Kneeburg, “Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing,” Proc. - Electron. Components Technol. Conf.963–967 (2015).

Bowers, J. E.

Braeken, D.

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

Bru, L. A.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Cheben, P.

Chen, B.

Chen, G.

Chen, Y.

Cheng, C. W.

C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, “Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics,” Nat. Commun. 4(1), 1577 (2013).
[Crossref]

Cirera, J. M.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Clemmen, S.

Corbett, B.

G. Muliuk, K. Van Gasse, J. Van Kerrebrouck, A. J. Trindade, B. Corbett, D. Van Thourhout, and G. Roelkens, “4 A-25 Gbps polarization diversity silicon photonics receiver with transfer printed III-V photodiodes,” IEEE Photonics Technol. Lett. 31(4), 287–290 (2019).
[Crossref]

J. Zhang, B. Haq, J. O’Callaghan, A. Gocalinska, E. Pelucchi, A. J. Trindade, B. Corbett, G. Morthier, and G. Roelkens, “Transfer-printing-based integration of a III-V-on-silicon distributed feedback laser,” Opt. Express 26(7), 8821 (2018).
[Crossref]

B. Corbett, R. Loi, W. Zhou, D. Liu, and Z. Ma, “Transfer print techniques for heterogeneous integration of photonic components,” Prog. Quantum Electron. 52, 1–17 (2017).
[Crossref]

J. Zhang, A. De Groote, A. Abbasi, R. Loi, J. O’Callaghan, B. Corbett, A. J. Trindade, C. A. Bower, and G. Roelkens, “Silicon photonics fiber-to-the-home transceiver array based on transfer-printing-based integration of III-V photodetectors,” Opt. Express 25(13), 14290 (2017).
[Crossref]

Dave, U.

Dave, U. D.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

De Groote, A.

J. Zhang, A. De Groote, A. Abbasi, R. Loi, J. O’Callaghan, B. Corbett, A. J. Trindade, C. A. Bower, and G. Roelkens, “Silicon photonics fiber-to-the-home transceiver array based on transfer-printing-based integration of III-V photodetectors,” Opt. Express 25(13), 14290 (2017).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Dekker, R.

D. Geuzebroek, R. Dekker, and P. van Dijk, “Photonics Packaging Made Visible,” Opt. Photonik 12(5), 34–38 (2017).
[Crossref]

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

Dhakal, A.

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

A. Dhakal, F. Peyskens, S. Clemmen, A. Raza, P. Wuytens, H. Zhao, N. Le Thomas, and R. Baets, “Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy,” Interface Focus 6(4), 20160015 (2016).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Dhoore, S.

Domenech, J. D.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Dominguez, C.

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Du Bois, B.

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

Elamin, A. A.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

Epping, J. P.

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

Fan, Y.

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

Fecioru, A.

C. A. Bower, M. A. Meitl, S. Bonafede, D. Gomez, A. Fecioru, and D. Kneeburg, “Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing,” Proc. - Electron. Components Technol. Conf.963–967 (2015).

Fermann, M. E.

Fernandez, J.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Gao, J.

Gargallo, B.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Geiselmann, M.

Geuzebroek, D.

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

D. Geuzebroek, R. Dekker, and P. van Dijk, “Photonics Packaging Made Visible,” Opt. Photonik 12(5), 34–38 (2017).
[Crossref]

Gielen, G.

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

Gocalinska, A.

Gomez, D.

C. A. Bower, M. A. Meitl, S. Bonafede, D. Gomez, A. Fecioru, and D. Kneeburg, “Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing,” Proc. - Electron. Components Technol. Conf.963–967 (2015).

Gonzalez-Guerrero, A. B.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

Goyvaerts, J.

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

G. Chen, J. Goyvaerts, S. Kumari, J. Van Kerrebrouck, M. Muneeb, S. Uvin, Y. Yu, and G. Roelkens, “Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposers,” Opt. Express 26(5), 6351 (2018).
[Crossref]

Gustavsson, J. S.

S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, and R. G. Baets, “Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm,” Laser Photonics Rev. 12(2), 1700206 (2018).
[Crossref]

Haglund, E. P.

S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, and R. G. Baets, “Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm,” Laser Photonics Rev. 12(2), 1700206 (2018).
[Crossref]

Halir, R.

Han, S. J.

C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, “Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics,” Nat. Commun. 4(1), 1577 (2013).
[Crossref]

Haq, B.

He, J.-J.

Heideman, R. G.

T. van Leeuwen, I. Akca, N. Angelou, N. Weiss, M. Hoekman, A. Leinse, and R. G. Heideman, “On-chip Mach-Zehnder interferometer for OCT systems,” Adv. Opt. Technol. 7(1-2), 103–106 (2018).
[Crossref]

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

Helin, P.

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

Hens, Z.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Hermans, A.

Hinojosa, A.

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

Hlawatsch, N.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

Hoekman, M.

T. van Leeuwen, I. Akca, N. Angelou, N. Weiss, M. Hoekman, A. Leinse, and R. G. Heideman, “On-chip Mach-Zehnder interferometer for OCT systems,” Adv. Opt. Technol. 7(1-2), 103–106 (2018).
[Crossref]

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

Hoffman, L.

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

Huang, J.

Y. Wan, C. Shang, J. Huang, Z. Xie, A. Jain, and J. Norman, “Low-dark current 1.55 um InAs quantum dash waveguide photodiodes,” ACS Nano 14(3), 3519–3527 (2020).
[Crossref]

Jain, A.

Y. Wan, C. Shang, J. Huang, Z. Xie, A. Jain, and J. Norman, “Low-dark current 1.55 um InAs quantum dash waveguide photodiodes,” ACS Nano 14(3), 3519–3527 (2020).
[Crossref]

Jans, H.

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

Jonas, F.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

Jung, D.

Keyvaninia, S.

Klamkin, J.

Kneeburg, D.

C. A. Bower, M. A. Meitl, S. Bonafede, D. Gomez, A. Fecioru, and D. Kneeburg, “Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing,” Proc. - Electron. Components Technol. Conf.963–967 (2015).

Kumari, S.

S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, and R. G. Baets, “Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm,” Laser Photonics Rev. 12(2), 1700206 (2018).
[Crossref]

G. Chen, J. Goyvaerts, S. Kumari, J. Van Kerrebrouck, M. Muneeb, S. Uvin, Y. Yu, and G. Roelkens, “Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposers,” Opt. Express 26(5), 6351 (2018).
[Crossref]

Kuse, N.

Kuyken, B.

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Larsson, A.

S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, and R. G. Baets, “Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm,” Laser Photonics Rev. 12(2), 1700206 (2018).
[Crossref]

Le Thomas, N.

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
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A. Dhakal, F. Peyskens, S. Clemmen, A. Raza, P. Wuytens, H. Zhao, N. Le Thomas, and R. Baets, “Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy,” Interface Focus 6(4), 20160015 (2016).
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A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
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P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
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A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
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C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, “Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics,” Nat. Commun. 4(1), 1577 (2013).
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Li, Y.

Liu, A.

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B. Corbett, R. Loi, W. Zhou, D. Liu, and Z. Ma, “Transfer print techniques for heterogeneous integration of photonic components,” Prog. Quantum Electron. 52, 1–17 (2017).
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B. Corbett, R. Loi, W. Zhou, D. Liu, and Z. Ma, “Transfer print techniques for heterogeneous integration of photonic components,” Prog. Quantum Electron. 52, 1–17 (2017).
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A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
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M. S. Murib, D. Martens, and P. Bienstman, “Label-free real-time optical monitoring of DNA hybridization using SiN Mach-Zehnder interferometer-based integrated biosensing platform,” J. Biomed. Opt. 23(12), 1 (2018).

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
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D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
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A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
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P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
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C. A. Bower, M. A. Meitl, S. Bonafede, D. Gomez, A. Fecioru, and D. Kneeburg, “Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing,” Proc. - Electron. Components Technol. Conf.963–967 (2015).

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P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
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Morgan, J.

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Muliuk, G.

G. Muliuk, K. Van Gasse, J. Van Kerrebrouck, A. J. Trindade, B. Corbett, D. Van Thourhout, and G. Roelkens, “4 A-25 Gbps polarization diversity silicon photonics receiver with transfer printed III-V photodiodes,” IEEE Photonics Technol. Lett. 31(4), 287–290 (2019).
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Muneeb, M.

G. Chen, J. Goyvaerts, S. Kumari, J. Van Kerrebrouck, M. Muneeb, S. Uvin, Y. Yu, and G. Roelkens, “Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposers,” Opt. Express 26(5), 6351 (2018).
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A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
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A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
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R. Wang, S. Sprengel, M. Muneeb, G. Boehm, R. Baets, M.-C. Amann, and G. Roelkens, “2 μm wavelength range InP-based type-II quantum well photodiodes heterogeneously integrated on silicon photonic integrated circuits,” Opt. Express 23(20), 26834 (2015).
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S. Keyvaninia, M. Muneeb, S. Stanković, P. J. Van Veldhoven, D. Van Thourhout, and G. Roelkens, “Ultra-thin DVS-BCB adhesive bonding of III-V wafers, dies and multiple dies to a patterned silicon-on-insulator substrate,” Opt. Mater. Express 3(1), 35 (2013).
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P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
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D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
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M. S. Murib, D. Martens, and P. Bienstman, “Label-free real-time optical monitoring of DNA hybridization using SiN Mach-Zehnder interferometer-based integrated biosensing platform,” J. Biomed. Opt. 23(12), 1 (2018).

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Norman, J.

Y. Wan, C. Shang, J. Huang, Z. Xie, A. Jain, and J. Norman, “Low-dark current 1.55 um InAs quantum dash waveguide photodiodes,” ACS Nano 14(3), 3519–3527 (2020).
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Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
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P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
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A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
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Perez, D.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
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Peyskens, F.

A. Dhakal, F. Peyskens, S. Clemmen, A. Raza, P. Wuytens, H. Zhao, N. Le Thomas, and R. Baets, “Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy,” Interface Focus 6(4), 20160015 (2016).
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A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
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M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
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Puers, R.

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
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Rahim, A.

Ramirez-Priego, P.

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

Raza, A.

Roelkens, G.

G. Muliuk, K. Van Gasse, J. Van Kerrebrouck, A. J. Trindade, B. Corbett, D. Van Thourhout, and G. Roelkens, “4 A-25 Gbps polarization diversity silicon photonics receiver with transfer printed III-V photodiodes,” IEEE Photonics Technol. Lett. 31(4), 287–290 (2019).
[Crossref]

G. Chen, J. Goyvaerts, S. Kumari, J. Van Kerrebrouck, M. Muneeb, S. Uvin, Y. Yu, and G. Roelkens, “Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposers,” Opt. Express 26(5), 6351 (2018).
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S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, and R. G. Baets, “Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm,” Laser Photonics Rev. 12(2), 1700206 (2018).
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J. Zhang, B. Haq, J. O’Callaghan, A. Gocalinska, E. Pelucchi, A. J. Trindade, B. Corbett, G. Morthier, and G. Roelkens, “Transfer-printing-based integration of a III-V-on-silicon distributed feedback laser,” Opt. Express 26(7), 8821 (2018).
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J. Zhang, A. De Groote, A. Abbasi, R. Loi, J. O’Callaghan, B. Corbett, A. J. Trindade, C. A. Bower, and G. Roelkens, “Silicon photonics fiber-to-the-home transceiver array based on transfer-printing-based integration of III-V photodetectors,” Opt. Express 25(13), 14290 (2017).
[Crossref]

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

R. Wang, S. Sprengel, M. Muneeb, G. Boehm, R. Baets, M.-C. Amann, and G. Roelkens, “2 μm wavelength range InP-based type-II quantum well photodiodes heterogeneously integrated on silicon photonic integrated circuits,” Opt. Express 23(20), 26834 (2015).
[Crossref]

S. Keyvaninia, M. Muneeb, S. Stanković, P. J. Van Veldhoven, D. Van Thourhout, and G. Roelkens, “Ultra-thin DVS-BCB adhesive bonding of III-V wafers, dies and multiple dies to a patterned silicon-on-insulator substrate,” Opt. Mater. Express 3(1), 35 (2013).
[Crossref]

Roeloffzen, C. G.

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

Rottenberg, X.

Ruocco, A.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Ryckeboer, E.

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Sadana, D. K.

C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, “Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics,” Nat. Commun. 4(1), 1577 (2013).
[Crossref]

Sanchez, A. M.

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Severi, S.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

Shang, C.

Y. Wan, C. Shang, J. Huang, Z. Xie, A. Jain, and J. Norman, “Low-dark current 1.55 um InAs quantum dash waveguide photodiodes,” ACS Nano 14(3), 3519–3527 (2020).
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K. Sun, D. Jung, C. Shang, A. Liu, J. Morgan, J. Zang, Q. Li, J. Klamkin, J. E. Bowers, and A. Beling, “Low dark current III-V on silicon photodiodes by heteroepitaxy,” Opt. Express 26(10), 13605 (2018).
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Shi, L.

C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, “Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics,” Nat. Commun. 4(1), 1577 (2013).
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Shiu, K. T.

C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, “Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics,” Nat. Commun. 4(1), 1577 (2013).
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Singh, M.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

Skirtach, A.

Soetaert, P.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

Sprengel, S.

Srinivasan, K.

Stankovic, S.

Stassen, A.

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

Stehr, M.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

Subramanian, A.

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

Subramanian, A. Z.

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Sun, K.

Tetsumoto, T.

Trindade, A. J.

Uvin, S.

Van Campenhout, J.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Van Der Slot, P. J.

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

van Dijk, P.

D. Geuzebroek, R. Dekker, and P. van Dijk, “Photonics Packaging Made Visible,” Opt. Photonik 12(5), 34–38 (2017).
[Crossref]

Van Dorpe, P.

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Van Gasse, K.

G. Muliuk, K. Van Gasse, J. Van Kerrebrouck, A. J. Trindade, B. Corbett, D. Van Thourhout, and G. Roelkens, “4 A-25 Gbps polarization diversity silicon photonics receiver with transfer printed III-V photodiodes,” IEEE Photonics Technol. Lett. 31(4), 287–290 (2019).
[Crossref]

Van Kerrebrouck, J.

G. Muliuk, K. Van Gasse, J. Van Kerrebrouck, A. J. Trindade, B. Corbett, D. Van Thourhout, and G. Roelkens, “4 A-25 Gbps polarization diversity silicon photonics receiver with transfer printed III-V photodiodes,” IEEE Photonics Technol. Lett. 31(4), 287–290 (2019).
[Crossref]

G. Chen, J. Goyvaerts, S. Kumari, J. Van Kerrebrouck, M. Muneeb, S. Uvin, Y. Yu, and G. Roelkens, “Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposers,” Opt. Express 26(5), 6351 (2018).
[Crossref]

van Leeuwen, T.

T. van Leeuwen, I. Akca, N. Angelou, N. Weiss, M. Hoekman, A. Leinse, and R. G. Heideman, “On-chip Mach-Zehnder interferometer for OCT systems,” Adv. Opt. Technol. 7(1-2), 103–106 (2018).
[Crossref]

Van Roy, W.

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

Van Thourhout, D.

G. Muliuk, K. Van Gasse, J. Van Kerrebrouck, A. J. Trindade, B. Corbett, D. Van Thourhout, and G. Roelkens, “4 A-25 Gbps polarization diversity silicon photonics receiver with transfer printed III-V photodiodes,” IEEE Photonics Technol. Lett. 31(4), 287–290 (2019).
[Crossref]

A. Rahim, E. Ryckeboer, A. Z. Subramanian, S. Clemmen, B. Kuyken, A. Dhakal, A. Raza, A. Hermans, M. Muneeb, S. Dhoore, Y. Li, U. Dave, P. Bienstman, N. Le Thomas, G. Roelkens, D. Van Thourhout, P. Helin, S. Severi, X. Rottenberg, and R. Baets, “Expanding the Silicon Photonics Portfolio with Silicon Nitride Photonic Integrated Circuits,” J. Lightwave Technol. 35(4), 639–649 (2017).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

S. Keyvaninia, M. Muneeb, S. Stanković, P. J. Van Veldhoven, D. Van Thourhout, and G. Roelkens, “Ultra-thin DVS-BCB adhesive bonding of III-V wafers, dies and multiple dies to a patterned silicon-on-insulator substrate,” Opt. Mater. Express 3(1), 35 (2013).
[Crossref]

Van Veldhoven, P. J.

Vos, R.

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

Wan, Y.

Y. Wan, C. Shang, J. Huang, Z. Xie, A. Jain, and J. Norman, “Low-dark current 1.55 um InAs quantum dash waveguide photodiodes,” ACS Nano 14(3), 3519–3527 (2020).
[Crossref]

Wang, R.

Weiss, N.

T. van Leeuwen, I. Akca, N. Angelou, N. Weiss, M. Hoekman, A. Leinse, and R. G. Heideman, “On-chip Mach-Zehnder interferometer for OCT systems,” Adv. Opt. Technol. 7(1-2), 103–106 (2018).
[Crossref]

Wuytens, P.

A. Dhakal, F. Peyskens, S. Clemmen, A. Raza, P. Wuytens, H. Zhao, N. Le Thomas, and R. Baets, “Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy,” Interface Focus 6(4), 20160015 (2016).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Xie, L.

Xie, W.

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Xie, Z.

Y. Wan, C. Shang, J. Huang, Z. Xie, A. Jain, and J. Norman, “Low-dark current 1.55 um InAs quantum dash waveguide photodiodes,” ACS Nano 14(3), 3519–3527 (2020).
[Crossref]

Ye, N.

Yu, Q.

Yu, Y.

Zang, J.

Zervas, M.

Zhang, J.

Zhao, H.

H. Zhao, B. Baumgartner, A. Raza, A. Skirtach, B. Lendl, and R. Baets, “Multiplex volatile organic compound Raman sensing with nanophotonic slot waveguides functionalized with a mesoporous enrichment layer,” Opt. Lett. 45(2), 447 (2020).
[Crossref]

H. Zhao, S. Clemmen, A. Raza, and R. Baets, “Stimulated Raman spectroscopy of analytes evanescently probed by a silicon nitride photonic integrated waveguide,” Opt. Lett. 43(6), 1403 (2018).
[Crossref]

A. Dhakal, F. Peyskens, S. Clemmen, A. Raza, P. Wuytens, H. Zhao, N. Le Thomas, and R. Baets, “Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy,” Interface Focus 6(4), 20160015 (2016).
[Crossref]

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Zhou, W.

B. Corbett, R. Loi, W. Zhou, D. Liu, and Z. Ma, “Transfer print techniques for heterogeneous integration of photonic components,” Prog. Quantum Electron. 52, 1–17 (2017).
[Crossref]

ACS Nano (1)

Y. Wan, C. Shang, J. Huang, Z. Xie, A. Jain, and J. Norman, “Low-dark current 1.55 um InAs quantum dash waveguide photodiodes,” ACS Nano 14(3), 3519–3527 (2020).
[Crossref]

ACS Sens. (1)

P. Ramirez-Priego, D. Martens, A. A. Elamin, P. Soetaert, W. Van Roy, R. Vos, B. Anton, R. Bockstaele, H. Becker, M. Singh, P. Bienstman, and L. M. Lechuga, “Label-Free and Real-Time Detection of Tuberculosis in Human Urine Samples Using a Nanophotonic Point-of-Care Platform,” ACS Sens. 3(10), 2079–2086 (2018).
[Crossref]

Adv. Opt. Technol. (1)

T. van Leeuwen, I. Akca, N. Angelou, N. Weiss, M. Hoekman, A. Leinse, and R. G. Heideman, “On-chip Mach-Zehnder interferometer for OCT systems,” Adv. Opt. Technol. 7(1-2), 103–106 (2018).
[Crossref]

Anal. Methods (1)

D. Martens, P. Ramirez-Priego, M. S. Murib, A. A. Elamin, A. B. Gonzalez-Guerrero, M. Stehr, F. Jonas, B. Anton, N. Hlawatsch, P. Soetaert, R. Vos, A. Stassen, S. Severi, W. Van Roy, R. Bockstaele, H. Becker, M. Singh, L. M. Lechuga, and P. Bienstman, “A low-cost integrated biosensing platform based on SiN nanophotonics for biomarker detection in urine,” Anal. Methods 10(25), 3066–3073 (2018).
[Crossref]

IEEE Photonics J. (2)

L. Hoffman, A. Subramanian, P. Helin, B. Du Bois, R. Baets, P. Van Dorpe, G. Gielen, R. Puers, and D. Braeken, “Low loss CMOS-Compatible PECVD silicon nitride waveguides and grating couplers for blue light optogenetic applications,” IEEE Photonics J. 8(5), 1–11 (2016).
[Crossref]

Y. Fan, J. P. Epping, R. M. Oldenbeuving, C. G. Roeloffzen, M. Hoekman, R. Dekker, R. G. Heideman, P. J. Van Der Slot, and K. J. Boller, “Optically Integrated InP-Si3N4 Hybrid Laser,” IEEE Photonics J. 8(6), 122–123 (2016).
[Crossref]

IEEE Photonics Technol. Lett. (1)

G. Muliuk, K. Van Gasse, J. Van Kerrebrouck, A. J. Trindade, B. Corbett, D. Van Thourhout, and G. Roelkens, “4 A-25 Gbps polarization diversity silicon photonics receiver with transfer printed III-V photodiodes,” IEEE Photonics Technol. Lett. 31(4), 287–290 (2019).
[Crossref]

Interface Focus (1)

A. Dhakal, F. Peyskens, S. Clemmen, A. Raza, P. Wuytens, H. Zhao, N. Le Thomas, and R. Baets, “Single mode waveguide platform for spontaneous and surface-enhanced on-chip Raman spectroscopy,” Interface Focus 6(4), 20160015 (2016).
[Crossref]

J. Biomed. Opt. (1)

M. S. Murib, D. Martens, and P. Bienstman, “Label-free real-time optical monitoring of DNA hybridization using SiN Mach-Zehnder interferometer-based integrated biosensing platform,” J. Biomed. Opt. 23(12), 1 (2018).

J. Lightwave Technol. (1)

Laser Photonics Rev. (1)

S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, and R. G. Baets, “Vertical-Cavity Silicon-Integrated Laser with In-Plane Waveguide Emission at 850 nm,” Laser Photonics Rev. 12(2), 1700206 (2018).
[Crossref]

Nat. Commun. (1)

C. W. Cheng, K. T. Shiu, N. Li, S. J. Han, L. Shi, and D. K. Sadana, “Epitaxial lift-off process for gallium arsenide substrate reuse and flexible electronics,” Nat. Commun. 4(1), 1577 (2013).
[Crossref]

Opt. Express (6)

R. Wang, S. Sprengel, M. Muneeb, G. Boehm, R. Baets, M.-C. Amann, and G. Roelkens, “2 μm wavelength range InP-based type-II quantum well photodiodes heterogeneously integrated on silicon photonic integrated circuits,” Opt. Express 23(20), 26834 (2015).
[Crossref]

J. Zhang, B. Haq, J. O’Callaghan, A. Gocalinska, E. Pelucchi, A. J. Trindade, B. Corbett, G. Morthier, and G. Roelkens, “Transfer-printing-based integration of a III-V-on-silicon distributed feedback laser,” Opt. Express 26(7), 8821 (2018).
[Crossref]

J. Zhang, A. De Groote, A. Abbasi, R. Loi, J. O’Callaghan, B. Corbett, A. J. Trindade, C. A. Bower, and G. Roelkens, “Silicon photonics fiber-to-the-home transceiver array based on transfer-printing-based integration of III-V photodetectors,” Opt. Express 25(13), 14290 (2017).
[Crossref]

K. Sun, D. Jung, C. Shang, A. Liu, J. Morgan, J. Zang, Q. Li, J. Klamkin, J. E. Bowers, and A. Beling, “Low dark current III-V on silicon photodiodes by heteroepitaxy,” Opt. Express 26(10), 13605 (2018).
[Crossref]

Q. Yu, J. Gao, N. Ye, B. Chen, K. Sun, L. Xie, K. Srinivasan, M. Zervas, G. Navickaite, M. Geiselmann, and A. Beling, “Heterogeneous Photodiodes on Silicon Nitride Waveguides with 20 GHz Bandwidth,” Opt. Express 28(10), 14824 (2020).
[Crossref]

G. Chen, J. Goyvaerts, S. Kumari, J. Van Kerrebrouck, M. Muneeb, S. Uvin, Y. Yu, and G. Roelkens, “Integration of high-speed GaAs metal-semiconductor-metal photodetectors by means of transfer printing for 850 nm wavelength photonic interposers,” Opt. Express 26(5), 6351 (2018).
[Crossref]

Opt. Laser Technol. (1)

M. A. Porcel, A. Hinojosa, H. Jans, A. Stassen, J. Goyvaerts, D. Geuzebroek, M. Geiselmann, C. Dominguez, and I. Artundo, “Silicon nitride photonic integration for visible light applications,” Opt. Laser Technol. 112, 299–306 (2019).
[Crossref]

Opt. Lett. (4)

Opt. Mater. Express (1)

Opt. Photonik (1)

D. Geuzebroek, R. Dekker, and P. van Dijk, “Photonics Packaging Made Visible,” Opt. Photonik 12(5), 34–38 (2017).
[Crossref]

Photonics Res. (1)

A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, B. Kuyken, H. Zhao, S. Pathak, A. Ruocco, A. De Groote, P. Wuytens, D. Martens, F. Leo, W. Xie, U. D. Dave, M. Muneeb, P. Van Dorpe, J. Van Campenhout, W. Bogaerts, P. Bienstman, N. Le Thomas, D. Van Thourhout, Z. Hens, G. Roelkens, and R. Baets, “Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited],” Photonics Res. 3(5), B47 (2015).
[Crossref]

Prog. Quantum Electron. (1)

B. Corbett, R. Loi, W. Zhou, D. Liu, and Z. Ma, “Transfer print techniques for heterogeneous integration of photonic components,” Prog. Quantum Electron. 52, 1–17 (2017).
[Crossref]

Sensors (1)

P. Munoz, G. Mico, L. A. Bru, D. Pastor, D. Perez, J. D. Domenech, J. Fernandez, R. Banos, B. Gargallo, R. Alemany, A. M. Sanchez, J. M. Cirera, R. Mas, and C. Dominguez, “Silicon nitride photonic integration platforms for visible, near-infrared and mid-infrared applications,” Sensors 17(9), 2088 (2017).
[Crossref]

Other (3)

C. A. Bower, M. A. Meitl, S. Bonafede, D. Gomez, A. Fecioru, and D. Kneeburg, “Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing,” Proc. - Electron. Components Technol. Conf.963–967 (2015).

L. Photonics, “Filter Toolbox,” (2020).

V-I-Systems, “V-I-Systems Optical Chips,” (2019).

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Figures (7)

Fig. 1.
Fig. 1. Concept illustration of the wafer-scale compatible micro-transfer-printing technology, where III-V components such as photodiodes are transferred from the III-V source substrate to a SiN $_x$ photonics wafer in a parallel manner.
Fig. 2.
Fig. 2. (a) 3D model of the p-i-n photodiode on top of a SiN $_x$ GC, showing the relevant design parameters and (b) a GDSII schematic of the on-chip spectrometer with printed PDs onto the output GCs.
Fig. 3.
Fig. 3. Schematic of the process flow with (a) the epitaxial layer stack and (b) the patterned device on the source substrate. The release layer is patterned to access the substrate. (c) Shows a top-down view of the photoresist encapsulation in contour that anchors the device to the substrate. The devices are released with an underetch in (d). Afterwards, the devices are picked up with a PDMS stamp in (e) and printed on the SiN $_x$ target PIC in (f). On the target wafer, the encapsulation is removed and the devices are planarized with DVS-BCB in (g) and interconnected in (h).
Fig. 4.
Fig. 4. Microscope images of (a) source substrate with dense PD configuration, a target test site with printed PDs after PR removal in (b) and after post-processing in (c). (d)-(e)-(f) shows the process of arrayed transfer-printing, where a set of PDs is printed in one go, on top of the AWG output channels and interconnected in post-processing.
Fig. 5.
Fig. 5. The electrical performance of the PDs with (a) V-I curve and differential series resistance up to 10 mA, (b) a distribution of the measured dark current at -1V reverse bias, (c) the I-V curves for a PD-on-GC illuminated at 780 nm and (d) at 850 nm.
Fig. 6.
Fig. 6. The obtained waveguide-referred responsivities for the PD-on-GC system (a) for a grating designed at 780 nm and (b) for a grating designed at 850 nm. The dashed line indicates a $50 \%$ external quantum efficiency as a reference for the system performance.
Fig. 7.
Fig. 7. AWG-demonstrator characterization with (a) measured optical transmission of the 10-channel AWG, (b) the photocurrent of the transfer-printed PDs on top of each channel output grating coupler, measured at -2V reverse bias.

Tables (1)

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Table 1. III-V photodetector epitaxial layer stack

Equations (3)

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I Q E = Light absorbed by PD Light coupled into PD = 1 e α t 0.95
E Q E = Light absorbed by PD Light inside WG = η W G t o P D I Q E η W G t o P D
R W G , m e a s R W G , s i m q h f λ E Q E s i m 0.30 [ A / W ] 0.38 [ A / W ]

Metrics