Abstract

Optical refractive-index sensors exploiting selective co-integration of plasmonics with silicon photonics has emerged as an attractive technology for biosensing applications that can unleash unprecedented performance breakthroughs that reaps the benefits of both technologies. However, towards this direction, a major challenge remains their integration using exclusively CMOS-compatible materials. In this context, herein, we demonstrate, for the first time to our knowledge, a CMOS-compatible plasmo-photonic Mach-Zehnder-interferometer (MZI) based on aluminum and Si3N4 waveguides, exhibiting record-high bulk sensitivity of 4764 nm/RIU with clear potential to scale up the bulk sensitivity values by properly engineering the design parameters of the MZI. The proposed sensor is composed of Si3N4 waveguides butt-coupled with an aluminum stripe in one branch to realize the sensing transducer. The reference arm is built by Si3N4 waveguides, incorporating a thermo-optic phase shifter followed by an MZI-based variable optical attenuation stage to maximize extinction ratio up to 38 dB, hence optimizing the overall sensing performance. The proposed sensor exhibits the highest bulk sensitivity among all plasmo-photonic counterparts, while complying with CMOS manufacturing standards, enabling volume manufacturing.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
    [Crossref]
  2. B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
    [Crossref]
  3. A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
    [Crossref]
  4. T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
    [Crossref]
  5. S. TalebiFard, S. Schmidt, W. Shi, W. Wu, N. A. F. Jaeger, E. Kwok, D. M. Ratner, and L. Chrostowski, “Optimized sensitivity of Silicon-on-Insulator (SOI) strip waveguide resonator sensor,” Biomed. Opt. Express 8(2), 500 (2017).
    [Crossref]
  6. R. Caroselli, S. Ponce-Alcántara, F. P. Quilez, D. M. Sánchez, L. T. Morán, A. G. Barres, L. Bellieres, H. Bandarenka, K. Girel, V. Bondarenko, and J. García-Rupérez, “Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements,” Opt. Express 25(25), 31651 (2017).
    [Crossref]
  7. B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
    [Crossref]
  8. A. Di Falco, L. O’Faolain, and T. F. Krauss, “Chemical sensing in slotted photonic crystal heterostructure cavities,” Appl. Phys. Lett. 94(6), 063503 (2009).
    [Crossref]
  9. Z. Tu, D. Gao, M. Zhang, and D. Zhang, “High-sensitivity complex refractive index sensing based on Fano resonance in the subwavelength grating waveguide micro-ring resonator,” Opt. Express 25(17), 20911 (2017).
    [Crossref]
  10. J. Flueckiger, S. Schmidt, V. Donzella, A. Sherwali, D. M. Ratner, L. Chrostowski, and K. C. Cheung, “Sub-wavelength grating for enhanced ring resonator biosensor,” Opt. Express 24(14), 15672 (2016).
    [Crossref]
  11. R. Slavík and J. Homola, “Ultrahigh resolution long range surface plasmon-based sensor,” Sens. Actuators, B 123(1), 10–12 (2007).
    [Crossref]
  12. J. Homola, “Surface plasmon resonance sensors for detection of chemical and biological species,” Chem. Rev. 108(2), 462–493 (2008).
    [Crossref]
  13. G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
    [Crossref]
  14. G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
    [Crossref]
  15. G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
    [Crossref]
  16. G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
    [Crossref]
  17. O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
    [Crossref]
  18. C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
    [Crossref]
  19. A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
    [Crossref]
  20. X. Sun, D. Dai, L. Thylén, and L. Wosinski, “Double-Slot Hybrid Plasmonic Ring Resonator Used for Optical Sensors and Modulators,” Photonics 2(4), 1116–1130 (2015).
    [Crossref]
  21. X. Sun, L. Thylén, and L. Wosinski, “Hollow hybrid plasmonic Mach–Zehnder sensor,” Opt. Lett. 42(4), 807 (2017).
    [Crossref]
  22. X. Sun, D. Dai, L. Thylén, and L. Wosinski, “High-sensitivity liquid refractive-index sensor based on a Mach-Zehnder interferometer with a double-slot hybrid plasmonic waveguide,” Opt. Express 23(20), 25688 (2015).
    [Crossref]
  23. M. S. Kwon, B. Ku, and Y. Kim, “Plasmofluidic disk resonators,” Sci. Rep. 6(1), 23149 (2016).
    [Crossref]
  24. P. Debackere, R. Baets, and P. Bienstman, “Bulk sensing experiments using a surface-plasmon interferometer,” Opt. Lett. 34(18), 2858–2860 (2009).
    [Crossref]
  25. T. Tabbakh and P. LiKamWa, “Liquid sensor based on optical surface plasmon resonance in a dielectric waveguide,” Proc. SPIE 10639, 100 (2018).
    [Crossref]
  26. Y. S. Chu, W. H. Hsu, C. W. Lin, and W. S. Wang, “Surface plasmon resonance sensors using silica-on-silicon optical waveguides,” Microw. Opt. Technol. Lett. 48(5), 955–957 (2006).
    [Crossref]
  27. C. Langhammer, M. Schwind, B. Kasemo, and I. Zorić, “Localized surface plasmon resonances in aluminum nanodisks,” Nano Lett. 8(5), 1461–1471 (2008).
    [Crossref]
  28. F. Zhang, J. Martin, and J. Plain, “Long-term stability of plasmonic resonances sustained by evaporated aluminum nanostructures,” Opt. Mater. Express 9(1), 85 (2019).
    [Crossref]
  29. A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
    [Crossref]
  30. G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
    [Crossref]
  31. E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, and A. Miliou, “Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform,” Plasmonics 14(4), 823–838 (2019).
    [Crossref]
  32. http://www.lumerical.com/tcad-products/interconnect/ . Lumerical Solutions.
  33. http://www.lumerical.com/tcad-products/mode/ . Lumerical Solutions.
  34. http://www.lumerical.com/tcad-products/fdtd/ . Lumerical Solutions.
  35. J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
    [Crossref]
  36. M. Lashgari and A. M. Malek, “Electrochimica Acta Fundamental studies of aluminum corrosion in acidic and basic environments: Theoretical predictions and experimental observations,” Electrochim. Acta 55(18), 5253–5257 (2010).
    [Crossref]
  37. I. Boukerche, S. Djerad, L. Benmansour, L. Tifouti, and K. Saleh, “Degradability of aluminum in acidic and alkaline solutions,” Corros. Sci. 78, 343–352 (2014).
    [Crossref]
  38. R. Winston Revie, Uhlig ‘ s corrosion handbook the electrochemical society series (John Wiley & Sons, 2011).
  39. E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
    [Crossref]

2019 (5)

2018 (5)

T. Tabbakh and P. LiKamWa, “Liquid sensor based on optical surface plasmon resonance in a dielectric waveguide,” Proc. SPIE 10639, 100 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

2017 (6)

Z. Tu, D. Gao, M. Zhang, and D. Zhang, “High-sensitivity complex refractive index sensing based on Fano resonance in the subwavelength grating waveguide micro-ring resonator,” Opt. Express 25(17), 20911 (2017).
[Crossref]

S. TalebiFard, S. Schmidt, W. Shi, W. Wu, N. A. F. Jaeger, E. Kwok, D. M. Ratner, and L. Chrostowski, “Optimized sensitivity of Silicon-on-Insulator (SOI) strip waveguide resonator sensor,” Biomed. Opt. Express 8(2), 500 (2017).
[Crossref]

R. Caroselli, S. Ponce-Alcántara, F. P. Quilez, D. M. Sánchez, L. T. Morán, A. G. Barres, L. Bellieres, H. Bandarenka, K. Girel, V. Bondarenko, and J. García-Rupérez, “Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements,” Opt. Express 25(25), 31651 (2017).
[Crossref]

X. Sun, L. Thylén, and L. Wosinski, “Hollow hybrid plasmonic Mach–Zehnder sensor,” Opt. Lett. 42(4), 807 (2017).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

2016 (2)

2015 (2)

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “Double-Slot Hybrid Plasmonic Ring Resonator Used for Optical Sensors and Modulators,” Photonics 2(4), 1116–1130 (2015).
[Crossref]

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “High-sensitivity liquid refractive-index sensor based on a Mach-Zehnder interferometer with a double-slot hybrid plasmonic waveguide,” Opt. Express 23(20), 25688 (2015).
[Crossref]

2014 (1)

I. Boukerche, S. Djerad, L. Benmansour, L. Tifouti, and K. Saleh, “Degradability of aluminum in acidic and alkaline solutions,” Corros. Sci. 78, 343–352 (2014).
[Crossref]

2012 (1)

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

2010 (3)

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

M. Lashgari and A. M. Malek, “Electrochimica Acta Fundamental studies of aluminum corrosion in acidic and basic environments: Theoretical predictions and experimental observations,” Electrochim. Acta 55(18), 5253–5257 (2010).
[Crossref]

2009 (3)

P. Debackere, R. Baets, and P. Bienstman, “Bulk sensing experiments using a surface-plasmon interferometer,” Opt. Lett. 34(18), 2858–2860 (2009).
[Crossref]

A. Di Falco, L. O’Faolain, and T. F. Krauss, “Chemical sensing in slotted photonic crystal heterostructure cavities,” Appl. Phys. Lett. 94(6), 063503 (2009).
[Crossref]

T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
[Crossref]

2008 (2)

J. Homola, “Surface plasmon resonance sensors for detection of chemical and biological species,” Chem. Rev. 108(2), 462–493 (2008).
[Crossref]

C. Langhammer, M. Schwind, B. Kasemo, and I. Zorić, “Localized surface plasmon resonances in aluminum nanodisks,” Nano Lett. 8(5), 1461–1471 (2008).
[Crossref]

2007 (1)

R. Slavík and J. Homola, “Ultrahigh resolution long range surface plasmon-based sensor,” Sens. Actuators, B 123(1), 10–12 (2007).
[Crossref]

2006 (3)

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Y. S. Chu, W. H. Hsu, C. W. Lin, and W. S. Wang, “Surface plasmon resonance sensors using silica-on-silicon optical waveguides,” Microw. Opt. Technol. Lett. 48(5), 955–957 (2006).
[Crossref]

1997 (1)

E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
[Crossref]

Alain, D.

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

Apostolopoulos, D.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Arocas, J.

Avramopoulos, H.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Baets, R.

T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
[Crossref]

P. Debackere, R. Baets, and P. Bienstman, “Bulk sensing experiments using a surface-plasmon interferometer,” Opt. Lett. 34(18), 2858–2860 (2009).
[Crossref]

Bandarenka, H.

Barres, A. G.

Baus, M.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Bellieres, L.

Benmansour, L.

I. Boukerche, S. Djerad, L. Benmansour, L. Tifouti, and K. Saleh, “Degradability of aluminum in acidic and alkaline solutions,” Corros. Sci. 78, 343–352 (2014).
[Crossref]

Bienstman, P.

T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
[Crossref]

P. Debackere, R. Baets, and P. Bienstman, “Bulk sensing experiments using a surface-plasmon interferometer,” Opt. Lett. 34(18), 2858–2860 (2009).
[Crossref]

Blaize, S.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Blanco, F. J.

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

Bondarenko, V.

Boukerche, I.

I. Boukerche, S. Djerad, L. Benmansour, L. Tifouti, and K. Saleh, “Degradability of aluminum in acidic and alkaline solutions,” Corros. Sci. 78, 343–352 (2014).
[Crossref]

Bozhevolnyi, S. I.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Brugman, A. M.

E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
[Crossref]

Bruyant, A.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Caroselli, R.

Cegielski, P. J.

Chatzianagnostou, E.

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, and A. Miliou, “Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform,” Plasmonics 14(4), 823–838 (2019).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

Cheben, P.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Chelnokov, A.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Cheung, K. C.

Chmielak, B.

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

Chrostowski, L.

Chu, Y. S.

Y. S. Chu, W. H. Hsu, C. W. Lin, and W. S. Wang, “Surface plasmon resonance sensors using silica-on-silicon optical waveguides,” Microw. Opt. Technol. Lett. 48(5), 955–957 (2006).
[Crossref]

Claes, T.

T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
[Crossref]

Colas-des-Francs, G.

Dabos, G.

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, and A. Miliou, “Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform,” Plasmonics 14(4), 823–838 (2019).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Dai, D.

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “Double-Slot Hybrid Plasmonic Ring Resonator Used for Optical Sensors and Modulators,” Photonics 2(4), 1116–1130 (2015).
[Crossref]

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “High-sensitivity liquid refractive-index sensor based on a Mach-Zehnder interferometer with a double-slot hybrid plasmonic waveguide,” Opt. Express 23(20), 25688 (2015).
[Crossref]

De Vos, K.

T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
[Crossref]

Debackere, P.

Delacour, C.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Delâge, A.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Densmore, A.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Dereux, A.

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Di Falco, A.

A. Di Falco, L. O’Faolain, and T. F. Krauss, “Chemical sensing in slotted photonic crystal heterostructure cavities,” Appl. Phys. Lett. 94(6), 063503 (2009).
[Crossref]

Djerad, S.

I. Boukerche, S. Djerad, L. Benmansour, L. Tifouti, and K. Saleh, “Degradability of aluminum in acidic and alkaline solutions,” Corros. Sci. 78, 343–352 (2014).
[Crossref]

Dominguez, C.

E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
[Crossref]

Domínguez, C.

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

Donzella, V.

Dündar, M. A.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Fedeli, J. M.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Flueckiger, J.

Gao, D.

García-Rupérez, J.

Giannoulis, G.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Giesecke, A. L.

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

Girel, K.

Greve, J.

E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
[Crossref]

Grosse, P.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Hammani, K.

Hassan, K.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

He, S.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Heintz, O.

Hoessbacher, C.

Homola, J.

J. Homola, “Surface plasmon resonance sensors for detection of chemical and biological species,” Chem. Rev. 108(2), 462–493 (2008).
[Crossref]

R. Slavík and J. Homola, “Ultrahigh resolution long range surface plasmon-based sensor,” Sens. Actuators, B 123(1), 10–12 (2007).
[Crossref]

Hsu, W. H.

Y. S. Chu, W. H. Hsu, C. W. Lin, and W. S. Wang, “Surface plasmon resonance sensors using silica-on-silicon optical waveguides,” Microw. Opt. Technol. Lett. 48(5), 955–957 (2006).
[Crossref]

Jaeger, N. A. F.

Janz, S.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Jean-Claude, W.

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

Kalavrouziotis, D.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Karl, M.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Karouta, F.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Kasemo, B.

C. Langhammer, M. Schwind, B. Kasemo, and I. Zorić, “Localized surface plasmon resonances in aluminum nanodisks,” Nano Lett. 8(5), 1461–1471 (2008).
[Crossref]

Ketzaki, D.

E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, and A. Miliou, “Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform,” Plasmonics 14(4), 823–838 (2019).
[Crossref]

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

Kim, Y.

M. S. Kwon, B. Ku, and Y. Kim, “Plasmofluidic disk resonators,” Sci. Rep. 6(1), 23149 (2016).
[Crossref]

Koch, U.

Kooyman, R. P. H.

E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
[Crossref]

Krauss, T. F.

A. Di Falco, L. O’Faolain, and T. F. Krauss, “Chemical sensing in slotted photonic crystal heterostructure cavities,” Appl. Phys. Lett. 94(6), 063503 (2009).
[Crossref]

Kriezis, E. E.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Ku, B.

M. S. Kwon, B. Ku, and Y. Kim, “Plasmofluidic disk resonators,” Sci. Rep. 6(1), 23149 (2016).
[Crossref]

Kumar, A.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Kwok, E.

Kwon, M. S.

M. S. Kwon, B. Ku, and Y. Kim, “Plasmofluidic disk resonators,” Sci. Rep. 6(1), 23149 (2016).
[Crossref]

Lamontagne, B.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Langhammer, C.

C. Langhammer, M. Schwind, B. Kasemo, and I. Zorić, “Localized surface plasmon resonances in aluminum nanodisks,” Nano Lett. 8(5), 1461–1471 (2008).
[Crossref]

Lapointe, J.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Lashgari, M.

M. Lashgari and A. M. Malek, “Electrochimica Acta Fundamental studies of aluminum corrosion in acidic and basic environments: Theoretical predictions and experimental observations,” Electrochim. Acta 55(18), 5253–5257 (2010).
[Crossref]

Laurent, M.

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

Lechuga, L. M.

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
[Crossref]

Lerondel, G.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Leuthold, J.

LiKamWa, P.

T. Tabbakh and P. LiKamWa, “Liquid sensor based on optical surface plasmon resonance in a dielectric waveguide,” Proc. SPIE 10639, 100 (2018).
[Crossref]

Lin, C. W.

Y. S. Chu, W. H. Hsu, C. W. Lin, and W. S. Wang, “Surface plasmon resonance sensors using silica-on-silicon optical waveguides,” Microw. Opt. Technol. Lett. 48(5), 955–957 (2006).
[Crossref]

Malek, A. M.

M. Lashgari and A. M. Malek, “Electrochimica Acta Fundamental studies of aluminum corrosion in acidic and basic environments: Theoretical predictions and experimental observations,” Electrochim. Acta 55(18), 5253–5257 (2010).
[Crossref]

Manolis, A.

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Markey, L.

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Martin, J.

Mayora, K.

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

Miliou, A.

E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, and A. Miliou, “Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform,” Plasmonics 14(4), 823–838 (2019).
[Crossref]

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

Molera, J. G.

T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
[Crossref]

Morán, L. T.

Moreno, M.

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

Nötzel, R.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

O’Faolain, L.

A. Di Falco, L. O’Faolain, and T. F. Krauss, “Chemical sensing in slotted photonic crystal heterostructure cavities,” Appl. Phys. Lett. 94(6), 063503 (2009).
[Crossref]

Papaioannou, S.

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Pitilakis, A.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Plain, J.

Pleros, N.

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Ponce-Alcántara, S.

Porschatis, C.

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

Post, E.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Quilez, F. P.

Ratner, D. M.

Rohracher, K.

Rusakov, D.

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

Salas-Montiel, R.

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Saleh, K.

I. Boukerche, S. Djerad, L. Benmansour, L. Tifouti, and K. Saleh, “Degradability of aluminum in acidic and alkaline solutions,” Corros. Sci. 78, 343–352 (2014).
[Crossref]

Sánchez, D. M.

Schacht, E.

T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
[Crossref]

Schipper, E. F.

E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
[Crossref]

Schmid, J. H.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Schmidt, S.

Schwind, M.

C. Langhammer, M. Schwind, B. Kasemo, and I. Zorić, “Localized surface plasmon resonances in aluminum nanodisks,” Nano Lett. 8(5), 1461–1471 (2008).
[Crossref]

Seplveda, B.

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

Sherwali, A.

Shi, W.

Slavík, R.

R. Slavík and J. Homola, “Ultrahigh resolution long range surface plasmon-based sensor,” Sens. Actuators, B 123(1), 10–12 (2007).
[Crossref]

Snchez Del Río, J.

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

Suckow, S.

Sun, X.

Tabbakh, T.

T. Tabbakh and P. LiKamWa, “Liquid sensor based on optical surface plasmon resonance in a dielectric waveguide,” Proc. SPIE 10639, 100 (2018).
[Crossref]

TalebiFard, S.

Tekin, T.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Thylén, L.

Tifouti, L.

I. Boukerche, S. Djerad, L. Benmansour, L. Tifouti, and K. Saleh, “Degradability of aluminum in acidic and alkaline solutions,” Corros. Sci. 78, 343–352 (2014).
[Crossref]

Tsilipakos, O.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Tsiokos, D.

E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, and A. Miliou, “Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform,” Plasmonics 14(4), 823–838 (2019).
[Crossref]

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

Tu, Z.

van der Heijden, R. W.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Viarbitskaya, S.

Vyrsokinos, K.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Wahlbrink, T.

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

Waldron, P.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Wang, B.

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

Wang, W. S.

Y. S. Chu, W. H. Hsu, C. W. Lin, and W. S. Wang, “Surface plasmon resonance sensors using silica-on-silicon optical waveguides,” Microw. Opt. Technol. Lett. 48(5), 955–957 (2006).
[Crossref]

Weeber, J.

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

Weeber, J. C.

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Weeber, J.-C.

E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, and A. Miliou, “Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform,” Plasmonics 14(4), 823–838 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, D. Ketzaki, D. Tsiokos, B. Chmielak, S. Suckow, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and N. Pleros, “Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si3N4 for Biosensing Applications,” J. Lightwave Technol. 37(21), 5516–5524 (2019).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

Winston Revie, R.

R. Winston Revie, Uhlig ‘ s corrosion handbook the electrochemical society series (John Wiley & Sons, 2011).

Wosinski, L.

Wu, W.

Xu, D. X.

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

Yioultsis, T. V.

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

Zhang, D.

Zhang, F.

Zhang, M.

Zoric, I.

C. Langhammer, M. Schwind, B. Kasemo, and I. Zorić, “Localized surface plasmon resonances in aluminum nanodisks,” Nano Lett. 8(5), 1461–1471 (2008).
[Crossref]

ACS Photonics (1)

E. Chatzianagnostou, A. Manolis, G. Dabos, D. Ketzaki, A. Miliou, N. Pleros, M. Laurent, W. Jean-Claude, D. Alain, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, and D. Tsiokos, “Scaling the Sensitivity of Integrated Plasmo-photonic Interferometric Sensors,” ACS Photonics 6(7), 1664–1673 (2019).
[Crossref]

Appl. Phys. Lett. (2)

B. Wang, M. A. Dündar, R. Nötzel, F. Karouta, S. He, and R. W. van der Heijden, “Photonic crystal slot nanobeam slow light waveguides for refractive index sensing,” Appl. Phys. Lett. 97(15), 151105 (2010).
[Crossref]

A. Di Falco, L. O’Faolain, and T. F. Krauss, “Chemical sensing in slotted photonic crystal heterostructure cavities,” Appl. Phys. Lett. 94(6), 063503 (2009).
[Crossref]

Biomed. Opt. Express (1)

Chem. Rev. (1)

J. Homola, “Surface plasmon resonance sensors for detection of chemical and biological species,” Chem. Rev. 108(2), 462–493 (2008).
[Crossref]

Corros. Sci. (1)

I. Boukerche, S. Djerad, L. Benmansour, L. Tifouti, and K. Saleh, “Degradability of aluminum in acidic and alkaline solutions,” Corros. Sci. 78, 343–352 (2014).
[Crossref]

Electrochim. Acta (1)

M. Lashgari and A. M. Malek, “Electrochimica Acta Fundamental studies of aluminum corrosion in acidic and basic environments: Theoretical predictions and experimental observations,” Electrochim. Acta 55(18), 5253–5257 (2010).
[Crossref]

IEEE J. Quantum Electron. (1)

O. Tsilipakos, A. Pitilakis, T. V. Yioultsis, S. Papaioannou, K. Vyrsokinos, D. Kalavrouziotis, G. Giannoulis, D. Apostolopoulos, H. Avramopoulos, T. Tekin, M. Baus, M. Karl, K. Hassan, J. C. Weeber, L. Markey, A. Dereux, A. Kumar, S. I. Bozhevolnyi, N. Pleros, and E. E. Kriezis, “Interfacing dielectric-loaded plasmonic and silicon photonic waveguides: Theoretical analysis and experimental demonstration,” IEEE J. Quantum Electron. 48(5), 678–687 (2012).
[Crossref]

IEEE Photonics J. (3)

G. Dabos, D. Ketzaki, A. Manolis, L. Markey, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Plasmonic Stripes in Aqueous Environment Co-Integrated with Si3N4 Photonics,” IEEE Photonics J. 10(1), 1–8 (2018).
[Crossref]

G. Dabos, D. Ketzaki, A. Manolis, E. Chatzianagnostou, L. Markey, J. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, D. Tsiokos, and N. Pleros, “Water Cladded Plasmonic Slot Waveguide Vertically Coupled With Si3N4 Photonics,” IEEE Photonics J. 10(3), 1–8 (2018).
[Crossref]

T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-free biosensing with a slot-waveguide-based ring resonator in silicon on insulator,” IEEE Photonics J. 1(3), 197–204 (2009).
[Crossref]

IEEE Photonics Technol. Lett. (1)

A. Densmore, D. X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delâge, B. Lamontagne, J. H. Schmid, and E. Post, “A silicon-on-insulator photonic wire based evanescent field sensor,” IEEE Photonics Technol. Lett. 18(23), 2520–2522 (2006).
[Crossref]

J. Lightwave Technol. (1)

J. Opt. A: Pure Appl. Opt. (1)

B. Seplveda, J. Snchez Del Río, M. Moreno, F. J. Blanco, K. Mayora, C. Domínguez, and L. M. Lechuga, “Optical biosensor microsystems based on the integration of highly sensitive Mach-Zehnder interferometer devices,” J. Opt. A: Pure Appl. Opt. 8(7), S561–S566 (2006).
[Crossref]

Microw. Opt. Technol. Lett. (1)

Y. S. Chu, W. H. Hsu, C. W. Lin, and W. S. Wang, “Surface plasmon resonance sensors using silica-on-silicon optical waveguides,” Microw. Opt. Technol. Lett. 48(5), 955–957 (2006).
[Crossref]

Nano Lett. (2)

C. Langhammer, M. Schwind, B. Kasemo, and I. Zorić, “Localized surface plasmon resonances in aluminum nanodisks,” Nano Lett. 8(5), 1461–1471 (2008).
[Crossref]

C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, “Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: Toward metal-oxide-silicon nanophotonics,” Nano Lett. 10(8), 2922–2926 (2010).
[Crossref]

Opt. Commun. (1)

G. Dabos, A. Manolis, A. L. Giesecke, C. Porschatis, B. Chmielak, T. Wahlbrink, N. Pleros, and D. Tsiokos, “TM grating coupler on low-loss LPCVD based Si3N4 waveguide platform,” Opt. Commun. 405, 35–38 (2017).
[Crossref]

Opt. Express (7)

J.-C. Weeber, J. Arocas, O. Heintz, L. Markey, S. Viarbitskaya, G. Colas-des-Francs, K. Hammani, A. Dereux, C. Hoessbacher, U. Koch, J. Leuthold, K. Rohracher, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, N. Pleros, and D. Tsiokos, “Characterization of CMOS metal based dielectric loaded surface plasmon waveguides at telecom wavelengths,” Opt. Express 25(1), 394 (2017).
[Crossref]

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “High-sensitivity liquid refractive-index sensor based on a Mach-Zehnder interferometer with a double-slot hybrid plasmonic waveguide,” Opt. Express 23(20), 25688 (2015).
[Crossref]

J. Flueckiger, S. Schmidt, V. Donzella, A. Sherwali, D. M. Ratner, L. Chrostowski, and K. C. Cheung, “Sub-wavelength grating for enhanced ring resonator biosensor,” Opt. Express 24(14), 15672 (2016).
[Crossref]

Z. Tu, D. Gao, M. Zhang, and D. Zhang, “High-sensitivity complex refractive index sensing based on Fano resonance in the subwavelength grating waveguide micro-ring resonator,” Opt. Express 25(17), 20911 (2017).
[Crossref]

R. Caroselli, S. Ponce-Alcántara, F. P. Quilez, D. M. Sánchez, L. T. Morán, A. G. Barres, L. Bellieres, H. Bandarenka, K. Girel, V. Bondarenko, and J. García-Rupérez, “Experimental study of the sensitivity of a porous silicon ring resonator sensor using continuous in-flow measurements,” Opt. Express 25(25), 31651 (2017).
[Crossref]

G. Dabos, A. Manolis, S. Papaioannou, D. Tsiokos, L. Markey, J.-C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, B. Chmielak, and N. Pleros, “CMOS plasmonics in WDM data transmission: 200 Gb/s (8 × 25Gb/s) transmission over aluminum plasmonic waveguides,” Opt. Express 26(10), 12469 (2018).
[Crossref]

A. Manolis, E. Chatzianagnostou, G. Dabos, N. Pleros, B. Chmielak, A. L. Giesecke, C. Porschatis, P. J. Cegielski, L. Markey, J.-C. Weeber, A. Dereux, and D. Tsiokos, “Plasmonics co-integrated with silicon nitride photonics for high-sensitivity interferometric biosensing,” Opt. Express 27(12), 17102 (2019).
[Crossref]

Opt. Lett. (2)

Opt. Mater. Express (1)

Photonics (1)

X. Sun, D. Dai, L. Thylén, and L. Wosinski, “Double-Slot Hybrid Plasmonic Ring Resonator Used for Optical Sensors and Modulators,” Photonics 2(4), 1116–1130 (2015).
[Crossref]

Plasmonics (1)

E. Chatzianagnostou, D. Ketzaki, G. Dabos, D. Tsiokos, J.-C. Weeber, and A. Miliou, “Design and Optimization of Open-cladded Plasmonic Waveguides for CMOS Integration on Si3N4 Platform,” Plasmonics 14(4), 823–838 (2019).
[Crossref]

Proc. SPIE (1)

T. Tabbakh and P. LiKamWa, “Liquid sensor based on optical surface plasmon resonance in a dielectric waveguide,” Proc. SPIE 10639, 100 (2018).
[Crossref]

Sci. Rep. (2)

M. S. Kwon, B. Ku, and Y. Kim, “Plasmofluidic disk resonators,” Sci. Rep. 6(1), 23149 (2016).
[Crossref]

G. Dabos, A. Manolis, D. Tsiokos, D. Ketzaki, E. Chatzianagnostou, L. Markey, D. Rusakov, J. C. Weeber, A. Dereux, A. L. Giesecke, C. Porschatis, T. Wahlbrink, B. Chmielak, and N. Pleros, “Aluminum plasmonic waveguides co-integrated with Si3N4 photonics using CMOS processes,” Sci. Rep. 8(1), 13380 (2018).
[Crossref]

Sens. Actuators, B (2)

E. F. Schipper, A. M. Brugman, C. Dominguez, L. M. Lechuga, R. P. H. Kooyman, and J. Greve, “The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology,” Sens. Actuators, B 40, 147–153 (1997).
[Crossref]

R. Slavík and J. Homola, “Ultrahigh resolution long range surface plasmon-based sensor,” Sens. Actuators, B 123(1), 10–12 (2007).
[Crossref]

Other (4)

http://www.lumerical.com/tcad-products/interconnect/ . Lumerical Solutions.

http://www.lumerical.com/tcad-products/mode/ . Lumerical Solutions.

http://www.lumerical.com/tcad-products/fdtd/ . Lumerical Solutions.

R. Winston Revie, Uhlig ‘ s corrosion handbook the electrochemical society series (John Wiley & Sons, 2011).

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1.
Fig. 1. (a) Top view representation of the plasmo-photonic MZI sensor. (b) Sideview impression of the Si3N4-to-Al interface. (c), (d) Waveguide cross section geometries on the sensing and reference arms, presenting also the respective numerically simulated electric field distributions in the bottom of the two figures. (e) Simulated transfer function of the VOA at 1550 nm with respect to the applied thermal power. (f) Assembled sensor chip on the evaluation board.
Fig. 2.
Fig. 2. (a) Top-view image of the fabricated sensor chip, hosting multiple sensors, with the micro-fluidic gasket on top. (b) Cross section SEM image of the Si3N4 photonic waveguide. (c) Top-view SEM image of the Al stripe lying within a cavity formed between the Si3N4 tapered waveguides. (d) Top-view SEM image of the fabricated MMI coupler. (e), (f) Top-view SEM images of the Ti-based heaters lying on top and symmetrically of the photonic waveguide.
Fig. 3.
Fig. 3. (a), (d) Measured sensors’ spectra for various RIs. (b), (e) Simulated transmission wavelength response of the sensor under test. (c), (f) Resonance shift with respect to the refractive index change of the tested fluids and least-squares linear fits for both experimental and simulation data.
Fig. 4.
Fig. 4. Sensitivity as a function of the sensor Free Spectral Range (FSR).

Tables (1)

Tables Icon

Table 1. Experimental results for state-of-the-art plasmo-photonic integrated RI sensors employing silicon photonics and plasmonic sensing transducers.a

Metrics