Abstract

We developed a technique that enables replacement of a metallic waveguide cladding with a low-index (n≈1.4) material – CaF2 or BaF2. It is transparent from the mid-IR up to the visible range: elevated confinement is preserved while introducing an optical entryway through the substrate. Replacing the metallic backplane also allows double-side patterning of the active region. Using this approach, we demonstrate strong light-matter coupling between an intersubband transition (λ∼10 μm) and a dispersive resonator at 300 K and at 78 K. Finally, we evaluate this approach’s potential as a platform for waveguiding in the mid-IR spectral range, with numerical simulations that reveal losses in the 1-10 cm−1 range.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2018 (6)

2017 (4)

A. I. Yakimov, V. V. Kirienko, A. A. Bloshkin, V. A. Armbrister, A. V. Dvurechenskii, and J. M. Hartmann, “Photovoltaic Ge/SiGe quantum dot mid-infrared photodetector enhanced by surface plasmons,” Opt. Express 25(21), 25602–25611 (2017).
[Crossref] [PubMed]

B. Paulillo, S. Pirotta, H. Nong, P. Crozat, S. Guilet, G. Xu, S. Dhillon, L. H. Li, A. G. Davies, E. H. Linfield, and R. Colombelli, “Ultrafast terahertz detectors based on three-dimensional meta-atoms,” Optica 4(12), 1451–1456 (2017).
[Crossref]

S. Jung, J. Kirch, J. H. Kim, L. J. Mawst, D. Botez, and M. A. Belkin, “Quantum cascade lasers transfer-printed on silicon-on-sapphire,” Appl. Phys. Lett. 111(21), 211102 (2017).
[Crossref]

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

2016 (6)

J. Haas and B. Mizaikoff, “Advances in Mid-Infrared Spectroscopy for Chemical Analysis,” Annu. Rev. Anal. Chem. (Palo Alto, Calif.) 9(1), 45–68 (2016).
[Crossref] [PubMed]

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

M. Sieger and B. Mizaikoff, “Toward On-Chip Mid-Infrared Sensors,” Anal. Chem. 88(11), 5562–5573 (2016).
[Crossref] [PubMed]

A. Spott, J. Peters, M. L. Davenport, E. J. Stanton, C. D. Merritt, W. W. Bewley, I. Vurgaftman, C. S. Kim, J. R. Meyer, J. Kirch, L. J. Mawst, D. Botez, and J. E. Bowers, “Quantum cascade laser on silicon,” Optica 3(5), 545–551 (2016).
[Crossref]

J. Kang, M. Takenaka, and S. Takagi, “Novel Ge waveguide platform on Ge-on-insulator wafer for mid-infrared photonic integrated circuits,” Opt. Express 24(11), 11855–11864 (2016).
[Crossref] [PubMed]

D. Bachmann, M. Rösch, M. J. Süess, M. Beck, K. Unterrainer, J. Darmo, J. Faist, and G. Scalari, “Short pulse generation and mode control of broadband terahertz quantum cascade lasers,” Optica 3(10), 1087–1094 (2016).
[Crossref]

2015 (5)

Q. Clément, J. M. Melkonian, J. B. Dherbecourt, M. Raybaut, A. Grisard, E. Lallier, B. Gérard, B. Faure, G. Souhaité, and A. Godard, “Longwave infrared, single-frequency, tunable, pulsed optical parametric oscillator based on orientation-patterned GaAs for gas sensing,” Opt. Lett. 40(12), 2676–2679 (2015).
[Crossref] [PubMed]

R. La Rocca, G. C. Messina, M. Dipalo, V. Shalabaeva, and F. De Angelis, “Out-of-Plane Plasmonic Antennas for Raman Analysis in Living Cells,” Small 11(36), 4632–4637 (2015).
[Crossref] [PubMed]

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

Y. Sang, H. Liu, and A. Umar, “Photocatalysis from UV/Vis to Near-Infrared Light: Towards Full Solar-Light Spectrum Activity,” ChemCatChem 7(4), 559–573 (2015).
[Crossref]

Y. Zhong, S. D. Malagari, T. Hamilton, and D. M. Wasserman, “Review of mid-infrared plasmonic materials,” J. Nanophotonics 9(1), 93791 (2015).
[Crossref]

2014 (5)

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

Y. Chen, H. Lin, J. Hu, and M. Li, “Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing,” ACS Nano 8(7), 6955–6961 (2014).
[Crossref] [PubMed]

2013 (2)

J.-M. Manceau, S. Zanotto, I. Sagnes, G. Beaudoin, and R. Colombelli, “Optical critical coupling into highly confining metal-insulator-metal resonators,” Appl. Phys. Lett. 103(9), 091110 (2013).
[Crossref]

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103 (2013).
[Crossref]

2012 (2)

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

A. Grisard, E. Lallier, and B. Gérard, “Quasi-phase-matched gallium arsenide for versatile mid-infrared frequency conversion,” Opt. Mater. Express 2(8), 1020–1025 (2012).
[Crossref]

2010 (1)

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

2009 (1)

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

2007 (1)

B. S. Williams, “Terahertz quantum-cascade lasers,” Nat. Photonics 1(9), 517–525 (2007).
[Crossref]

2005 (1)

C. Ciuti, G. Bastard, and I. Carusotto, “Quantum vacuum properties of the intersubband cavity polariton field,” Phys. Rev. B Condens. Matter Mater. Phys. 72(11), 115303 (2005).
[Crossref]

2004 (1)

2003 (1)

B. S. Williams, S. Kumar, H. Callebaut, Q. Hu, and J. L. Reno, “Terahertz quantum-cascade laser at λ≈100 μm using metal waveguide for mode confinement,” Appl. Phys. Lett. 83(11), 2124–2126 (2003).
[Crossref]

2001 (1)

C. Gmachl, F. Capasso, D. L. Sivco, and A. Y. Cho, “Recent progress in quantum cascade lasers and applications,” Rep. Prog. Phys. 64(11), 1533–1601 (2001).
[Crossref]

1994 (1)

Y. Wu, J. T. Mayer, E. Garfunkel, and T. E. Madey, “X-ray Photoelectron Spectroscopy Study of Water Adsorption on BaF2(111) and CaF2(111) Surfaces,” Langmuir 10(5), 1482–1487 (1994).
[Crossref]

Anappara, A. A.

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Armbrister, V. A.

Aryaee Panah, M. E.

E. Shkondin, T. Repän, M. E. Aryaee Panah, A. V. Lavrinenko, and O. Takayama, “High Aspect Ratio Plasmonic Nanotrench Structures with Large Active Surface Area for Label-Free Mid-Infrared Molecular Absorption Sensing,” ACS Applied Nano Materials 1(3), 1212–1218 (2018).
[Crossref]

Askenazi, B.

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

Bachmann, D.

Bahriz, M.

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Baldacci, L.

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

Ballabio, A.

Baranov, A. N.

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Barbieri, S.

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

Barison, S.

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

Bastard, G.

C. Ciuti, G. Bastard, and I. Carusotto, “Quantum vacuum properties of the intersubband cavity polariton field,” Phys. Rev. B Condens. Matter Mater. Phys. 72(11), 115303 (2005).
[Crossref]

Beaudoin, G.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

J.-M. Manceau, S. Zanotto, I. Sagnes, G. Beaudoin, and R. Colombelli, “Optical critical coupling into highly confining metal-insulator-metal resonators,” Appl. Phys. Lett. 103(9), 091110 (2013).
[Crossref]

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Beck, M.

Becouarn, L.

Belkin, M. A.

S. Jung, J. Kirch, J. H. Kim, L. J. Mawst, D. Botez, and M. A. Belkin, “Quantum cascade lasers transfer-printed on silicon-on-sapphire,” Appl. Phys. Lett. 111(21), 211102 (2017).
[Crossref]

Bewley, W. W.

Bianco, F.

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

Biasiol, G.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Bloshkin, A. A.

Botez, D.

S. Jung, J. Kirch, J. H. Kim, L. J. Mawst, D. Botez, and M. A. Belkin, “Quantum cascade lasers transfer-printed on silicon-on-sapphire,” Appl. Phys. Lett. 111(21), 211102 (2017).
[Crossref]

A. Spott, J. Peters, M. L. Davenport, E. J. Stanton, C. D. Merritt, W. W. Bewley, I. Vurgaftman, C. S. Kim, J. R. Meyer, J. Kirch, L. J. Mawst, D. Botez, and J. E. Bowers, “Quantum cascade laser on silicon,” Optica 3(5), 545–551 (2016).
[Crossref]

Bousseksou, A.

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Bouville, D.

Bowers, J. E.

Bozzola, A.

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

Calandrini, E.

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

Callebaut, H.

B. S. Williams, S. Kumar, H. Callebaut, Q. Hu, and J. L. Reno, “Terahertz quantum-cascade laser at λ≈100 μm using metal waveguide for mode confinement,” Appl. Phys. Lett. 83(11), 2124–2126 (2003).
[Crossref]

Capasso, F.

C. Gmachl, F. Capasso, D. L. Sivco, and A. Y. Cho, “Recent progress in quantum cascade lasers and applications,” Rep. Prog. Phys. 64(11), 1533–1601 (2001).
[Crossref]

Carusotto, I.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

C. Ciuti, G. Bastard, and I. Carusotto, “Quantum vacuum properties of the intersubband cavity polariton field,” Phys. Rev. B Condens. Matter Mater. Phys. 72(11), 115303 (2005).
[Crossref]

Cattarin, S.

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

Chakravarty, S.

Chassagneux, Y.

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

Chastanet, D.

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Chen, C.

Chen, R. T.

Chen, Y.

Y. Chen, H. Lin, J. Hu, and M. Li, “Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing,” ACS Nano 8(7), 6955–6961 (2014).
[Crossref] [PubMed]

Cho, A. Y.

C. Gmachl, F. Capasso, D. L. Sivco, and A. Y. Cho, “Recent progress in quantum cascade lasers and applications,” Rep. Prog. Phys. 64(11), 1533–1601 (2001).
[Crossref]

Choi, W. J.

Chung, C.-J.

Ciuti, C.

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

C. Ciuti, G. Bastard, and I. Carusotto, “Quantum vacuum properties of the intersubband cavity polariton field,” Phys. Rev. B Condens. Matter Mater. Phys. 72(11), 115303 (2005).
[Crossref]

Clément, Q.

Colombelli, R.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

B. Paulillo, S. Pirotta, H. Nong, P. Crozat, S. Guilet, G. Xu, S. Dhillon, L. H. Li, A. G. Davies, E. H. Linfield, and R. Colombelli, “Ultrafast terahertz detectors based on three-dimensional meta-atoms,” Optica 4(12), 1451–1456 (2017).
[Crossref]

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

J.-M. Manceau, S. Zanotto, I. Sagnes, G. Beaudoin, and R. Colombelli, “Optical critical coupling into highly confining metal-insulator-metal resonators,” Appl. Phys. Lett. 103(9), 091110 (2013).
[Crossref]

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

Crozat, P.

Darmo, J.

Davenport, M. L.

Davies, A. G.

B. Paulillo, S. Pirotta, H. Nong, P. Crozat, S. Guilet, G. Xu, S. Dhillon, L. H. Li, A. G. Davies, E. H. Linfield, and R. Colombelli, “Ultrafast terahertz detectors based on three-dimensional meta-atoms,” Optica 4(12), 1451–1456 (2017).
[Crossref]

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

De Angelis, F.

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

R. La Rocca, G. C. Messina, M. Dipalo, V. Shalabaeva, and F. De Angelis, “Out-of-Plane Plasmonic Antennas for Raman Analysis in Living Cells,” Small 11(36), 4632–4637 (2015).
[Crossref] [PubMed]

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

De Liberato, S.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Delteil, A.

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Dherbecourt, J. B.

Dhillon, S.

Dipalo, M.

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

R. La Rocca, G. C. Messina, M. Dipalo, V. Shalabaeva, and F. De Angelis, “Out-of-Plane Plasmonic Antennas for Raman Analysis in Living Cells,” Small 11(36), 4632–4637 (2015).
[Crossref] [PubMed]

Dvurechenskii, A. V.

Faist, J.

Faure, B.

Fejer, M. M.

Ferrara, L.

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

Feuillet Palma, C.

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Frigerio, J.

Garfunkel, E.

Y. Wu, J. T. Mayer, E. Garfunkel, and T. E. Madey, “X-ray Photoelectron Spectroscopy Study of Water Adsorption on BaF2(111) and CaF2(111) Surfaces,” Langmuir 10(5), 1482–1487 (1994).
[Crossref]

Garoli, D.

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

Gerard, B.

Gérard, B.

Giles Davies, A.

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

Gmachl, C.

C. Gmachl, F. Capasso, D. L. Sivco, and A. Y. Cho, “Recent progress in quantum cascade lasers and applications,” Rep. Prog. Phys. 64(11), 1533–1601 (2001).
[Crossref]

Godard, A.

Grisard, A.

Guilet, S.

Günter, G.

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Haas, J.

J. Haas and B. Mizaikoff, “Advances in Mid-Infrared Spectroscopy for Chemical Analysis,” Annu. Rev. Anal. Chem. (Palo Alto, Calif.) 9(1), 45–68 (2016).
[Crossref] [PubMed]

Halioua, Y.

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

Hamilton, T.

Y. Zhong, S. D. Malagari, T. Hamilton, and D. M. Wasserman, “Review of mid-infrared plasmonic materials,” J. Nanophotonics 9(1), 93791 (2015).
[Crossref]

Han, J.-H.

Harris, J. S.

Hartmann, J. M.

Hees, J.

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Hu, J.

Y. Chen, H. Lin, J. Hu, and M. Li, “Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing,” ACS Nano 8(7), 6955–6961 (2014).
[Crossref] [PubMed]

Hu, Q.

B. S. Williams, S. Kumar, H. Callebaut, Q. Hu, and J. L. Reno, “Terahertz quantum-cascade laser at λ≈100 μm using metal waveguide for mode confinement,” Appl. Phys. Lett. 83(11), 2124–2126 (2003).
[Crossref]

Huber, R.

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Isac, N.

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

Isella, G.

Julien, F. H.

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Jung, S.

S. Jung, J. Kirch, J. H. Kim, L. J. Mawst, D. Botez, and M. A. Belkin, “Quantum cascade lasers transfer-printed on silicon-on-sapphire,” Appl. Phys. Lett. 111(21), 211102 (2017).
[Crossref]

Kang, J.

Khanna, S. P.

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

Kim, C. S.

Kim, H.

Kim, J. H.

S. Jung, J. Kirch, J. H. Kim, L. J. Mawst, D. Botez, and M. A. Belkin, “Quantum cascade lasers transfer-printed on silicon-on-sapphire,” Appl. Phys. Lett. 111(21), 211102 (2017).
[Crossref]

Kim, S.

Kirch, J.

S. Jung, J. Kirch, J. H. Kim, L. J. Mawst, D. Botez, and M. A. Belkin, “Quantum cascade lasers transfer-printed on silicon-on-sapphire,” Appl. Phys. Lett. 111(21), 211102 (2017).
[Crossref]

A. Spott, J. Peters, M. L. Davenport, E. J. Stanton, C. D. Merritt, W. W. Bewley, I. Vurgaftman, C. S. Kim, J. R. Meyer, J. Kirch, L. J. Mawst, D. Botez, and J. E. Bowers, “Quantum cascade laser on silicon,” Optica 3(5), 545–551 (2016).
[Crossref]

Kirienko, V. V.

Kumar, S.

B. S. Williams, S. Kumar, H. Callebaut, Q. Hu, and J. L. Reno, “Terahertz quantum-cascade laser at λ≈100 μm using metal waveguide for mode confinement,” Appl. Phys. Lett. 83(11), 2124–2126 (2003).
[Crossref]

Kuo, P. S.

La Rocca, R.

R. La Rocca, G. C. Messina, M. Dipalo, V. Shalabaeva, and F. De Angelis, “Out-of-Plane Plasmonic Antennas for Raman Analysis in Living Cells,” Small 11(36), 4632–4637 (2015).
[Crossref] [PubMed]

Lallier, E.

Laurent, T.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

Lavrinenko, A. V.

E. Shkondin, T. Repän, M. E. Aryaee Panah, A. V. Lavrinenko, and O. Takayama, “High Aspect Ratio Plasmonic Nanotrench Structures with Large Active Surface Area for Label-Free Mid-Infrared Molecular Absorption Sensing,” ACS Applied Nano Materials 1(3), 1212–1218 (2018).
[Crossref]

Law, S.

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103 (2013).
[Crossref]

Le Roux, X.

Leitenstorfer, A.

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Levi, O.

Li, L.

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

Li, L. H.

Li, M.

Lin, H.

Y. Chen, H. Lin, J. Hu, and M. Li, “Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing,” ACS Nano 8(7), 6955–6961 (2014).
[Crossref] [PubMed]

Linfield, E. H.

B. Paulillo, S. Pirotta, H. Nong, P. Crozat, S. Guilet, G. Xu, S. Dhillon, L. H. Li, A. G. Davies, E. H. Linfield, and R. Colombelli, “Ultrafast terahertz detectors based on three-dimensional meta-atoms,” Optica 4(12), 1451–1456 (2017).
[Crossref]

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

Liu, H.

Y. Sang, H. Liu, and A. Umar, “Photocatalysis from UV/Vis to Near-Infrared Light: Towards Full Solar-Light Spectrum Activity,” ChemCatChem 7(4), 559–573 (2015).
[Crossref]

Liu, Q.

Lollia, G.

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Madey, T. E.

Y. Wu, J. T. Mayer, E. Garfunkel, and T. E. Madey, “X-ray Photoelectron Spectroscopy Study of Water Adsorption on BaF2(111) and CaF2(111) Surfaces,” Langmuir 10(5), 1482–1487 (1994).
[Crossref]

Maineult, W.

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

Malagari, S. D.

Y. Zhong, S. D. Malagari, T. Hamilton, and D. M. Wasserman, “Review of mid-infrared plasmonic materials,” J. Nanophotonics 9(1), 93791 (2015).
[Crossref]

Malerba, M.

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

Manceau, J.-M.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

J.-M. Manceau, S. Zanotto, I. Sagnes, G. Beaudoin, and R. Colombelli, “Optical critical coupling into highly confining metal-insulator-metal resonators,” Appl. Phys. Lett. 103(9), 091110 (2013).
[Crossref]

Marris-Morini, D.

Mawst, L. J.

S. Jung, J. Kirch, J. H. Kim, L. J. Mawst, D. Botez, and M. A. Belkin, “Quantum cascade lasers transfer-printed on silicon-on-sapphire,” Appl. Phys. Lett. 111(21), 211102 (2017).
[Crossref]

A. Spott, J. Peters, M. L. Davenport, E. J. Stanton, C. D. Merritt, W. W. Bewley, I. Vurgaftman, C. S. Kim, J. R. Meyer, J. Kirch, L. J. Mawst, D. Botez, and J. E. Bowers, “Quantum cascade laser on silicon,” Optica 3(5), 545–551 (2016).
[Crossref]

Mayer, J. T.

Y. Wu, J. T. Mayer, E. Garfunkel, and T. E. Madey, “X-ray Photoelectron Spectroscopy Study of Water Adsorption on BaF2(111) and CaF2(111) Surfaces,” Langmuir 10(5), 1482–1487 (1994).
[Crossref]

Melkonian, J. M.

Merritt, C. D.

Messina, G. C.

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

R. La Rocca, G. C. Messina, M. Dipalo, V. Shalabaeva, and F. De Angelis, “Out-of-Plane Plasmonic Antennas for Raman Analysis in Living Cells,” Small 11(36), 4632–4637 (2015).
[Crossref] [PubMed]

Meyer, J. R.

Mezzapesa, F. P.

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

Miele, E.

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

Mizaikoff, B.

J. Haas and B. Mizaikoff, “Advances in Mid-Infrared Spectroscopy for Chemical Analysis,” Annu. Rev. Anal. Chem. (Palo Alto, Calif.) 9(1), 45–68 (2016).
[Crossref] [PubMed]

M. Sieger and B. Mizaikoff, “Toward On-Chip Mid-Infrared Sensors,” Anal. Chem. 88(11), 5562–5573 (2016).
[Crossref] [PubMed]

Mohr, D. A.

Nga Chen, Y.

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

Nong, H.

Oh, S.-H.

Ongarello, T.

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

Ortolani, M.

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

Paulillo, B.

B. Paulillo, S. Pirotta, H. Nong, P. Crozat, S. Guilet, G. Xu, S. Dhillon, L. H. Li, A. G. Davies, E. H. Linfield, and R. Colombelli, “Ultrafast terahertz detectors based on three-dimensional meta-atoms,” Optica 4(12), 1451–1456 (2017).
[Crossref]

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

Peters, J.

Pinguet, T. J.

Pirotta, S.

Podolskiy, V.

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103 (2013).
[Crossref]

Ramirez, J. M.

Raybaut, M.

Renaudat St-Jean, M.

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Reno, J. L.

B. S. Williams, S. Kumar, H. Callebaut, Q. Hu, and J. L. Reno, “Terahertz quantum-cascade laser at λ≈100 μm using metal waveguide for mode confinement,” Appl. Phys. Lett. 83(11), 2124–2126 (2003).
[Crossref]

Repän, T.

E. Shkondin, T. Repän, M. E. Aryaee Panah, A. V. Lavrinenko, and O. Takayama, “High Aspect Ratio Plasmonic Nanotrench Structures with Large Active Surface Area for Label-Free Mid-Infrared Molecular Absorption Sensing,” ACS Applied Nano Materials 1(3), 1212–1218 (2018).
[Crossref]

Rösch, M.

Sagnes, I.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

J.-M. Manceau, S. Zanotto, I. Sagnes, G. Beaudoin, and R. Colombelli, “Optical critical coupling into highly confining metal-insulator-metal resonators,” Appl. Phys. Lett. 103(9), 091110 (2013).
[Crossref]

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Sang, Y.

Y. Sang, H. Liu, and A. Umar, “Photocatalysis from UV/Vis to Near-Infrared Light: Towards Full Solar-Light Spectrum Activity,” ChemCatChem 7(4), 559–573 (2015).
[Crossref]

Scalari, G.

Sell, A.

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Shalabaeva, V.

R. La Rocca, G. C. Messina, M. Dipalo, V. Shalabaeva, and F. De Angelis, “Out-of-Plane Plasmonic Antennas for Raman Analysis in Living Cells,” Small 11(36), 4632–4637 (2015).
[Crossref] [PubMed]

Shim, J.-P.

Shkondin, E.

E. Shkondin, T. Repän, M. E. Aryaee Panah, A. V. Lavrinenko, and O. Takayama, “High Aspect Ratio Plasmonic Nanotrench Structures with Large Active Surface Area for Label-Free Mid-Infrared Molecular Absorption Sensing,” ACS Applied Nano Materials 1(3), 1212–1218 (2018).
[Crossref]

Sieger, M.

M. Sieger and B. Mizaikoff, “Toward On-Chip Mid-Infrared Sensors,” Anal. Chem. 88(11), 5562–5573 (2016).
[Crossref] [PubMed]

Sirtori, C.

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Sivco, D. L.

C. Gmachl, F. Capasso, D. L. Sivco, and A. Y. Cho, “Recent progress in quantum cascade lasers and applications,” Rep. Prog. Phys. 64(11), 1533–1601 (2001).
[Crossref]

Sorba, L.

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Souhaité, G.

Spott, A.

Stanton, E. J.

Süess, M. J.

Takagi, S.

Takayama, O.

E. Shkondin, T. Repän, M. E. Aryaee Panah, A. V. Lavrinenko, and O. Takayama, “High Aspect Ratio Plasmonic Nanotrench Structures with Large Active Surface Area for Label-Free Mid-Infrared Molecular Absorption Sensing,” ACS Applied Nano Materials 1(3), 1212–1218 (2018).
[Crossref]

Takenaka, M.

Teissier, R.

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Todorov, Y.

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Toma, A.

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

Tran, N.-L.

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

Tredicucci, A.

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Umar, A.

Y. Sang, H. Liu, and A. Umar, “Photocatalysis from UV/Vis to Near-Infrared Light: Towards Full Solar-Light Spectrum Activity,” ChemCatChem 7(4), 559–573 (2015).
[Crossref]

Unterrainer, K.

Vakarin, V.

Vasanelli, A.

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Vitiello, M. S.

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

Vivien, L.

Vodopyanov, K. L.

Vurgaftman, I.

Wasserman, D.

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103 (2013).
[Crossref]

Wasserman, D. M.

Y. Zhong, S. D. Malagari, T. Hamilton, and D. M. Wasserman, “Review of mid-infrared plasmonic materials,” J. Nanophotonics 9(1), 93791 (2015).
[Crossref]

Williams, B. S.

B. S. Williams, “Terahertz quantum-cascade lasers,” Nat. Photonics 1(9), 517–525 (2007).
[Crossref]

B. S. Williams, S. Kumar, H. Callebaut, Q. Hu, and J. L. Reno, “Terahertz quantum-cascade laser at λ≈100 μm using metal waveguide for mode confinement,” Appl. Phys. Lett. 83(11), 2124–2126 (2003).
[Crossref]

Wu, Y.

Y. Wu, J. T. Mayer, E. Garfunkel, and T. E. Madey, “X-ray Photoelectron Spectroscopy Study of Water Adsorption on BaF2(111) and CaF2(111) Surfaces,” Langmuir 10(5), 1482–1487 (1994).
[Crossref]

Xu, G.

B. Paulillo, S. Pirotta, H. Nong, P. Crozat, S. Guilet, G. Xu, S. Dhillon, L. H. Li, A. G. Davies, E. H. Linfield, and R. Colombelli, “Ultrafast terahertz detectors based on three-dimensional meta-atoms,” Optica 4(12), 1451–1456 (2017).
[Crossref]

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

Xu, X.

Yakimov, A. I.

Yoo, D.

Zanotto, S.

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

J.-M. Manceau, S. Zanotto, I. Sagnes, G. Beaudoin, and R. Colombelli, “Optical critical coupling into highly confining metal-insulator-metal resonators,” Appl. Phys. Lett. 103(9), 091110 (2013).
[Crossref]

Zhong, Y.

Y. Zhong, S. D. Malagari, T. Hamilton, and D. M. Wasserman, “Review of mid-infrared plasmonic materials,” J. Nanophotonics 9(1), 93791 (2015).
[Crossref]

Zilio, P.

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

Zou, Y.

ACS Applied Nano Materials (1)

E. Shkondin, T. Repän, M. E. Aryaee Panah, A. V. Lavrinenko, and O. Takayama, “High Aspect Ratio Plasmonic Nanotrench Structures with Large Active Surface Area for Label-Free Mid-Infrared Molecular Absorption Sensing,” ACS Applied Nano Materials 1(3), 1212–1218 (2018).
[Crossref]

ACS Nano (1)

Y. Chen, H. Lin, J. Hu, and M. Li, “Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing,” ACS Nano 8(7), 6955–6961 (2014).
[Crossref] [PubMed]

Anal. Chem. (1)

M. Sieger and B. Mizaikoff, “Toward On-Chip Mid-Infrared Sensors,” Anal. Chem. 88(11), 5562–5573 (2016).
[Crossref] [PubMed]

Annu. Rev. Anal. Chem. (Palo Alto, Calif.) (1)

J. Haas and B. Mizaikoff, “Advances in Mid-Infrared Spectroscopy for Chemical Analysis,” Annu. Rev. Anal. Chem. (Palo Alto, Calif.) 9(1), 45–68 (2016).
[Crossref] [PubMed]

Appl. Phys. Lett. (9)

D. Chastanet, A. Bousseksou, G. Lollia, M. Bahriz, F. H. Julien, A. N. Baranov, R. Teissier, and R. Colombelli, “High temperature, single mode, long infrared (λ = 17.8 μm) InAs-based quantum cascade lasers,” Appl. Phys. Lett. 105(11), 111118 (2014).
[Crossref]

Y. Chassagneux, R. Colombelli, W. Maineult, S. Barbieri, S. P. Khanna, E. H. Linfield, and A. G. Davies, “Graded photonic crystal terahertz quantum cascade lasers,” Appl. Phys. Lett. 96(3), 031104 (2010).
[Crossref]

J.-M. Manceau, S. Zanotto, I. Sagnes, G. Beaudoin, and R. Colombelli, “Optical critical coupling into highly confining metal-insulator-metal resonators,” Appl. Phys. Lett. 103(9), 091110 (2013).
[Crossref]

S. Jung, J. Kirch, J. H. Kim, L. J. Mawst, D. Botez, and M. A. Belkin, “Quantum cascade lasers transfer-printed on silicon-on-sapphire,” Appl. Phys. Lett. 111(21), 211102 (2017).
[Crossref]

M. Malerba, T. Ongarello, B. Paulillo, J.-M. Manceau, G. Beaudoin, I. Sagnes, F. De Angelis, and R. Colombelli, “Towards strong light-matter coupling at the single-resonator level with sub-wavelength mid-infrared nano-antennas,” Appl. Phys. Lett. 109(2), 021111 (2016).
[Crossref]

G. Xu, L. Li, N. Isac, Y. Halioua, A. Giles Davies, E. H. Linfield, and R. Colombelli, “Surface-emitting terahertz quantum cascade lasers with continuous-wave power in the tens of milliwatt range,” Appl. Phys. Lett. 104(9), 091112 (2014).
[Crossref]

Y. Nga Chen, Y. Todorov, B. Askenazi, A. Vasanelli, G. Biasiol, R. Colombelli, and C. Sirtori, “Antenna-coupled microcavities for enhanced infrared photo-detection,” Appl. Phys. Lett. 104(3), 031113 (2014).
[Crossref]

J.-M. Manceau, N.-L. Tran, G. Biasiol, T. Laurent, I. Sagnes, G. Beaudoin, S. De Liberato, I. Carusotto, and R. Colombelli, “Resonant intersubband polariton-LO phonon scattering in an optically pumped polaritonic device,” Appl. Phys. Lett. 112(19), 191106 (2018).
[Crossref]

B. S. Williams, S. Kumar, H. Callebaut, Q. Hu, and J. L. Reno, “Terahertz quantum-cascade laser at λ≈100 μm using metal waveguide for mode confinement,” Appl. Phys. Lett. 83(11), 2124–2126 (2003).
[Crossref]

Beilstein J. Nanotechnol. (1)

G. C. Messina, M. Malerba, P. Zilio, E. Miele, M. Dipalo, L. Ferrara, and F. De Angelis, “Hollow plasmonic antennas for broadband SERS spectroscopy,” Beilstein J. Nanotechnol. 6, 492–498 (2015).
[Crossref] [PubMed]

ChemCatChem (1)

Y. Sang, H. Liu, and A. Umar, “Photocatalysis from UV/Vis to Near-Infrared Light: Towards Full Solar-Light Spectrum Activity,” ChemCatChem 7(4), 559–573 (2015).
[Crossref]

J. Nanophotonics (1)

Y. Zhong, S. D. Malagari, T. Hamilton, and D. M. Wasserman, “Review of mid-infrared plasmonic materials,” J. Nanophotonics 9(1), 93791 (2015).
[Crossref]

Langmuir (1)

Y. Wu, J. T. Mayer, E. Garfunkel, and T. E. Madey, “X-ray Photoelectron Spectroscopy Study of Water Adsorption on BaF2(111) and CaF2(111) Surfaces,” Langmuir 10(5), 1482–1487 (1994).
[Crossref]

Nanophotonics (1)

S. Law, V. Podolskiy, and D. Wasserman, “Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics,” Nanophotonics 2(2), 103 (2013).
[Crossref]

Nanoscale (1)

D. Garoli, E. Calandrini, A. Bozzola, M. Ortolani, S. Cattarin, S. Barison, A. Toma, and F. De Angelis, “Boosting infrared energy transfer in 3D nanoporous gold antennas,” Nanoscale 9(2), 915–922 (2017).
[Crossref] [PubMed]

Nat. Photonics (1)

B. S. Williams, “Terahertz quantum-cascade lasers,” Nat. Photonics 1(9), 517–525 (2007).
[Crossref]

Nat. Phys. (1)

S. Zanotto, F. P. Mezzapesa, F. Bianco, G. Biasiol, L. Baldacci, M. S. Vitiello, L. Sorba, R. Colombelli, and A. Tredicucci, “Perfect energy-feeding into strongly coupled systems and interferometric control of polariton absorption,” Nat. Phys. 10(11), 830–834 (2014).
[Crossref]

Nature (1)

G. Günter, A. A. Anappara, J. Hees, A. Sell, G. Biasiol, L. Sorba, S. De Liberato, C. Ciuti, A. Tredicucci, A. Leitenstorfer, and R. Huber, “Sub-cycle switch-on of ultrastrong light-matter interaction,” Nature 458(7235), 178–181 (2009).
[Crossref] [PubMed]

Opt. Express (4)

Opt. Lett. (2)

Opt. Mater. Express (2)

Optica (3)

Photon. Res. (1)

Phys. Rev. B Condens. Matter Mater. Phys. (1)

C. Ciuti, G. Bastard, and I. Carusotto, “Quantum vacuum properties of the intersubband cavity polariton field,” Phys. Rev. B Condens. Matter Mater. Phys. 72(11), 115303 (2005).
[Crossref]

Phys. Rev. Lett. (1)

A. Delteil, A. Vasanelli, Y. Todorov, C. Feuillet Palma, M. Renaudat St-Jean, G. Beaudoin, I. Sagnes, and C. Sirtori, “Charge-induced coherence between intersubband plasmons in a quantum structure,” Phys. Rev. Lett. 109(24), 246808 (2012).
[Crossref] [PubMed]

Rep. Prog. Phys. (1)

C. Gmachl, F. Capasso, D. L. Sivco, and A. Y. Cho, “Recent progress in quantum cascade lasers and applications,” Rep. Prog. Phys. 64(11), 1533–1601 (2001).
[Crossref]

Small (1)

R. La Rocca, G. C. Messina, M. Dipalo, V. Shalabaeva, and F. De Angelis, “Out-of-Plane Plasmonic Antennas for Raman Analysis in Living Cells,” Small 11(36), 4632–4637 (2015).
[Crossref] [PubMed]

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M. Helm, “The basic physics of intersubband transitions,” in Semiconductors and semimetals (Elsevier, 1999), pp. 1–99.

H. A. Haus, Waves and fields in optoelectronics (Prentice-Hall, 1984).

D. Marris-Morini, V. Vakarin, M. Ramirez Joan, Q. Liu, A. Ballabio, J. Frigerio, M. Montesinos, C. Alonso-Ramos, X. Le Roux, S. Serna, D. Benedikovic, D. Chrastina, L. Vivien, and G. Isella, “Germanium-based integrated photonics from near- to mid-infrared applications,” in Nanophotonics, (2018), p. 1781.

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Figures (5)

Fig. 1
Fig. 1 Fabrication steps (details available in the main text). (a) traditional approach involving thermocompressive waferbonding and substrate removal, yielding a double-metal optical cavity; (b) direct transfer of epitaxial layer via temporary encapsulation of the patterned top side, substrate removal, and deposition in liquid environment on the new transparent host substrate (bonding via Van der Waals interactions); (c) bonding with a commercial off-stoichiometry thiol-ene polymer (ostemer) and subsequent wafer removal, allowing micropatterning on both sides of the active region.
Fig. 2
Fig. 2 Angle-resolved reflectivity experiments and simulations from bare cavities. Top panel: numerically calculated (a) and experimentally measured (b) dispersion of a 1.5 μm-thick undoped GaAs active region directly transferred on CaF2 (grating up, on the air/GaAs interface); Bottom panel: simulated (d) and measured (e) dispersion of the same undoped GaAs cavity, ostemer-bonded to CaF2 (grating down, buried on the GaAs / CaF2 interface); FDTD calculation of Ez field enhancement (z-axis perpendicular to active region) monitored in the region adjacent to the metal grating (white rectangle) for both grating-up (c) and grating-down (f) layouts. Grating parameters: 4.8 μm period; 85% filling factor; 200 nm-thick Ti/Au metallization.
Fig. 3
Fig. 3 Angle-resolved reflectivity experiments and simulations from quantum-well active regions, comparing the polaritonic mixed mode on (a) grating-down layout and (b) grating-up standard layout. Both specimens are bonded with ostemer. The photonic cavity mode is strongly coupled to the quantum well ISB transition at 119 meV, splitting into lower and upper polariton branches. The possibility of performing lithographic steps both before and after bonding outlooks double side metal-AR-metal nanopatterning. Grating parameters: (top panel) 4.95 μm period, 83.3% filling factor, (bottom panel) 5.35 μm period, 84% filling factor. 200 nm-thick Ti/Au metallization.
Fig. 4
Fig. 4 Reflectivity experiments in the grating-down configuration (sample depicted in Fig. 3(a)) with normal incidence, TM polarization, at room (above) and liquid nitrogen (below) temperature; (b) Transmission experiment for the same sample, showing an additional purely photonic peak (hidden in reflection) at 790 cm−1 (98 meV, compare to Fig. 3(a)), besides the expected lower and upper polariton excitation. Absorption is calculated as: A = 1-R-T = 0.24 (UP), 0.28 (UP).
Fig. 5
Fig. 5 (a) Field distribution (|Ez|2 is plotted) of the TM00 mode in a semi-insulating GaAs-on-CaF2 waveguide; (b) electromagnetic overlap with the ostemer layer of the TM00 mode as a function of wavenumber, for different GaAs and ostemer thicknesses. The plotted quantity is Ostemer |E | 2 / Full domain |E | 2 ; (c) reflectivity spectrum from a 1.8 μm-thick ostemer layer deposited on a gold-coated substrate and deduced imaginary part of the refractive index; (d) propagation losses for mode TM00 as a function of the wavelength, for different GaAs and ostemer thicknesses. The ridge width is 8 μm. Above 1800 cm−1 losses are below 2 dB/cm (0.46 cm−1). In the region of ostemer ro-vibrational transitions, it is possible to keep the losses below in the 1-3 cm−1 with a reasonably thick AR.

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