Abstract

In this paper, we demonstrate an ultra-broadband terahertz (THz) bi-metasurfaces absorber composed of two stacking metasurfaces backed by a metallic ground plane. The bottom metasurface consists of four multiplexed cross resonators with different geometries on a thin parylene layer, achieving a bandwidth of 3.80 THz with the absorption higher than 50% at high frequency. Meanwhile, the top metasurface, including two multiplexed cross resonators with different sizes on a relatively thicker parylene layer, provides a low frequency absorption band with an additional Salisbury screen absorption peak that connects the two absorption bands of the two metasurfaces, therefore enabling an ultra-broadband absorption. The experimental absorption spectrum of the bi-metasurfaces shows a bandwidth of 4.46 THz while the absorption exceeding 50% and a full width at half maxima (FWHM) of 97.7%. The ultra-broadband absorber will be a promising candidate for THz broadband detection.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref] [PubMed]
  3. S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
    [Crossref]
  4. D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
  7. D. Wang, Y. Gu, Y. Gong, C. W. Qiu, and M. Hong, “An ultrathin terahertz quarter-wave plate using planar babinet-inverted metasurface,” Opt. Express 23(9), 11114–11122 (2015).
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  8. Y. Nakata, Y. Taira, T. Nakanishi, and F. Miyamaru, “Freestanding transparent terahertz half-wave plate using subwavelength cut-wire pairs,” Opt. Express 25(3), 2107–2114 (2017).
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    [Crossref]
  22. X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
    [Crossref]
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    [Crossref] [PubMed]
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    [PubMed]
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    [Crossref]
  28. J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
    [Crossref]
  29. S. Liu, H. Chen, and T. J. Cui, “A broadband terahertz absorber using multi-layer stacked bars,” Appl. Phys. Lett. 106(15), 151601 (2015).
    [Crossref]
  30. W. Pan, X. Yu, J. Zhang, and W. Zeng, “A novel design of broadband terahertz metamaterial absorber based on nested circle rings,” IEEE Photonics Technol. Lett. 28(21), 2335–2338 (2016).
    [Crossref]
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    [Crossref]
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    [Crossref]
  33. Y. Peng, X. Zang, Y. Zhu, C. Shi, L. Chen, B. Cai, and S. Zhuang, “Ultra-broadband terahertz perfect absorber by exciting multi-order diffractions in a double-layered grating structure,” Opt. Express 23(3), 2032–2039 (2015).
    [Crossref] [PubMed]
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    [Crossref]
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    [Crossref]
  36. H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
    [Crossref]
  37. D. R. Smith, D. C. Vier, T. Koschny, and C. M. Soukoulis, “Electromagnetic parameter retrieval from inhomogeneous metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 71(33 Pt 2B), 036617 (2005).
    [Crossref] [PubMed]
  38. L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
    [Crossref]

2018 (5)

X. Zhao, J. Schalch, J. Zhang, H. R. Seren, G. Duan, R. D. Averitt, and X. Zhang, “Electromechanically tunable metasurface transmission waveplate at terahertz frequencies,” Optica 5(3), 303 (2018).
[Crossref]

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

M. Rahmanzadeh, H. Rajabalipanah, and A. Abdolali, “Multilayer graphene-based metasurfaces: robust design method for extremely broadband, wide-angle, and polarization-insensitive terahertz absorbers,” Appl. Opt. 57(4), 959–968 (2018).
[Crossref] [PubMed]

S. Tan, F. Yan, W. Wang, H. Zhou, and Y. Hou, “Ultrasensitive sensing with three-dimensional terahertz metamaterial absorber,” J. Opt. 20(5), 055101 (2018).
[Crossref]

B.-X. Wang, Q. Xie, G. Dong, and W.-Q. Huang, “Simplified Design for Broadband and Polarization-Insensitive Terahertz Metamaterial Absorber,” IEEE Photonics Technol. Lett. 30(12), 1115–1118 (2018).
[Crossref]

2017 (6)

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
[Crossref]

M. Kenney, J. Grant, Y. D. Shah, I. Escorcia-Carranza, M. Humphreys, and D. R. S. Cumming, “Octave-Spanning Broadband Absorption of Terahertz Light Using Metasurface Fractal-Cross Absorbers,” ACS Photonics 4(10), 2604–2612 (2017).
[Crossref]

X. Liu, K. Fan, I. V. Shadrivov, and W. J. Padilla, “Experimental realization of a terahertz all-dielectric metasurface absorber,” Opt. Express 25(1), 191–201 (2017).
[Crossref] [PubMed]

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

C.-C. Chang, D. Headland, D. Abbott, W. Withayachumnankul, and H.-T. Chen, “Demonstration of a highly efficient terahertz flat lens employing tri-layer metasurfaces,” Opt. Lett. 42(9), 1867–1870 (2017).
[Crossref] [PubMed]

Y. Nakata, Y. Taira, T. Nakanishi, and F. Miyamaru, “Freestanding transparent terahertz half-wave plate using subwavelength cut-wire pairs,” Opt. Express 25(3), 2107–2114 (2017).
[Crossref] [PubMed]

2016 (5)

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

Y. Urade, Y. Nakata, T. Nakanishi, and M. Kitano, “Broadband and energy-concentrating terahertz coherent perfect absorber based on a self-complementary metasurface,” Opt. Lett. 41(19), 4472–4475 (2016).
[Crossref] [PubMed]

X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
[Crossref]

I. Escorcia, J. Grant, J. Gough, and D. R. Cumming, “Uncooled CMOS terahertz imager using a metamaterial absorber and pn diode,” Opt. Lett. 41(14), 3261–3264 (2016).
[Crossref] [PubMed]

W. Pan, X. Yu, J. Zhang, and W. Zeng, “A novel design of broadband terahertz metamaterial absorber based on nested circle rings,” IEEE Photonics Technol. Lett. 28(21), 2335–2338 (2016).
[Crossref]

2015 (6)

S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
[Crossref]

Y. Peng, X. Zang, Y. Zhu, C. Shi, L. Chen, B. Cai, and S. Zhuang, “Ultra-broadband terahertz perfect absorber by exciting multi-order diffractions in a double-layered grating structure,” Opt. Express 23(3), 2032–2039 (2015).
[Crossref] [PubMed]

Y. Wen, W. Ma, J. Bailey, G. Matmon, and X. Yu, “Broadband terahertz metamaterial absorber based on asymmetric resonators with perfect absorption‎,” IEEE Trans. Terahertz Sci. Technol. 5(3), 406–411 (2015).
[Crossref]

S. Liu, H. Chen, and T. J. Cui, “A broadband terahertz absorber using multi-layer stacked bars,” Appl. Phys. Lett. 106(15), 151601 (2015).
[Crossref]

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
[Crossref]

D. Wang, Y. Gu, Y. Gong, C. W. Qiu, and M. Hong, “An ultrathin terahertz quarter-wave plate using planar babinet-inverted metasurface,” Opt. Express 23(9), 11114–11122 (2015).
[Crossref] [PubMed]

2014 (3)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

T. Niu, W. Withayachumnankul, A. Upadhyay, P. Gutruf, D. Abbott, M. Bhaskaran, S. Sriram, and C. Fumeaux, “Terahertz reflectarray as a polarizing beam splitter,” Opt. Express 22(13), 16148–16160 (2014).
[Crossref] [PubMed]

J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
[Crossref]

2013 (4)

J. Grant, I. Escorcia‐Carranza, C. Li, I. J. McCrindle, J. Gough, and D. R. Cumming, “A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer,” Laser Photonics Rev. 7(6), 1043–1048 (2013).
[Crossref]

F. Alves, D. Grbovic, B. Kearney, N. V. Lavrik, and G. Karunasiri, “Bi-material terahertz sensors using metamaterial structures,” Opt. Express 21(11), 13256–13271 (2013).
[Crossref] [PubMed]

X. Zhang, Z. Tian, W. Yue, J. Gu, S. Zhang, J. Han, and W. Zhang, “Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities,” Adv. Mater. 25(33), 4567–4572 (2013).
[Crossref] [PubMed]

D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
[Crossref]

2012 (2)

C. M. Watts, X. Liu, and W. J. Padilla, “Metamaterial electromagnetic wave absorbers,” Adv. Mater. 24(23), OP98 (2012).
[PubMed]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
[Crossref]

2011 (1)

2010 (2)

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
[Crossref]

2009 (1)

M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B Condens. Matter Mater. Phys. 79(3), 033101 (2009).
[Crossref]

2008 (2)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
[Crossref]

2005 (1)

D. R. Smith, D. C. Vier, T. Koschny, and C. M. Soukoulis, “Electromagnetic parameter retrieval from inhomogeneous metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 71(33 Pt 2B), 036617 (2005).
[Crossref] [PubMed]

Abbott, D.

Abdolali, A.

Alves, F.

Averitt, R.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
[Crossref]

Averitt, R. D.

X. Zhao, J. Schalch, J. Zhang, H. R. Seren, G. Duan, R. D. Averitt, and X. Zhang, “Electromechanically tunable metasurface transmission waveplate at terahertz frequencies,” Optica 5(3), 303 (2018).
[Crossref]

X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
[Crossref]

Azad, A. K.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
[Crossref]

Bailey, J.

Y. Wen, W. Ma, J. Bailey, G. Matmon, and X. Yu, “Broadband terahertz metamaterial absorber based on asymmetric resonators with perfect absorption‎,” IEEE Trans. Terahertz Sci. Technol. 5(3), 406–411 (2015).
[Crossref]

Bhaskaran, M.

Bingham, C.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
[Crossref]

Cai, B.

Capasso, F.

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Chang, C.-C.

Chen, H.

S. Liu, H. Chen, and T. J. Cui, “A broadband terahertz absorber using multi-layer stacked bars,” Appl. Phys. Lett. 106(15), 151601 (2015).
[Crossref]

Chen, H.-T.

C.-C. Chang, D. Headland, D. Abbott, W. Withayachumnankul, and H.-T. Chen, “Demonstration of a highly efficient terahertz flat lens employing tri-layer metasurfaces,” Opt. Lett. 42(9), 1867–1870 (2017).
[Crossref] [PubMed]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
[Crossref]

Chen, L.

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

Y. Peng, X. Zang, Y. Zhu, C. Shi, L. Chen, B. Cai, and S. Zhuang, “Ultra-broadband terahertz perfect absorber by exciting multi-order diffractions in a double-layered grating structure,” Opt. Express 23(3), 2032–2039 (2015).
[Crossref] [PubMed]

Chen, Q.

X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
[Crossref]

Cheng, Q.

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

Chowdhury, D. R.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
[Crossref]

Cui, T. J.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

S. Liu, H. Chen, and T. J. Cui, “A broadband terahertz absorber using multi-layer stacked bars,” Appl. Phys. Lett. 106(15), 151601 (2015).
[Crossref]

Cumming, D. R.

X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
[Crossref]

I. Escorcia, J. Grant, J. Gough, and D. R. Cumming, “Uncooled CMOS terahertz imager using a metamaterial absorber and pn diode,” Opt. Lett. 41(14), 3261–3264 (2016).
[Crossref] [PubMed]

J. Grant, I. Escorcia‐Carranza, C. Li, I. J. McCrindle, J. Gough, and D. R. Cumming, “A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer,” Laser Photonics Rev. 7(6), 1043–1048 (2013).
[Crossref]

J. Grant, Y. Ma, S. Saha, A. Khalid, and D. R. Cumming, “Polarization insensitive, broadband terahertz metamaterial absorber,” Opt. Lett. 36(17), 3476–3478 (2011).
[Crossref] [PubMed]

Cumming, D. R. S.

M. Kenney, J. Grant, Y. D. Shah, I. Escorcia-Carranza, M. Humphreys, and D. R. S. Cumming, “Octave-Spanning Broadband Absorption of Terahertz Light Using Metasurface Fractal-Cross Absorbers,” ACS Photonics 4(10), 2604–2612 (2017).
[Crossref]

Diem, M.

M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B Condens. Matter Mater. Phys. 79(3), 033101 (2009).
[Crossref]

Ding, F.

J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
[Crossref]

Dokmeci, M. R.

X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
[Crossref]

Dong, G.

B.-X. Wang, Q. Xie, G. Dong, and W.-Q. Huang, “Simplified Design for Broadband and Polarization-Insensitive Terahertz Metamaterial Absorber,” IEEE Photonics Technol. Lett. 30(12), 1115–1118 (2018).
[Crossref]

Dong, L.

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
[Crossref]

Du, L. L.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

Duan, G.

Escorcia, I.

Escorcia-Carranza, I.

M. Kenney, J. Grant, Y. D. Shah, I. Escorcia-Carranza, M. Humphreys, and D. R. S. Cumming, “Octave-Spanning Broadband Absorption of Terahertz Light Using Metasurface Fractal-Cross Absorbers,” ACS Photonics 4(10), 2604–2612 (2017).
[Crossref]

J. Grant, I. Escorcia‐Carranza, C. Li, I. J. McCrindle, J. Gough, and D. R. Cumming, “A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer,” Laser Photonics Rev. 7(6), 1043–1048 (2013).
[Crossref]

Fan, K.

X. Liu, K. Fan, I. V. Shadrivov, and W. J. Padilla, “Experimental realization of a terahertz all-dielectric metasurface absorber,” Opt. Express 25(1), 191–201 (2017).
[Crossref] [PubMed]

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
[Crossref]

Feng, S.

D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
[Crossref]

Feng, Y.

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
[Crossref]

Fumeaux, C.

Gong, H.

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

Gong, Y.

Gough, J.

I. Escorcia, J. Grant, J. Gough, and D. R. Cumming, “Uncooled CMOS terahertz imager using a metamaterial absorber and pn diode,” Opt. Lett. 41(14), 3261–3264 (2016).
[Crossref] [PubMed]

J. Grant, I. Escorcia‐Carranza, C. Li, I. J. McCrindle, J. Gough, and D. R. Cumming, “A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer,” Laser Photonics Rev. 7(6), 1043–1048 (2013).
[Crossref]

Grant, J.

M. Kenney, J. Grant, Y. D. Shah, I. Escorcia-Carranza, M. Humphreys, and D. R. S. Cumming, “Octave-Spanning Broadband Absorption of Terahertz Light Using Metasurface Fractal-Cross Absorbers,” ACS Photonics 4(10), 2604–2612 (2017).
[Crossref]

I. Escorcia, J. Grant, J. Gough, and D. R. Cumming, “Uncooled CMOS terahertz imager using a metamaterial absorber and pn diode,” Opt. Lett. 41(14), 3261–3264 (2016).
[Crossref] [PubMed]

J. Grant, I. Escorcia‐Carranza, C. Li, I. J. McCrindle, J. Gough, and D. R. Cumming, “A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer,” Laser Photonics Rev. 7(6), 1043–1048 (2013).
[Crossref]

J. Grant, Y. Ma, S. Saha, A. Khalid, and D. R. Cumming, “Polarization insensitive, broadband terahertz metamaterial absorber,” Opt. Lett. 36(17), 3476–3478 (2011).
[Crossref] [PubMed]

Grbovic, D.

Gu, J.

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
[Crossref]

X. Zhang, Z. Tian, W. Yue, J. Gu, S. Zhang, J. Han, and W. Zhang, “Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities,” Adv. Mater. 25(33), 4567–4572 (2013).
[Crossref] [PubMed]

Gu, Y.

Gutruf, P.

Han, J.

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
[Crossref]

X. Zhang, Z. Tian, W. Yue, J. Gu, S. Zhang, J. Han, and W. Zhang, “Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities,” Adv. Mater. 25(33), 4567–4572 (2013).
[Crossref] [PubMed]

Han, J. G.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

He, Q.

J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
[Crossref]

Headland, D.

Hong, M.

Hou, Y.

S. Tan, F. Yan, W. Wang, H. Zhou, and Y. Hou, “Ultrasensitive sensing with three-dimensional terahertz metamaterial absorber,” J. Opt. 20(5), 055101 (2018).
[Crossref]

Hu, D.

D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
[Crossref]

Hu, X.

X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
[Crossref]

Huang, L.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
[Crossref]

Huang, W.-Q.

B.-X. Wang, Q. Xie, G. Dong, and W.-Q. Huang, “Simplified Design for Broadband and Polarization-Insensitive Terahertz Metamaterial Absorber,” IEEE Photonics Technol. Lett. 30(12), 1115–1118 (2018).
[Crossref]

Humphreys, M.

M. Kenney, J. Grant, Y. D. Shah, I. Escorcia-Carranza, M. Humphreys, and D. R. S. Cumming, “Octave-Spanning Broadband Absorption of Terahertz Light Using Metasurface Fractal-Cross Absorbers,” ACS Photonics 4(10), 2604–2612 (2017).
[Crossref]

Jia, D.

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
[Crossref]

Jiang, W.

S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
[Crossref]

Kan, Q.

D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
[Crossref]

Karunasiri, G.

Kearney, B.

Kenney, M.

M. Kenney, J. Grant, Y. D. Shah, I. Escorcia-Carranza, M. Humphreys, and D. R. S. Cumming, “Octave-Spanning Broadband Absorption of Terahertz Light Using Metasurface Fractal-Cross Absorbers,” ACS Photonics 4(10), 2604–2612 (2017).
[Crossref]

Khalid, A.

Kitano, M.

Klar, P. J.

D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
[Crossref]

Koschny, T.

M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B Condens. Matter Mater. Phys. 79(3), 033101 (2009).
[Crossref]

D. R. Smith, D. C. Vier, T. Koschny, and C. M. Soukoulis, “Electromagnetic parameter retrieval from inhomogeneous metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 71(33 Pt 2B), 036617 (2005).
[Crossref] [PubMed]

Landy, N.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
[Crossref]

Landy, N. I.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Lavrik, N. V.

Li, C.

J. Grant, I. Escorcia‐Carranza, C. Li, I. J. McCrindle, J. Gough, and D. R. Cumming, “A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer,” Laser Photonics Rev. 7(6), 1043–1048 (2013).
[Crossref]

Li, Y.

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

Li, Z.

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

Liu, M.

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
[Crossref]

Liu, S.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

S. Liu, H. Chen, and T. J. Cui, “A broadband terahertz absorber using multi-layer stacked bars,” Appl. Phys. Lett. 106(15), 151601 (2015).
[Crossref]

Liu, X.

X. Liu, K. Fan, I. V. Shadrivov, and W. J. Padilla, “Experimental realization of a terahertz all-dielectric metasurface absorber,” Opt. Express 25(1), 191–201 (2017).
[Crossref] [PubMed]

C. M. Watts, X. Liu, and W. J. Padilla, “Metamaterial electromagnetic wave absorbers,” Adv. Mater. 24(23), OP98 (2012).
[PubMed]

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
[Crossref]

Luan, K.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

Luo, S.-N.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
[Crossref]

Ma, W.

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
[Crossref]

Y. Wen, W. Ma, J. Bailey, G. Matmon, and X. Yu, “Broadband terahertz metamaterial absorber based on asymmetric resonators with perfect absorption‎,” IEEE Trans. Terahertz Sci. Technol. 5(3), 406–411 (2015).
[Crossref]

Ma, Y.

S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
[Crossref]

J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
[Crossref]

J. Grant, Y. Ma, S. Saha, A. Khalid, and D. R. Cumming, “Polarization insensitive, broadband terahertz metamaterial absorber,” Opt. Lett. 36(17), 3476–3478 (2011).
[Crossref] [PubMed]

Ma, Z.

J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
[Crossref]

MacNaughton, S.

X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
[Crossref]

Matmon, G.

Y. Wen, W. Ma, J. Bailey, G. Matmon, and X. Yu, “Broadband terahertz metamaterial absorber based on asymmetric resonators with perfect absorption‎,” IEEE Trans. Terahertz Sci. Technol. 5(3), 406–411 (2015).
[Crossref]

McCrindle, I. J.

J. Grant, I. Escorcia‐Carranza, C. Li, I. J. McCrindle, J. Gough, and D. R. Cumming, “A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer,” Laser Photonics Rev. 7(6), 1043–1048 (2013).
[Crossref]

Miyamaru, F.

Mock, J. J.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Nakanishi, T.

Nakata, Y.

Niu, T.

Noor, A.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

Padilla, W.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
[Crossref]

Padilla, W. J.

X. Liu, K. Fan, I. V. Shadrivov, and W. J. Padilla, “Experimental realization of a terahertz all-dielectric metasurface absorber,” Opt. Express 25(1), 191–201 (2017).
[Crossref] [PubMed]

C. M. Watts, X. Liu, and W. J. Padilla, “Metamaterial electromagnetic wave absorbers,” Adv. Mater. 24(23), OP98 (2012).
[PubMed]

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
[Crossref] [PubMed]

X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
[Crossref]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Pan, W.

W. Pan, X. Yu, J. Zhang, and W. Zeng, “A novel design of broadband terahertz metamaterial absorber based on nested circle rings,” IEEE Photonics Technol. Lett. 28(21), 2335–2338 (2016).
[Crossref]

Peng, Y.

Pilon, D.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
[Crossref]

Qiu, C. W.

Rahmanzadeh, M.

Rajabalipanah, H.

Ramani, S.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
[Crossref]

Reiten, M. T.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
[Crossref]

Saha, S.

Sajuyigbe, S.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[Crossref] [PubMed]

Schalch, J.

Selvarasah, S.

X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
[Crossref]

Seren, H. R.

Shadrivov, I. V.

Shah, Y. D.

M. Kenney, J. Grant, Y. D. Shah, I. Escorcia-Carranza, M. Humphreys, and D. R. S. Cumming, “Octave-Spanning Broadband Absorption of Terahertz Light Using Metasurface Fractal-Cross Absorbers,” ACS Photonics 4(10), 2604–2612 (2017).
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S. Tan, F. Yan, W. Wang, H. Zhou, and Y. Hou, “Ultrasensitive sensing with three-dimensional terahertz metamaterial absorber,” J. Opt. 20(5), 055101 (2018).
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X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
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Upadhyay, A.

Urade, Y.

Vier, D. C.

D. R. Smith, D. C. Vier, T. Koschny, and C. M. Soukoulis, “Electromagnetic parameter retrieval from inhomogeneous metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 71(33 Pt 2B), 036617 (2005).
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Wang, H.

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M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
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S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
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S. Tan, F. Yan, W. Wang, H. Zhou, and Y. Hou, “Ultrasensitive sensing with three-dimensional terahertz metamaterial absorber,” J. Opt. 20(5), 055101 (2018).
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D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
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[Crossref]

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X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
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Wen, Y.

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
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Y. Wen, W. Ma, J. Bailey, G. Matmon, and X. Yu, “Broadband terahertz metamaterial absorber based on asymmetric resonators with perfect absorption‎,” IEEE Trans. Terahertz Sci. Technol. 5(3), 406–411 (2015).
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Withayachumnankul, W.

Xie, J.

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

Xie, L.

S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
[Crossref]

Xie, Q.

B.-X. Wang, Q. Xie, G. Dong, and W.-Q. Huang, “Simplified Design for Broadband and Polarization-Insensitive Terahertz Metamaterial Absorber,” IEEE Photonics Technol. Lett. 30(12), 1115–1118 (2018).
[Crossref]

Xu, G.

X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
[Crossref]

Xu, Q.

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
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Xu, W.

S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
[Crossref]

Xu, Y.

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
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S. Tan, F. Yan, W. Wang, H. Zhou, and Y. Hou, “Ultrasensitive sensing with three-dimensional terahertz metamaterial absorber,” J. Opt. 20(5), 055101 (2018).
[Crossref]

Ye, J.

D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
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S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
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S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
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Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
[Crossref]

W. Pan, X. Yu, J. Zhang, and W. Zeng, “A novel design of broadband terahertz metamaterial absorber based on nested circle rings,” IEEE Photonics Technol. Lett. 28(21), 2335–2338 (2016).
[Crossref]

Y. Wen, W. Ma, J. Bailey, G. Matmon, and X. Yu, “Broadband terahertz metamaterial absorber based on asymmetric resonators with perfect absorption‎,” IEEE Trans. Terahertz Sci. Technol. 5(3), 406–411 (2015).
[Crossref]

Yuan, J.

S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
[Crossref]

Yue, W.

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
[Crossref]

X. Zhang, Z. Tian, W. Yue, J. Gu, S. Zhang, J. Han, and W. Zhang, “Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities,” Adv. Mater. 25(33), 4567–4572 (2013).
[Crossref] [PubMed]

Zang, X.

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

Y. Peng, X. Zang, Y. Zhu, C. Shi, L. Chen, B. Cai, and S. Zhuang, “Ultra-broadband terahertz perfect absorber by exciting multi-order diffractions in a double-layered grating structure,” Opt. Express 23(3), 2032–2039 (2015).
[Crossref] [PubMed]

Zeng, W.

W. Pan, X. Yu, J. Zhang, and W. Zeng, “A novel design of broadband terahertz metamaterial absorber based on nested circle rings,” IEEE Photonics Technol. Lett. 28(21), 2335–2338 (2016).
[Crossref]

Zhang, J.

X. Zhao, J. Schalch, J. Zhang, H. R. Seren, G. Duan, R. D. Averitt, and X. Zhang, “Electromechanically tunable metasurface transmission waveplate at terahertz frequencies,” Optica 5(3), 303 (2018).
[Crossref]

W. Pan, X. Yu, J. Zhang, and W. Zeng, “A novel design of broadband terahertz metamaterial absorber based on nested circle rings,” IEEE Photonics Technol. Lett. 28(21), 2335–2338 (2016).
[Crossref]

Zhang, L.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

Zhang, S.

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
[Crossref]

X. Zhang, Z. Tian, W. Yue, J. Gu, S. Zhang, J. Han, and W. Zhang, “Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities,” Adv. Mater. 25(33), 4567–4572 (2013).
[Crossref] [PubMed]

Zhang, W.

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
[Crossref]

X. Zhang, Z. Tian, W. Yue, J. Gu, S. Zhang, J. Han, and W. Zhang, “Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities,” Adv. Mater. 25(33), 4567–4572 (2013).
[Crossref] [PubMed]

Zhang, W. L.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

Zhang, X.

X. Zhao, J. Schalch, J. Zhang, H. R. Seren, G. Duan, R. D. Averitt, and X. Zhang, “Electromechanically tunable metasurface transmission waveplate at terahertz frequencies,” Optica 5(3), 303 (2018).
[Crossref]

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
[Crossref]

Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
[Crossref]

X. Zhang, Z. Tian, W. Yue, J. Gu, S. Zhang, J. Han, and W. Zhang, “Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities,” Adv. Mater. 25(33), 4567–4572 (2013).
[Crossref] [PubMed]

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
[Crossref]

Zhang, Y.

X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
[Crossref]

D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
[Crossref]

Zhao, X.

Zhao, Y.

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
[Crossref]

X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
[Crossref]

Zhou, H.

S. Tan, F. Yan, W. Wang, H. Zhou, and Y. Hou, “Ultrasensitive sensing with three-dimensional terahertz metamaterial absorber,” J. Opt. 20(5), 055101 (2018).
[Crossref]

Zhou, L.

J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
[Crossref]

Zhou, X. Y.

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
[Crossref]

Zhu, J.

S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
[Crossref]

J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
[Crossref]

Zhu, Y.

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

Y. Peng, X. Zang, Y. Zhu, C. Shi, L. Chen, B. Cai, and S. Zhuang, “Ultra-broadband terahertz perfect absorber by exciting multi-order diffractions in a double-layered grating structure,” Opt. Express 23(3), 2032–2039 (2015).
[Crossref] [PubMed]

Zhuang, S.

X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
[Crossref]

Y. Peng, X. Zang, Y. Zhu, C. Shi, L. Chen, B. Cai, and S. Zhuang, “Ultra-broadband terahertz perfect absorber by exciting multi-order diffractions in a double-layered grating structure,” Opt. Express 23(3), 2032–2039 (2015).
[Crossref] [PubMed]

ACS Photonics (2)

S. Liu, A. Noor, L. L. Du, L. Zhang, Q. Xu, K. Luan, T. Q. Wang, Z. Tian, W. X. Tang, J. G. Han, W. L. Zhang, X. Y. Zhou, Q. Cheng, and T. J. Cui, “Anomalous refraction and nondiffractive Bessel-beam generation of terahertz waves through transmission-type coding metasurfaces,” ACS Photonics 3(10), 1968–1977 (2016).
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M. Kenney, J. Grant, Y. D. Shah, I. Escorcia-Carranza, M. Humphreys, and D. R. S. Cumming, “Octave-Spanning Broadband Absorption of Terahertz Light Using Metasurface Fractal-Cross Absorbers,” ACS Photonics 4(10), 2604–2612 (2017).
[Crossref]

Adv. Mater. (2)

C. M. Watts, X. Liu, and W. J. Padilla, “Metamaterial electromagnetic wave absorbers,” Adv. Mater. 24(23), OP98 (2012).
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X. Zhang, Z. Tian, W. Yue, J. Gu, S. Zhang, J. Han, and W. Zhang, “Broadband terahertz wave deflection based on C-shape complex metamaterials with phase discontinuities,” Adv. Mater. 25(33), 4567–4572 (2013).
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Adv. Opt. Mater. (2)

D. Hu, X. Wang, S. Feng, J. Ye, W. Sun, Q. Kan, P. J. Klar, and Y. Zhang, “Ultrathin terahertz planar elements,” Adv. Opt. Mater. 1(2), 186–191 (2013).
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Q. Wang, X. Zhang, Y. Xu, Z. Tian, J. Gu, W. Yue, S. Zhang, J. Han, and W. Zhang, “A broadband metasurface‐based terahertz flat‐lens array,” Adv. Opt. Mater. 3(6), 779–785 (2015).
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Appl. Opt. (1)

Appl. Phys. Lett. (7)

M. Wei, Q. Xu, Q. Wang, X. Zhang, Y. Li, J. Gu, Z. Tian, X. Zhang, J. Han, and W. Zhang, “Broadband non-polarizing terahertz beam splitters with variable split ratio,” Appl. Phys. Lett. 111(7), 071101 (2017).
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X. Zang, H. Gong, Z. Li, J. Xie, Q. Cheng, L. Chen, A. P. Shkurinov, Y. Zhu, and S. Zhuang, “Metasurface for multi-channel terahertz beam splitters and polarization rotators,” Appl. Phys. Lett. 112(17), 171111 (2018).
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X. Liu, S. MacNaughton, D. B. Shrekenhamer, H. Tao, S. Selvarasah, A. Totachawattana, R. D. Averitt, M. R. Dokmeci, S. Sonkusale, and W. J. Padilla, “Metamaterials on parylene thin film substrates: Design, fabrication, and characterization at terahertz frequency,” Appl. Phys. Lett. 96(1), 011906 (2010).
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J. Zhu, Z. Ma, W. Sun, F. Ding, Q. He, L. Zhou, and Y. Ma, “Ultra-broadband terahertz metamaterial absorber,” Appl. Phys. Lett. 105(2), 021102 (2014).
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S. Liu, H. Chen, and T. J. Cui, “A broadband terahertz absorber using multi-layer stacked bars,” Appl. Phys. Lett. 106(15), 151601 (2015).
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S. Yin, J. Zhu, W. Xu, W. Jiang, J. Yuan, G. Yin, L. Xie, Y. Ying, and Y. Ma, “High-performance terahertz wave absorbers made of silicon-based metamaterials,” Appl. Phys. Lett. 107(7), 073903 (2015).
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L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, “Impact of resonator geometry and its coupling with ground plane on ultrathin metamaterial perfect absorbers,” Appl. Phys. Lett. 101(10), 101102 (2012).
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IEEE Photonics Technol. Lett. (2)

W. Pan, X. Yu, J. Zhang, and W. Zeng, “A novel design of broadband terahertz metamaterial absorber based on nested circle rings,” IEEE Photonics Technol. Lett. 28(21), 2335–2338 (2016).
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B.-X. Wang, Q. Xie, G. Dong, and W.-Q. Huang, “Simplified Design for Broadband and Polarization-Insensitive Terahertz Metamaterial Absorber,” IEEE Photonics Technol. Lett. 30(12), 1115–1118 (2018).
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IEEE Trans. Terahertz Sci. Technol. (1)

Y. Wen, W. Ma, J. Bailey, G. Matmon, and X. Yu, “Broadband terahertz metamaterial absorber based on asymmetric resonators with perfect absorption‎,” IEEE Trans. Terahertz Sci. Technol. 5(3), 406–411 (2015).
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J. Opt. (1)

S. Tan, F. Yan, W. Wang, H. Zhou, and Y. Hou, “Ultrasensitive sensing with three-dimensional terahertz metamaterial absorber,” J. Opt. 20(5), 055101 (2018).
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Laser Photonics Rev. (2)

X. Hu, G. Xu, L. Wen, H. Wang, Y. Zhao, Y. Zhang, D. R. Cumming, and Q. Chen, “Metamaterial absorber integrated microfluidic terahertz sensors,” Laser Photonics Rev. 10(6), 962–969 (2016).
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J. Grant, I. Escorcia‐Carranza, C. Li, I. J. McCrindle, J. Gough, and D. R. Cumming, “A monolithic resonant terahertz sensor element comprising a metamaterial absorber and micro‐bolometer,” Laser Photonics Rev. 7(6), 1043–1048 (2013).
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Microsyst. Nanoeng. (1)

Y. Wen, D. Jia, W. Ma, Y. Feng, M. Liu, L. Dong, Y. Zhao, and X. Yu, “Photomechanical meta-molecule array for real-time terahertz imaging,” Microsyst. Nanoeng. 3, 17071 (2017).
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Nat. Mater. (1)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
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Opt. Express (6)

Opt. Lett. (4)

Optica (1)

Phys. Rev. B Condens. Matter Mater. Phys. (2)

M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B Condens. Matter Mater. Phys. 79(3), 033101 (2009).
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H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B Condens. Matter Mater. Phys. 78(24), 241103 (2008).
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Phys. Rev. E Stat. Nonlin. Soft Matter Phys. (1)

D. R. Smith, D. C. Vier, T. Koschny, and C. M. Soukoulis, “Electromagnetic parameter retrieval from inhomogeneous metamaterials,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 71(33 Pt 2B), 036617 (2005).
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Phys. Rev. Lett. (2)

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett. 104(20), 207403 (2010).
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N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
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Figures (5)

Fig. 1
Fig. 1 Schematic diagram of (a) perspective view and (b) side view of the unit cell of the bi-metasurfaces.
Fig. 2
Fig. 2 (a)Simulated absorption spectrum of the top metasurface absorber. The inset is the schematic diagram of the unit cell of the top metasurface absorber. (b, c) Simulated surface current density at the two resonance frequencies of f1 and f2. (d) The real part, imaginary part and magnitude of the normalized effective impedance spectra.
Fig. 3
Fig. 3 (a)Simulated absorption spectrum of the bottom metasurface absorber. The inset is the schematic diagram of the unit cell of the bottom metasurface absorber. (b-e) Simulated surface current density at the four resonance frequencies of f4 = 7.12 THz, f5 = 7.56 THz, f6 = 7.87 THz, and f7 = 8.72 THz.
Fig. 4
Fig. 4 (a)Simulated absorption spectrum of the bi-metasurfaces absorber. (b, c) Microscope photos of the fabricated bi-metasurfaces absorber sample with the focuses located at bottom and top resonator layers, respectively. (d, e) SEM pictures of the bottom and top metasurface absorbers.
Fig. 5
Fig. 5 Measured absorption spectra of the fabricated (a) top metasurface, (b) bottom metasurface and (c) bi-metasurfaces absorbers.

Equations (1)

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z ˜ (ω)= (1+ r ˜ (ω)) 2 t ˜ (ω) 2 (1 r ˜ (ω)) 2 t ˜ (ω) 2

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