Abstract

The demonstration of a color display metasurface on a 12-inch silicon wafer with critical dimension (CD) below 100 nm by complementary metal-oxide semiconductor (CMOS) compatible technology is reported for the first time. The 193 nm ArF deep UV immersion lithography is leveraged instead of electron beam lithography (EBL) to pattern the metasurface, which greatly improves the efficiency while keeping a high resolution. The demonstrated metasurface successfully generates the resonant modes and reflects the lights at resonance wavelengths, giving its display in red, green, and blue (RGB) colors. The wafer-level uniformities of CD and reflection characteristic of the metasurface are measured and analyzed. The experimental data show that they are well controlled in the fabrication process. The work provides a promising route towards mass production of dielectric metasurfaces.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref] [PubMed]

2018 (7)

E. Arbabi, A. Arbabi, S. M. Kamali, Y. Horie, M. Faraji-Dana, and A. Faraon, “MEMS-tunable dielectric metasurface lens,” Nat. Commun. 9(1), 812 (2018).
[Crossref] [PubMed]

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

H.-C. Wang, C. H. Chu, P. C. Wu, H.-H. Hsiao, H. J. Wu, J.-W. Chen, W. H. Lee, Y.-C. Lai, Y.-W. Huang, M. L. Tseng, S.-W. Chang, and D. P. Tsai, “Ultrathin planar cavity metasurfaces,” Small 14(17), e1703920 (2018).
[Crossref] [PubMed]

A. She, S. Zhang, S. Shian, D. R. Clarke, and F. Capasso, “Large area metalenses: design, characterization, and mass manufacturing,” Opt. Express 26(2), 1573–1585 (2018).
[Crossref] [PubMed]

V.-C. Su, C. H. Chu, G. Sun, and D. P. Tsai, “Advances in optical metasurfaces: fabrication and applications,” Opt. Express 26(10), 13148–13182 (2018).
[Crossref] [PubMed]

2017 (8)

Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing beyond sRGB color gamut by mimicking silicon nanostructures in free-space,” Nano Lett. 17(12), 7620–7628 (2017).
[Crossref] [PubMed]

M. Khorasaninejad and F. Capasso, “Metalenses: Versatile multifunctional photonic components,” Science 358(6367), eaam8100 (2017).

O. Avayu, E. Almeida, Y. Prior, and T. Ellenbogen, “Composite functional metasurfaces for multispectral achromatic optics,” Nat. Commun. 8, 14992 (2017).
[Crossref] [PubMed]

B. Groever, W. T. Chen, and F. Capasso, “Meta-lens doublet in the visible region,” Nano Lett. 17(8), 4902–4907 (2017).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, C. Hung Chu, J.-W. Chen, S.-H. Lu, J. Chen, B. Xu, C.-H. Kuan, T. Li, S. Zhu, and D. P. Tsai, “Broadband achromatic optical metasurface devices,” Nat. Commun. 8(1), 187 (2017).
[Crossref] [PubMed]

B. H. Chen, P. C. Wu, V. C. Su, Y. C. Lai, C. H. Chu, I. C. Lee, J. W. Chen, Y. H. Chen, Y. C. Lan, C. H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear metasurface for simultaneous control of spin and orbital angular momentum in second harmonic generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

P. C. Wu, W.-Y. Tsai, W. T. Chen, Y.-W. Huang, T.-Y. Chen, J.-W. Chen, C. Y. Liao, C. H. Chu, G. Sun, and D. P. Tsai, “Versatile polarization generation with an aluminum plasmonic metasurface,” Nano Lett. 17(1), 445–452 (2017).
[Crossref] [PubMed]

2016 (3)

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase-change medium,” Laser Photonics Rev. 10(6), 1063 (2016).
[Crossref]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

S. Zhang, M.-H. Kim, F. Aieta, A. She, T. Mansuripur, I. Gabay, M. Khorasaninejad, D. Rousso, X. Wang, M. Troccoli, N. Yu, and F. Capasso, “High efficiency near diffraction-limited mid-infrared flat lenses based on metasurface reflectarrays,” Opt. Express 24(16), 18024–18034 (2016).
[Crossref] [PubMed]

2015 (4)

T. Paul, A. Matthes, T. Harzendorf, S. Ratzsch, and U. D. Zeitner, “Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings,” Opt. Mater. Express 5(1), 124–129 (2015).
[Crossref]

A. L. Kitt, J. P. Rolland, and A. N. Vamivakas, “Visible metasurfaces and ruled diffraction gratings: a comparison,” Opt. Mater. Express 5(12), 2895–2901 (2015).
[Crossref]

M. Pu, X. Ma, Z. Zhao, X. Li, Y. Wang, H. Gao, C. Hu, P. Gao, C. Wang, and X. Luo, “Near-field collimation of light carrying orbital angular momentum with bull’s-eye-assisted plasmonic coaxial waveguides,” Sci. Rep. 5(1), 12108 (2015).
[Crossref] [PubMed]

F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
[Crossref] [PubMed]

2014 (3)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation,” Nano Lett. 14(3), 1394–1399 (2014).
[Crossref] [PubMed]

Z. Xu, T. Li, D.-H. Zhang, C. Yan, D. Li, L. Y. M. Tobing, F. Qin, Y. Wang, X. Shen, and T. Yu, “Groove-structured metasurfaces for modulation of surface plasmon propagation,” Appl. Phys. Express 7(5), 052001 (2014).
[Crossref]

2012 (1)

M. L. Tseng, P. C. Wu, S. Sun, C. M. Chang, W. T. Chen, C. H. Chu, P.-L. Chen, L. Zhou, D.-W. Huang, T.-J. Yen, and D. P. Tsai, “Fabrication of multilayer metamaterials by femtosecond laser-induced forward-transfer technique,” Laser Photonics Rev. 6(5), 702–707 (2012).
[Crossref]

2011 (1)

Aieta, F.

Almeida, E.

O. Avayu, E. Almeida, Y. Prior, and T. Ellenbogen, “Composite functional metasurfaces for multispectral achromatic optics,” Nat. Commun. 8, 14992 (2017).
[Crossref] [PubMed]

An, S.

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

Arbabi, A.

E. Arbabi, A. Arbabi, S. M. Kamali, Y. Horie, M. Faraji-Dana, and A. Faraon, “MEMS-tunable dielectric metasurface lens,” Nat. Commun. 9(1), 812 (2018).
[Crossref] [PubMed]

Arbabi, E.

E. Arbabi, A. Arbabi, S. M. Kamali, Y. Horie, M. Faraji-Dana, and A. Faraon, “MEMS-tunable dielectric metasurface lens,” Nat. Commun. 9(1), 812 (2018).
[Crossref] [PubMed]

Avayu, O.

O. Avayu, E. Almeida, Y. Prior, and T. Ellenbogen, “Composite functional metasurfaces for multispectral achromatic optics,” Nat. Commun. 8, 14992 (2017).
[Crossref] [PubMed]

Briggs, D. P.

Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation,” Nano Lett. 14(3), 1394–1399 (2014).
[Crossref] [PubMed]

Capasso, F.

A. She, S. Zhang, S. Shian, D. R. Clarke, and F. Capasso, “Large area metalenses: design, characterization, and mass manufacturing,” Opt. Express 26(2), 1573–1585 (2018).
[Crossref] [PubMed]

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

M. Khorasaninejad and F. Capasso, “Metalenses: Versatile multifunctional photonic components,” Science 358(6367), eaam8100 (2017).

B. Groever, W. T. Chen, and F. Capasso, “Meta-lens doublet in the visible region,” Nano Lett. 17(8), 4902–4907 (2017).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

S. Zhang, M.-H. Kim, F. Aieta, A. She, T. Mansuripur, I. Gabay, M. Khorasaninejad, D. Rousso, X. Wang, M. Troccoli, N. Yu, and F. Capasso, “High efficiency near diffraction-limited mid-infrared flat lenses based on metasurface reflectarrays,” Opt. Express 24(16), 18024–18034 (2016).
[Crossref] [PubMed]

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Chang, C. M.

M. L. Tseng, P. C. Wu, S. Sun, C. M. Chang, W. T. Chen, C. H. Chu, P.-L. Chen, L. Zhou, D.-W. Huang, T.-J. Yen, and D. P. Tsai, “Fabrication of multilayer metamaterials by femtosecond laser-induced forward-transfer technique,” Laser Photonics Rev. 6(5), 702–707 (2012).
[Crossref]

Chang, S.-W.

H.-C. Wang, C. H. Chu, P. C. Wu, H.-H. Hsiao, H. J. Wu, J.-W. Chen, W. H. Lee, Y.-C. Lai, Y.-W. Huang, M. L. Tseng, S.-W. Chang, and D. P. Tsai, “Ultrathin planar cavity metasurfaces,” Small 14(17), e1703920 (2018).
[Crossref] [PubMed]

Cheah, K. W.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear metasurface for simultaneous control of spin and orbital angular momentum in second harmonic generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

Chen, B. H.

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

B. H. Chen, P. C. Wu, V. C. Su, Y. C. Lai, C. H. Chu, I. C. Lee, J. W. Chen, Y. H. Chen, Y. C. Lan, C. H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Chen, J.

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, C. Hung Chu, J.-W. Chen, S.-H. Lu, J. Chen, B. Xu, C.-H. Kuan, T. Li, S. Zhu, and D. P. Tsai, “Broadband achromatic optical metasurface devices,” Nat. Commun. 8(1), 187 (2017).
[Crossref] [PubMed]

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase-change medium,” Laser Photonics Rev. 10(6), 1063 (2016).
[Crossref]

Chen, J. W.

B. H. Chen, P. C. Wu, V. C. Su, Y. C. Lai, C. H. Chu, I. C. Lee, J. W. Chen, Y. H. Chen, Y. C. Lan, C. H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

Chen, J.-W.

H.-C. Wang, C. H. Chu, P. C. Wu, H.-H. Hsiao, H. J. Wu, J.-W. Chen, W. H. Lee, Y.-C. Lai, Y.-W. Huang, M. L. Tseng, S.-W. Chang, and D. P. Tsai, “Ultrathin planar cavity metasurfaces,” Small 14(17), e1703920 (2018).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, C. Hung Chu, J.-W. Chen, S.-H. Lu, J. Chen, B. Xu, C.-H. Kuan, T. Li, S. Zhu, and D. P. Tsai, “Broadband achromatic optical metasurface devices,” Nat. Commun. 8(1), 187 (2017).
[Crossref] [PubMed]

P. C. Wu, W.-Y. Tsai, W. T. Chen, Y.-W. Huang, T.-Y. Chen, J.-W. Chen, C. Y. Liao, C. H. Chu, G. Sun, and D. P. Tsai, “Versatile polarization generation with an aluminum plasmonic metasurface,” Nano Lett. 17(1), 445–452 (2017).
[Crossref] [PubMed]

Chen, M.-K.

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

Chen, P.-L.

M. L. Tseng, P. C. Wu, S. Sun, C. M. Chang, W. T. Chen, C. H. Chu, P.-L. Chen, L. Zhou, D.-W. Huang, T.-J. Yen, and D. P. Tsai, “Fabrication of multilayer metamaterials by femtosecond laser-induced forward-transfer technique,” Laser Photonics Rev. 6(5), 702–707 (2012).
[Crossref]

Chen, S.

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C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase-change medium,” Laser Photonics Rev. 10(6), 1063 (2016).
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C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase-change medium,” Laser Photonics Rev. 10(6), 1063 (2016).
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Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation,” Nano Lett. 14(3), 1394–1399 (2014).
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[Crossref] [PubMed]

Z. Xu, T. Li, D.-H. Zhang, C. Yan, D. Li, L. Y. M. Tobing, F. Qin, Y. Wang, X. Shen, and T. Yu, “Groove-structured metasurfaces for modulation of surface plasmon propagation,” Appl. Phys. Express 7(5), 052001 (2014).
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[Crossref] [PubMed]

F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
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C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase-change medium,” Laser Photonics Rev. 10(6), 1063 (2016).
[Crossref]

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G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear metasurface for simultaneous control of spin and orbital angular momentum in second harmonic generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

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S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
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B. H. Chen, P. C. Wu, V. C. Su, Y. C. Lai, C. H. Chu, I. C. Lee, J. W. Chen, Y. H. Chen, Y. C. Lan, C. H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, C. Hung Chu, J.-W. Chen, S.-H. Lu, J. Chen, B. Xu, C.-H. Kuan, T. Li, S. Zhu, and D. P. Tsai, “Broadband achromatic optical metasurface devices,” Nat. Commun. 8(1), 187 (2017).
[Crossref] [PubMed]

P. C. Wu, W.-Y. Tsai, W. T. Chen, Y.-W. Huang, T.-Y. Chen, J.-W. Chen, C. Y. Liao, C. H. Chu, G. Sun, and D. P. Tsai, “Versatile polarization generation with an aluminum plasmonic metasurface,” Nano Lett. 17(1), 445–452 (2017).
[Crossref] [PubMed]

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase-change medium,” Laser Photonics Rev. 10(6), 1063 (2016).
[Crossref]

M. L. Tseng, P. C. Wu, S. Sun, C. M. Chang, W. T. Chen, C. H. Chu, P.-L. Chen, L. Zhou, D.-W. Huang, T.-J. Yen, and D. P. Tsai, “Fabrication of multilayer metamaterials by femtosecond laser-induced forward-transfer technique,” Laser Photonics Rev. 6(5), 702–707 (2012).
[Crossref]

Xu, B.

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, C. Hung Chu, J.-W. Chen, S.-H. Lu, J. Chen, B. Xu, C.-H. Kuan, T. Li, S. Zhu, and D. P. Tsai, “Broadband achromatic optical metasurface devices,” Nat. Commun. 8(1), 187 (2017).
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Xu, Z.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear metasurface for simultaneous control of spin and orbital angular momentum in second harmonic generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

Z. Xu, T. Li, D.-H. Zhang, C. Yan, D. Li, L. Y. M. Tobing, F. Qin, Y. Wang, X. Shen, and T. Yu, “Groove-structured metasurfaces for modulation of surface plasmon propagation,” Appl. Phys. Express 7(5), 052001 (2014).
[Crossref]

Yan, C.

Z. Xu, T. Li, D.-H. Zhang, C. Yan, D. Li, L. Y. M. Tobing, F. Qin, Y. Wang, X. Shen, and T. Yu, “Groove-structured metasurfaces for modulation of surface plasmon propagation,” Appl. Phys. Express 7(5), 052001 (2014).
[Crossref]

Yang, J. K. W.

Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing beyond sRGB color gamut by mimicking silicon nanostructures in free-space,” Nano Lett. 17(12), 7620–7628 (2017).
[Crossref] [PubMed]

Yang, Y.

Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation,” Nano Lett. 14(3), 1394–1399 (2014).
[Crossref] [PubMed]

Yen, T.-J.

M. L. Tseng, P. C. Wu, S. Sun, C. M. Chang, W. T. Chen, C. H. Chu, P.-L. Chen, L. Zhou, D.-W. Huang, T.-J. Yen, and D. P. Tsai, “Fabrication of multilayer metamaterials by femtosecond laser-induced forward-transfer technique,” Laser Photonics Rev. 6(5), 702–707 (2012).
[Crossref]

Yin, G.

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

Yu, N.

Yu, T.

Z. Xu, T. Li, D.-H. Zhang, C. Yan, D. Li, L. Y. M. Tobing, F. Qin, Y. Wang, X. Shen, and T. Yu, “Groove-structured metasurfaces for modulation of surface plasmon propagation,” Appl. Phys. Express 7(5), 052001 (2014).
[Crossref]

Yu, Y. F.

Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing beyond sRGB color gamut by mimicking silicon nanostructures in free-space,” Nano Lett. 17(12), 7620–7628 (2017).
[Crossref] [PubMed]

Zeitner, U. D.

Zentgraf, T.

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear metasurface for simultaneous control of spin and orbital angular momentum in second harmonic generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

Zhang, D.-H.

Z. Xu, T. Li, D.-H. Zhang, C. Yan, D. Li, L. Y. M. Tobing, F. Qin, Y. Wang, X. Shen, and T. Yu, “Groove-structured metasurfaces for modulation of surface plasmon propagation,” Appl. Phys. Express 7(5), 052001 (2014).
[Crossref]

Zhang, H.

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

Zhang, L.

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

Zhang, S.

Zhang, Y.

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

Zhao, Z.

M. Pu, X. Ma, Z. Zhao, X. Li, Y. Wang, H. Gao, C. Hu, P. Gao, C. Wang, and X. Luo, “Near-field collimation of light carrying orbital angular momentum with bull’s-eye-assisted plasmonic coaxial waveguides,” Sci. Rep. 5(1), 12108 (2015).
[Crossref] [PubMed]

Zheng, B.

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

Zheng, H.

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

Zhou, L.

M. L. Tseng, P. C. Wu, S. Sun, C. M. Chang, W. T. Chen, C. H. Chu, P.-L. Chen, L. Zhou, D.-W. Huang, T.-J. Yen, and D. P. Tsai, “Fabrication of multilayer metamaterials by femtosecond laser-induced forward-transfer technique,” Laser Photonics Rev. 6(5), 702–707 (2012).
[Crossref]

Zhu, A. Y.

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

Zhu, S.

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, C. Hung Chu, J.-W. Chen, S.-H. Lu, J. Chen, B. Xu, C.-H. Kuan, T. Li, S. Zhu, and D. P. Tsai, “Broadband achromatic optical metasurface devices,” Nat. Commun. 8(1), 187 (2017).
[Crossref] [PubMed]

ACS Nano (1)

F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
[Crossref] [PubMed]

Appl. Phys. Express (1)

Z. Xu, T. Li, D.-H. Zhang, C. Yan, D. Li, L. Y. M. Tobing, F. Qin, Y. Wang, X. Shen, and T. Yu, “Groove-structured metasurfaces for modulation of surface plasmon propagation,” Appl. Phys. Express 7(5), 052001 (2014).
[Crossref]

Laser Photonics Rev. (2)

C. H. Chu, M. L. Tseng, J. Chen, P. C. Wu, Y.-H. Chen, H.-C. Wang, T.-Y. Chen, W. T. Hsieh, H. J. Wu, G. Sun, and D. P. Tsai, “Active dielectric metasurface based on phase-change medium,” Laser Photonics Rev. 10(6), 1063 (2016).
[Crossref]

M. L. Tseng, P. C. Wu, S. Sun, C. M. Chang, W. T. Chen, C. H. Chu, P.-L. Chen, L. Zhou, D.-W. Huang, T.-J. Yen, and D. P. Tsai, “Fabrication of multilayer metamaterials by femtosecond laser-induced forward-transfer technique,” Laser Photonics Rev. 6(5), 702–707 (2012).
[Crossref]

Nano Lett. (7)

Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric meta-reflectarray for broadband linear polarization conversion and optical vortex generation,” Nano Lett. 14(3), 1394–1399 (2014).
[Crossref] [PubMed]

Z. Dong, J. Ho, Y. F. Yu, Y. H. Fu, R. Paniagua-Dominguez, S. Wang, A. I. Kuznetsov, and J. K. W. Yang, “Printing beyond sRGB color gamut by mimicking silicon nanostructures in free-space,” Nano Lett. 17(12), 7620–7628 (2017).
[Crossref] [PubMed]

B. H. Chen, P. C. Wu, V. C. Su, Y. C. Lai, C. H. Chu, I. C. Lee, J. W. Chen, Y. H. Chen, Y. C. Lan, C. H. Kuan, and D. P. Tsai, “GaN metalens for pixel-level full-color routing at visible light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

B. Groever, W. T. Chen, and F. Capasso, “Meta-lens doublet in the visible region,” Nano Lett. 17(8), 4902–4907 (2017).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-insensitive metalenses at visible wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

G. Li, L. Wu, K. F. Li, S. Chen, C. Schlickriede, Z. Xu, S. Huang, W. Li, Y. Liu, E. Y. B. Pun, T. Zentgraf, K. W. Cheah, Y. Luo, and S. Zhang, “Nonlinear metasurface for simultaneous control of spin and orbital angular momentum in second harmonic generation,” Nano Lett. 17(12), 7974–7979 (2017).
[Crossref] [PubMed]

P. C. Wu, W.-Y. Tsai, W. T. Chen, Y.-W. Huang, T.-Y. Chen, J.-W. Chen, C. Y. Liao, C. H. Chu, G. Sun, and D. P. Tsai, “Versatile polarization generation with an aluminum plasmonic metasurface,” Nano Lett. 17(1), 445–452 (2017).
[Crossref] [PubMed]

Nat. Commun. (4)

O. Avayu, E. Almeida, Y. Prior, and T. Ellenbogen, “Composite functional metasurfaces for multispectral achromatic optics,” Nat. Commun. 8, 14992 (2017).
[Crossref] [PubMed]

E. Arbabi, A. Arbabi, S. M. Kamali, Y. Horie, M. Faraji-Dana, and A. Faraon, “MEMS-tunable dielectric metasurface lens,” Nat. Commun. 9(1), 812 (2018).
[Crossref] [PubMed]

L. Zhang, J. Ding, H. Zheng, S. An, H. Lin, B. Zheng, Q. Du, G. Yin, J. Michon, Y. Zhang, Z. Fang, M. Y. Shalaginov, L. Deng, T. Gu, H. Zhang, and J. Hu, “Ultra-thin high-efficiency mid-infrared transmissive Huygens meta-optics,” Nat. Commun. 9(1), 1481 (2018).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, C. Hung Chu, J.-W. Chen, S.-H. Lu, J. Chen, B. Xu, C.-H. Kuan, T. Li, S. Zhu, and D. P. Tsai, “Broadband achromatic optical metasurface devices,” Nat. Commun. 8(1), 187 (2017).
[Crossref] [PubMed]

Nat. Mater. (1)

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

Nat. Nanotechnol. (2)

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

Opt. Express (4)

Opt. Mater. Express (2)

Sci. Rep. (1)

M. Pu, X. Ma, Z. Zhao, X. Li, Y. Wang, H. Gao, C. Hu, P. Gao, C. Wang, and X. Luo, “Near-field collimation of light carrying orbital angular momentum with bull’s-eye-assisted plasmonic coaxial waveguides,” Sci. Rep. 5(1), 12108 (2015).
[Crossref] [PubMed]

Science (1)

M. Khorasaninejad and F. Capasso, “Metalenses: Versatile multifunctional photonic components,” Science 358(6367), eaam8100 (2017).

Small (1)

H.-C. Wang, C. H. Chu, P. C. Wu, H.-H. Hsiao, H. J. Wu, J.-W. Chen, W. H. Lee, Y.-C. Lai, Y.-W. Huang, M. L. Tseng, S.-W. Chang, and D. P. Tsai, “Ultrathin planar cavity metasurfaces,” Small 14(17), e1703920 (2018).
[Crossref] [PubMed]

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Figures (4)

Fig. 1
Fig. 1 (a) Schematic configuration of the color display metasurface with a-Si nanopillar array. The simulated (b) λR and (c) reflectance of the metasurface vs. diameter D of nanopillar. (d) Simulated reflectance spectra when D is set as 170 nm, 120 nm and 70 nm with period of 300 nm, 250 nm and 200 nm, respectively. The insets in Fig. 1(d) show the optical fields of resonant modes at wavelength of 577 nm for pillar diameter of 120 nm.
Fig. 2
Fig. 2 (a) Photograph of the fabricated 12-inch wafer. (b) Close view of one die on the wafer with the colored logo “IME”. (c)-(e) SEM images of a-Si nanopillar arrays for the three letters “I”, “M” and “E”, respectively.
Fig. 3
Fig. 3 (a) Schematic diagram of measurement setup for reflectance spectra. (b) Measured reflectance spectra of the logo “IME” on the central die of the wafer.
Fig. 4
Fig. 4 Reflectance peak varying with the pillar’s diameter D for letter “I” (red color) and letter “M” (green color). Twelve dies along the horizontal and vertical midcourt line of the wafer are selected to measure both the spectrum and the diameter. The pitches of a-Si nanopillar arrays for letter “I” and letter “M” are 300 nm and 250 nm, respectively.

Tables (1)

Tables Icon

Table 1 Measurement results of wafer-level DICD. SEM show the photoresist nanopillars of letters “I” (red color), “M” (green color) and “E” (blue color), respectively.

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