Abstract

We demonstrated GaN-based photonic crystal (PC) nanobeam cavities by using the e-beam lithography and the suspended nanobeams were realized by focused-ion beam (FIB) milling. One resonant mode was clearly observed at 411.7 nm at 77K by optical pumping. The quality factor was measured to be to 7.4 × 102. Moreover, the degree of polarization value was measured to be 40%. The temperature-dependent characteristics were measured and discussed, which unambiguously demonstrated that the observed resonant peak originated from the band-edge mode of the one-dimensional PC nanobeam.

© 2014 Optical Society of America

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2012 (4)

S. Sergent, M. Arita, S. Kako, S. Iwamoto, Y. Arakawa, “High-Q (>5000) AlN nanobeam photonic crystal cavity embedding GaN quantum dots,” Appl. Phys. Lett. 100(12), 121103 (2012).
[CrossRef]

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

N. Okada, Y. Yamada, K. Tadatomo, “Structural and optical evaluation of InGaN/GaN multi-quantum wells on template consisting of in-plane alternately arranged relaxed InGaN and GaN,” J. Appl. Phys. 111(4), 043508 (2012).
[CrossRef]

2011 (5)

T. C. Lu, J. R. Chen, S. C. Lin, S. W. Huang, S. C. Wang, Y. Yamamoto, “Room temperature current injection polariton light emitting diode with a hybrid microcavity,” Nano Lett. 11(7), 2791–2795 (2011).
[CrossRef] [PubMed]

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

S. J. Kim, B. H. Ahn, J. Y. Kim, K. Y. Jeong, K. S. Kim, Y. H. Lee, “Nanobeam photonic bandedge lasers,” Opt. Express 19(24), 24055–24060 (2011).
[CrossRef] [PubMed]

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

I. S. Maksymov, “Optical switching and logic gates with hybrid plasmonic–photonic crystal nanobeam cavities,” Phys. Lett. A 375(5), 918–921 (2011).
[CrossRef]

2010 (4)

Q. M. Quan, P. B. Deotare, M. Lončar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[CrossRef]

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

S. W. Chang, T. R. Lin, S. L. Chuang, “Theory of plasmonic Fabry-Perot nanolasers,” Opt. Express 18(14), 15039–15053 (2010).
[CrossRef] [PubMed]

2009 (1)

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

2008 (5)

N. Watanabe, T. Kimoto, J. Suda, “The temperature dependence of the refractive indices of GaN and AlN from room temperature up to 515 °C,” J. Appl. Phys. 104(10), 106101 (2008).
[CrossRef]

A. Tandaechanurat, S. Iwamoto, M. Nomura, N. Kumagai, Y. Arakawa, “Increase of Q-factor in photonic crystal H1-defect nanocavities after closing of photonic bandgap with optimal slab thickness,” Opt. Express 16(1), 448–455 (2008).
[CrossRef] [PubMed]

M. Notomi, E. Kuramochi, H. Taniyama, “Ultrahigh-Q nanocavity with 1D photonic gap,” Opt. Express 16(15), 11095–11102 (2008).
[CrossRef] [PubMed]

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, S. Noda, “GaN photonic-crystal surface-emitting laser at blue-violet wavelengths,” Science 319(5862), 445–447 (2008).
[CrossRef] [PubMed]

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

2007 (1)

M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, “AlN air-bridge photonic crystal nanocavities demonstrating high quality factor,” Appl. Phys. Lett. 91(5), 051106 (2007).
[CrossRef]

2006 (2)

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

S. Kako, C. Santori, K. Hoshino, S. Götzinger, Y. Yamamoto, Y. Arakawa, “A gallium nitride single-photon source operating at 200 K,” Nat. Mater. 5(11), 887–892 (2006).
[CrossRef] [PubMed]

2004 (1)

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

2003 (1)

I. Vurgaftman, J. Meyer, “Design optimization for high-brightness surface-emitting photonic-crystal distributed-feedback lasers,” IEEE J. Quantum Electron. 39(6), 689–700 (2003).
[CrossRef]

2002 (1)

M. Imada, A. Chutinan, S. Noda, M. Mochizuki, “Multidirectionally distributed feedback photonic crystal lasers,” Phys. Rev. B 65(19), 195306 (2002).
[CrossRef]

2001 (1)

E. J. Cho, F. V. Bright, “Optical Sensor Array and Integrated Light Source,” Anal. Chem. 73(14), 3289–3293 (2001).
[CrossRef] [PubMed]

2000 (1)

R. R. Reeber, K. Wang, “Lattice parameters and thermal expansion of GaN,” J. Mater. Res. 15(01), 40–44 (2000).
[CrossRef]

1999 (2)

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

1997 (1)

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

1987 (2)

E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett. 58(20), 2059–2062 (1987).
[CrossRef] [PubMed]

S. John, “Strong localization of photons in certain disordered dielectric superlattices,” Phys. Rev. Lett. 58(23), 2486–2489 (1987).
[CrossRef] [PubMed]

Ahn, B. H.

Arakawa, Y.

S. Sergent, M. Arita, S. Kako, S. Iwamoto, Y. Arakawa, “High-Q (>5000) AlN nanobeam photonic crystal cavity embedding GaN quantum dots,” Appl. Phys. Lett. 100(12), 121103 (2012).
[CrossRef]

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

A. Tandaechanurat, S. Iwamoto, M. Nomura, N. Kumagai, Y. Arakawa, “Increase of Q-factor in photonic crystal H1-defect nanocavities after closing of photonic bandgap with optimal slab thickness,” Opt. Express 16(1), 448–455 (2008).
[CrossRef] [PubMed]

M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, “AlN air-bridge photonic crystal nanocavities demonstrating high quality factor,” Appl. Phys. Lett. 91(5), 051106 (2007).
[CrossRef]

S. Kako, C. Santori, K. Hoshino, S. Götzinger, Y. Yamamoto, Y. Arakawa, “A gallium nitride single-photon source operating at 200 K,” Nat. Mater. 5(11), 887–892 (2006).
[CrossRef] [PubMed]

Arita, M.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

S. Sergent, M. Arita, S. Kako, S. Iwamoto, Y. Arakawa, “High-Q (>5000) AlN nanobeam photonic crystal cavity embedding GaN quantum dots,” Appl. Phys. Lett. 100(12), 121103 (2012).
[CrossRef]

M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, “AlN air-bridge photonic crystal nanocavities demonstrating high quality factor,” Appl. Phys. Lett. 91(5), 051106 (2007).
[CrossRef]

Ashley, T.

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

Atlasov, K. A.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Baek, J. H.

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

Bewley, W. W.

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

Boucaud, P.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Bretagnon, T.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Bright, F. V.

E. J. Cho, F. V. Bright, “Optical Sensor Array and Integrated Light Source,” Anal. Chem. 73(14), 3289–3293 (2001).
[CrossRef] [PubMed]

Brimont, C.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Butt, R.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Canedy, C. L.

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

Carlin, J.-F.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Castiglia, A.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Chang, S. W.

Checoury, X.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Chen, J. R.

T. C. Lu, J. R. Chen, S. C. Lin, S. W. Huang, S. C. Wang, Y. Yamamoto, “Room temperature current injection polariton light emitting diode with a hybrid microcavity,” Nano Lett. 11(7), 2791–2795 (2011).
[CrossRef] [PubMed]

Chen, S. W.

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Cho, E. J.

E. J. Cho, F. V. Bright, “Optical Sensor Array and Integrated Light Source,” Anal. Chem. 73(14), 3289–3293 (2001).
[CrossRef] [PubMed]

Chuang, S. L.

Chutinan, A.

M. Imada, A. Chutinan, S. Noda, M. Mochizuki, “Multidirectionally distributed feedback photonic crystal lasers,” Phys. Rev. B 65(19), 195306 (2002).
[CrossRef]

Cryan, M. J.

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

Dapkus, P. D.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

David, S.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Deotare, P.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Deotare, P. B.

Q. M. Quan, P. B. Deotare, M. Lončar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[CrossRef]

Dharanipathy, U.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Dodabalapur, A.

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

Dupuis, R.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Fan, S.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Fan, S. H.

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Ferrera, J.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Foresi, J. S.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Gayral, B.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Götzinger, S.

S. Kako, C. Santori, K. Hoshino, S. Götzinger, Y. Yamamoto, Y. Arakawa, “A gallium nitride single-photon source operating at 200 K,” Nat. Mater. 5(11), 887–892 (2006).
[CrossRef] [PubMed]

Grandjean, N.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Guillet, T.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Heard, P. J.

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

Ho, Y.-L. D.

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

Hori, Y.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

Hoshino, K.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

S. Kako, C. Santori, K. Hoshino, S. Götzinger, Y. Yamamoto, Y. Arakawa, “A gallium nitride single-photon source operating at 200 K,” Nat. Mater. 5(11), 887–892 (2006).
[CrossRef] [PubMed]

Houdr, R.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Huang, S. W.

T. C. Lu, J. R. Chen, S. C. Lin, S. W. Huang, S. C. Wang, Y. Yamamoto, “Room temperature current injection polariton light emitting diode with a hybrid microcavity,” Nano Lett. 11(7), 2791–2795 (2011).
[CrossRef] [PubMed]

Huang, Y.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Imada, M.

M. Imada, A. Chutinan, S. Noda, M. Mochizuki, “Multidirectionally distributed feedback photonic crystal lasers,” Phys. Rev. B 65(19), 195306 (2002).
[CrossRef]

Ippen, E. P.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Ishida, S.

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, “AlN air-bridge photonic crystal nanocavities demonstrating high quality factor,” Appl. Phys. Lett. 91(5), 051106 (2007).
[CrossRef]

Iwamoto, S.

S. Sergent, M. Arita, S. Kako, S. Iwamoto, Y. Arakawa, “High-Q (>5000) AlN nanobeam photonic crystal cavity embedding GaN quantum dots,” Appl. Phys. Lett. 100(12), 121103 (2012).
[CrossRef]

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

A. Tandaechanurat, S. Iwamoto, M. Nomura, N. Kumagai, Y. Arakawa, “Increase of Q-factor in photonic crystal H1-defect nanocavities after closing of photonic bandgap with optimal slab thickness,” Opt. Express 16(1), 448–455 (2008).
[CrossRef] [PubMed]

M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, “AlN air-bridge photonic crystal nanocavities demonstrating high quality factor,” Appl. Phys. Lett. 91(5), 051106 (2007).
[CrossRef]

Iwase, H.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

Jeong, K. Y.

Jianglin, Y.

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, S. Noda, “GaN photonic-crystal surface-emitting laser at blue-violet wavelengths,” Science 319(5862), 445–447 (2008).
[CrossRef] [PubMed]

Joannopoulos, J. D.

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

John, S.

S. John, “Strong localization of photons in certain disordered dielectric superlattices,” Phys. Rev. Lett. 58(23), 2486–2489 (1987).
[CrossRef] [PubMed]

Ju, Y. G.

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

Kako, S.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

S. Sergent, M. Arita, S. Kako, S. Iwamoto, Y. Arakawa, “High-Q (>5000) AlN nanobeam photonic crystal cavity embedding GaN quantum dots,” Appl. Phys. Lett. 100(12), 121103 (2012).
[CrossRef]

M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, “AlN air-bridge photonic crystal nanocavities demonstrating high quality factor,” Appl. Phys. Lett. 91(5), 051106 (2007).
[CrossRef]

S. Kako, C. Santori, K. Hoshino, S. Götzinger, Y. Yamamoto, Y. Arakawa, “A gallium nitride single-photon source operating at 200 K,” Nat. Mater. 5(11), 887–892 (2006).
[CrossRef] [PubMed]

Kao, C. C.

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Kao, T. T.

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Kawashima, S.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

Kawashima, T.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

Khan, M.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Kim, C. S.

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

Kim, I.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

Kim, J. Y.

Kim, K. S.

Kim, M.

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

Kim, S. B.

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

Kim, S. H.

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

Kim, S. J.

Kimerling, L. C.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Kimoto, T.

N. Watanabe, T. Kimoto, J. Suda, “The temperature dependence of the refractive indices of GaN and AlN from room temperature up to 515 °C,” J. Appl. Phys. 104(10), 106101 (2008).
[CrossRef]

Kumagai, N.

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

A. Tandaechanurat, S. Iwamoto, M. Nomura, N. Kumagai, Y. Arakawa, “Increase of Q-factor in photonic crystal H1-defect nanocavities after closing of photonic bandgap with optimal slab thickness,” Opt. Express 16(1), 448–455 (2008).
[CrossRef] [PubMed]

Kuo, H. C.

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Kuramochi, E.

Kwon, S. H.

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

Lee, R. K.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

Lee, Y. H.

S. J. Kim, B. H. Ahn, J. Y. Kim, K. Y. Jeong, K. S. Kim, Y. H. Lee, “Nanobeam photonic bandedge lasers,” Opt. Express 19(24), 24055–24060 (2011).
[CrossRef] [PubMed]

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

Levrat, J.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Lin, L. F.

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Lin, S. C.

T. C. Lu, J. R. Chen, S. C. Lin, S. W. Huang, S. C. Wang, Y. Yamamoto, “Room temperature current injection polariton light emitting diode with a hybrid microcavity,” Nano Lett. 11(7), 2791–2795 (2011).
[CrossRef] [PubMed]

Lin, T. R.

Lindle, J. R.

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

Loncar, M.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Q. M. Quan, P. B. Deotare, M. Lončar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[CrossRef]

Lu, T. C.

T. C. Lu, J. R. Chen, S. C. Lin, S. W. Huang, S. C. Wang, Y. Yamamoto, “Room temperature current injection polariton light emitting diode with a hybrid microcavity,” Nano Lett. 11(7), 2791–2795 (2011).
[CrossRef] [PubMed]

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Maksymov, I. S.

I. S. Maksymov, “Optical switching and logic gates with hybrid plasmonic–photonic crystal nanobeam cavities,” Phys. Lett. A 375(5), 918–921 (2011).
[CrossRef]

Matsubara, H.

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, S. Noda, “GaN photonic-crystal surface-emitting laser at blue-violet wavelengths,” Science 319(5862), 445–447 (2008).
[CrossRef] [PubMed]

Meier, M.

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

Mekis, A.

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

Mexis, M.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Meyer, J.

I. Vurgaftman, J. Meyer, “Design optimization for high-brightness surface-emitting photonic-crystal distributed-feedback lasers,” IEEE J. Quantum Electron. 39(6), 689–700 (2003).
[CrossRef]

Meyer, J. R.

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

Mochizuki, M.

M. Imada, A. Chutinan, S. Noda, M. Mochizuki, “Multidirectionally distributed feedback photonic crystal lasers,” Phys. Rev. B 65(19), 195306 (2002).
[CrossRef]

Nagatomo, Y.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

Nalamasu, O.

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

Nash, G. R.

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

Neel, D.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Noda, S.

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, S. Noda, “GaN photonic-crystal surface-emitting laser at blue-violet wavelengths,” Science 319(5862), 445–447 (2008).
[CrossRef] [PubMed]

M. Imada, A. Chutinan, S. Noda, M. Mochizuki, “Multidirectionally distributed feedback photonic crystal lasers,” Phys. Rev. B 65(19), 195306 (2002).
[CrossRef]

Nomura, M.

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

A. Tandaechanurat, S. Iwamoto, M. Nomura, N. Kumagai, Y. Arakawa, “Increase of Q-factor in photonic crystal H1-defect nanocavities after closing of photonic bandgap with optimal slab thickness,” Opt. Express 16(1), 448–455 (2008).
[CrossRef] [PubMed]

Notomi, M.

Numata, A.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

O’Brien, J. D.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

Ohta, R.

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

Okada, N.

N. Okada, Y. Yamada, K. Tadatomo, “Structural and optical evaluation of InGaN/GaN multi-quantum wells on template consisting of in-plane alternately arranged relaxed InGaN and GaN,” J. Appl. Phys. 111(4), 043508 (2012).
[CrossRef]

Ota, Y.

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

Painter, O.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

Park, H. G.

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

Pugh, J. R.

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

Quan, Q. M.

Q. M. Quan, P. B. Deotare, M. Lončar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[CrossRef]

Rarity, J. G.

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

Reeber, R. R.

R. R. Reeber, K. Wang, “Lattice parameters and thermal expansion of GaN,” J. Mater. Res. 15(01), 40–44 (2000).
[CrossRef]

Rossbach, G.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Ryou, J.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Saito, H.

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, S. Noda, “GaN photonic-crystal surface-emitting laser at blue-violet wavelengths,” Science 319(5862), 445–447 (2008).
[CrossRef] [PubMed]

Sam-Giao, D.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Santori, C.

S. Kako, C. Santori, K. Hoshino, S. Götzinger, Y. Yamamoto, Y. Arakawa, “A gallium nitride single-photon source operating at 200 K,” Nat. Mater. 5(11), 887–892 (2006).
[CrossRef] [PubMed]

Scherer, A.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

Semond, F.

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Sergent, S.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

S. Sergent, M. Arita, S. Kako, S. Iwamoto, Y. Arakawa, “High-Q (>5000) AlN nanobeam photonic crystal cavity embedding GaN quantum dots,” Appl. Phys. Lett. 100(12), 121103 (2012).
[CrossRef]

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

Slusher, R. E.

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

Smith, H. I.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Steinmeyer, G.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Suda, J.

N. Watanabe, T. Kimoto, J. Suda, “The temperature dependence of the refractive indices of GaN and AlN from room temperature up to 515 °C,” J. Appl. Phys. 104(10), 106101 (2008).
[CrossRef]

Tadatomo, K.

N. Okada, Y. Yamada, K. Tadatomo, “Structural and optical evaluation of InGaN/GaN multi-quantum wells on template consisting of in-plane alternately arranged relaxed InGaN and GaN,” J. Appl. Phys. 111(4), 043508 (2012).
[CrossRef]

Tanabe, K.

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

Tanaka, Y.

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, S. Noda, “GaN photonic-crystal surface-emitting laser at blue-violet wavelengths,” Science 319(5862), 445–447 (2008).
[CrossRef] [PubMed]

Tandaechanurat, A.

Taniyama, H.

Thoen, E. R.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Timko, A.

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

Trivin, N. V.

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

Uchida, M.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

Uchida, T.

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

Villeneuve, P. R.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Vurgaftman, I.

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

I. Vurgaftman, J. Meyer, “Design optimization for high-brightness surface-emitting photonic-crystal distributed-feedback lasers,” IEEE J. Quantum Electron. 39(6), 689–700 (2003).
[CrossRef]

Wang, K.

R. R. Reeber, K. Wang, “Lattice parameters and thermal expansion of GaN,” J. Mater. Res. 15(01), 40–44 (2000).
[CrossRef]

Wang, S. C.

T. C. Lu, J. R. Chen, S. C. Lin, S. W. Huang, S. C. Wang, Y. Yamamoto, “Room temperature current injection polariton light emitting diode with a hybrid microcavity,” Nano Lett. 11(7), 2791–2795 (2011).
[CrossRef] [PubMed]

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Watanabe, N.

N. Watanabe, T. Kimoto, J. Suda, “The temperature dependence of the refractive indices of GaN and AlN from room temperature up to 515 °C,” J. Appl. Phys. 104(10), 106101 (2008).
[CrossRef]

Yablonovitch, E.

E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett. 58(20), 2059–2062 (1987).
[CrossRef] [PubMed]

Yamada, Y.

N. Okada, Y. Yamada, K. Tadatomo, “Structural and optical evaluation of InGaN/GaN multi-quantum wells on template consisting of in-plane alternately arranged relaxed InGaN and GaN,” J. Appl. Phys. 111(4), 043508 (2012).
[CrossRef]

Yamamoto, Y.

T. C. Lu, J. R. Chen, S. C. Lin, S. W. Huang, S. C. Wang, Y. Yamamoto, “Room temperature current injection polariton light emitting diode with a hybrid microcavity,” Nano Lett. 11(7), 2791–2795 (2011).
[CrossRef] [PubMed]

S. Kako, C. Santori, K. Hoshino, S. Götzinger, Y. Yamamoto, Y. Arakawa, “A gallium nitride single-photon source operating at 200 K,” Nat. Mater. 5(11), 887–892 (2006).
[CrossRef] [PubMed]

Yang, J. K.

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

Yariv, A.

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

Yoshimoto, S.

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, S. Noda, “GaN photonic-crystal surface-emitting laser at blue-violet wavelengths,” Science 319(5862), 445–447 (2008).
[CrossRef] [PubMed]

Yu, P.

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

Zhang, Y.

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

Anal. Chem. (1)

E. J. Cho, F. V. Bright, “Optical Sensor Array and Integrated Light Source,” Anal. Chem. 73(14), 3289–3293 (2001).
[CrossRef] [PubMed]

Appl. Phys. Lett. (12)

S. Sergent, M. Arita, S. Kako, S. Iwamoto, Y. Arakawa, “High-Q (>5000) AlN nanobeam photonic crystal cavity embedding GaN quantum dots,” Appl. Phys. Lett. 100(12), 121103 (2012).
[CrossRef]

S. Sergent, M. Arita, S. Kako, K. Tanabe, S. Iwamoto, Y. Arakawa, “High-Q AlN photonic crystal nanobeam cavities fabricated by layer transfer,” Appl. Phys. Lett. 101(10), 101106 (2012).
[CrossRef]

M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, “AlN air-bridge photonic crystal nanocavities demonstrating high quality factor,” Appl. Phys. Lett. 91(5), 051106 (2007).
[CrossRef]

D. Neel, S. Sergent, M. Mexis, D. Sam-Giao, T. Guillet, C. Brimont, T. Bretagnon, F. Semond, B. Gayral, S. David, X. Checoury, P. Boucaud, “AlN photonic crystal nanocavities realized by epitaxial conformal growth on nanopatterned silicon substrate,” Appl. Phys. Lett. 98(26), 261106 (2011).
[CrossRef]

N. V. Trivin, G. Rossbach, U. Dharanipathy, J. Levrat, A. Castiglia, J.-F. Carlin, K. A. Atlasov, R. Butt, R. Houdr, N. Grandjean, “High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate,” Appl. Phys. Lett. 100(7), 071103 (2012).
[CrossRef]

M. Meier, A. Mekis, A. Dodabalapur, A. Timko, R. E. Slusher, J. D. Joannopoulos, O. Nalamasu, “Laser action from two-dimensional distributed feedback in photonic crystals,” Appl. Phys. Lett. 74(1), 7 (1999).
[CrossRef]

T. C. Lu, S. W. Chen, L. F. Lin, T. T. Kao, C. C. Kao, P. Yu, H. C. Kuo, S. C. Wang, S. H. Fan, “GaN-based two-dimensional surface-emitting photonic crystal lasers with AlN/GaN distributed Bragg reflector,” Appl. Phys. Lett. 92(1), 011129 (2008).
[CrossRef]

S. Kawashima, T. Kawashima, Y. Nagatomo, Y. Hori, H. Iwase, T. Uchida, K. Hoshino, A. Numata, M. Uchida, “GaN-based surface-emitting laser with two-dimensional photonic crystal acting as distributed-feedback grating and optical cladding,” Appl. Phys. Lett. 97(25), 251112 (2010).
[CrossRef]

M. Kim, C. S. Kim, W. W. Bewley, J. R. Lindle, C. L. Canedy, I. Vurgaftman, J. R. Meyer, “Surface-emitting photonic-crystal distributed-feedback laser for the midinfrared,” Appl. Phys. Lett. 88(19), 191105 (2006).
[CrossRef]

Y. Zhang, M. Khan, Y. Huang, J. Ryou, P. Deotare, R. Dupuis, M. Lončar, “Photonic crystal nanobeam lasers,” Appl. Phys. Lett. 97(5), 051104 (2010).
[CrossRef]

R. Ohta, Y. Ota, M. Nomura, N. Kumagai, S. Ishida, S. Iwamoto, Y. Arakawa, “Strong coupling between a photonic crystal nanobeam cavity and a single quantum dot,” Appl. Phys. Lett. 98(17), 173104 (2011).
[CrossRef]

Q. M. Quan, P. B. Deotare, M. Lončar, “Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide,” Appl. Phys. Lett. 96(20), 203102 (2010).
[CrossRef]

IEEE J. Quantum Electron. (1)

I. Vurgaftman, J. Meyer, “Design optimization for high-brightness surface-emitting photonic-crystal distributed-feedback lasers,” IEEE J. Quantum Electron. 39(6), 689–700 (2003).
[CrossRef]

J. Appl. Phys. (2)

N. Watanabe, T. Kimoto, J. Suda, “The temperature dependence of the refractive indices of GaN and AlN from room temperature up to 515 °C,” J. Appl. Phys. 104(10), 106101 (2008).
[CrossRef]

N. Okada, Y. Yamada, K. Tadatomo, “Structural and optical evaluation of InGaN/GaN multi-quantum wells on template consisting of in-plane alternately arranged relaxed InGaN and GaN,” J. Appl. Phys. 111(4), 043508 (2012).
[CrossRef]

J. Mater. Res. (1)

R. R. Reeber, K. Wang, “Lattice parameters and thermal expansion of GaN,” J. Mater. Res. 15(01), 40–44 (2000).
[CrossRef]

J. Opt. A, Pure Appl. Opt. (1)

J. R. Pugh, Y.-L. D. Ho, P. J. Heard, G. R. Nash, T. Ashley, J. G. Rarity, M. J. Cryan, “Design and fabrication of a midinfrared photonic crystal defect cavity in indium antimonide,” J. Opt. A, Pure Appl. Opt. 11(5), 054006 (2009).
[CrossRef]

Nano Lett. (1)

T. C. Lu, J. R. Chen, S. C. Lin, S. W. Huang, S. C. Wang, Y. Yamamoto, “Room temperature current injection polariton light emitting diode with a hybrid microcavity,” Nano Lett. 11(7), 2791–2795 (2011).
[CrossRef] [PubMed]

Nat. Mater. (1)

S. Kako, C. Santori, K. Hoshino, S. Götzinger, Y. Yamamoto, Y. Arakawa, “A gallium nitride single-photon source operating at 200 K,” Nat. Mater. 5(11), 887–892 (2006).
[CrossRef] [PubMed]

Nature (1)

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, E. P. Ippen, “Photonic-bandgap microcavities in optical waveguides,” Nature 390(6656), 143–145 (1997).
[CrossRef]

Opt. Express (4)

Phys. Lett. A (1)

I. S. Maksymov, “Optical switching and logic gates with hybrid plasmonic–photonic crystal nanobeam cavities,” Phys. Lett. A 375(5), 918–921 (2011).
[CrossRef]

Phys. Rev. B (1)

M. Imada, A. Chutinan, S. Noda, M. Mochizuki, “Multidirectionally distributed feedback photonic crystal lasers,” Phys. Rev. B 65(19), 195306 (2002).
[CrossRef]

Phys. Rev. Lett. (2)

E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett. 58(20), 2059–2062 (1987).
[CrossRef] [PubMed]

S. John, “Strong localization of photons in certain disordered dielectric superlattices,” Phys. Rev. Lett. 58(23), 2486–2489 (1987).
[CrossRef] [PubMed]

Science (3)

O. Painter, R. K. Lee, A. Scherer, A. Yariv, J. D. O’Brien, P. D. Dapkus, I. Kim, “Two-dimensional photonic band-Gap defect mode laser,” Science 284(5421), 1819–1821 (1999).
[CrossRef] [PubMed]

H. G. Park, S. H. Kim, S. H. Kwon, Y. G. Ju, J. K. Yang, J. H. Baek, S. B. Kim, Y. H. Lee, “Electrically driven single-cell photonic crystal laser,” Science 305(5689), 1444–1447 (2004).
[CrossRef] [PubMed]

H. Matsubara, S. Yoshimoto, H. Saito, Y. Jianglin, Y. Tanaka, S. Noda, “GaN photonic-crystal surface-emitting laser at blue-violet wavelengths,” Science 319(5862), 445–447 (2008).
[CrossRef] [PubMed]

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Figures (4)

Fig. 1
Fig. 1

(a) Scheme of the GaN-based PC nanobeam cavity, where w is the nanobeam width, h is the nanobeam cavity height, a is the lattice period, and r is the radius of one PC hole. The MQW region is sandwiched by two GaN layers with identical thickness. (b) The band diagram of GaN-based PC nanobeam cavity. The red dashed line represents the light line. The gray area above the light line represents the radiation modes. The black, blue and green curves represent the photonic bands with different guided modes. (c) Top view of the simulated electric field mapping in one unit cell. (d) Left: Cross sectional view of the simulated electric field mapping in one unit cell at the z-x plane. Right: Extracted electric field along the dash line in the left figure.

Fig. 2
Fig. 2

(a) The calculated Q factor versus the r/a ratio. (b) The calculated Q factor and confinement factor versus the cavity height. The confinement factor was defined as the overlap ratio between the optical field and the MQW area as shown in Fig. 1(d) (c) The top view, (d) enlarged top view and (e) tilted angle view SEM images of the GaN-based PC nanobeam cavity. The parameters such as period and radius of PC were 180 nm and 50 nm. The height and width of nanobeam structure were 300 nm and 320 nm.

Fig. 3
Fig. 3

The μ-PL spectra of (a) the planar sample and (b) the GaN-based 1D PC nanobeam cavity. The resonant wavelength and quality factor were calculated to be 411.7 nm and 742, respectively by using the Lorentz fitting in (b).

Fig. 4
Fig. 4

(a) Polarization characteristics of the GaN-based 1D PC nanobeam cavity. The degree of polarization (DOP) was measured to be 40%. (b) Temperature-dependent μ-PL spectra of the GaN-based 1D PC nanobeam cavity. The red-shift rate of the resonant mode peak was calculated to be 0.03 nm/K.

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