Abstract

We report the development of the multimode fiber-coupled superconducting nanowire single-photon detector with high system detection efficiency at visible wavelength. The detector consists of a 10.5-nm-thick and 150-nm-wide NbN nanowire meander fabricated on a Si substrate with a multilayer dielectric mirror and a quarter wavelength cavity for obtaining high optical absorptance. The meander area was 35 µm in diameter and coupled with the GRIN-lensed multimode optical fiber with a core diameter of 50 µm. The system reached detection efficiency of 70% with dark count rate of 100 Hz at the wavelength of 635 nm, 3 dB roll-off response counting rate of 8.5 Mcps, and timing jitter of 76 ps.

© 2014 Optical Society of America

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2014

2013

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[CrossRef]

H. Shibata, K. Shimizu, H. Takesue, and Y. Tokura, “Superconducting Nanowire Single-Photon Detector with Ultralow Dark Count Rate Using Cold Optical Filters,” Appl. Phys. Express 6(7), 072801 (2013).
[CrossRef]

S. Chen, D. Liu, W. Zhang, L. You, Y. He, W. Zhang, X. Yang, G. Wu, M. Ren, H. Zeng, Z. Wang, X. Xie, and M. Jiang, “Time-of-flight laser ranging and imaging at 1550 nm using low-jitter superconducting nanowire single-photon detection system,” Appl. Opt. 52(14), 3241–3245 (2013).
[CrossRef] [PubMed]

S. Miki, T. Yamashita, H. Terai, and Z. Wang, “High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler,” Opt. Express 21(8), 10208–10214 (2013).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, H. Terai, and Z. Wang, “Low-filling-factor superconducting single photon detector with high system detection efficiency,” Opt. Express 21(22), 27177–27184 (2013).
[CrossRef] [PubMed]

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

D. Rosenberg, A. J. Kerman, R. J. Molnar, and E. A. Dauler, “High-speed and high-efficiency superconducting nanowire single photon detector array,” Opt. Express 21(2), 1440–1447 (2013).
[CrossRef] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

2011

2010

T. Yamashita, S. Miki, W. Qiu, M. Fujiwara, M. Sasaki, and Z. Wang, “Temperature Dependent Performances of Superconducting Nanowire Single-Photon Detectors in an Ultralow-Temperature Region,” Appl. Phys. Express 3(10), 102502 (2010).
[CrossRef]

2009

S. Miki, M. Fujiwara, M. Sasaki, and Z. Wang, “Development of SNSPD system with Gifford-McMahon cryocooler,” IEEE Trans. Appl. Supercond. 19(3), 332–335 (2009).
[CrossRef]

X. L. Hu, T. Zhong, J. E. White, E. A. Dauler, F. Najafi, C. H. Herder, F. N. C. Wong, and K. K. Berggren, “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Opt. Lett. 34(23), 3607–3609 (2009).
[CrossRef] [PubMed]

B. Baek, J. A. Stern, and S. W. Nam, “Superconducting nanowire single-photon detector in an optical cavity for front-side illumination,” Appl. Phys. Lett. 95(19), 191110 (2009).
[CrossRef]

2008

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

2007

J. K. W. Yang, A. J. Kerman, E. A. Dauler, V. Anant, K. M. Rosfjord, and K. K. Berggren, “Modeling the electrical and thermal response of superconducting nanowire single-photon detectors,” IEEE Trans. Appl. Supercond. 17(2), 581–585 (2007).
[CrossRef]

2006

2001

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Allacher, A.

Anant, V.

J. K. W. Yang, A. J. Kerman, E. A. Dauler, V. Anant, K. M. Rosfjord, and K. K. Berggren, “Modeling the electrical and thermal response of superconducting nanowire single-photon detectors,” IEEE Trans. Appl. Supercond. 17(2), 581–585 (2007).
[CrossRef]

K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. M. Voronov, G. N. Gol’tsman, and K. K. Berggren, “Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating,” Opt. Express 14(2), 527–534 (2006).
[CrossRef] [PubMed]

Asai, T.

Baek, B.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

B. Baek, J. A. Stern, and S. W. Nam, “Superconducting nanowire single-photon detector in an optical cavity for front-side illumination,” Appl. Phys. Lett. 95(19), 191110 (2009).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

Berggren, K. K.

J. R. Clem and K. K. Berggren, “Geometry-dependent critical currents in superconducting nanocircuits,” Phys. Rev. B 84(17), 174510 (2011).
[CrossRef]

X. L. Hu, T. Zhong, J. E. White, E. A. Dauler, F. Najafi, C. H. Herder, F. N. C. Wong, and K. K. Berggren, “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Opt. Lett. 34(23), 3607–3609 (2009).
[CrossRef] [PubMed]

J. K. W. Yang, A. J. Kerman, E. A. Dauler, V. Anant, K. M. Rosfjord, and K. K. Berggren, “Modeling the electrical and thermal response of superconducting nanowire single-photon detectors,” IEEE Trans. Appl. Supercond. 17(2), 581–585 (2007).
[CrossRef]

K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. M. Voronov, G. N. Gol’tsman, and K. K. Berggren, “Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating,” Opt. Express 14(2), 527–534 (2006).
[CrossRef] [PubMed]

Boroson, D. M.

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Chen, J.

Chen, S.

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

S. Chen, D. Liu, W. Zhang, L. You, Y. He, W. Zhang, X. Yang, G. Wu, M. Ren, H. Zeng, Z. Wang, X. Xie, and M. Jiang, “Time-of-flight laser ranging and imaging at 1550 nm using low-jitter superconducting nanowire single-photon detection system,” Appl. Opt. 52(14), 3241–3245 (2013).
[CrossRef] [PubMed]

Chulkova, G.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Clem, J. R.

J. R. Clem and K. K. Berggren, “Geometry-dependent critical currents in superconducting nanocircuits,” Phys. Rev. B 84(17), 174510 (2011).
[CrossRef]

Dauler, E. A.

D. Rosenberg, A. J. Kerman, R. J. Molnar, and E. A. Dauler, “High-speed and high-efficiency superconducting nanowire single photon detector array,” Opt. Express 21(2), 1440–1447 (2013).
[CrossRef] [PubMed]

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[CrossRef]

X. L. Hu, T. Zhong, J. E. White, E. A. Dauler, F. Najafi, C. H. Herder, F. N. C. Wong, and K. K. Berggren, “Fiber-coupled nanowire photon counter at 1550 nm with 24% system detection efficiency,” Opt. Lett. 34(23), 3607–3609 (2009).
[CrossRef] [PubMed]

J. K. W. Yang, A. J. Kerman, E. A. Dauler, V. Anant, K. M. Rosfjord, and K. K. Berggren, “Modeling the electrical and thermal response of superconducting nanowire single-photon detectors,” IEEE Trans. Appl. Supercond. 17(2), 581–585 (2007).
[CrossRef]

K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. M. Voronov, G. N. Gol’tsman, and K. K. Berggren, “Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating,” Opt. Express 14(2), 527–534 (2006).
[CrossRef] [PubMed]

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Devoe, C. E.

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Dixon, A. R.

Domeki, T.

Dynes, J. F.

Dzardanov, A.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Eisaman, M. D.

M. D. Eisaman, J. Fan, A. Migdall, and S. V. Polyakov, “Invited Review Article: Single-photon sources and detectors,” Rev. Sci. Instrum. 82(7), 071101 (2011).
[CrossRef] [PubMed]

Fan, J.

M. D. Eisaman, J. Fan, A. Migdall, and S. V. Polyakov, “Invited Review Article: Single-photon sources and detectors,” Rev. Sci. Instrum. 82(7), 071101 (2011).
[CrossRef] [PubMed]

Fujiwara, M.

R.-B. Jin, R. Shimizu, K. Wakui, M. Fujiwara, T. Yamashita, S. Miki, H. Terai, Z. Wang, and M. Sasaki, “Pulsed Sagnac polarization-entangled photon source with a PPKTP crystal at telecom wavelength,” Opt. Express 22(10), 11498–11507 (2014).
[CrossRef] [PubMed]

R. Ikuta, T. Kobayashi, S. Yasui, S. Miki, T. Yamashita, H. Terai, M. Fujiwara, T. Yamamoto, M. Koashi, M. Sasaki, Z. Wang, and N. Imoto, “Frequency down-conversion of 637 nm light to the telecommunication band for non-classical light emitted from NV centers in diamond,” Opt. Express 22(9), 11205–11214 (2014).
[CrossRef] [PubMed]

M. Sasaki, M. Fujiwara, H. Ishizuka, W. Klaus, K. Wakui, M. Takeoka, S. Miki, T. Yamashita, Z. Wang, A. Tanaka, K. Yoshino, Y. Nambu, S. Takahashi, A. Tajima, A. Tomita, T. Domeki, T. Hasegawa, Y. Sakai, H. Kobayashi, T. Asai, K. Shimizu, T. Tokura, T. Tsurumaru, M. Matsui, T. Honjo, K. Tamaki, H. Takesue, Y. Tokura, J. F. Dynes, A. R. Dixon, A. W. Sharpe, Z. L. Yuan, A. J. Shields, S. Uchikoga, M. Legré, S. Robyr, P. Trinkler, L. Monat, J. B. Page, G. Ribordy, A. Poppe, A. Allacher, O. Maurhart, T. Länger, M. Peev, and A. Zeilinger, “Field test of quantum key distribution in the Tokyo QKD Network,” Opt. Express 19(11), 10387–10409 (2011).
[CrossRef] [PubMed]

M. Fujiwara, A. Tanaka, S. Takahashi, K. Yoshino, Y. Nambu, A. Tajima, S. Miki, T. Yamashita, Z. Wang, A. Tomita, and M. Sasaki, “Afterpulse-like phenomenon of superconducting single photon detector in high speed quantum key distribution system,” Opt. Express 19(20), 19562–19571 (2011).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, W. Qiu, M. Fujiwara, M. Sasaki, and Z. Wang, “Temperature Dependent Performances of Superconducting Nanowire Single-Photon Detectors in an Ultralow-Temperature Region,” Appl. Phys. Express 3(10), 102502 (2010).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, and Z. Wang, “Development of SNSPD system with Gifford-McMahon cryocooler,” IEEE Trans. Appl. Supercond. 19(3), 332–335 (2009).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

Gerrits, T.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Gol’tsman, G. N.

K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. M. Voronov, G. N. Gol’tsman, and K. K. Berggren, “Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating,” Opt. Express 14(2), 527–534 (2006).
[CrossRef] [PubMed]

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Grein, M. E.

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Gu, M.

Hadfield, R. H.

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

Harrington, S.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Hasegawa, T.

He, Y.

S. Chen, D. Liu, W. Zhang, L. You, Y. He, W. Zhang, X. Yang, G. Wu, M. Ren, H. Zeng, Z. Wang, X. Xie, and M. Jiang, “Time-of-flight laser ranging and imaging at 1550 nm using low-jitter superconducting nanowire single-photon detection system,” Appl. Opt. 52(14), 3241–3245 (2013).
[CrossRef] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

Herder, C. H.

Honjo, T.

Hu, X. L.

Ikuta, R.

Imoto, N.

Ishizuka, H.

Jia, T.

Jiang, M.

Jin, R.-B.

Kang, L.

Kerman, A. J.

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[CrossRef]

D. Rosenberg, A. J. Kerman, R. J. Molnar, and E. A. Dauler, “High-speed and high-efficiency superconducting nanowire single photon detector array,” Opt. Express 21(2), 1440–1447 (2013).
[CrossRef] [PubMed]

J. K. W. Yang, A. J. Kerman, E. A. Dauler, V. Anant, K. M. Rosfjord, and K. K. Berggren, “Modeling the electrical and thermal response of superconducting nanowire single-photon detectors,” IEEE Trans. Appl. Supercond. 17(2), 581–585 (2007).
[CrossRef]

K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. M. Voronov, G. N. Gol’tsman, and K. K. Berggren, “Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating,” Opt. Express 14(2), 527–534 (2006).
[CrossRef] [PubMed]

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Klaus, W.

Koashi, M.

Kobayashi, H.

Kobayashi, T.

Länger, T.

Legré, M.

Li, H.

Lipatov, A.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Lita, A. E.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Liu, D.

S. Chen, D. Liu, W. Zhang, L. You, Y. He, W. Zhang, X. Yang, G. Wu, M. Ren, H. Zeng, Z. Wang, X. Xie, and M. Jiang, “Time-of-flight laser ranging and imaging at 1550 nm using low-jitter superconducting nanowire single-photon detection system,” Appl. Opt. 52(14), 3241–3245 (2013).
[CrossRef] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

Liu, X.

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
[CrossRef] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

Marsili, F.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Matsui, M.

Maurhart, O.

Migdall, A.

M. D. Eisaman, J. Fan, A. Migdall, and S. V. Polyakov, “Invited Review Article: Single-photon sources and detectors,” Rev. Sci. Instrum. 82(7), 071101 (2011).
[CrossRef] [PubMed]

Miki, S.

R.-B. Jin, R. Shimizu, K. Wakui, M. Fujiwara, T. Yamashita, S. Miki, H. Terai, Z. Wang, and M. Sasaki, “Pulsed Sagnac polarization-entangled photon source with a PPKTP crystal at telecom wavelength,” Opt. Express 22(10), 11498–11507 (2014).
[CrossRef] [PubMed]

R. Ikuta, T. Kobayashi, S. Yasui, S. Miki, T. Yamashita, H. Terai, M. Fujiwara, T. Yamamoto, M. Koashi, M. Sasaki, Z. Wang, and N. Imoto, “Frequency down-conversion of 637 nm light to the telecommunication band for non-classical light emitted from NV centers in diamond,” Opt. Express 22(9), 11205–11214 (2014).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, H. Terai, and Z. Wang, “Low-filling-factor superconducting single photon detector with high system detection efficiency,” Opt. Express 21(22), 27177–27184 (2013).
[CrossRef] [PubMed]

S. Miki, T. Yamashita, H. Terai, and Z. Wang, “High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler,” Opt. Express 21(8), 10208–10214 (2013).
[CrossRef] [PubMed]

M. Sasaki, M. Fujiwara, H. Ishizuka, W. Klaus, K. Wakui, M. Takeoka, S. Miki, T. Yamashita, Z. Wang, A. Tanaka, K. Yoshino, Y. Nambu, S. Takahashi, A. Tajima, A. Tomita, T. Domeki, T. Hasegawa, Y. Sakai, H. Kobayashi, T. Asai, K. Shimizu, T. Tokura, T. Tsurumaru, M. Matsui, T. Honjo, K. Tamaki, H. Takesue, Y. Tokura, J. F. Dynes, A. R. Dixon, A. W. Sharpe, Z. L. Yuan, A. J. Shields, S. Uchikoga, M. Legré, S. Robyr, P. Trinkler, L. Monat, J. B. Page, G. Ribordy, A. Poppe, A. Allacher, O. Maurhart, T. Länger, M. Peev, and A. Zeilinger, “Field test of quantum key distribution in the Tokyo QKD Network,” Opt. Express 19(11), 10387–10409 (2011).
[CrossRef] [PubMed]

M. Fujiwara, A. Tanaka, S. Takahashi, K. Yoshino, Y. Nambu, A. Tajima, S. Miki, T. Yamashita, Z. Wang, A. Tomita, and M. Sasaki, “Afterpulse-like phenomenon of superconducting single photon detector in high speed quantum key distribution system,” Opt. Express 19(20), 19562–19571 (2011).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, W. Qiu, M. Fujiwara, M. Sasaki, and Z. Wang, “Temperature Dependent Performances of Superconducting Nanowire Single-Photon Detectors in an Ultralow-Temperature Region,” Appl. Phys. Express 3(10), 102502 (2010).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, and Z. Wang, “Development of SNSPD system with Gifford-McMahon cryocooler,” IEEE Trans. Appl. Supercond. 19(3), 332–335 (2009).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

Miller, A. J.

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

Mirin, R. P.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Molnar, R. J.

D. Rosenberg, A. J. Kerman, R. J. Molnar, and E. A. Dauler, “High-speed and high-efficiency superconducting nanowire single photon detector array,” Opt. Express 21(2), 1440–1447 (2013).
[CrossRef] [PubMed]

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[CrossRef]

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Monat, L.

Murphy, D. V.

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Najafi, F.

Nam, S. W.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

B. Baek, J. A. Stern, and S. W. Nam, “Superconducting nanowire single-photon detector in an optical cavity for front-side illumination,” Appl. Phys. Lett. 95(19), 191110 (2009).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

Nambu, Y.

Okunev, O.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Page, J. B.

Peev, M.

Peng, W.

Polyakov, S. V.

M. D. Eisaman, J. Fan, A. Migdall, and S. V. Polyakov, “Invited Review Article: Single-photon sources and detectors,” Rev. Sci. Instrum. 82(7), 071101 (2011).
[CrossRef] [PubMed]

Poppe, A.

Qiu, W.

T. Yamashita, S. Miki, W. Qiu, M. Fujiwara, M. Sasaki, and Z. Wang, “Temperature Dependent Performances of Superconducting Nanowire Single-Photon Detectors in an Ultralow-Temperature Region,” Appl. Phys. Express 3(10), 102502 (2010).
[CrossRef]

Ren, M.

Ribordy, G.

Robinson, B. S.

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Robyr, S.

Rosenberg, D.

D. Rosenberg, A. J. Kerman, R. J. Molnar, and E. A. Dauler, “High-speed and high-efficiency superconducting nanowire single photon detector array,” Opt. Express 21(2), 1440–1447 (2013).
[CrossRef] [PubMed]

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[CrossRef]

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Rosfjord, K. M.

J. K. W. Yang, A. J. Kerman, E. A. Dauler, V. Anant, K. M. Rosfjord, and K. K. Berggren, “Modeling the electrical and thermal response of superconducting nanowire single-photon detectors,” IEEE Trans. Appl. Supercond. 17(2), 581–585 (2007).
[CrossRef]

K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. M. Voronov, G. N. Gol’tsman, and K. K. Berggren, “Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating,” Opt. Express 14(2), 527–534 (2006).
[CrossRef] [PubMed]

Sakai, Y.

Sasaki, M.

R. Ikuta, T. Kobayashi, S. Yasui, S. Miki, T. Yamashita, H. Terai, M. Fujiwara, T. Yamamoto, M. Koashi, M. Sasaki, Z. Wang, and N. Imoto, “Frequency down-conversion of 637 nm light to the telecommunication band for non-classical light emitted from NV centers in diamond,” Opt. Express 22(9), 11205–11214 (2014).
[CrossRef] [PubMed]

R.-B. Jin, R. Shimizu, K. Wakui, M. Fujiwara, T. Yamashita, S. Miki, H. Terai, Z. Wang, and M. Sasaki, “Pulsed Sagnac polarization-entangled photon source with a PPKTP crystal at telecom wavelength,” Opt. Express 22(10), 11498–11507 (2014).
[CrossRef] [PubMed]

M. Sasaki, M. Fujiwara, H. Ishizuka, W. Klaus, K. Wakui, M. Takeoka, S. Miki, T. Yamashita, Z. Wang, A. Tanaka, K. Yoshino, Y. Nambu, S. Takahashi, A. Tajima, A. Tomita, T. Domeki, T. Hasegawa, Y. Sakai, H. Kobayashi, T. Asai, K. Shimizu, T. Tokura, T. Tsurumaru, M. Matsui, T. Honjo, K. Tamaki, H. Takesue, Y. Tokura, J. F. Dynes, A. R. Dixon, A. W. Sharpe, Z. L. Yuan, A. J. Shields, S. Uchikoga, M. Legré, S. Robyr, P. Trinkler, L. Monat, J. B. Page, G. Ribordy, A. Poppe, A. Allacher, O. Maurhart, T. Länger, M. Peev, and A. Zeilinger, “Field test of quantum key distribution in the Tokyo QKD Network,” Opt. Express 19(11), 10387–10409 (2011).
[CrossRef] [PubMed]

M. Fujiwara, A. Tanaka, S. Takahashi, K. Yoshino, Y. Nambu, A. Tajima, S. Miki, T. Yamashita, Z. Wang, A. Tomita, and M. Sasaki, “Afterpulse-like phenomenon of superconducting single photon detector in high speed quantum key distribution system,” Opt. Express 19(20), 19562–19571 (2011).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, W. Qiu, M. Fujiwara, M. Sasaki, and Z. Wang, “Temperature Dependent Performances of Superconducting Nanowire Single-Photon Detectors in an Ultralow-Temperature Region,” Appl. Phys. Express 3(10), 102502 (2010).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, and Z. Wang, “Development of SNSPD system with Gifford-McMahon cryocooler,” IEEE Trans. Appl. Supercond. 19(3), 332–335 (2009).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

Semenov, A.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Sharpe, A. W.

Shatrovoy, O.

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Shaw, M. D.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Shibata, H.

H. Shibata, K. Shimizu, H. Takesue, and Y. Tokura, “Superconducting Nanowire Single-Photon Detector with Ultralow Dark Count Rate Using Cold Optical Filters,” Appl. Phys. Express 6(7), 072801 (2013).
[CrossRef]

Shields, A. J.

Shimizu, K.

Shimizu, R.

Smirnov, K.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Sobolewski, R.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Stern, J. A.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

B. Baek, J. A. Stern, and S. W. Nam, “Superconducting nanowire single-photon detector in an optical cavity for front-side illumination,” Appl. Phys. Lett. 95(19), 191110 (2009).
[CrossRef]

Tajima, A.

Takahashi, S.

Takeoka, M.

Takesue, H.

Tamaki, K.

Tanaka, A.

Terai, H.

Tokura, T.

Tokura, Y.

Tomita, A.

Trinkler, P.

Tsurumaru, T.

Uchikoga, S.

Vayshenker, I.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Verma, V. B.

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Voronov, B.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Voronov, B. M.

Wakui, K.

Wan, C.

Wang, Z.

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
[CrossRef] [PubMed]

R. Ikuta, T. Kobayashi, S. Yasui, S. Miki, T. Yamashita, H. Terai, M. Fujiwara, T. Yamamoto, M. Koashi, M. Sasaki, Z. Wang, and N. Imoto, “Frequency down-conversion of 637 nm light to the telecommunication band for non-classical light emitted from NV centers in diamond,” Opt. Express 22(9), 11205–11214 (2014).
[CrossRef] [PubMed]

R.-B. Jin, R. Shimizu, K. Wakui, M. Fujiwara, T. Yamashita, S. Miki, H. Terai, Z. Wang, and M. Sasaki, “Pulsed Sagnac polarization-entangled photon source with a PPKTP crystal at telecom wavelength,” Opt. Express 22(10), 11498–11507 (2014).
[CrossRef] [PubMed]

S. Miki, T. Yamashita, H. Terai, and Z. Wang, “High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler,” Opt. Express 21(8), 10208–10214 (2013).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, H. Terai, and Z. Wang, “Low-filling-factor superconducting single photon detector with high system detection efficiency,” Opt. Express 21(22), 27177–27184 (2013).
[CrossRef] [PubMed]

S. Chen, D. Liu, W. Zhang, L. You, Y. He, W. Zhang, X. Yang, G. Wu, M. Ren, H. Zeng, Z. Wang, X. Xie, and M. Jiang, “Time-of-flight laser ranging and imaging at 1550 nm using low-jitter superconducting nanowire single-photon detection system,” Appl. Opt. 52(14), 3241–3245 (2013).
[CrossRef] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

M. Fujiwara, A. Tanaka, S. Takahashi, K. Yoshino, Y. Nambu, A. Tajima, S. Miki, T. Yamashita, Z. Wang, A. Tomita, and M. Sasaki, “Afterpulse-like phenomenon of superconducting single photon detector in high speed quantum key distribution system,” Opt. Express 19(20), 19562–19571 (2011).
[CrossRef] [PubMed]

M. Sasaki, M. Fujiwara, H. Ishizuka, W. Klaus, K. Wakui, M. Takeoka, S. Miki, T. Yamashita, Z. Wang, A. Tanaka, K. Yoshino, Y. Nambu, S. Takahashi, A. Tajima, A. Tomita, T. Domeki, T. Hasegawa, Y. Sakai, H. Kobayashi, T. Asai, K. Shimizu, T. Tokura, T. Tsurumaru, M. Matsui, T. Honjo, K. Tamaki, H. Takesue, Y. Tokura, J. F. Dynes, A. R. Dixon, A. W. Sharpe, Z. L. Yuan, A. J. Shields, S. Uchikoga, M. Legré, S. Robyr, P. Trinkler, L. Monat, J. B. Page, G. Ribordy, A. Poppe, A. Allacher, O. Maurhart, T. Länger, M. Peev, and A. Zeilinger, “Field test of quantum key distribution in the Tokyo QKD Network,” Opt. Express 19(11), 10387–10409 (2011).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, W. Qiu, M. Fujiwara, M. Sasaki, and Z. Wang, “Temperature Dependent Performances of Superconducting Nanowire Single-Photon Detectors in an Ultralow-Temperature Region,” Appl. Phys. Express 3(10), 102502 (2010).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, and Z. Wang, “Development of SNSPD system with Gifford-McMahon cryocooler,” IEEE Trans. Appl. Supercond. 19(3), 332–335 (2009).
[CrossRef]

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

White, J. E.

Williams, C.

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

Wong, F. N. C.

Wu, G.

Wu, P.

Xie, X.

Xu, W.

Yamamoto, T.

Yamashita, T.

R.-B. Jin, R. Shimizu, K. Wakui, M. Fujiwara, T. Yamashita, S. Miki, H. Terai, Z. Wang, and M. Sasaki, “Pulsed Sagnac polarization-entangled photon source with a PPKTP crystal at telecom wavelength,” Opt. Express 22(10), 11498–11507 (2014).
[CrossRef] [PubMed]

R. Ikuta, T. Kobayashi, S. Yasui, S. Miki, T. Yamashita, H. Terai, M. Fujiwara, T. Yamamoto, M. Koashi, M. Sasaki, Z. Wang, and N. Imoto, “Frequency down-conversion of 637 nm light to the telecommunication band for non-classical light emitted from NV centers in diamond,” Opt. Express 22(9), 11205–11214 (2014).
[CrossRef] [PubMed]

S. Miki, T. Yamashita, H. Terai, and Z. Wang, “High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler,” Opt. Express 21(8), 10208–10214 (2013).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, H. Terai, and Z. Wang, “Low-filling-factor superconducting single photon detector with high system detection efficiency,” Opt. Express 21(22), 27177–27184 (2013).
[CrossRef] [PubMed]

M. Sasaki, M. Fujiwara, H. Ishizuka, W. Klaus, K. Wakui, M. Takeoka, S. Miki, T. Yamashita, Z. Wang, A. Tanaka, K. Yoshino, Y. Nambu, S. Takahashi, A. Tajima, A. Tomita, T. Domeki, T. Hasegawa, Y. Sakai, H. Kobayashi, T. Asai, K. Shimizu, T. Tokura, T. Tsurumaru, M. Matsui, T. Honjo, K. Tamaki, H. Takesue, Y. Tokura, J. F. Dynes, A. R. Dixon, A. W. Sharpe, Z. L. Yuan, A. J. Shields, S. Uchikoga, M. Legré, S. Robyr, P. Trinkler, L. Monat, J. B. Page, G. Ribordy, A. Poppe, A. Allacher, O. Maurhart, T. Länger, M. Peev, and A. Zeilinger, “Field test of quantum key distribution in the Tokyo QKD Network,” Opt. Express 19(11), 10387–10409 (2011).
[CrossRef] [PubMed]

M. Fujiwara, A. Tanaka, S. Takahashi, K. Yoshino, Y. Nambu, A. Tajima, S. Miki, T. Yamashita, Z. Wang, A. Tomita, and M. Sasaki, “Afterpulse-like phenomenon of superconducting single photon detector in high speed quantum key distribution system,” Opt. Express 19(20), 19562–19571 (2011).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, W. Qiu, M. Fujiwara, M. Sasaki, and Z. Wang, “Temperature Dependent Performances of Superconducting Nanowire Single-Photon Detectors in an Ultralow-Temperature Region,” Appl. Phys. Express 3(10), 102502 (2010).
[CrossRef]

Yang, J. K. W.

J. K. W. Yang, A. J. Kerman, E. A. Dauler, V. Anant, K. M. Rosfjord, and K. K. Berggren, “Modeling the electrical and thermal response of superconducting nanowire single-photon detectors,” IEEE Trans. Appl. Supercond. 17(2), 581–585 (2007).
[CrossRef]

K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. M. Voronov, G. N. Gol’tsman, and K. K. Berggren, “Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating,” Opt. Express 14(2), 527–534 (2006).
[CrossRef] [PubMed]

Yang, X.

Yasui, S.

Yoon, J.

M. E. Grein, A. J. Kerman, E. A. Dauler, O. Shatrovoy, R. J. Molnar, D. Rosenberg, J. Yoon, C. E. Devoe, D. V. Murphy, B. S. Robinson, and D. M. Boroson, “Design of a ground-based optical receiver for the lunar laser communications demonstration,” in 2011International Conference on Space Optical Systems and Applications, pp. 78–82.

Yoshino, K.

You, L.

Yuan, Z. L.

Zeilinger, A.

Zeng, H.

Zhang, L.

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
[CrossRef] [PubMed]

Q. Zhao, T. Jia, M. Gu, C. Wan, L. Zhang, W. Xu, L. Kang, J. Chen, and P. Wu, “Counting rate enhancements in superconducting nanowire single-photon detectors with improved readout circuits,” Opt. Lett. 39(7), 1869–1872 (2014).
[CrossRef] [PubMed]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

Zhang, W.

Zhao, Q.

Zhong, T.

AIP Advances

L. You, X. Yang, Y. He, W. Zhang, D. Liu, W. Zhang, L. Zhang, L. Zhang, X. Liu, S. Chen, Z. Wang, and X. Xie, “Jitter analysis of a superconducting nanowire single photon detector,” AIP Advances 3(7), 072135 (2013).
[CrossRef]

Appl. Opt.

Appl. Phys. Express

T. Yamashita, S. Miki, W. Qiu, M. Fujiwara, M. Sasaki, and Z. Wang, “Temperature Dependent Performances of Superconducting Nanowire Single-Photon Detectors in an Ultralow-Temperature Region,” Appl. Phys. Express 3(10), 102502 (2010).
[CrossRef]

H. Shibata, K. Shimizu, H. Takesue, and Y. Tokura, “Superconducting Nanowire Single-Photon Detector with Ultralow Dark Count Rate Using Cold Optical Filters,” Appl. Phys. Express 6(7), 072801 (2013).
[CrossRef]

Appl. Phys. Lett.

S. Miki, M. Fujiwara, M. Sasaki, B. Baek, A. J. Miller, R. H. Hadfield, S. W. Nam, and Z. Wang, “Large sensitive-area NbN nanowire superconducting single-photon detectors fabricated on single-crystal MgO substrates,” Appl. Phys. Lett. 92(6), 061116 (2008).
[CrossRef]

G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001).
[CrossRef]

B. Baek, J. A. Stern, and S. W. Nam, “Superconducting nanowire single-photon detector in an optical cavity for front-side illumination,” Appl. Phys. Lett. 95(19), 191110 (2009).
[CrossRef]

IEEE Trans. Appl. Supercond.

S. Miki, M. Fujiwara, M. Sasaki, and Z. Wang, “Development of SNSPD system with Gifford-McMahon cryocooler,” IEEE Trans. Appl. Supercond. 19(3), 332–335 (2009).
[CrossRef]

J. K. W. Yang, A. J. Kerman, E. A. Dauler, V. Anant, K. M. Rosfjord, and K. K. Berggren, “Modeling the electrical and thermal response of superconducting nanowire single-photon detectors,” IEEE Trans. Appl. Supercond. 17(2), 581–585 (2007).
[CrossRef]

J. Appl. Phys.

A. J. Kerman, D. Rosenberg, R. J. Molnar, and E. A. Dauler, “Readout of superconducting nanowire single-photon detectors at high count rates,” J. Appl. Phys. 113(14), 144511 (2013).
[CrossRef]

Nat. Photonics

F. Marsili, V. B. Verma, J. A. Stern, S. Harrington, A. E. Lita, T. Gerrits, I. Vayshenker, B. Baek, M. D. Shaw, R. P. Mirin, and S. W. Nam, “Detecting single infrared photons with 93% system efficiency,” Nat. Photonics 7(3), 210–214 (2013).
[CrossRef]

Opt. Express

D. Rosenberg, A. J. Kerman, R. J. Molnar, and E. A. Dauler, “High-speed and high-efficiency superconducting nanowire single photon detector array,” Opt. Express 21(2), 1440–1447 (2013).
[CrossRef] [PubMed]

R. Ikuta, T. Kobayashi, S. Yasui, S. Miki, T. Yamashita, H. Terai, M. Fujiwara, T. Yamamoto, M. Koashi, M. Sasaki, Z. Wang, and N. Imoto, “Frequency down-conversion of 637 nm light to the telecommunication band for non-classical light emitted from NV centers in diamond,” Opt. Express 22(9), 11205–11214 (2014).
[CrossRef] [PubMed]

R.-B. Jin, R. Shimizu, K. Wakui, M. Fujiwara, T. Yamashita, S. Miki, H. Terai, Z. Wang, and M. Sasaki, “Pulsed Sagnac polarization-entangled photon source with a PPKTP crystal at telecom wavelength,” Opt. Express 22(10), 11498–11507 (2014).
[CrossRef] [PubMed]

K. M. Rosfjord, J. K. W. Yang, E. A. Dauler, A. J. Kerman, V. Anant, B. M. Voronov, G. N. Gol’tsman, and K. K. Berggren, “Nanowire Single-photon detector with an integrated optical cavity and anti-reflection coating,” Opt. Express 14(2), 527–534 (2006).
[CrossRef] [PubMed]

M. Sasaki, M. Fujiwara, H. Ishizuka, W. Klaus, K. Wakui, M. Takeoka, S. Miki, T. Yamashita, Z. Wang, A. Tanaka, K. Yoshino, Y. Nambu, S. Takahashi, A. Tajima, A. Tomita, T. Domeki, T. Hasegawa, Y. Sakai, H. Kobayashi, T. Asai, K. Shimizu, T. Tokura, T. Tsurumaru, M. Matsui, T. Honjo, K. Tamaki, H. Takesue, Y. Tokura, J. F. Dynes, A. R. Dixon, A. W. Sharpe, Z. L. Yuan, A. J. Shields, S. Uchikoga, M. Legré, S. Robyr, P. Trinkler, L. Monat, J. B. Page, G. Ribordy, A. Poppe, A. Allacher, O. Maurhart, T. Länger, M. Peev, and A. Zeilinger, “Field test of quantum key distribution in the Tokyo QKD Network,” Opt. Express 19(11), 10387–10409 (2011).
[CrossRef] [PubMed]

S. Miki, T. Yamashita, H. Terai, and Z. Wang, “High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler,” Opt. Express 21(8), 10208–10214 (2013).
[CrossRef] [PubMed]

T. Yamashita, S. Miki, H. Terai, and Z. Wang, “Low-filling-factor superconducting single photon detector with high system detection efficiency,” Opt. Express 21(22), 27177–27184 (2013).
[CrossRef] [PubMed]

M. Fujiwara, A. Tanaka, S. Takahashi, K. Yoshino, Y. Nambu, A. Tajima, S. Miki, T. Yamashita, Z. Wang, A. Tomita, and M. Sasaki, “Afterpulse-like phenomenon of superconducting single photon detector in high speed quantum key distribution system,” Opt. Express 19(20), 19562–19571 (2011).
[CrossRef] [PubMed]

X. Yang, H. Li, W. Zhang, L. You, L. Zhang, X. Liu, Z. Wang, W. Peng, X. Xie, and M. Jiang, “Superconducting nanowire single photon detector with on-chip bandpass filter,” Opt. Express 22(13), 16267–16272 (2014).
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M. D. Eisaman, J. Fan, A. Migdall, and S. V. Polyakov, “Invited Review Article: Single-photon sources and detectors,” Rev. Sci. Instrum. 82(7), 071101 (2011).
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W. Slysz, M. Wegrzecki, J. Bar, P. Grabiec, M. Gorska, E. Reiger, S. Dorenbos, V. Zwiller, I. Milostnaya, O. Minaeva, A. Antipov, O. Okunev, A. Korneev, K. Smirnov, B. Voronov, N. Kaurova, G. N. Gol'tsman, J. Kitaygorsky, D. Pan, A. Pearlmann, A. Cross, I. Komissarov, and R. Sobolewski, “Fiber-coupled NbN superconducting single-photon detectors for quantum correlation measurements,” Photon Counting Applications, Quantum Optics, and Quantum Cryptography 6583 (2007).

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Figures (5)

Fig. 1
Fig. 1

(a) Schematic of stack structure of the SSPD (not to scale). (b) Scanning electron micrograph of a circular active area of SSPD with a diameter of 35 µm. The line-width of the nanowires and the space between them are 150 nm and 100 nm, respectively.

Fig. 2
Fig. 2

System detection efficiency (SDE), system dark count rate (SDCR), and device dark count rate (DDCR) as a function of the normalized bias current. The SDE was measured at a wavelength of 635 nm. The triangle and pentacle indicate the SDCR and DDCR with the DCR of the SSPD measured by mounting the device in the package with and without a MM optical fiber connected, respectively.

Fig. 3
Fig. 3

The normalized bias current dependence of the SDE for incident photons with wavelengths of 635 nm (red circle), 785 nm (green square), 904 nm (blue triangle), and 980 nm (purple quadrangle).

Fig. 4
Fig. 4

Response counting rate dependence of the SDE. The wavelength of the incident photons was 635 nm, and the detector was biased at 0.92Isw.

Fig. 5
Fig. 5

Histograms of the time-correlated photon counts measured at the wavelength of 1550 nm. Circles and stars indicate the histograms when the device was coupled with multi-mode (MM) fiber and single-mode (SM) fiber, respectively. The red lines are the fitted curves using the Gaussian distribution.

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