Abstract

Femtosecond laser-irradiation-induced phase change of a new amorphous Si2Sb2Te3 film with a good thermal stability and low reset current is studied by coherent phonon spectroscopy. New coherent optical phonons (COP) occur as laser irradiation fluence reaches some threshold, implying laser-induced phase change emerged. The compositions in phase-changed area revealed by COP modes agree well with ones in reported annealed crystallized film, implying laser-induced phase change as crystallization. Pump fluence dependence of COP dynamics reveals good crystallization quality of the phase-changed film, exhibiting promising application of Si2Sb2Te3 films in optical phase change memory. Acoustic phonons are also found and identified.

© 2013 OSA

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  1. X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).
  2. J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
    [CrossRef]
  3. Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
    [CrossRef]
  4. F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
    [CrossRef] [PubMed]
  5. K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
    [CrossRef]
  6. B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
    [CrossRef]
  7. W. L. Zhu, C. Z. Wang, M. C. Sun, S. M. Li, J. W. Zhai, and T. S. Lai, “Characterization of Femtosecond laser-irradiation crystallization and structure of multiple periodic Si/Sb₈₀Te₂₀ nanocomposite films by coherent phonon spectroscopy,” Opt. Express19(23), 22684–22691 (2011).
    [CrossRef] [PubMed]
  8. M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
    [CrossRef]
  9. Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
    [CrossRef]
  10. S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).
  11. Y. G. Wang, X. F. Xu, and R. Venkatasubramanian, “Reduction in coherent phonon lifetime in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.93(11), 113114 (2008).
    [CrossRef]
  12. A. Q. Wu, X. F. Xu, and R. Venkatasubramanian, “Ultrafast dynamics of photoexcited coherent phonon in Bi2Te3 thin films,” Appl. Phys. Lett.92(1), 011108 (2008).
    [CrossRef]
  13. M. Hase, Y. Miyamoto, and J. Tominaga, “Ultrafast dephasing of coherent optical phonons in atomically controlled GeTe/Sb2Te3 superlattices,” Phys. Rev. B79(17), 174112 (2009).
    [CrossRef]
  14. M. F. DeCamp, D. A. Reis, P. H. Bucksbaum, and R. Merlin, “Dynamics and coherent control of high-amplitude optical phonons in bismuth,” Phys. Rev. B64(9), 092301 (2001).
    [CrossRef]
  15. H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao, “Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films,” Appl. Phys. Lett.90(19), 191906 (2007).
    [CrossRef]
  16. Y. G. Wang, C. Leibig, X. F. Xu, and R. Venkatasubramanian, “Acoustic phonon scattering in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.97(8), 083103 (2010).
    [CrossRef]

2011 (5)

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

W. L. Zhu, C. Z. Wang, M. C. Sun, S. M. Li, J. W. Zhai, and T. S. Lai, “Characterization of Femtosecond laser-irradiation crystallization and structure of multiple periodic Si/Sb₈₀Te₂₀ nanocomposite films by coherent phonon spectroscopy,” Opt. Express19(23), 22684–22691 (2011).
[CrossRef] [PubMed]

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

2010 (3)

Y. G. Wang, C. Leibig, X. F. Xu, and R. Venkatasubramanian, “Acoustic phonon scattering in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.97(8), 083103 (2010).
[CrossRef]

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
[CrossRef]

2009 (1)

M. Hase, Y. Miyamoto, and J. Tominaga, “Ultrafast dephasing of coherent optical phonons in atomically controlled GeTe/Sb2Te3 superlattices,” Phys. Rev. B79(17), 174112 (2009).
[CrossRef]

2008 (2)

Y. G. Wang, X. F. Xu, and R. Venkatasubramanian, “Reduction in coherent phonon lifetime in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.93(11), 113114 (2008).
[CrossRef]

A. Q. Wu, X. F. Xu, and R. Venkatasubramanian, “Ultrafast dynamics of photoexcited coherent phonon in Bi2Te3 thin films,” Appl. Phys. Lett.92(1), 011108 (2008).
[CrossRef]

2007 (2)

H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao, “Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films,” Appl. Phys. Lett.90(19), 191906 (2007).
[CrossRef]

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

2006 (1)

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

2001 (1)

M. F. DeCamp, D. A. Reis, P. H. Bucksbaum, and R. Merlin, “Dynamics and coherent control of high-amplitude optical phonons in bismuth,” Phys. Rev. B64(9), 092301 (2001).
[CrossRef]

2000 (1)

M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
[CrossRef]

Béchevet, B.

M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
[CrossRef]

Bucksbaum, P. H.

M. F. DeCamp, D. A. Reis, P. H. Bucksbaum, and R. Merlin, “Dynamics and coherent control of high-amplitude optical phonons in bismuth,” Phys. Rev. B64(9), 092301 (2001).
[CrossRef]

Cai, B. C.

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

Cai, Y. F.

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

Chen, B.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

Chen, K.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Cheng, Y.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Clarke, R.

Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
[CrossRef]

DeCamp, M. F.

M. F. DeCamp, D. A. Reis, P. H. Bucksbaum, and R. Merlin, “Dynamics and coherent control of high-amplitude optical phonons in bismuth,” Phys. Rev. B64(9), 092301 (2001).
[CrossRef]

Dekorsy, T.

M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
[CrossRef]

Endicott, L.

Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
[CrossRef]

Feng, J.

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

Feng, S. L.

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Först, M.

M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
[CrossRef]

Fujii, M.

H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao, “Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films,” Appl. Phys. Lett.90(19), 191906 (2007).
[CrossRef]

Gan, F. X.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Gong, Y. F.

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

Han, X. D.

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Hase, M.

M. Hase, Y. Miyamoto, and J. Tominaga, “Ultrafast dephasing of coherent optical phonons in atomically controlled GeTe/Sb2Te3 superlattices,” Phys. Rev. B79(17), 174112 (2009).
[CrossRef]

Hirao, M.

H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao, “Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films,” Appl. Phys. Lett.90(19), 191906 (2007).
[CrossRef]

Huang, H.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Kurz, H.

M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
[CrossRef]

Lai, T.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Lai, T. S.

Lai, Y. F.

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

Laurenzis, M.

M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
[CrossRef]

Leibig, C.

Y. G. Wang, C. Leibig, X. F. Xu, and R. Venkatasubramanian, “Acoustic phonon scattering in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.97(8), 083103 (2010).
[CrossRef]

Li, S.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Li, S. M.

Li, Y. W.

Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
[CrossRef]

Lin, Y. Y.

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

Liu, B.

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Merlin, R.

M. F. DeCamp, D. A. Reis, P. H. Bucksbaum, and R. Merlin, “Dynamics and coherent control of high-amplitude optical phonons in bismuth,” Phys. Rev. B64(9), 092301 (2001).
[CrossRef]

Miyamoto, Y.

M. Hase, Y. Miyamoto, and J. Tominaga, “Ultrafast dephasing of coherent optical phonons in atomically controlled GeTe/Sb2Te3 superlattices,” Phys. Rev. B79(17), 174112 (2009).
[CrossRef]

Nakamura, N.

H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao, “Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films,” Appl. Phys. Lett.90(19), 191906 (2007).
[CrossRef]

Ogi, H.

H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao, “Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films,” Appl. Phys. Lett.90(19), 191906 (2007).
[CrossRef]

Peng, C.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

Qiao, B. W.

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

Rao, F.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

Reis, D. A.

M. F. DeCamp, D. A. Reis, P. H. Bucksbaum, and R. Merlin, “Dynamics and coherent control of high-amplitude optical phonons in bismuth,” Phys. Rev. B64(9), 092301 (2001).
[CrossRef]

Ren, K.

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

Shagawa, T.

H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao, “Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films,” Appl. Phys. Lett.90(19), 191906 (2007).
[CrossRef]

Song, S. N.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

Song, Z.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

Song, Z. T.

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Stoica, V. A.

Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
[CrossRef]

Sun, M. C.

Tang, T. A.

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

Tang, T.-A.

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

Tominaga, J.

M. Hase, Y. Miyamoto, and J. Tominaga, “Ultrafast dephasing of coherent optical phonons in atomically controlled GeTe/Sb2Te3 superlattices,” Phys. Rev. B79(17), 174112 (2009).
[CrossRef]

Trappe, C.

M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
[CrossRef]

Uher, C.

Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
[CrossRef]

Venkatasubramanian, R.

Y. G. Wang, C. Leibig, X. F. Xu, and R. Venkatasubramanian, “Acoustic phonon scattering in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.97(8), 083103 (2010).
[CrossRef]

A. Q. Wu, X. F. Xu, and R. Venkatasubramanian, “Ultrafast dynamics of photoexcited coherent phonon in Bi2Te3 thin films,” Appl. Phys. Lett.92(1), 011108 (2008).
[CrossRef]

Y. G. Wang, X. F. Xu, and R. Venkatasubramanian, “Reduction in coherent phonon lifetime in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.93(11), 113114 (2008).
[CrossRef]

Wang, C. Z.

Wang, G. Y.

Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
[CrossRef]

Wang, W. F.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Wang, Y.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Wang, Y. G.

Y. G. Wang, C. Leibig, X. F. Xu, and R. Venkatasubramanian, “Acoustic phonon scattering in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.97(8), 083103 (2010).
[CrossRef]

Y. G. Wang, X. F. Xu, and R. Venkatasubramanian, “Reduction in coherent phonon lifetime in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.93(11), 113114 (2008).
[CrossRef]

Wu, A. Q.

A. Q. Wu, X. F. Xu, and R. Venkatasubramanian, “Ultrafast dynamics of photoexcited coherent phonon in Bi2Te3 thin films,” Appl. Phys. Lett.92(1), 011108 (2008).
[CrossRef]

Wu, L. C.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

Wu, Y. Q.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Xia, M. J.

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

Xu, X. F.

Y. G. Wang, C. Leibig, X. F. Xu, and R. Venkatasubramanian, “Acoustic phonon scattering in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.97(8), 083103 (2010).
[CrossRef]

A. Q. Wu, X. F. Xu, and R. Venkatasubramanian, “Ultrafast dynamics of photoexcited coherent phonon in Bi2Te3 thin films,” Appl. Phys. Lett.92(1), 011108 (2008).
[CrossRef]

Y. G. Wang, X. F. Xu, and R. Venkatasubramanian, “Reduction in coherent phonon lifetime in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.93(11), 113114 (2008).
[CrossRef]

Yan, N.

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Yao, D. N.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

Yao, D.-X.

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Zhai, J. W.

Zhang, T.

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Zhang, Y.

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

Zhang, Z.

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Zhang, Z. F.

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

Zhou, X.

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

Zhou, X. L.

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

Zhu, W. L.

W. L. Zhu, C. Z. Wang, M. C. Sun, S. M. Li, J. W. Zhai, and T. S. Lai, “Characterization of Femtosecond laser-irradiation crystallization and structure of multiple periodic Si/Sb₈₀Te₂₀ nanocomposite films by coherent phonon spectroscopy,” Opt. Express19(23), 22684–22691 (2011).
[CrossRef] [PubMed]

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

Appl. Phys. Lett. (7)

X. Zhou, L. C. Wu, Z. Song, F. Rao, Y. Cheng, C. Peng, D. N. Yao, S. N. Song, B. Liu, S. L. Feng, and B. Chen, “Sb-rich Si-Sb-Te phase change material for multilevel data storage: The degree of disorder in the crystalline state,” Appl. Phys. Lett.99(3), 032105 (2011).

Y. G. Wang, X. F. Xu, and R. Venkatasubramanian, “Reduction in coherent phonon lifetime in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.93(11), 113114 (2008).
[CrossRef]

A. Q. Wu, X. F. Xu, and R. Venkatasubramanian, “Ultrafast dynamics of photoexcited coherent phonon in Bi2Te3 thin films,” Appl. Phys. Lett.92(1), 011108 (2008).
[CrossRef]

M. Först, T. Dekorsy, C. Trappe, M. Laurenzis, H. Kurz, and B. Béchevet, “Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopy,” Appl. Phys. Lett.77(13), 1964–1966 (2000).
[CrossRef]

Y. W. Li, V. A. Stoica, L. Endicott, G. Y. Wang, C. Uher, and R. Clarke, “Coherent optical phonon spectroscopy studies of femtosecond-laser modified Sb2Te3 films,” Appl. Phys. Lett.97(17), 171908 (2010).
[CrossRef]

H. Ogi, M. Fujii, N. Nakamura, T. Shagawa, and M. Hirao, “Resonance acoustic-phonon spectroscopy for studying elasticity of ultrathin films,” Appl. Phys. Lett.90(19), 191906 (2007).
[CrossRef]

Y. G. Wang, C. Leibig, X. F. Xu, and R. Venkatasubramanian, “Acoustic phonon scattering in Bi2Te3/Sb2Te3 superlattices,” Appl. Phys. Lett.97(8), 083103 (2010).
[CrossRef]

J. Appl. Phys. (2)

S. Li, H. Huang, W. L. Zhu, W. F. Wang, K. Chen, D.-X. Yao, Y. Wang, T. Lai, Y. Q. Wu, and F. X. Gan, “Femtosecond laser-induced crystallization of amorphous Sb2Te3 film and coherent phonon spectroscopy characterization and optical injection of electron spins,” J. Appl. Phys.110(5), 053523 (2011).

J. Feng, Z. F. Zhang, Y. Zhang, B. C. Cai, Y. Y. Lin, T. A. Tang, and B. Chen, “Crystallization process and amorphous state stability of Si-Sb-Te films for phase change memory,” J. Appl. Phys.101(7), 074502 (2007).
[CrossRef]

J. Non-Cryst. Solids (1)

Y. Cheng, N. Yan, X. D. Han, Z. Zhang, T. Zhang, Z. T. Song, B. Liu, and S. L. Feng, “Thermally induced phase separation of Si-Sb-Te alloy,” J. Non-Cryst. Solids356(18-19), 884–888 (2010).
[CrossRef]

Nanotechnology (1)

F. Rao, Z. T. Song, K. Ren, X. L. Zhou, Y. Cheng, L. C. Wu, and B. Liu, “Si-Sb-Te materials for phase change memory applications,” Nanotechnology22(14), 145702 (2011).
[CrossRef] [PubMed]

Opt. Express (1)

Phys. Rev. B (2)

M. Hase, Y. Miyamoto, and J. Tominaga, “Ultrafast dephasing of coherent optical phonons in atomically controlled GeTe/Sb2Te3 superlattices,” Phys. Rev. B79(17), 174112 (2009).
[CrossRef]

M. F. DeCamp, D. A. Reis, P. H. Bucksbaum, and R. Merlin, “Dynamics and coherent control of high-amplitude optical phonons in bismuth,” Phys. Rev. B64(9), 092301 (2001).
[CrossRef]

Scr. Mater. (1)

K. Ren, F. Rao, Z. T. Song, Y. Cheng, L. C. Wu, X. L. Zhou, Y. F. Gong, M. J. Xia, B. Liu, and S. L. Feng, “Study on the crystallization behaviors of Si2Sb2Tex materials,” Scr. Mater.64(7), 685–688 (2011).
[CrossRef]

Semicond. Sci. Technol. (1)

B. W. Qiao, J. Feng, Y. F. Lai, Y. F. Cai, Y. Y. Lin, T.-A. Tang, B. C. Cai, and B. Chen, “Si–Sb–Te films for phase-change random access memory,” Semicond. Sci. Technol.21(8), 1073–1076 (2006).
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

Transient differential transmission traces measured under a same low pump fluence of 0.08 mJ/cm2 for different laser irradiation fluence indicated in figure. The traces are shifted upward for clarity. The “amorphous” is equivalent to a laser irradiation fluence of 0.08 mJ/cm2.

Fig. 2
Fig. 2

(a) Transient oscillation of COP separated from Fig. 1 for corresponding laser irradiation power; (b) FFT spectra corresponding to (a). Each trace is shifted upward for clarity.

Fig. 3
Fig. 3

Transient differential transmission traces of laser-irradiation crystallized Si2Sb2Te3 film for different laser pump fluence. All traces are shifted upward for clarity.

Fig. 4
Fig. 4

(a) Transient oscillation of COP separated from Fig. 3. The traces are shifted upward for clarity. (b) The lifetime of COP as a function of pump fluence. (c) The frequency of COP vs. pump fluence. The solid line in (b) and (c) is the guide for the eye.

Fig. 5
Fig. 5

(a) Transient transmissivity traces for different laser irradiation power but the same pump power of 15 mW; (b) Transient oscillation of COP separated from (a); (c) FFT spectra corresponding to (b). Each trace is shifted upward for clarity.

Equations (1)

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f m = mv 2d

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