Abstract

We demonstrate a printable Thermo-Optic (TO) switch utilizing imprinting and ink-jet printing techniques. The material system, optical and thermal designs are discussed. Imprinting technique is used to transfer a 2 × 2 switch pattern from a flexible mold into a UV15LV polymer bottom cladding. Ink-jet printing is further used to deposit a SU-8 polymer core layer on top. Operation of the switch is experimentally demonstrated up to a frequency of 1 kHz, with switching time less than 0.5ms. The printing technique demonstrates great potential for high throughput, roll-to-roll fabrication of low cost photonic devices.

© 2013 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. W. H. Wong, K. K. Liu, K. S. Chan, and E. Y. B. Pun, “Polymer devices for photonic applications,” J. Cryst. Growth288(1), 100–104 (2006).
    [CrossRef]
  2. M. B. Christiansen, M. Schøler, and A. Kristensen, “Integration of active and passive polymer optics,” Opt. Express15(7), 3931–3939 (2007).
    [CrossRef] [PubMed]
  3. X. H. Lin, X. Y. Dou, A. X. Wang, and R. T. Chen, “Polymer optical waveguide based bi-directional optical bus architecture for high speed optical backplane,” Proc. SPIE8267, 826709 (2012).
    [CrossRef]
  4. H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
    [CrossRef]
  5. X. L. Wang, B. Howley, M. Y. Chen, and R. T. Chen, “4 x 4 nonblocking polymeric thermo-optic switch matrix using the total internal reflection effect,” IEEE J Sel Top Quant12(5), 997–1000 (2006).
    [CrossRef]
  6. B. S. Lee, C. Y. Lin, A. X. Wang, and R. T. Chen, “Demonstration of a linearized traveling wave Y-fed directional coupler modulator based on electro-optic polymer,” J. Lightwave Technol.29(13), 1931–1936 (2011).
    [CrossRef]
  7. D. H. Park, Y. Z. Leng, J. D. Luo, A. K. Y. Jen, and W. N. Herman, “High speed electro-optic polymer phase modulator using an in-plane slotline RF waveguide,” Rf and Millimeter-Wave Photonics7936 (2011).
  8. W. H. Steier, A. Szep, Y. H. Kuo, P. Rabiei, S. W. Ahn, M. C. Oh, H. Zhang, C. Zhang, H. Erlig, B. Tsap, H. R. Fetterman, D. H. Chang, and L. R. Dalton, “High speed polymer electro-optic modulators,” Leos 2001: 14th Annual Meeting of the IEEE Lasers & Electro-Optics Society, Vols 1 and 2, Proceedings, 188–189 (2001).
  9. J. Y. Yang, Q. J. Zhou, and R. T. Chen, “Polyimide-waveguide-based thermal optical switch using total-internal-reflection effect,” Appl. Phys. Lett.81(16), 2947–2949 (2002).
    [CrossRef]
  10. L. J. Guo, “Nanoimprint lithography: Methods and material requirements,” Adv. Mater. (Deerfield Beach Fla.)19(4), 495–513 (2007).
    [CrossRef]
  11. S. H. Ahn and L. J. Guo, “High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates,” Adv Mater20, 2044–2049 (2008).
  12. J. H. Min, H. Kim, B. Kim, and S. Kang, “Design of microlens array on aperture stop array to generate multi optical probes with spatial light modulation,” Jpn. J. Appl. Phys.47(8), 6800–6803 (2008).
    [CrossRef]
  13. K. L. Lai, S. F. Hsiao, M. H. Hon, and I. C. Leu, “Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting,” Microelectron. Eng.94, 33–37 (2012).
    [CrossRef]
  14. Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
    [CrossRef]
  15. S. W. Ahn, K. D. Lee, D. H. Kim, and S. S. Lee, “Polymeric wavelength filter based on a Bragg grating using nanoimprint technique,” IEEE Photonic Tech L17(10), 2122–2124 (2005).
    [CrossRef]
  16. Y. J. Weng, Y. C. Weng, Y. C. Wong, S. Y. Yang, and H. K. Liu, “Fabrication of optical waveguide devices using electromagnetic assisted nanoimprinting,” Proceedings of the 2009 International Conference on Signal Processing Systems, 910–912 (2009).
  17. X. L. Wang, X. Y. Dou, X. H. Lin, and R. T. Chen, “Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method,” Proc. SPIE7607, 76070R, 76070R-7 (2010).
    [CrossRef]
  18. M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
    [CrossRef]
  19. X. Lin, X. Dou, X. Wang, and R. T. Chen, “Nickel electroplating for nanostructure mold fabrication,” J. Nanosci. Nanotechnol.11(8), 7006–7010 (2011).
    [CrossRef] [PubMed]
  20. X. Y. Dou, X. L. Wang, H. Y. Huang, X. H. Lin, and R. T. Chen, “Fabrication of metallic hard mold for polymeric waveguides with embedded micro-mirrors,” 2010 IEEE Photonics Society Winter Topicals Meeting Series, 101–102 (2010).
  21. T. Ling, S. L. Chen, and L. J. Guo, “Fabrication and characterization of high Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector,” Opt. Express19(2), 861–869 (2011).
    [CrossRef] [PubMed]
  22. D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
    [CrossRef]
  23. P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
    [CrossRef]
  24. Y. Ekinci, H. H. Solak, C. David, and H. Sigg, “Bilayer Al wire-grids as broadband and high-performance polarizers,” Opt. Express14(6), 2323–2334 (2006).
    [CrossRef] [PubMed]
  25. B. Ciftcioglu, R. Berman, S. Wang, J. Y. Hu, I. Savidis, M. Jain, D. Moore, M. Huang, E. G. Friedman, G. Wicks, and H. Wu, “3-D integrated heterogeneous intra-chip free-space optical interconnect,” Opt. Express20(4), 4331–4345 (2012).
    [CrossRef] [PubMed]
  26. C. H. Tien, C. H. Hung, and T. H. Yu, “Microlens arrays by direct-writing inkjet print for lcd backlighting applications,” J Disp Technol5(5), 147–151 (2009).
    [CrossRef]
  27. S. R. Mohapatra, T. Tsuruoka, T. Hasegawa, K. Terabe, and M. Aono, “Flexible resistive switching memory using inkjet printing of a solid polymer electrolyte,” AIP Adv. 2(2012).
  28. Y.-T. Han, J.-U. Shin, S.-H. Park, H.-J. Lee, W.-Y. Hwang, H.-H. Park, and Y. Baek, “N × N polymer matrix switches using thermo-optic total-internal-reflection switch,” Opt. Express20(12), 13284–13295 (2012).
    [CrossRef] [PubMed]
  29. Y. O. Noh, H. J. Lee, Y. H. Won, and M. C. Oh, “Polymer waveguide thermo-optic switches with - 70 dB optical crosstalk,” Opt. Commun.258(1), 18–22 (2006).
    [CrossRef]
  30. X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
    [CrossRef]
  31. M. G. Kang and L. J. Guo, “Metal transfer assisted nanolithography on rigid and flexible substrates,” J. Vac. Sci. Technol. B26(6), 2421–2425 (2008).
    [CrossRef]

2012 (6)

X. H. Lin, X. Y. Dou, A. X. Wang, and R. T. Chen, “Polymer optical waveguide based bi-directional optical bus architecture for high speed optical backplane,” Proc. SPIE8267, 826709 (2012).
[CrossRef]

K. L. Lai, S. F. Hsiao, M. H. Hon, and I. C. Leu, “Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting,” Microelectron. Eng.94, 33–37 (2012).
[CrossRef]

Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
[CrossRef]

B. Ciftcioglu, R. Berman, S. Wang, J. Y. Hu, I. Savidis, M. Jain, D. Moore, M. Huang, E. G. Friedman, G. Wicks, and H. Wu, “3-D integrated heterogeneous intra-chip free-space optical interconnect,” Opt. Express20(4), 4331–4345 (2012).
[CrossRef] [PubMed]

S. R. Mohapatra, T. Tsuruoka, T. Hasegawa, K. Terabe, and M. Aono, “Flexible resistive switching memory using inkjet printing of a solid polymer electrolyte,” AIP Adv. 2(2012).

Y.-T. Han, J.-U. Shin, S.-H. Park, H.-J. Lee, W.-Y. Hwang, H.-H. Park, and Y. Baek, “N × N polymer matrix switches using thermo-optic total-internal-reflection switch,” Opt. Express20(12), 13284–13295 (2012).
[CrossRef] [PubMed]

2011 (5)

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

X. Lin, X. Dou, X. Wang, and R. T. Chen, “Nickel electroplating for nanostructure mold fabrication,” J. Nanosci. Nanotechnol.11(8), 7006–7010 (2011).
[CrossRef] [PubMed]

T. Ling, S. L. Chen, and L. J. Guo, “Fabrication and characterization of high Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector,” Opt. Express19(2), 861–869 (2011).
[CrossRef] [PubMed]

B. S. Lee, C. Y. Lin, A. X. Wang, and R. T. Chen, “Demonstration of a linearized traveling wave Y-fed directional coupler modulator based on electro-optic polymer,” J. Lightwave Technol.29(13), 1931–1936 (2011).
[CrossRef]

D. H. Park, Y. Z. Leng, J. D. Luo, A. K. Y. Jen, and W. N. Herman, “High speed electro-optic polymer phase modulator using an in-plane slotline RF waveguide,” Rf and Millimeter-Wave Photonics7936 (2011).

2010 (1)

X. L. Wang, X. Y. Dou, X. H. Lin, and R. T. Chen, “Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method,” Proc. SPIE7607, 76070R, 76070R-7 (2010).
[CrossRef]

2009 (1)

C. H. Tien, C. H. Hung, and T. H. Yu, “Microlens arrays by direct-writing inkjet print for lcd backlighting applications,” J Disp Technol5(5), 147–151 (2009).
[CrossRef]

2008 (3)

M. G. Kang and L. J. Guo, “Metal transfer assisted nanolithography on rigid and flexible substrates,” J. Vac. Sci. Technol. B26(6), 2421–2425 (2008).
[CrossRef]

S. H. Ahn and L. J. Guo, “High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates,” Adv Mater20, 2044–2049 (2008).

J. H. Min, H. Kim, B. Kim, and S. Kang, “Design of microlens array on aperture stop array to generate multi optical probes with spatial light modulation,” Jpn. J. Appl. Phys.47(8), 6800–6803 (2008).
[CrossRef]

2007 (2)

L. J. Guo, “Nanoimprint lithography: Methods and material requirements,” Adv. Mater. (Deerfield Beach Fla.)19(4), 495–513 (2007).
[CrossRef]

M. B. Christiansen, M. Schøler, and A. Kristensen, “Integration of active and passive polymer optics,” Opt. Express15(7), 3931–3939 (2007).
[CrossRef] [PubMed]

2006 (4)

W. H. Wong, K. K. Liu, K. S. Chan, and E. Y. B. Pun, “Polymer devices for photonic applications,” J. Cryst. Growth288(1), 100–104 (2006).
[CrossRef]

X. L. Wang, B. Howley, M. Y. Chen, and R. T. Chen, “4 x 4 nonblocking polymeric thermo-optic switch matrix using the total internal reflection effect,” IEEE J Sel Top Quant12(5), 997–1000 (2006).
[CrossRef]

Y. Ekinci, H. H. Solak, C. David, and H. Sigg, “Bilayer Al wire-grids as broadband and high-performance polarizers,” Opt. Express14(6), 2323–2334 (2006).
[CrossRef] [PubMed]

Y. O. Noh, H. J. Lee, Y. H. Won, and M. C. Oh, “Polymer waveguide thermo-optic switches with - 70 dB optical crosstalk,” Opt. Commun.258(1), 18–22 (2006).
[CrossRef]

2005 (5)

X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
[CrossRef]

H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
[CrossRef]

S. W. Ahn, K. D. Lee, D. H. Kim, and S. S. Lee, “Polymeric wavelength filter based on a Bragg grating using nanoimprint technique,” IEEE Photonic Tech L17(10), 2122–2124 (2005).
[CrossRef]

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

2002 (1)

J. Y. Yang, Q. J. Zhou, and R. T. Chen, “Polyimide-waveguide-based thermal optical switch using total-internal-reflection effect,” Appl. Phys. Lett.81(16), 2947–2949 (2002).
[CrossRef]

Ahn, S. H.

S. H. Ahn and L. J. Guo, “High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates,” Adv Mater20, 2044–2049 (2008).

Ahn, S. W.

S. W. Ahn, K. D. Lee, D. H. Kim, and S. S. Lee, “Polymeric wavelength filter based on a Bragg grating using nanoimprint technique,” IEEE Photonic Tech L17(10), 2122–2124 (2005).
[CrossRef]

Anni, M.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Aono, M.

S. R. Mohapatra, T. Tsuruoka, T. Hasegawa, K. Terabe, and M. Aono, “Flexible resistive switching memory using inkjet printing of a solid polymer electrolyte,” AIP Adv. 2(2012).

Baek, Y.

Barbarella, G.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Basile, P.

X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
[CrossRef]

Berman, R.

Chan, K. S.

W. H. Wong, K. K. Liu, K. S. Chan, and E. Y. B. Pun, “Polymer devices for photonic applications,” J. Cryst. Growth288(1), 100–104 (2006).
[CrossRef]

Chang, C. Y.

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Chen, M. Y.

X. L. Wang, B. Howley, M. Y. Chen, and R. T. Chen, “4 x 4 nonblocking polymeric thermo-optic switch matrix using the total internal reflection effect,” IEEE J Sel Top Quant12(5), 997–1000 (2006).
[CrossRef]

X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
[CrossRef]

Chen, R.

X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
[CrossRef]

Chen, R. T.

X. H. Lin, X. Y. Dou, A. X. Wang, and R. T. Chen, “Polymer optical waveguide based bi-directional optical bus architecture for high speed optical backplane,” Proc. SPIE8267, 826709 (2012).
[CrossRef]

X. Lin, X. Dou, X. Wang, and R. T. Chen, “Nickel electroplating for nanostructure mold fabrication,” J. Nanosci. Nanotechnol.11(8), 7006–7010 (2011).
[CrossRef] [PubMed]

B. S. Lee, C. Y. Lin, A. X. Wang, and R. T. Chen, “Demonstration of a linearized traveling wave Y-fed directional coupler modulator based on electro-optic polymer,” J. Lightwave Technol.29(13), 1931–1936 (2011).
[CrossRef]

X. L. Wang, X. Y. Dou, X. H. Lin, and R. T. Chen, “Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method,” Proc. SPIE7607, 76070R, 76070R-7 (2010).
[CrossRef]

X. L. Wang, B. Howley, M. Y. Chen, and R. T. Chen, “4 x 4 nonblocking polymeric thermo-optic switch matrix using the total internal reflection effect,” IEEE J Sel Top Quant12(5), 997–1000 (2006).
[CrossRef]

J. Y. Yang, Q. J. Zhou, and R. T. Chen, “Polyimide-waveguide-based thermal optical switch using total-internal-reflection effect,” Appl. Phys. Lett.81(16), 2947–2949 (2002).
[CrossRef]

Chen, S. L.

Chen, T. Y.

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Christiansen, M. B.

Chu, S. Y.

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Ciftcioglu, B.

Cingolani, R.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

David, C.

Davies, G.

Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
[CrossRef]

Dou, X.

X. Lin, X. Dou, X. Wang, and R. T. Chen, “Nickel electroplating for nanostructure mold fabrication,” J. Nanosci. Nanotechnol.11(8), 7006–7010 (2011).
[CrossRef] [PubMed]

Dou, X. Y.

X. H. Lin, X. Y. Dou, A. X. Wang, and R. T. Chen, “Polymer optical waveguide based bi-directional optical bus architecture for high speed optical backplane,” Proc. SPIE8267, 826709 (2012).
[CrossRef]

X. L. Wang, X. Y. Dou, X. H. Lin, and R. T. Chen, “Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method,” Proc. SPIE7607, 76070R, 76070R-7 (2010).
[CrossRef]

Ekinci, Y.

Favaretto, L.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Friedman, E. G.

Gao, Y. L.

Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
[CrossRef]

Gigli, G.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Guo, L. J.

T. Ling, S. L. Chen, and L. J. Guo, “Fabrication and characterization of high Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector,” Opt. Express19(2), 861–869 (2011).
[CrossRef] [PubMed]

M. G. Kang and L. J. Guo, “Metal transfer assisted nanolithography on rigid and flexible substrates,” J. Vac. Sci. Technol. B26(6), 2421–2425 (2008).
[CrossRef]

S. H. Ahn and L. J. Guo, “High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates,” Adv Mater20, 2044–2049 (2008).

L. J. Guo, “Nanoimprint lithography: Methods and material requirements,” Adv. Mater. (Deerfield Beach Fla.)19(4), 495–513 (2007).
[CrossRef]

Han, Y.-T.

Hasegawa, T.

S. R. Mohapatra, T. Tsuruoka, T. Hasegawa, K. Terabe, and M. Aono, “Flexible resistive switching memory using inkjet printing of a solid polymer electrolyte,” AIP Adv. 2(2012).

Herman, W. N.

D. H. Park, Y. Z. Leng, J. D. Luo, A. K. Y. Jen, and W. N. Herman, “High speed electro-optic polymer phase modulator using an in-plane slotline RF waveguide,” Rf and Millimeter-Wave Photonics7936 (2011).

Hiltunen, J.

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

Hon, M. H.

K. L. Lai, S. F. Hsiao, M. H. Hon, and I. C. Leu, “Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting,” Microelectron. Eng.94, 33–37 (2012).
[CrossRef]

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Hong, F. C.

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Howley, B.

X. L. Wang, B. Howley, M. Y. Chen, and R. T. Chen, “4 x 4 nonblocking polymeric thermo-optic switch matrix using the total internal reflection effect,” IEEE J Sel Top Quant12(5), 997–1000 (2006).
[CrossRef]

X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
[CrossRef]

Hsiao, S. F.

K. L. Lai, S. F. Hsiao, M. H. Hon, and I. C. Leu, “Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting,” Microelectron. Eng.94, 33–37 (2012).
[CrossRef]

Hsu, L. C.

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Hu, J. Y.

Huang, M.

Hung, C. H.

C. H. Tien, C. H. Hung, and T. H. Yu, “Microlens arrays by direct-writing inkjet print for lcd backlighting applications,” J Disp Technol5(5), 147–151 (2009).
[CrossRef]

Hwang, W.-Y.

Jain, M.

Jen, A. K. Y.

D. H. Park, Y. Z. Leng, J. D. Luo, A. K. Y. Jen, and W. N. Herman, “High speed electro-optic polymer phase modulator using an in-plane slotline RF waveguide,” Rf and Millimeter-Wave Photonics7936 (2011).

Jiang, X. Q.

H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
[CrossRef]

Jin, P.

Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
[CrossRef]

Kang, M. G.

M. G. Kang and L. J. Guo, “Metal transfer assisted nanolithography on rigid and flexible substrates,” J. Vac. Sci. Technol. B26(6), 2421–2425 (2008).
[CrossRef]

Kang, S.

J. H. Min, H. Kim, B. Kim, and S. Kang, “Design of microlens array on aperture stop array to generate multi optical probes with spatial light modulation,” Jpn. J. Appl. Phys.47(8), 6800–6803 (2008).
[CrossRef]

Kao, P. C.

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Karioja, P.

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

Kim, B.

J. H. Min, H. Kim, B. Kim, and S. Kang, “Design of microlens array on aperture stop array to generate multi optical probes with spatial light modulation,” Jpn. J. Appl. Phys.47(8), 6800–6803 (2008).
[CrossRef]

Kim, D. H.

S. W. Ahn, K. D. Lee, D. H. Kim, and S. S. Lee, “Polymeric wavelength filter based on a Bragg grating using nanoimprint technique,” IEEE Photonic Tech L17(10), 2122–2124 (2005).
[CrossRef]

Kim, H.

J. H. Min, H. Kim, B. Kim, and S. Kang, “Design of microlens array on aperture stop array to generate multi optical probes with spatial light modulation,” Jpn. J. Appl. Phys.47(8), 6800–6803 (2008).
[CrossRef]

Kristensen, A.

Lai, K. L.

K. L. Lai, S. F. Hsiao, M. H. Hon, and I. C. Leu, “Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting,” Microelectron. Eng.94, 33–37 (2012).
[CrossRef]

Lappalainen, J.

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

Lee, B. S.

Lee, H. J.

Y. O. Noh, H. J. Lee, Y. H. Won, and M. C. Oh, “Polymer waveguide thermo-optic switches with - 70 dB optical crosstalk,” Opt. Commun.258(1), 18–22 (2006).
[CrossRef]

Lee, H.-J.

Lee, K. D.

S. W. Ahn, K. D. Lee, D. H. Kim, and S. S. Lee, “Polymeric wavelength filter based on a Bragg grating using nanoimprint technique,” IEEE Photonic Tech L17(10), 2122–2124 (2005).
[CrossRef]

Lee, S. S.

S. W. Ahn, K. D. Lee, D. H. Kim, and S. S. Lee, “Polymeric wavelength filter based on a Bragg grating using nanoimprint technique,” IEEE Photonic Tech L17(10), 2122–2124 (2005).
[CrossRef]

Leng, Y. Z.

D. H. Park, Y. Z. Leng, J. D. Luo, A. K. Y. Jen, and W. N. Herman, “High speed electro-optic polymer phase modulator using an in-plane slotline RF waveguide,” Rf and Millimeter-Wave Photonics7936 (2011).

Leu, I. C.

K. L. Lai, S. F. Hsiao, M. H. Hon, and I. C. Leu, “Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting,” Microelectron. Eng.94, 33–37 (2012).
[CrossRef]

Li, X. H.

H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
[CrossRef]

Li, Y. B.

H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
[CrossRef]

Liao, W. C.

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Lin, C. Y.

Lin, J.

Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
[CrossRef]

Lin, X.

X. Lin, X. Dou, X. Wang, and R. T. Chen, “Nickel electroplating for nanostructure mold fabrication,” J. Nanosci. Nanotechnol.11(8), 7006–7010 (2011).
[CrossRef] [PubMed]

Lin, X. H.

X. H. Lin, X. Y. Dou, A. X. Wang, and R. T. Chen, “Polymer optical waveguide based bi-directional optical bus architecture for high speed optical backplane,” Proc. SPIE8267, 826709 (2012).
[CrossRef]

X. L. Wang, X. Y. Dou, X. H. Lin, and R. T. Chen, “Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method,” Proc. SPIE7607, 76070R, 76070R-7 (2010).
[CrossRef]

Ling, T.

Liu, K. K.

W. H. Wong, K. K. Liu, K. S. Chan, and E. Y. B. Pun, “Polymer devices for photonic applications,” J. Cryst. Growth288(1), 100–104 (2006).
[CrossRef]

Luo, J. D.

D. H. Park, Y. Z. Leng, J. D. Luo, A. K. Y. Jen, and W. N. Herman, “High speed electro-optic polymer phase modulator using an in-plane slotline RF waveguide,” Rf and Millimeter-Wave Photonics7936 (2011).

Mele, E.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Min, J. H.

J. H. Min, H. Kim, B. Kim, and S. Kang, “Design of microlens array on aperture stop array to generate multi optical probes with spatial light modulation,” Jpn. J. Appl. Phys.47(8), 6800–6803 (2008).
[CrossRef]

Mohapatra, S. R.

S. R. Mohapatra, T. Tsuruoka, T. Hasegawa, K. Terabe, and M. Aono, “Flexible resistive switching memory using inkjet printing of a solid polymer electrolyte,” AIP Adv. 2(2012).

Moore, D.

Myllyla, R.

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

Noh, Y. O.

Y. O. Noh, H. J. Lee, Y. H. Won, and M. C. Oh, “Polymer waveguide thermo-optic switches with - 70 dB optical crosstalk,” Opt. Commun.258(1), 18–22 (2006).
[CrossRef]

Oh, M. C.

Y. O. Noh, H. J. Lee, Y. H. Won, and M. C. Oh, “Polymer waveguide thermo-optic switches with - 70 dB optical crosstalk,” Opt. Commun.258(1), 18–22 (2006).
[CrossRef]

Park, D. H.

D. H. Park, Y. Z. Leng, J. D. Luo, A. K. Y. Jen, and W. N. Herman, “High speed electro-optic polymer phase modulator using an in-plane slotline RF waveguide,” Rf and Millimeter-Wave Photonics7936 (2011).

Park, H.-H.

Park, S.-H.

Persano, L.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Pisignano, D.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Prewett, P. D.

Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
[CrossRef]

Pun, E. Y. B.

W. H. Wong, K. K. Liu, K. S. Chan, and E. Y. B. Pun, “Polymer devices for photonic applications,” J. Cryst. Growth288(1), 100–104 (2006).
[CrossRef]

Puustinen, J.

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

Savidis, I.

Schøler, M.

Shin, J.-U.

Sigg, H.

Solak, H. H.

Tan, J. B.

Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
[CrossRef]

Terabe, K.

S. R. Mohapatra, T. Tsuruoka, T. Hasegawa, K. Terabe, and M. Aono, “Flexible resistive switching memory using inkjet printing of a solid polymer electrolyte,” AIP Adv. 2(2012).

Tien, C. H.

C. H. Tien, C. H. Hung, and T. H. Yu, “Microlens arrays by direct-writing inkjet print for lcd backlighting applications,” J Disp Technol5(5), 147–151 (2009).
[CrossRef]

Tsuruoka, T.

S. R. Mohapatra, T. Tsuruoka, T. Hasegawa, K. Terabe, and M. Aono, “Flexible resistive switching memory using inkjet printing of a solid polymer electrolyte,” AIP Adv. 2(2012).

Uusitalo, S.

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

Visconti, P.

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Wang, A. X.

X. H. Lin, X. Y. Dou, A. X. Wang, and R. T. Chen, “Polymer optical waveguide based bi-directional optical bus architecture for high speed optical backplane,” Proc. SPIE8267, 826709 (2012).
[CrossRef]

B. S. Lee, C. Y. Lin, A. X. Wang, and R. T. Chen, “Demonstration of a linearized traveling wave Y-fed directional coupler modulator based on electro-optic polymer,” J. Lightwave Technol.29(13), 1931–1936 (2011).
[CrossRef]

Wang, M.

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

Wang, M. H.

H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
[CrossRef]

Wang, S.

Wang, X.

X. Lin, X. Dou, X. Wang, and R. T. Chen, “Nickel electroplating for nanostructure mold fabrication,” J. Nanosci. Nanotechnol.11(8), 7006–7010 (2011).
[CrossRef] [PubMed]

Wang, X. L.

X. L. Wang, X. Y. Dou, X. H. Lin, and R. T. Chen, “Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method,” Proc. SPIE7607, 76070R, 76070R-7 (2010).
[CrossRef]

X. L. Wang, B. Howley, M. Y. Chen, and R. T. Chen, “4 x 4 nonblocking polymeric thermo-optic switch matrix using the total internal reflection effect,” IEEE J Sel Top Quant12(5), 997–1000 (2006).
[CrossRef]

X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
[CrossRef]

Wicks, G.

Won, Y. H.

Y. O. Noh, H. J. Lee, Y. H. Won, and M. C. Oh, “Polymer waveguide thermo-optic switches with - 70 dB optical crosstalk,” Opt. Commun.258(1), 18–22 (2006).
[CrossRef]

Wong, W. H.

W. H. Wong, K. K. Liu, K. S. Chan, and E. Y. B. Pun, “Polymer devices for photonic applications,” J. Cryst. Growth288(1), 100–104 (2006).
[CrossRef]

Wu, H.

Yang, J. Y.

H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
[CrossRef]

J. Y. Yang, Q. J. Zhou, and R. T. Chen, “Polyimide-waveguide-based thermal optical switch using total-internal-reflection effect,” Appl. Phys. Lett.81(16), 2947–2949 (2002).
[CrossRef]

Yu, H.

H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
[CrossRef]

Yu, T. H.

C. H. Tien, C. H. Hung, and T. H. Yu, “Microlens arrays by direct-writing inkjet print for lcd backlighting applications,” J Disp Technol5(5), 147–151 (2009).
[CrossRef]

Zhan, C. Y.

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Zhou, Q. J.

X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
[CrossRef]

J. Y. Yang, Q. J. Zhou, and R. T. Chen, “Polyimide-waveguide-based thermal optical switch using total-internal-reflection effect,” Appl. Phys. Lett.81(16), 2947–2949 (2002).
[CrossRef]

Adv Mater (1)

S. H. Ahn and L. J. Guo, “High-speed roll-to-roll nanoimprint lithography on flexible plastic substrates,” Adv Mater20, 2044–2049 (2008).

Adv. Mater. (Deerfield Beach Fla.) (1)

L. J. Guo, “Nanoimprint lithography: Methods and material requirements,” Adv. Mater. (Deerfield Beach Fla.)19(4), 495–513 (2007).
[CrossRef]

AIP Adv (1)

S. R. Mohapatra, T. Tsuruoka, T. Hasegawa, K. Terabe, and M. Aono, “Flexible resistive switching memory using inkjet printing of a solid polymer electrolyte,” AIP Adv. 2(2012).

Appl. Phys. Lett. (1)

J. Y. Yang, Q. J. Zhou, and R. T. Chen, “Polyimide-waveguide-based thermal optical switch using total-internal-reflection effect,” Appl. Phys. Lett.81(16), 2947–2949 (2002).
[CrossRef]

IEEE J Sel Top Quant (1)

X. L. Wang, B. Howley, M. Y. Chen, and R. T. Chen, “4 x 4 nonblocking polymeric thermo-optic switch matrix using the total internal reflection effect,” IEEE J Sel Top Quant12(5), 997–1000 (2006).
[CrossRef]

IEEE Photonic Tech L (1)

S. W. Ahn, K. D. Lee, D. H. Kim, and S. S. Lee, “Polymeric wavelength filter based on a Bragg grating using nanoimprint technique,” IEEE Photonic Tech L17(10), 2122–2124 (2005).
[CrossRef]

IEEE Trans. Electron. Dev. (1)

P. C. Kao, S. Y. Chu, T. Y. Chen, C. Y. Zhan, F. C. Hong, C. Y. Chang, L. C. Hsu, W. C. Liao, and M. H. Hon, “Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography,” IEEE Trans. Electron. Dev.52(8), 1722–1726 (2005).
[CrossRef]

Integrated Optics: Devices, Materials, and Technologies IX (1)

X. L. Wang, B. Howley, M. Y. Chen, Q. J. Zhou, R. Chen, and P. Basile, “Polymer based thermo-optic switch for optical true time delay,” Integrated Optics: Devices, Materials, and Technologies IX5728, 60–67 (2005).
[CrossRef]

J Disp Technol (1)

C. H. Tien, C. H. Hung, and T. H. Yu, “Microlens arrays by direct-writing inkjet print for lcd backlighting applications,” J Disp Technol5(5), 147–151 (2009).
[CrossRef]

J. Cryst. Growth (1)

W. H. Wong, K. K. Liu, K. S. Chan, and E. Y. B. Pun, “Polymer devices for photonic applications,” J. Cryst. Growth288(1), 100–104 (2006).
[CrossRef]

J. Lightwave Technol. (1)

J. Micromech. Microeng. (1)

Y. L. Gao, J. Lin, P. Jin, J. B. Tan, G. Davies, and P. D. Prewett, “Stop grating for perfect replication of micro Fresnel lens by thermal imprinting,” J. Micromech. Microeng.22(6), 065018 (2012).
[CrossRef]

J. Nanosci. Nanotechnol. (1)

X. Lin, X. Dou, X. Wang, and R. T. Chen, “Nickel electroplating for nanostructure mold fabrication,” J. Nanosci. Nanotechnol.11(8), 7006–7010 (2011).
[CrossRef] [PubMed]

J. Vac. Sci. Technol. B (1)

M. G. Kang and L. J. Guo, “Metal transfer assisted nanolithography on rigid and flexible substrates,” J. Vac. Sci. Technol. B26(6), 2421–2425 (2008).
[CrossRef]

Jpn. J. Appl. Phys. (1)

J. H. Min, H. Kim, B. Kim, and S. Kang, “Design of microlens array on aperture stop array to generate multi optical probes with spatial light modulation,” Jpn. J. Appl. Phys.47(8), 6800–6803 (2008).
[CrossRef]

Microelectron. Eng. (2)

K. L. Lai, S. F. Hsiao, M. H. Hon, and I. C. Leu, “Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting,” Microelectron. Eng.94, 33–37 (2012).
[CrossRef]

M. Wang, J. Hiltunen, S. Uusitalo, J. Puustinen, J. Lappalainen, P. Karioja, and R. Myllyla, “Fabrication of optical inverted-rib waveguides using UV-imprinting,” Microelectron. Eng.88(2), 175–178 (2011).
[CrossRef]

Opt. Commun. (1)

Y. O. Noh, H. J. Lee, Y. H. Won, and M. C. Oh, “Polymer waveguide thermo-optic switches with - 70 dB optical crosstalk,” Opt. Commun.258(1), 18–22 (2006).
[CrossRef]

Opt. Express (5)

Passive Components and Fiber-Based Devices (1)

H. Yu, X. Q. Jiang, J. Y. Yang, X. H. Li, M. H. Wang, and Y. B. Li, “The design of 2x2 polymer TIR switch based on thermal field analysis employing thermo-optic effect,” Passive Components and Fiber-Based Devices5623, 174–183 (2005).
[CrossRef]

Proc. SPIE (2)

X. H. Lin, X. Y. Dou, A. X. Wang, and R. T. Chen, “Polymer optical waveguide based bi-directional optical bus architecture for high speed optical backplane,” Proc. SPIE8267, 826709 (2012).
[CrossRef]

X. L. Wang, X. Y. Dou, X. H. Lin, and R. T. Chen, “Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method,” Proc. SPIE7607, 76070R, 76070R-7 (2010).
[CrossRef]

Rf and Millimeter-Wave Photonics (1)

D. H. Park, Y. Z. Leng, J. D. Luo, A. K. Y. Jen, and W. N. Herman, “High speed electro-optic polymer phase modulator using an in-plane slotline RF waveguide,” Rf and Millimeter-Wave Photonics7936 (2011).

Synth. Met. (1)

D. Pisignano, L. Persano, E. Mele, P. Visconti, M. Anni, G. Gigli, R. Cingolani, L. Favaretto, and G. Barbarella, “First-order imprinted organic distributed feedback lasers,” Synth. Met.153(1-3), 237–240 (2005).
[CrossRef]

Other (3)

X. Y. Dou, X. L. Wang, H. Y. Huang, X. H. Lin, and R. T. Chen, “Fabrication of metallic hard mold for polymeric waveguides with embedded micro-mirrors,” 2010 IEEE Photonics Society Winter Topicals Meeting Series, 101–102 (2010).

W. H. Steier, A. Szep, Y. H. Kuo, P. Rabiei, S. W. Ahn, M. C. Oh, H. Zhang, C. Zhang, H. Erlig, B. Tsap, H. R. Fetterman, D. H. Chang, and L. R. Dalton, “High speed polymer electro-optic modulators,” Leos 2001: 14th Annual Meeting of the IEEE Lasers & Electro-Optics Society, Vols 1 and 2, Proceedings, 188–189 (2001).

Y. J. Weng, Y. C. Weng, Y. C. Wong, S. Y. Yang, and H. K. Liu, “Fabrication of optical waveguide devices using electromagnetic assisted nanoimprinting,” Proceedings of the 2009 International Conference on Signal Processing Systems, 910–912 (2009).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (7)

Fig. 1
Fig. 1

(a) schematic showing the top view of the 2 × 2 thermo-optic switch layout. A horn structure, with a half branch angle of 4° is used. Gold heating electrode is 8 μm wide over the center region of the horn. (b) The cross-section view and the simulated mode profile at the input side of the 2 × 2 TO switch. The mode is well confined in the waveguide. Core layer is composed of 1.8 μm thick slab and 0.5 μm (height) x 5 μm (width) strip. (c) Simulation results of the power outputs from the bar (blue) and the cross (green) ports when the junction is in switching condition

Fig. 2
Fig. 2

Process flow for fabricating a 2 × 2 thermo-optic polymer switch using imprinting and ink-jet printing method

Fig. 3
Fig. 3

(a) silicon master mold fabrication process (b) soft mold replication from master mold

Fig. 4
Fig. 4

SEM images of (a) silicon mold (b) SSQ soft mold (c) imprinted UV 15LV at the junction area of the TO switch. The inset in (a) shows the cross-section views of the silicon mold, with 500nm step height. The upper left insets in (b) and (c) show the zoom-in views of the merging points of two waveguides. The lower right insets in (b) and (c) shows the tilted view of mold and imprinted trench in the 5 μm wide input/output regions

Fig. 5
Fig. 5

SEM cross-section view of printed layers in the device, (a) with ink-jet printed UV15LV as top cladding (b) with coated UFC-170A as top cladding

Fig. 6
Fig. 6

(a) Microscopic picture showing the top view of a fabricated 2 × 2 thermo-optic polymer switch. (b) Normalized optical output power versus electrical power consumption from both bar port (Channel A) and cross port (Channel B).

Fig. 7
Fig. 7

Optical response with square wave function applied across the heating electrode, at selected frequencies of (a) 100Hz, (b) 300Hz, (c) 500Hz, and (d) 1kHz. The device can operate at 1kHz with decent performance. Channel A represents bar port and Channel B represents cross port.

Metrics