Abstract

Silicon photodiodes with high photoconductive gain are demonstrated. The photodiodes are fabricated in a complementary metal-oxide-semiconductor (CMOS)-compatible process. The typical room temperature responsivity at 940 nm is >20 A/W and the dark current density is ?100 nA/cm2 at 5 V reverse bias, yielding a detectivity of ?1014 Jones. These photodiodes are good candidates for applications that require high detection sensitivity and low bias operation.

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  1. R. H. Bube, Photoconductivity of Solids (Krieger Publishing, 1960), pp 365–367.
  2. S. Espevik, C. Wu, and R. H. Bube, “Mechanism of photoconductivity in chemically deposited lead sulfide layers,” J. Appl. Phys. 42, 3513–3529 (1971).
    [CrossRef]
  3. P. H. Wendland, “New large area CdS photoconductor,” Rev. Sci. Instrum. 33, 337–339 (1962).
    [CrossRef]
  4. H. Chen, M. K. F. Lo, G. Yang, H. G. Monbouquette, and Y. Yang, “Nanoparticle-assisted high photoconductive gain in composites of polymer and fullerene,” Nat. Nanotechnol. 3, 543–547 (2008).
    [CrossRef] [PubMed]
  5. G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
    [CrossRef] [PubMed]
  6. G. Konstantatos and E. H. Sargent, “PbS colloidal quantum dot photoconductive photodetectors: Transport, traps, and gain,” Appl. Phys. Lett. 91, 173505 (2007).
    [CrossRef]
  7. G. Konstantatos, J. Clifford, L. Levina, and E. H. Sargent, “Sensitive solution-processed visible-wavelength photodetectors,” Nat. Photon. 1, 531–534 (2007).
    [CrossRef]
  8. G. Konstantatos, L. Levina, A. Fischer, and E. H. Sargent, “Engineering the temporal response of photoconductive photodetectors via selective introduction of surface trap states,” Nano Lett. 8, 1446–1450 (2008).
    [CrossRef] [PubMed]
  9. A. F. Sklensky and R. H. Bube, “Photoelectronic properties of zinc impurity in silicon,” Phys. Rev. 6, 1328–1336 (1972).
    [CrossRef]
  10. S. M. Sze and K. K. Ng, Physics of Semiconductor Devices (Wiley, New Jersey2007).
  11. J. E. Carey, C. H. Crouch, M. Shen, and E. Mazur, “Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes,” Opt. Lett. 30, 1773–1775 (2005).
    [CrossRef] [PubMed]
  12. M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
    [CrossRef]
  13. http://sales.hamamatsu.com/assets/pdf/parts_S/s8745-01_etc_kspd1065e01.pdf .
  14. R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
    [CrossRef]

2010 (1)

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

2008 (2)

H. Chen, M. K. F. Lo, G. Yang, H. G. Monbouquette, and Y. Yang, “Nanoparticle-assisted high photoconductive gain in composites of polymer and fullerene,” Nat. Nanotechnol. 3, 543–547 (2008).
[CrossRef] [PubMed]

G. Konstantatos, L. Levina, A. Fischer, and E. H. Sargent, “Engineering the temporal response of photoconductive photodetectors via selective introduction of surface trap states,” Nano Lett. 8, 1446–1450 (2008).
[CrossRef] [PubMed]

2007 (2)

G. Konstantatos and E. H. Sargent, “PbS colloidal quantum dot photoconductive photodetectors: Transport, traps, and gain,” Appl. Phys. Lett. 91, 173505 (2007).
[CrossRef]

G. Konstantatos, J. Clifford, L. Levina, and E. H. Sargent, “Sensitive solution-processed visible-wavelength photodetectors,” Nat. Photon. 1, 531–534 (2007).
[CrossRef]

2006 (1)

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

2005 (1)

2004 (1)

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

1972 (1)

A. F. Sklensky and R. H. Bube, “Photoelectronic properties of zinc impurity in silicon,” Phys. Rev. 6, 1328–1336 (1972).
[CrossRef]

1971 (1)

S. Espevik, C. Wu, and R. H. Bube, “Mechanism of photoconductivity in chemically deposited lead sulfide layers,” J. Appl. Phys. 42, 3513–3529 (1971).
[CrossRef]

1962 (1)

P. H. Wendland, “New large area CdS photoconductor,” Rev. Sci. Instrum. 33, 337–339 (1962).
[CrossRef]

Alie, S.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Brockherde, W.

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

Bube, R. H.

A. F. Sklensky and R. H. Bube, “Photoelectronic properties of zinc impurity in silicon,” Phys. Rev. 6, 1328–1336 (1972).
[CrossRef]

S. Espevik, C. Wu, and R. H. Bube, “Mechanism of photoconductivity in chemically deposited lead sulfide layers,” J. Appl. Phys. 42, 3513–3529 (1971).
[CrossRef]

R. H. Bube, Photoconductivity of Solids (Krieger Publishing, 1960), pp 365–367.

Carey, J. E.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

J. E. Carey, C. H. Crouch, M. Shen, and E. Mazur, “Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes,” Opt. Lett. 30, 1773–1775 (2005).
[CrossRef] [PubMed]

Chen, H.

H. Chen, M. K. F. Lo, G. Yang, H. G. Monbouquette, and Y. Yang, “Nanoparticle-assisted high photoconductive gain in composites of polymer and fullerene,” Nat. Nanotechnol. 3, 543–547 (2008).
[CrossRef] [PubMed]

Clifford, J.

G. Konstantatos, J. Clifford, L. Levina, and E. H. Sargent, “Sensitive solution-processed visible-wavelength photodetectors,” Nat. Photon. 1, 531–534 (2007).
[CrossRef]

Clofford, J.

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Crouch, C. H.

Espevik, S.

S. Espevik, C. Wu, and R. H. Bube, “Mechanism of photoconductivity in chemically deposited lead sulfide layers,” J. Appl. Phys. 42, 3513–3529 (1971).
[CrossRef]

Fischer, A.

G. Konstantatos, L. Levina, A. Fischer, and E. H. Sargent, “Engineering the temporal response of photoconductive photodetectors via selective introduction of surface trap states,” Nano Lett. 8, 1446–1450 (2008).
[CrossRef] [PubMed]

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Homayoon, H.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Hoogland, S.

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Hosticka, B. J.

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

Howard, I.

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Jiang, J.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Kemna, A.

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

Klem, E.

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Konstantatos, G.

G. Konstantatos, L. Levina, A. Fischer, and E. H. Sargent, “Engineering the temporal response of photoconductive photodetectors via selective introduction of surface trap states,” Nano Lett. 8, 1446–1450 (2008).
[CrossRef] [PubMed]

G. Konstantatos and E. H. Sargent, “PbS colloidal quantum dot photoconductive photodetectors: Transport, traps, and gain,” Appl. Phys. Lett. 91, 173505 (2007).
[CrossRef]

G. Konstantatos, J. Clifford, L. Levina, and E. H. Sargent, “Sensitive solution-processed visible-wavelength photodetectors,” Nat. Photon. 1, 531–534 (2007).
[CrossRef]

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Levina, L.

G. Konstantatos, L. Levina, A. Fischer, and E. H. Sargent, “Engineering the temporal response of photoconductive photodetectors via selective introduction of surface trap states,” Nano Lett. 8, 1446–1450 (2008).
[CrossRef] [PubMed]

G. Konstantatos, J. Clifford, L. Levina, and E. H. Sargent, “Sensitive solution-processed visible-wavelength photodetectors,” Nat. Photon. 1, 531–534 (2007).
[CrossRef]

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Li, X.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Lo, M. K. F.

H. Chen, M. K. F. Lo, G. Yang, H. G. Monbouquette, and Y. Yang, “Nanoparticle-assisted high photoconductive gain in composites of polymer and fullerene,” Nat. Nanotechnol. 3, 543–547 (2008).
[CrossRef] [PubMed]

Mazur, E.

McKee, J.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Miller, D.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Monbouquette, H. G.

H. Chen, M. K. F. Lo, G. Yang, H. G. Monbouquette, and Y. Yang, “Nanoparticle-assisted high photoconductive gain in composites of polymer and fullerene,” Nat. Nanotechnol. 3, 543–547 (2008).
[CrossRef] [PubMed]

Ng, K. K.

S. M. Sze and K. K. Ng, Physics of Semiconductor Devices (Wiley, New Jersey2007).

Oezkan, E.

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

Palsule, C.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Pralle, M. U.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Sargent, E. H.

G. Konstantatos, L. Levina, A. Fischer, and E. H. Sargent, “Engineering the temporal response of photoconductive photodetectors via selective introduction of surface trap states,” Nano Lett. 8, 1446–1450 (2008).
[CrossRef] [PubMed]

G. Konstantatos, J. Clifford, L. Levina, and E. H. Sargent, “Sensitive solution-processed visible-wavelength photodetectors,” Nat. Photon. 1, 531–534 (2007).
[CrossRef]

G. Konstantatos and E. H. Sargent, “PbS colloidal quantum dot photoconductive photodetectors: Transport, traps, and gain,” Appl. Phys. Lett. 91, 173505 (2007).
[CrossRef]

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Serrano, F. M.

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

Shen, M.

Sickler, J.

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Sklensky, A. F.

A. F. Sklensky and R. H. Bube, “Photoelectronic properties of zinc impurity in silicon,” Phys. Rev. 6, 1328–1336 (1972).
[CrossRef]

Steadman, R.

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

Sze, S. M.

S. M. Sze and K. K. Ng, Physics of Semiconductor Devices (Wiley, New Jersey2007).

Vogtmeier, G.

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

Wendland, P. H.

P. H. Wendland, “New large area CdS photoconductor,” Rev. Sci. Instrum. 33, 337–339 (1962).
[CrossRef]

Wu, C.

S. Espevik, C. Wu, and R. H. Bube, “Mechanism of photoconductivity in chemically deposited lead sulfide layers,” J. Appl. Phys. 42, 3513–3529 (1971).
[CrossRef]

Yang, G.

H. Chen, M. K. F. Lo, G. Yang, H. G. Monbouquette, and Y. Yang, “Nanoparticle-assisted high photoconductive gain in composites of polymer and fullerene,” Nat. Nanotechnol. 3, 543–547 (2008).
[CrossRef] [PubMed]

Yang, Y.

H. Chen, M. K. F. Lo, G. Yang, H. G. Monbouquette, and Y. Yang, “Nanoparticle-assisted high photoconductive gain in composites of polymer and fullerene,” Nat. Nanotechnol. 3, 543–547 (2008).
[CrossRef] [PubMed]

Appl. Phys. Lett. (1)

G. Konstantatos and E. H. Sargent, “PbS colloidal quantum dot photoconductive photodetectors: Transport, traps, and gain,” Appl. Phys. Lett. 91, 173505 (2007).
[CrossRef]

IEEE J. Solid-State Circuits (1)

R. Steadman, F. M. Serrano, G. Vogtmeier, A. Kemna, E. Oezkan, W. Brockherde, and B. J. Hosticka, “A CMOS photodiode array with in-pixel data acquisition system for computed tomography,” IEEE J. Solid-State Circuits 39, 1034–1043 (2004)
[CrossRef]

J. Appl. Phys. (1)

S. Espevik, C. Wu, and R. H. Bube, “Mechanism of photoconductivity in chemically deposited lead sulfide layers,” J. Appl. Phys. 42, 3513–3529 (1971).
[CrossRef]

Nano Lett. (1)

G. Konstantatos, L. Levina, A. Fischer, and E. H. Sargent, “Engineering the temporal response of photoconductive photodetectors via selective introduction of surface trap states,” Nano Lett. 8, 1446–1450 (2008).
[CrossRef] [PubMed]

Nat. Nanotechnol. (1)

H. Chen, M. K. F. Lo, G. Yang, H. G. Monbouquette, and Y. Yang, “Nanoparticle-assisted high photoconductive gain in composites of polymer and fullerene,” Nat. Nanotechnol. 3, 543–547 (2008).
[CrossRef] [PubMed]

Nat. Photon. (1)

G. Konstantatos, J. Clifford, L. Levina, and E. H. Sargent, “Sensitive solution-processed visible-wavelength photodetectors,” Nat. Photon. 1, 531–534 (2007).
[CrossRef]

Nature (1)

G. Konstantatos, I. Howard, A. Fischer, S. Hoogland, J. Clofford, E. Klem, L. Levina, and E. H. Sargent, “Ultra-sensitive solution-cast quantum dot photodetectors,” Nature 442, 180–183 (2006).
[CrossRef] [PubMed]

Opt. Lett. (1)

Phys. Rev. (1)

A. F. Sklensky and R. H. Bube, “Photoelectronic properties of zinc impurity in silicon,” Phys. Rev. 6, 1328–1336 (1972).
[CrossRef]

Proc. SPIE (1)

M. U. Pralle, J. E. Carey, H. Homayoon, S. Alie, J. Sickler, X. Li, J. Jiang, D. Miller, C. Palsule, and J. McKee, “Black silicon enhanced photodetectors: a path to IR CMOS,” Proc. SPIE 7660, 76600N (2010).
[CrossRef]

Rev. Sci. Instrum. (1)

P. H. Wendland, “New large area CdS photoconductor,” Rev. Sci. Instrum. 33, 337–339 (1962).
[CrossRef]

Other (3)

S. M. Sze and K. K. Ng, Physics of Semiconductor Devices (Wiley, New Jersey2007).

http://sales.hamamatsu.com/assets/pdf/parts_S/s8745-01_etc_kspd1065e01.pdf .

R. H. Bube, Photoconductivity of Solids (Krieger Publishing, 1960), pp 365–367.

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