Abstract

One of the most serious issues in information industries is the bandwidth bottleneck in inter-chip interconnects. We propose a photonics-electronics convergence system to solve this issue. We fabricated a high density optical interposer to demonstrate the feasibility of the system by using silicon photonics integrated with an arrayed laser diode, an optical splitter, silicon optical modulators, germanium photodetectors, and silicon optical waveguides on a single silicon substrate. Error-free data transmission at 12.5 Gbps and a transmission density of 6.6 Tbps/cm2 were achieved with the optical interposer. We believe this technology will solve the bandwidth bottleneck problem in the future.

© 2012 OSA

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References

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  1. I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
    [CrossRef]
  2. International Technology Roadmap for Semiconductors 2009 Edition, Assembly and Packaging, Table AP2 and AP3. http://www.itrs.net/Links/2009ITRS/2009Chapters_2009Tables/2009_Assembly.pdf
  3. L. Chen, K. Preston, S. Manipatruni, and M. Lipson, “Integrated GHz silicon photonic interconnect with micrometer-scale modulators and detectors,” Opt. Express17(17), 15248–15256 (2009).
    [CrossRef] [PubMed]
  4. K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).
  5. G. Kim, J. W. Park, I. G. Kim, S. Kim, S. Kim, J. M. Lee, G. S. Park, J. Joo, K. S. Jang, J. H. Oh, S. A. Kim, J. H. Kim, J. Y. Lee, J. M. Park, D. W. Kim, D. K. Jeong, M. S. Hwang, J. K. Kim, K. S. Park, H. K. Chi, H. C. Kim, D. W. Kim, and M. H. Cho, “Low-voltage high-performance silicon photonic devices and photonic integrated circuits operating up to 30 Gb/s,” Opt. Express19(27), 26936–26947 (2011).
    [CrossRef] [PubMed]
  6. X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
    [CrossRef]
  7. Y. Urino, T. Shimizu, M. Okano, N. Hatori, M. Ishizaka, T. Yamamoto, T. Baba, T. Akagawa, S. Akiyama, T. Usuki, D. Okamoto, M. Miura, M. Noguchi, J. Fujikata, D. Shimura, H. Okayama, T. Tsuchizawa, T. Watanabe, K. Yamada, S. Itabashi, E. Saito, T. Nakamura, and Y. Arakawa, “First demonstration of high density optical interconnects integrated with lasers, optical modulators, and photodetectors on single silicon substrate,” Opt. Express19(26), B159–B165 (2011).
    [CrossRef] [PubMed]
  8. N. Hirayama, H. Takahashi, Y. Noguchi, M. Yamagishi, and T. Horikawa, “Low-loss Si waveguides with variable-shaped-beam EB lithography for large-scaled photonic circuits,” The extended abstract of 2012 International Conference on Solid State Devices and Materials (SSDM), A-2–2 (2012).
  9. S. Akiyama, T. Baba, M. Imai, T. Akagawa, M. Takahashi, N. Hirayama, H. Takahashi, Y. Noguchi, H. Okayama, T. Horikawa, and T. Usuki, “12.5-Gb/s operation with 0.29-V•cm V(π)L using silicon Mach-Zehnder modulator based-on forward-biased pin diode,” Opt. Express20(3), 2911–2923 (2012).
    [CrossRef] [PubMed]
  10. J. Fujikata, M. Noguchi, M. Miura, D. Okamoto, T. Horikawa, and Y. Arakawa, “Si waveguide-integrated MSM Ge photodiode,” Proceeding of International Conference on Solid State Devices and Materials (SSDM), CI-6–3 (2011).
  11. N. Hatori, T. Shimizu, M. Okano, M. Ishizaka, T. Yamamoto, Y. Urino, M. Mori, T. Nakamura, and Y. Arakawa, “A novel spot size convertor for hybrid integrated light sources on photonics-electronics convergence system,” Proceeding of 9th International Conference on Group IV Photonics (GFP), ThB2 (2012).
  12. N. Fujioka, T. Chu, and M. Ishizaka, “Compact and low power consumption hybrid integrated wavelength tunable laser module using silicon waveguide resonators,” J. Lightwave Technol.28, 3115–3120 (2010).

2012

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

S. Akiyama, T. Baba, M. Imai, T. Akagawa, M. Takahashi, N. Hirayama, H. Takahashi, Y. Noguchi, H. Okayama, T. Horikawa, and T. Usuki, “12.5-Gb/s operation with 0.29-V•cm V(π)L using silicon Mach-Zehnder modulator based-on forward-biased pin diode,” Opt. Express20(3), 2911–2923 (2012).
[CrossRef] [PubMed]

2011

2010

N. Fujioka, T. Chu, and M. Ishizaka, “Compact and low power consumption hybrid integrated wavelength tunable laser module using silicon waveguide resonators,” J. Lightwave Technol.28, 3115–3120 (2010).

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

2009

Akagawa, T.

Akiyama, S.

Arakawa, Y.

Asghari, M.

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Baba, T.

Block, B. A.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

Chang, P. L. D.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

Chen, L.

Chi, H. K.

Cho, M. H.

Chu, T.

Cunningham, J. E.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Fujikata, J.

Fujioka, N.

Hatori, N.

Hirayama, N.

Ho, R.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Horikawa, T.

Hwang, M. S.

Imai, M.

Ishizaka, M.

Itabashi, S.

Jang, K. S.

Jeong, D. K.

Joo, J.

Kem, A. M.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

Kim, D. W.

Kim, G.

Kim, H. C.

Kim, I. G.

Kim, J. H.

Kim, J. K.

Kim, S.

Kim, S. A.

Koka, P.

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Krishnamoorthy, A. V.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Lee, J. M.

Lee, J. Y.

Lexau, J.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Li, G.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Liao, J. T. S.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

Lipson, M.

Liu, F.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

Luo, Y.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Manipatruni, S.

McCracken, M.

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Mitchell, J.

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Miura, M.

Mohammed, E. M.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

Nakamura, T.

Noguchi, M.

Noguchi, Y.

Oh, J. H.

Okamoto, D.

Okano, M.

Okayama, H.

Palermo, S.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

Park, G. S.

Park, J. M.

Park, J. W.

Park, K. S.

Pinguet, T.

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Preston, K.

Raj, K.

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Reshotko, M. R.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

Saito, E.

Schwetman, H.

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Shimizu, T.

Shimura, D.

Shubin, I.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Takahashi, H.

Takahashi, M.

Thacker, H.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Tsuchizawa, T.

Urino, Y.

Usuki, T.

Watanabe, T.

Yamada, K.

Yamamoto, T.

Yao, J.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Young, I. A.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

Zheng, X.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

IEEE Commun. Mag.

I. A. Young, E. M. Mohammed, J. T. S. Liao, A. M. Kem, S. Palermo, B. A. Block, M. R. Reshotko, and P. L. D. Chang, “Optical technology for energy efficient I/O in high performance computing,” IEEE Commun. Mag.48(10), 184–191 (2010).
[CrossRef]

IEEE Photon. Technol. Lett.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “2-pJ/bit (On-Chip) 10-Gb/s digital CMOS silicon photonic link,” IEEE Photon. Technol. Lett.24(14), 1260–1262 (2012).
[CrossRef]

J. Lightwave Technol.

Opt. Express

Proc. SPIE

K. Raj, J. E. Cunningham, R. Ho, X. Zheng, H. Schwetman, P. Koka, M. McCracken, J. Lexau, G. Li, H. Thacker, I. Shubin, Y. Luo, J. Yao, M. Asghari, T. Pinguet, J. Mitchell, and A. V. Krishnamoorthy, “’Macrochip’ computer systems enabled by silicon photonic interconnects,” Proc. SPIE7607, 1–16 (2010).

Other

International Technology Roadmap for Semiconductors 2009 Edition, Assembly and Packaging, Table AP2 and AP3. http://www.itrs.net/Links/2009ITRS/2009Chapters_2009Tables/2009_Assembly.pdf

J. Fujikata, M. Noguchi, M. Miura, D. Okamoto, T. Horikawa, and Y. Arakawa, “Si waveguide-integrated MSM Ge photodiode,” Proceeding of International Conference on Solid State Devices and Materials (SSDM), CI-6–3 (2011).

N. Hatori, T. Shimizu, M. Okano, M. Ishizaka, T. Yamamoto, Y. Urino, M. Mori, T. Nakamura, and Y. Arakawa, “A novel spot size convertor for hybrid integrated light sources on photonics-electronics convergence system,” Proceeding of 9th International Conference on Group IV Photonics (GFP), ThB2 (2012).

N. Hirayama, H. Takahashi, Y. Noguchi, M. Yamagishi, and T. Horikawa, “Low-loss Si waveguides with variable-shaped-beam EB lithography for large-scaled photonic circuits,” The extended abstract of 2012 International Conference on Solid State Devices and Materials (SSDM), A-2–2 (2012).

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Figures (8)

Fig. 1
Fig. 1

Conceptual model of photonics-electronics convergence system for inter-chip interconnects.

Fig. 2
Fig. 2

Structure and images of optical modulator.

Fig. 3
Fig. 3

DC response of optical modulator.

Fig. 4
Fig. 4

Structure and images of MSM-PD.

Fig. 5
Fig. 5

Frequency responses of PDs.

Fig. 6
Fig. 6

Schematic structure of trident SSC and SEM image.

Fig. 7
Fig. 7

Photograph of fabricated silicon optical interposer.

Fig. 8
Fig. 8

Results from data transmission experiments.

Tables (2)

Tables Icon

Table 1 Optical power budget

Tables Icon

Table 2 Footprints of optical components per channel

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