Abstract

We carry out performance characterisation of a commercial push and pull deformable mirror with 48 actuators (Adaptica Srl). We present a detailed description of the system as well as a statistical approach on the identification of the mirror influence function. A new efficient control algorithm to induce the desired wavefront shape is also developed and comparison with other control algorithms present in literature has been made to prove the efficiency of the new approach.

© 2012 OSA

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  1. N. Hubin and L. Noethe, “Active optics, adaptive optics, and laser guide stars,” Science262, 1390–1394 (1993).
    [CrossRef] [PubMed]
  2. M. Rueckel, J. Mack-Bucher, and W. Denk, “Adaptive wavefront correction in two-photon microscopy using coherence-gated wavefront sensing.” Proc. Nat. Acad. Sci.103, 17137–17142 (2006).
    [CrossRef] [PubMed]
  3. E. Rossi, M. Chung, J. J. Hunter, W. H. Merigan, and D. R. Williams, “Imaging retinal mosaics in the living eye.” Eye (London, England)25, 301–308 (2011).
    [CrossRef]
  4. R. K. Tyson, Adaptive Optics Engineering Handbook (CRC Press, 1999).
  5. N. Ishii, T. Muroi, N. Kinoshita, K. Kamijo, and N. Shimidzu, “Wavefront compensation method using novel index in holographic data storage,” J. Europ. Opt. Soc. Rap. Public.5, 10036 (2010).
    [CrossRef]
  6. A. Polo, V. Kutchoukov, F. Bociort, S. F. Pereira, and H. P. Urbach, “Determination of wavefront structure for a Hartmann wavefront sensor using a phase-retrieval method,” Opt. Express20, 237–246 (2012).
    [CrossRef]
  7. F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).
  8. G. Vdovin and P. M. Sarro, “Flexible mirror micromachined in silicon.” Appl. Opt.34, 2968–2972 (1995).
    [CrossRef] [PubMed]
  9. E. Steinhaus and S. G. Lipson, “Bimorph piezoelectric flexible mirror,” J. Opt. Soc. Am.69, 478–481 (1979).
    [CrossRef]
  10. J. García-Márquez, J. E. A. Landgrave, N. Alcalá-Ochoa, and C. Pérez-Santos, “Recursive wavefront aberration correction method for LCoS spatial light modulators,” Opt. Lasers Eng.49, 743–748 (2011).
    [CrossRef]
  11. G. D. Love, “Wave-front correction and production of Zernike modes with a liquid-crystal spatial light modulator,” Appl. Opt.36, 1517–1520 (1997).
    [CrossRef] [PubMed]
  12. S. Bonora and L. Poletto, “Push-pull membrane mirrors for adaptive optics.” Opt. Express14, 11935–11944 (2006).
    [CrossRef] [PubMed]
  13. E. Fernandez and P. Artal, “Membrane deformable mirror for adaptive optics: performance limits in visual optics.” Opt. Express11, 1056–1069 (2003).
    [CrossRef] [PubMed]
  14. L. Zhu, P. C. Sun, D. U. Bartsch, W. R. Freeman, and Y. Fainman, “Wave-front generation of Zernike polynomial modes with a micromachined membrane deformable mirror.” Appl. Opt.38, 6019–6026 (1999).
    [CrossRef]
  15. E. S. Claflin and N. Bareket, “Configuring an electrostatic membrane mirror by least-squares fitting with analytically derived influence functions,” J. Opt. Soc. Am. A3, 1833–1839 (1986).
    [CrossRef]
  16. Adaptica Srl, “Saturn user manual,” http://www.adaptica.com/site/en/pages/saturn .
  17. C. Paterson, I. Munro, and J. C. Dainty, “A low cost adaptive optics system using a membrane mirror,” Opt. Express6, 175–185 (2000).
    [CrossRef] [PubMed]
  18. L. Jolissaint, “Synthetic modeling of astronomical closed loop adaptive optics,” J. Europ. Opt. Soc. Rap. Public.5, 10055 (2010).
    [CrossRef]
  19. D. Malacara and W. T. Welford, Optical Shop Testing (John Wiley Sons, Inc., 2006).
  20. A. Haber, R. Fraanje, and M. Verhaegen, “Linear computational complexity robust ilc for lifted systems,” Automatica48, 1102–1110 (2012).
    [CrossRef]
  21. D. A. Bristow, M. Tharayil, and A. G. Alleyne, “A survey of iterative learning control,” IEEE Control Systems26, 96–114 (2006).
    [CrossRef]
  22. M. Verhaegen and V. Verdult,, Filtering and System Identification: A Least Square Approach (Cambridge University Press, New York, NY, USA, 2007).
  23. I. G. Hughes and T. P. A. Hase, Measurements and Their Uncertainties: A Practical Guide to Modern Error Analysis (Oxford University Press, New York, NY, USA, 2011).
  24. F. Roddier, Adaptive Optics in Astronomy (Cambridge University Press, 1999).
  25. G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
    [CrossRef]

2012

A. Polo, V. Kutchoukov, F. Bociort, S. F. Pereira, and H. P. Urbach, “Determination of wavefront structure for a Hartmann wavefront sensor using a phase-retrieval method,” Opt. Express20, 237–246 (2012).
[CrossRef]

A. Haber, R. Fraanje, and M. Verhaegen, “Linear computational complexity robust ilc for lifted systems,” Automatica48, 1102–1110 (2012).
[CrossRef]

2011

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

J. García-Márquez, J. E. A. Landgrave, N. Alcalá-Ochoa, and C. Pérez-Santos, “Recursive wavefront aberration correction method for LCoS spatial light modulators,” Opt. Lasers Eng.49, 743–748 (2011).
[CrossRef]

E. Rossi, M. Chung, J. J. Hunter, W. H. Merigan, and D. R. Williams, “Imaging retinal mosaics in the living eye.” Eye (London, England)25, 301–308 (2011).
[CrossRef]

2010

N. Ishii, T. Muroi, N. Kinoshita, K. Kamijo, and N. Shimidzu, “Wavefront compensation method using novel index in holographic data storage,” J. Europ. Opt. Soc. Rap. Public.5, 10036 (2010).
[CrossRef]

L. Jolissaint, “Synthetic modeling of astronomical closed loop adaptive optics,” J. Europ. Opt. Soc. Rap. Public.5, 10055 (2010).
[CrossRef]

2006

M. Rueckel, J. Mack-Bucher, and W. Denk, “Adaptive wavefront correction in two-photon microscopy using coherence-gated wavefront sensing.” Proc. Nat. Acad. Sci.103, 17137–17142 (2006).
[CrossRef] [PubMed]

D. A. Bristow, M. Tharayil, and A. G. Alleyne, “A survey of iterative learning control,” IEEE Control Systems26, 96–114 (2006).
[CrossRef]

S. Bonora and L. Poletto, “Push-pull membrane mirrors for adaptive optics.” Opt. Express14, 11935–11944 (2006).
[CrossRef] [PubMed]

2003

2000

1999

L. Zhu, P. C. Sun, D. U. Bartsch, W. R. Freeman, and Y. Fainman, “Wave-front generation of Zernike polynomial modes with a micromachined membrane deformable mirror.” Appl. Opt.38, 6019–6026 (1999).
[CrossRef]

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

1997

1995

1993

N. Hubin and L. Noethe, “Active optics, adaptive optics, and laser guide stars,” Science262, 1390–1394 (1993).
[CrossRef] [PubMed]

1986

1979

Alcalá-Ochoa, N.

J. García-Márquez, J. E. A. Landgrave, N. Alcalá-Ochoa, and C. Pérez-Santos, “Recursive wavefront aberration correction method for LCoS spatial light modulators,” Opt. Lasers Eng.49, 743–748 (2011).
[CrossRef]

Alleyne, A. G.

D. A. Bristow, M. Tharayil, and A. G. Alleyne, “A survey of iterative learning control,” IEEE Control Systems26, 96–114 (2006).
[CrossRef]

Andrighettoni, M.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Andryzhyieuskaya, A.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Artal, P.

Bakker, H.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Bareket, N.

Bartsch, D. U.

Beems, M.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Biasi, R.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Biliotti, V.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Bociort, F.

A. Polo, V. Kutchoukov, F. Bociort, S. F. Pereira, and H. P. Urbach, “Determination of wavefront structure for a Hartmann wavefront sensor using a phase-retrieval method,” Opt. Express20, 237–246 (2012).
[CrossRef]

Bonora, S.

Bristow, D. A.

D. A. Bristow, M. Tharayil, and A. G. Alleyne, “A survey of iterative learning control,” IEEE Control Systems26, 96–114 (2006).
[CrossRef]

Brusa-Zappellini, G.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Chung, M.

E. Rossi, M. Chung, J. J. Hunter, W. H. Merigan, and D. R. Williams, “Imaging retinal mosaics in the living eye.” Eye (London, England)25, 301–308 (2011).
[CrossRef]

Claflin, E. S.

Dainty, J. C.

Del Vecchio, C.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Denk, W.

M. Rueckel, J. Mack-Bucher, and W. Denk, “Adaptive wavefront correction in two-photon microscopy using coherence-gated wavefront sensing.” Proc. Nat. Acad. Sci.103, 17137–17142 (2006).
[CrossRef] [PubMed]

Engblom, P.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Fainman, Y.

Fernandez, E.

Finders, J.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Fraanje, R.

A. Haber, R. Fraanje, and M. Verhaegen, “Linear computational complexity robust ilc for lifted systems,” Automatica48, 1102–1110 (2012).
[CrossRef]

Franchini, C.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Freeman, W. R.

Gallieni, D.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

García-Márquez, J.

J. García-Márquez, J. E. A. Landgrave, N. Alcalá-Ochoa, and C. Pérez-Santos, “Recursive wavefront aberration correction method for LCoS spatial light modulators,” Opt. Lasers Eng.49, 743–748 (2011).
[CrossRef]

Gruner, T.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Haber, A.

A. Haber, R. Fraanje, and M. Verhaegen, “Linear computational complexity robust ilc for lifted systems,” Automatica48, 1102–1110 (2012).
[CrossRef]

Hase, T. P. A.

I. G. Hughes and T. P. A. Hase, Measurements and Their Uncertainties: A Practical Guide to Modern Error Analysis (Oxford University Press, New York, NY, USA, 2011).

Hollink, T.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Hubin, N.

N. Hubin and L. Noethe, “Active optics, adaptive optics, and laser guide stars,” Science262, 1390–1394 (1993).
[CrossRef] [PubMed]

Hughes, I. G.

I. G. Hughes and T. P. A. Hase, Measurements and Their Uncertainties: A Practical Guide to Modern Error Analysis (Oxford University Press, New York, NY, USA, 2011).

Hunter, J. J.

E. Rossi, M. Chung, J. J. Hunter, W. H. Merigan, and D. R. Williams, “Imaging retinal mosaics in the living eye.” Eye (London, England)25, 301–308 (2011).
[CrossRef]

Ishii, N.

N. Ishii, T. Muroi, N. Kinoshita, K. Kamijo, and N. Shimidzu, “Wavefront compensation method using novel index in holographic data storage,” J. Europ. Opt. Soc. Rap. Public.5, 10036 (2010).
[CrossRef]

Jolissaint, L.

L. Jolissaint, “Synthetic modeling of astronomical closed loop adaptive optics,” J. Europ. Opt. Soc. Rap. Public.5, 10055 (2010).
[CrossRef]

Kamijo, K.

N. Ishii, T. Muroi, N. Kinoshita, K. Kamijo, and N. Shimidzu, “Wavefront compensation method using novel index in holographic data storage,” J. Europ. Opt. Soc. Rap. Public.5, 10036 (2010).
[CrossRef]

Kinoshita, N.

N. Ishii, T. Muroi, N. Kinoshita, K. Kamijo, and N. Shimidzu, “Wavefront compensation method using novel index in holographic data storage,” J. Europ. Opt. Soc. Rap. Public.5, 10036 (2010).
[CrossRef]

Kutchoukov, V.

A. Polo, V. Kutchoukov, F. Bociort, S. F. Pereira, and H. P. Urbach, “Determination of wavefront structure for a Hartmann wavefront sensor using a phase-retrieval method,” Opt. Express20, 237–246 (2012).
[CrossRef]

Landgrave, J. E. A.

J. García-Márquez, J. E. A. Landgrave, N. Alcalá-Ochoa, and C. Pérez-Santos, “Recursive wavefront aberration correction method for LCoS spatial light modulators,” Opt. Lasers Eng.49, 743–748 (2011).
[CrossRef]

Lipson, S. G.

Love, G. D.

Mack-Bucher, J.

M. Rueckel, J. Mack-Bucher, and W. Denk, “Adaptive wavefront correction in two-photon microscopy using coherence-gated wavefront sensing.” Proc. Nat. Acad. Sci.103, 17137–17142 (2006).
[CrossRef] [PubMed]

Malacara, D.

D. Malacara and W. T. Welford, Optical Shop Testing (John Wiley Sons, Inc., 2006).

Mantegazza, P.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Merigan, W. H.

E. Rossi, M. Chung, J. J. Hunter, W. H. Merigan, and D. R. Williams, “Imaging retinal mosaics in the living eye.” Eye (London, England)25, 301–308 (2011).
[CrossRef]

Mulkens, J.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Munro, I.

Muroi, T.

N. Ishii, T. Muroi, N. Kinoshita, K. Kamijo, and N. Shimidzu, “Wavefront compensation method using novel index in holographic data storage,” J. Europ. Opt. Soc. Rap. Public.5, 10036 (2010).
[CrossRef]

Nachtwein, A.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Noethe, L.

N. Hubin and L. Noethe, “Active optics, adaptive optics, and laser guide stars,” Science262, 1390–1394 (1993).
[CrossRef] [PubMed]

Paterson, C.

Pereira, S. F.

A. Polo, V. Kutchoukov, F. Bociort, S. F. Pereira, and H. P. Urbach, “Determination of wavefront structure for a Hartmann wavefront sensor using a phase-retrieval method,” Opt. Express20, 237–246 (2012).
[CrossRef]

Pérez-Santos, C.

J. García-Márquez, J. E. A. Landgrave, N. Alcalá-Ochoa, and C. Pérez-Santos, “Recursive wavefront aberration correction method for LCoS spatial light modulators,” Opt. Lasers Eng.49, 743–748 (2011).
[CrossRef]

Poletto, L.

Polo, A.

A. Polo, V. Kutchoukov, F. Bociort, S. F. Pereira, and H. P. Urbach, “Determination of wavefront structure for a Hartmann wavefront sensor using a phase-retrieval method,” Opt. Express20, 237–246 (2012).
[CrossRef]

Riccardi, A.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Roddier, F.

F. Roddier, Adaptive Optics in Astronomy (Cambridge University Press, 1999).

Rossi, E.

E. Rossi, M. Chung, J. J. Hunter, W. H. Merigan, and D. R. Williams, “Imaging retinal mosaics in the living eye.” Eye (London, England)25, 301–308 (2011).
[CrossRef]

Rueckel, M.

M. Rueckel, J. Mack-Bucher, and W. Denk, “Adaptive wavefront correction in two-photon microscopy using coherence-gated wavefront sensing.” Proc. Nat. Acad. Sci.103, 17137–17142 (2006).
[CrossRef] [PubMed]

Salinari, P.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Sarro, P. M.

Shimidzu, N.

N. Ishii, T. Muroi, N. Kinoshita, K. Kamijo, and N. Shimidzu, “Wavefront compensation method using novel index in holographic data storage,” J. Europ. Opt. Soc. Rap. Public.5, 10036 (2010).
[CrossRef]

Staals, F.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Stefanini, P.

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Steinhaus, E.

Sun, P. C.

Tharayil, M.

D. A. Bristow, M. Tharayil, and A. G. Alleyne, “A survey of iterative learning control,” IEEE Control Systems26, 96–114 (2006).
[CrossRef]

Tyson, R. K.

R. K. Tyson, Adaptive Optics Engineering Handbook (CRC Press, 1999).

Urbach, H. P.

A. Polo, V. Kutchoukov, F. Bociort, S. F. Pereira, and H. P. Urbach, “Determination of wavefront structure for a Hartmann wavefront sensor using a phase-retrieval method,” Opt. Express20, 237–246 (2012).
[CrossRef]

Vdovin, G.

Verdult, V.

M. Verhaegen and V. Verdult,, Filtering and System Identification: A Least Square Approach (Cambridge University Press, New York, NY, USA, 2007).

Verhaegen, M.

A. Haber, R. Fraanje, and M. Verhaegen, “Linear computational complexity robust ilc for lifted systems,” Automatica48, 1102–1110 (2012).
[CrossRef]

M. Verhaegen and V. Verdult,, Filtering and System Identification: A Least Square Approach (Cambridge University Press, New York, NY, USA, 2007).

Welford, W. T.

D. Malacara and W. T. Welford, Optical Shop Testing (John Wiley Sons, Inc., 2006).

Willekers, R.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Williams, D. R.

E. Rossi, M. Chung, J. J. Hunter, W. H. Merigan, and D. R. Williams, “Imaging retinal mosaics in the living eye.” Eye (London, England)25, 301–308 (2011).
[CrossRef]

Zhang, Y.

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

Zhu, L.

Appl. Opt.

Automatica

A. Haber, R. Fraanje, and M. Verhaegen, “Linear computational complexity robust ilc for lifted systems,” Automatica48, 1102–1110 (2012).
[CrossRef]

Eye (London, England)

E. Rossi, M. Chung, J. J. Hunter, W. H. Merigan, and D. R. Williams, “Imaging retinal mosaics in the living eye.” Eye (London, England)25, 301–308 (2011).
[CrossRef]

IEEE Control Systems

D. A. Bristow, M. Tharayil, and A. G. Alleyne, “A survey of iterative learning control,” IEEE Control Systems26, 96–114 (2006).
[CrossRef]

J. Europ. Opt. Soc. Rap. Public.

N. Ishii, T. Muroi, N. Kinoshita, K. Kamijo, and N. Shimidzu, “Wavefront compensation method using novel index in holographic data storage,” J. Europ. Opt. Soc. Rap. Public.5, 10036 (2010).
[CrossRef]

L. Jolissaint, “Synthetic modeling of astronomical closed loop adaptive optics,” J. Europ. Opt. Soc. Rap. Public.5, 10055 (2010).
[CrossRef]

J. Opt. Soc. Am.

J. Opt. Soc. Am. A

Opt. Express

Opt. Lasers Eng.

J. García-Márquez, J. E. A. Landgrave, N. Alcalá-Ochoa, and C. Pérez-Santos, “Recursive wavefront aberration correction method for LCoS spatial light modulators,” Opt. Lasers Eng.49, 743–748 (2011).
[CrossRef]

Proc. Nat. Acad. Sci.

M. Rueckel, J. Mack-Bucher, and W. Denk, “Adaptive wavefront correction in two-photon microscopy using coherence-gated wavefront sensing.” Proc. Nat. Acad. Sci.103, 17137–17142 (2006).
[CrossRef] [PubMed]

Proc. SPIE

F. Staals, A. Andryzhyieuskaya, H. Bakker, M. Beems, J. Finders, T. Hollink, J. Mulkens, A. Nachtwein, R. Willekers, P. Engblom, T. Gruner, and Y. Zhang, “Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner,” Proc. SPIE7973, 79731G–13 (2011).

G. Brusa-Zappellini, A. Riccardi, V. Biliotti, C. Del Vecchio, P. Salinari, P. Stefanini, P. Mantegazza, R. Biasi, M. Andrighettoni, C. Franchini, and D. Gallieni, “Adaptive secondary mirror for the 6.5-m conversion of the multiple mirror telescope: first laboratory testing results,” Proc. SPIE3726, 38–49 (1999).
[CrossRef]

Science

N. Hubin and L. Noethe, “Active optics, adaptive optics, and laser guide stars,” Science262, 1390–1394 (1993).
[CrossRef] [PubMed]

Other

R. K. Tyson, Adaptive Optics Engineering Handbook (CRC Press, 1999).

D. Malacara and W. T. Welford, Optical Shop Testing (John Wiley Sons, Inc., 2006).

Adaptica Srl, “Saturn user manual,” http://www.adaptica.com/site/en/pages/saturn .

M. Verhaegen and V. Verdult,, Filtering and System Identification: A Least Square Approach (Cambridge University Press, New York, NY, USA, 2007).

I. G. Hughes and T. P. A. Hase, Measurements and Their Uncertainties: A Practical Guide to Modern Error Analysis (Oxford University Press, New York, NY, USA, 2011).

F. Roddier, Adaptive Optics in Astronomy (Cambridge University Press, 1999).

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