Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics 5, 293–296 (2011).
[Crossref]

P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett. 107, 063901 (2011).
[Crossref]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332, 555–559 (2011).
[Crossref] [PubMed]

L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express 19, 8102–8107 (2011).
[Crossref] [PubMed]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express 19, 14233–14239 (2011).
[Crossref] [PubMed]

A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett. 36, 2845–2847 (2011).
[Crossref] [PubMed]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36, 3398–3400 (2011).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4, 37–40 (2010).
[Crossref]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96, 061101 (2010).
[Crossref]

P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics 3, 529–533 (2009).
[Crossref]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high-Q ring resonator,” Opt. Express 17, 11366–11370 (2009).
[Crossref] [PubMed]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett. 100, 103905 (2008).
[Crossref] [PubMed]

P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett. 101, 053903 (2008).
[Crossref]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

M. Oxborrow, “Traceable 2-D finite-element simulation of the whispering-gallery modes of axisymmetric electromagnetic resonators,” IEEE Trans. Microwave Theory Tech. 55, 1209–1218 (2007).
[Crossref]

C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express 15, 5976–5990 (2007).
[Crossref] [PubMed]

A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 14, 4357–4362 (2006).
[Crossref] [PubMed]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[Crossref] [PubMed]

A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett. 86, 261106 (2005).
[Crossref]

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12, 4742–4750 (2004).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
[Crossref]

C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt. 26, 2621–2624 (1987).
[Crossref] [PubMed]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics 3, 529–533 (2009).
[Crossref]

P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett. 101, 053903 (2008).
[Crossref]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express 19, 8102–8107 (2011).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett. 100, 103905 (2008).
[Crossref] [PubMed]

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12, 4742–4750 (2004).
[Crossref] [PubMed]

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett. 86, 261106 (2005).
[Crossref]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett. 101, 053903 (2008).
[Crossref]

P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett. 107, 063901 (2011).
[Crossref]

P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics 3, 529–533 (2009).
[Crossref]

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332, 555–559 (2011).
[Crossref] [PubMed]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96, 061101 (2010).
[Crossref]

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express 19, 14233–14239 (2011).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4, 37–40 (2010).
[Crossref]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[Crossref] [PubMed]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express 15, 5976–5990 (2007).
[Crossref] [PubMed]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett. 86, 261106 (2005).
[Crossref]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36, 3398–3400 (2011).
[Crossref] [PubMed]

M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express 19, 14233–14239 (2011).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4, 37–40 (2010).
[Crossref]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[Crossref] [PubMed]

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett. 107, 063901 (2011).
[Crossref]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4, 37–40 (2010).
[Crossref]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high-Q ring resonator,” Opt. Express 17, 11366–11370 (2009).
[Crossref] [PubMed]

P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics 3, 529–533 (2009).
[Crossref]

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett. 107, 063901 (2011).
[Crossref]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt. 26, 2621–2624 (1987).
[Crossref] [PubMed]

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett. 107, 063901 (2011).
[Crossref]

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332, 555–559 (2011).
[Crossref] [PubMed]

P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett. 107, 063901 (2011).
[Crossref]

P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics 3, 529–533 (2009).
[Crossref]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett. 101, 053903 (2008).
[Crossref]

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett. 86, 261106 (2005).
[Crossref]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96, 061101 (2010).
[Crossref]

A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett. 36, 2845–2847 (2011).
[Crossref] [PubMed]

A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics 5, 293–296 (2011).
[Crossref]

C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express 15, 5976–5990 (2007).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt. 26, 2621–2624 (1987).
[Crossref] [PubMed]

C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt. 26, 2621–2624 (1987).
[Crossref] [PubMed]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332, 555–559 (2011).
[Crossref] [PubMed]

P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett. 107, 063901 (2011).
[Crossref]

P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics 3, 529–533 (2009).
[Crossref]

P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett. 101, 053903 (2008).
[Crossref]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
[Crossref]

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express 15, 5976–5990 (2007).
[Crossref] [PubMed]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express 19, 14233–14239 (2011).
[Crossref] [PubMed]

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt. 26, 2621–2624 (1987).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express 15, 5976–5990 (2007).
[Crossref] [PubMed]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express 19, 14233–14239 (2011).
[Crossref] [PubMed]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36, 3398–3400 (2011).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4, 37–40 (2010).
[Crossref]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high-Q ring resonator,” Opt. Express 17, 11366–11370 (2009).
[Crossref] [PubMed]

A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics 5, 293–296 (2011).
[Crossref]

A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett. 36, 2845–2847 (2011).
[Crossref] [PubMed]

M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express 19, 14233–14239 (2011).
[Crossref] [PubMed]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36, 3398–3400 (2011).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4, 37–40 (2010).
[Crossref]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high-Q ring resonator,” Opt. Express 17, 11366–11370 (2009).
[Crossref] [PubMed]

A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 14, 4357–4362 (2006).
[Crossref] [PubMed]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett. 36, 2845–2847 (2011).
[Crossref] [PubMed]

A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics 5, 293–296 (2011).
[Crossref]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 14, 4357–4362 (2006).
[Crossref] [PubMed]

A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics 5, 293–296 (2011).
[Crossref]

A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett. 36, 2845–2847 (2011).
[Crossref] [PubMed]

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36, 3398–3400 (2011).
[Crossref] [PubMed]

C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt. 26, 2621–2624 (1987).
[Crossref] [PubMed]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett. 100, 103905 (2008).
[Crossref] [PubMed]

M. Oxborrow, “Traceable 2-D finite-element simulation of the whispering-gallery modes of axisymmetric electromagnetic resonators,” IEEE Trans. Microwave Theory Tech. 55, 1209–1218 (2007).
[Crossref]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express 15, 5976–5990 (2007).
[Crossref] [PubMed]

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express 19, 14233–14239 (2011).
[Crossref] [PubMed]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36, 3398–3400 (2011).
[Crossref] [PubMed]

A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett. 86, 261106 (2005).
[Crossref]

A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics 5, 293–296 (2011).
[Crossref]

A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett. 36, 2845–2847 (2011).
[Crossref] [PubMed]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett. 101, 053903 (2008).
[Crossref]

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[Crossref] [PubMed]

A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 14, 4357–4362 (2006).
[Crossref] [PubMed]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett. 100, 103905 (2008).
[Crossref] [PubMed]

A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett. 36, 2845–2847 (2011).
[Crossref] [PubMed]

A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics 5, 293–296 (2011).
[Crossref]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[Crossref] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
[Crossref]

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett. 100, 103905 (2008).
[Crossref] [PubMed]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96, 061101 (2010).
[Crossref]

A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett. 86, 261106 (2005).
[Crossref]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96, 061101 (2010).
[Crossref]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[Crossref] [PubMed]

A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 14, 4357–4362 (2006).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4, 37–40 (2010).
[Crossref]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12, 4742–4750 (2004).
[Crossref] [PubMed]

T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett. 100, 103905 (2008).
[Crossref] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
[Crossref]

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36, 3398–3400 (2011).
[Crossref] [PubMed]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express 19, 8102–8107 (2011).
[Crossref] [PubMed]

T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett. 100, 103905 (2008).
[Crossref] [PubMed]

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12, 4742–4750 (2004).
[Crossref] [PubMed]

L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express 19, 8102–8107 (2011).
[Crossref] [PubMed]

L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express 19, 8102–8107 (2011).
[Crossref] [PubMed]

C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt. 26, 2621–2624 (1987).
[Crossref] [PubMed]

A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett. 86, 261106 (2005).
[Crossref]

D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett. 96, 061101 (2010).
[Crossref]

M. Oxborrow, “Traceable 2-D finite-element simulation of the whispering-gallery modes of axisymmetric electromagnetic resonators,” IEEE Trans. Microwave Theory Tech. 55, 1209–1218 (2007).
[Crossref]

F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics 5, 770–776 (2011).
[Crossref]

A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics 5, 293–296 (2011).
[Crossref]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4, 37–40 (2010).
[Crossref]

T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics 6, 480–487 (2012).
[Crossref]

P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics 3, 529–533 (2009).
[Crossref]

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature 441, 960–963 (2006).
[Crossref] [PubMed]

T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express 12, 4742–4750 (2004).
[Crossref] [PubMed]

A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express 14, 4357–4362 (2006).
[Crossref] [PubMed]

C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express 15, 5976–5990 (2007).
[Crossref] [PubMed]

J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19, 24090–24101 (2011).
[Crossref] [PubMed]

A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high-Q ring resonator,” Opt. Express 17, 11366–11370 (2009).
[Crossref] [PubMed]

L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express 19, 8102–8107 (2011).
[Crossref] [PubMed]

T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express 19, 11529–11538 (2011).
[Crossref] [PubMed]

M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express 19, 14233–14239 (2011).
[Crossref] [PubMed]

A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett. 36, 2845–2847 (2011).
[Crossref] [PubMed]

Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett. 36, 3398–3400 (2011).
[Crossref] [PubMed]

T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett. 27, 1669–1671 (2002).
[Crossref]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28, 1302–1304 (2003).
[Crossref] [PubMed]

X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett. 33, 2889–2891 (2008).
[Crossref] [PubMed]

P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett. 107, 063901 (2011).
[Crossref]

T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett. 100, 103905 (2008).
[Crossref] [PubMed]

P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett. 101, 053903 (2008).
[Crossref]

T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science 321, 1335–1337 (2008).
[Crossref] [PubMed]

T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science 332, 555–559 (2011).
[Crossref] [PubMed]

J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).