Abstract

We propose a novel silicon-nanowire-type multiplexer (MUX) / demultiplexer (DeMUX) based on multi-stage microring resonator assisted delayed Mach-Zehnder interferometers. It is theoretically shown that spectral flatness of DeMUX spectra can be accomplished by incorporating nonlinear phase behaviors of microring resonators into the multi-stage delayed Mach-Zehnder interferometers. We experimentally demonstrate flat-topped 400GHz-spacing 1 × 4Ch demultiplexing operation in the fabricated device with silicon-nanowire waveguides. Furthermore, by integrating the micro-heaters on the top cladding layer of the fabricated device, the DeMUX performance is upgraded in terms of excess loss (<0.8dB) and crosstalk (<–10dB) without any degradation of filter spectral flatness at each channel grid.

© 2012 OSA

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2012 (1)

Y. A. Vlasov, “Silicon CMOS-integrated nano-photonics for computer and data communications beyond 100G,” IEEE Commun. Mag.50(2), S67–S72 (2012).
[CrossRef]

2011 (2)

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

S. Park, K. J. Kim, I. G. Kim, and G. Kim, “Si micro-ring MUX/DeMUX WDM filters,” Opt. Express19(14), 13531–13539 (2011).
[CrossRef] [PubMed]

2010 (6)

Q. Fang, T.-Y. Liow, J. F. Song, K. W. Ang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability,” Opt. Express18(5), 5106–5113 (2010).
[CrossRef] [PubMed]

N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

P. Dong, W. Qian, H. Liang, R. Shafiiha, X. Wang, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “1x4 reconfigurable demultiplexing filter based on free-standing silicon racetrack resonators,” Opt. Express18(24), 24504–24509 (2010).
[CrossRef] [PubMed]

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

M. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kartner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring resonator filterbank for on-chip WDM systems,” Opt. Lett.19(1), 306–316 (2010).

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

2009 (1)

D. A. B. Miller, “Device requirements for optical interconnects to silicon chips,” IEEE Proc.97(7), 1166–1185 (2009).
[CrossRef]

2008 (3)

2007 (2)

2000 (1)

M. Kohtoku, S. Oku, Y. Kadota, Y. Shibata, and Y. Yoshikuni, “200-GHz FSR periodic multi/demultiplexer with flattened transmission and rejection band by using a Mach-Zehnder interferometer with a ring resonator,” IEEE Photon. Technol. Lett.12(9), 1174–1176 (2000).
[CrossRef]

Ang, K. W.

Asghari, M.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

P. Dong, W. Qian, H. Liang, R. Shafiiha, X. Wang, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “1x4 reconfigurable demultiplexing filter based on free-standing silicon racetrack resonators,” Opt. Express18(24), 24504–24509 (2010).
[CrossRef] [PubMed]

Barkai, A.

Basak, J.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

Chetrit, Y.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

Cunningham, J. E.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

P. Dong, W. Qian, H. Liang, R. Shafiiha, X. Wang, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “1x4 reconfigurable demultiplexing filter based on free-standing silicon racetrack resonators,” Opt. Express18(24), 24504–24509 (2010).
[CrossRef] [PubMed]

Dahlem, M.

M. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kartner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring resonator filterbank for on-chip WDM systems,” Opt. Lett.19(1), 306–316 (2010).

Dong, P.

Elek, N.

Fang, Q.

Feng, D.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

P. Dong, W. Qian, H. Liang, R. Shafiiha, X. Wang, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “1x4 reconfigurable demultiplexing filter based on free-standing silicon racetrack resonators,” Opt. Express18(24), 24504–24509 (2010).
[CrossRef] [PubMed]

Feng, N. N.

Goossen, K. W.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

Ho, R.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Holzwarth, C. W.

M. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kartner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring resonator filterbank for on-chip WDM systems,” Opt. Lett.19(1), 306–316 (2010).

Ippen, E. P.

M. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kartner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring resonator filterbank for on-chip WDM systems,” Opt. Lett.19(1), 306–316 (2010).

Jan, W.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

Jones, R.

Kadota, Y.

M. Kohtoku, S. Oku, Y. Kadota, Y. Shibata, and Y. Yoshikuni, “200-GHz FSR periodic multi/demultiplexer with flattened transmission and rejection band by using a Mach-Zehnder interferometer with a ring resonator,” IEEE Photon. Technol. Lett.12(9), 1174–1176 (2000).
[CrossRef]

Kartner, F. X.

M. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kartner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring resonator filterbank for on-chip WDM systems,” Opt. Lett.19(1), 306–316 (2010).

Khan, M. H.

Khilo, A.

M. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kartner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring resonator filterbank for on-chip WDM systems,” Opt. Lett.19(1), 306–316 (2010).

Kim, D. J.

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, “Crosstalk reduction in a shallow-etched silicon nanowire AWG,” IEEE Photon. Technol. Lett.20(19), 1615–1617 (2008).
[CrossRef]

Kim, D. W.

Kim, G.

S. Park, K. J. Kim, I. G. Kim, and G. Kim, “Si micro-ring MUX/DeMUX WDM filters,” Opt. Express19(14), 13531–13539 (2011).
[CrossRef] [PubMed]

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, “Crosstalk reduction in a shallow-etched silicon nanowire AWG,” IEEE Photon. Technol. Lett.20(19), 1615–1617 (2008).
[CrossRef]

Kim, I. G.

Kim, K. J.

Kohtoku, M.

M. Kohtoku, S. Oku, Y. Kadota, Y. Shibata, and Y. Yoshikuni, “200-GHz FSR periodic multi/demultiplexer with flattened transmission and rejection band by using a Mach-Zehnder interferometer with a ring resonator,” IEEE Photon. Technol. Lett.12(9), 1174–1176 (2000).
[CrossRef]

Krishnamoorthy, A. V.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

P. Dong, W. Qian, H. Liang, R. Shafiiha, X. Wang, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “1x4 reconfigurable demultiplexing filter based on free-standing silicon racetrack resonators,” Opt. Express18(24), 24504–24509 (2010).
[CrossRef] [PubMed]

Kwong, D. L.

Lee, J. M.

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, “Crosstalk reduction in a shallow-etched silicon nanowire AWG,” IEEE Photon. Technol. Lett.20(19), 1615–1617 (2008).
[CrossRef]

Lexau, J.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Li, G.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

P. Dong, W. Qian, H. Liang, R. Shafiiha, X. Wang, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “1x4 reconfigurable demultiplexing filter based on free-standing silicon racetrack resonators,” Opt. Express18(24), 24504–24509 (2010).
[CrossRef] [PubMed]

Liang, H.

Liao, L.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

Liao, S.

N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Liow, T.-Y.

Lipson, M.

Liu, A.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. Liu, “Silicon-on-insulator eight-channel optical multiplexer based on a cascade of asymmetric Mach-Zehnder interferometers,” Opt. Lett.33(5), 530–532 (2008).
[CrossRef] [PubMed]

Liu, F.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Lo, G. Q.

Luo, Y.

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Manipatruni, S.

Miller, D. A. B.

D. A. B. Miller, “Device requirements for optical interconnects to silicon chips,” IEEE Proc.97(7), 1166–1185 (2009).
[CrossRef]

Nguyen, H.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. Liu, “Silicon-on-insulator eight-channel optical multiplexer based on a cascade of asymmetric Mach-Zehnder interferometers,” Opt. Lett.33(5), 530–532 (2008).
[CrossRef] [PubMed]

Oku, S.

M. Kohtoku, S. Oku, Y. Kadota, Y. Shibata, and Y. Yoshikuni, “200-GHz FSR periodic multi/demultiplexer with flattened transmission and rejection band by using a Mach-Zehnder interferometer with a ring resonator,” IEEE Photon. Technol. Lett.12(9), 1174–1176 (2000).
[CrossRef]

Paniccia, M.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

Park, S.

Patil, D.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Pinguet, T.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Pyo, J.

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, “Crosstalk reduction in a shallow-etched silicon nanowire AWG,” IEEE Photon. Technol. Lett.20(19), 1615–1617 (2008).
[CrossRef]

Qi, M.

Qian, W.

Raj, K.

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Rozier, R.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

Rubin, D.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

Schmidt, B.

Schwetman, H.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

Shafiiha, R.

Shakya, J.

Shen, H.

Shi, J.

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Shibata, Y.

M. Kohtoku, S. Oku, Y. Kadota, Y. Shibata, and Y. Yoshikuni, “200-GHz FSR periodic multi/demultiplexer with flattened transmission and rejection band by using a Mach-Zehnder interferometer with a ring resonator,” IEEE Photon. Technol. Lett.12(9), 1174–1176 (2000).
[CrossRef]

Shubin, I. N.

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Smith, H. I.

M. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kartner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring resonator filterbank for on-chip WDM systems,” Opt. Lett.19(1), 306–316 (2010).

Song, J.

Song, J. F.

Song, J. H.

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, “Crosstalk reduction in a shallow-etched silicon nanowire AWG,” IEEE Photon. Technol. Lett.20(19), 1615–1617 (2008).
[CrossRef]

Tao, S. H.

Thacker, H.

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Vlasov, Y. A.

Y. A. Vlasov, “Silicon CMOS-integrated nano-photonics for computer and data communications beyond 100G,” IEEE Commun. Mag.50(2), S67–S72 (2012).
[CrossRef]

Wang, X.

Xiao, S.

Xu, Q.

Yao, J.

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Yoshikuni, Y.

M. Kohtoku, S. Oku, Y. Kadota, Y. Shibata, and Y. Yoshikuni, “200-GHz FSR periodic multi/demultiplexer with flattened transmission and rejection band by using a Mach-Zehnder interferometer with a ring resonator,” IEEE Photon. Technol. Lett.12(9), 1174–1176 (2000).
[CrossRef]

Yu, M. B.

Zheng, D.

Zheng, X.

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

IEEE Commun. Mag. (1)

Y. A. Vlasov, “Silicon CMOS-integrated nano-photonics for computer and data communications beyond 100G,” IEEE Commun. Mag.50(2), S67–S72 (2012).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (2)

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength division multiplexing circuit on silicon-on-insulator platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010).
[CrossRef]

A. V. Krishnamoorthy, K. W. Goossen, W. Jan, X. Zheng, R. Ho, G. Li, R. Rozier, F. Liu, D. Patil, J. Lexau, H. Schwetman, D. Feng, M. Asghari, T. Pinguet, and J. E. Cunningham, “Progress in low-power switched optical interconnects,” IEEE J. Sel. Top. Quantum Electron.17(2), 357–376 (2011).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, “Crosstalk reduction in a shallow-etched silicon nanowire AWG,” IEEE Photon. Technol. Lett.20(19), 1615–1617 (2008).
[CrossRef]

M. Kohtoku, S. Oku, Y. Kadota, Y. Shibata, and Y. Yoshikuni, “200-GHz FSR periodic multi/demultiplexer with flattened transmission and rejection band by using a Mach-Zehnder interferometer with a ring resonator,” IEEE Photon. Technol. Lett.12(9), 1174–1176 (2000).
[CrossRef]

IEEE Proc. (1)

D. A. B. Miller, “Device requirements for optical interconnects to silicon chips,” IEEE Proc.97(7), 1166–1185 (2009).
[CrossRef]

Opt. Express (7)

S. Park, K. J. Kim, I. G. Kim, and G. Kim, “Si micro-ring MUX/DeMUX WDM filters,” Opt. Express19(14), 13531–13539 (2011).
[CrossRef] [PubMed]

Q. Fang, T.-Y. Liow, J. F. Song, K. W. Ang, M. B. Yu, G. Q. Lo, and D. L. Kwong, “WDM multi-channel silicon photonic receiver with 320 Gbps data transmission capability,” Opt. Express18(5), 5106–5113 (2010).
[CrossRef] [PubMed]

Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express15(2), 430–436 (2007).
[CrossRef] [PubMed]

N. N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25microm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Multiple-channel silicon micro-resonator based filters for WDM applications,” Opt. Express15(12), 7489–7498 (2007).
[CrossRef] [PubMed]

P. Dong, W. Qian, H. Liang, R. Shafiiha, X. Wang, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “1x4 reconfigurable demultiplexing filter based on free-standing silicon racetrack resonators,” Opt. Express18(24), 24504–24509 (2010).
[CrossRef] [PubMed]

J. Song, Q. Fang, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Passive ring-assisted Mach-Zehnder interleaver on silicon-on-insulator,” Opt. Express16(12), 8359–8365 (2008).
[CrossRef] [PubMed]

Opt. Lett. (2)

M. Dahlem, C. W. Holzwarth, A. Khilo, F. X. Kartner, H. I. Smith, and E. P. Ippen, “Reconfigurable multi-channel second-order silicon microring resonator filterbank for on-chip WDM systems,” Opt. Lett.19(1), 306–316 (2010).

D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. Liu, “Silicon-on-insulator eight-channel optical multiplexer based on a cascade of asymmetric Mach-Zehnder interferometers,” Opt. Lett.33(5), 530–532 (2008).
[CrossRef] [PubMed]

Proc. SPIE (1)

G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, P. Dong, D. Feng, S. Liao, R. Shafiiha, M. Asghari, J. Yao, J. Shi, I. N. Shubin, D. Patil, F. Liu, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power silicon photonic interconnect for high-performance computing systems,” Proc. SPIE7607, 760703, 760703-15 (2010).
[CrossRef]

Other (4)

F. Horst, “Silicon integrated waveguide devices for filtering and wavelength demultiplexing,” in Proceedings of 2011 Optical Fiber Communication Conference (San Diego, United States of America, 2010), OWJ3.

S. Pathak, E. Lambert, P. Dumon, D. Van Thourhout, and W. Bogaerts, “Compact SOI-based AWG with flattened spectral response using a MMI,” in Proceeding of 2011 Group IV Photonics (London, England, 2011), WC2.

X. Zheng, F. Liu, J. Lexau, D. Patil, G. Li, Y. Luo, H. Thacker, I. Shubin, J. Yao, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-low power arrayed CMOS silicon photonic transceivers for an 80 Gbps WDM optical link,” in Proceedings of 2011 Optical Fiber Communication Conference (Los Angelis, United States of America, 2011), PDPA1.

X. Zheng, Y. Luo, J. Lexau, F. Liu, G. Li, H. Thacker, I. Shubin, J. Yao, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “A Complete 10 Gbps chip-to-chip digital CMOS silicon photonic link,” in Proceedings of 2012 Conference on Laser and Electro-Optics (San Jose, United States of America, 2012), CTh5D.6.

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Figures (11)

Fig. 1
Fig. 1

Schematic diagram of the proposed 1 × 4Ch optical DeMUX employing two-stage MRR assisted DMZIs

Fig. 2
Fig. 2

Conceptual drawing of the relation of center wavelengths and FSRs for the DMZI-1, MRR-1, MRR-2a and MRR-2b in the proposed scheme

Fig. 3
Fig. 3

Calculated phase and amplitude characteristics of the 1st-stage M-DMZI: (a) differential phase variation (Δϕ) between the DMZI-1 and the MRR-1, and (b) corresponding filter transmittances for B1 and B2 ports

Fig. 4
Fig. 4

Calculated phase and amplitude characteristics of the multi-stage M-DMZIs (1st-stage and 2nd-stage M-DMZIs): (a) differential phase variation (Δϕ) between the M-DMZI-1-2a and the M-DMZI-1-2b, and (b) corresponding filter transmittances for all output channels

Fig. 5
Fig. 5

Top-view of the proposed 1 × 4Ch optical DeMUX together with schematic drawings of the Si-nanowire waveguide’s cross-section and the directional couplers used in each M-DMZI.

Fig. 6
Fig. 6

Top-views of the micro-heater integrated 1 × 4Ch optical DeMUX and its magnified view at around the M-DMZI-2b

Fig. 7
Fig. 7

Measured transmission spectra for the fabricated device without a micro-heater tuning control

Fig. 8
Fig. 8

(a) Schematic diagram for evaluating the 2nd-stage M-DMZIs, (b) measured spectra for each M-DMZI, and (c) calculated spectra when we provided some portion of extra phase errors to each M-DMZI

Fig. 9
Fig. 9

Calculated transmission spectra for the 1 × 4Ch DeMUX when we considered random phase error at the three M-DMZIs

Fig. 10
Fig. 10

Measured spectra for the heater-mounted device before exploiting a thermal tuning control

Fig. 11
Fig. 11

Measured spectra of the heater-mounted 1 × 4Ch DeMUX with the activation of the micro-heaters at the MRR-2a, the MRR-2b and the DMZI-2b, together with transmission spectra for the S-bend waveguide

Tables (2)

Tables Icon

Table 1 Provided excess phase errors at the 2nd-stage M-DMZIs shown in Fig. 8(a)

Tables Icon

Table 2 Provided excess phase errors at the 1st-stage M-DMZI shown in Fig. 8(a)

Equations (14)

Equations on this page are rendered with MathJax. Learn more.

λ MRR1 = λ DMZI1 0.5Δν
FS R MRR1 0.5FS R DMZI1 Δν
λ MRR2a = λ MRR1 +0.5Δν
λ MRR2b = λ MRR1 0.5Δν
FS R MRR2a FS R MRR2b 0.5FS R DMZI2a 0.5FS R DMZI2b 2Δν
λ DMZI2a = λ MRR2a +Δν= λ MRR2b +2Δν
λ DMZI2b = λ DMZI2a Δν
κ MRR1 = κ MRR2a = κ MRR2b 0.85
[ b 1 b 2 ]= 1 2 [ 1 j j 1 ][ Exp[ j β C L DL1 ] 0 0 T( β C L MRR1 ) ][ 1 j j 1 ][ 0 a 1 ]= M DI1 [ 0 a 1 ]
T( β C L MRR1 )= κ MRR1 [ cos( β C L MRR1 )jsin( β C L MRR1 ) ] 1 1 κ MRR1 [ cos( β C L MRR1 )jsin( β C L MRR1 ) ]
[ c 1 c 2 ]= M DI2a [ 0 b 1 ]
[ d 1 d 2 ]= M DI2b [ b 2 0 ]
M DI2a = 1 2 [ 1 j j 1 ][ Exp[ j β C L DL2a ] 0 0 T( β C L MRR2a ) ][ 1 j j 1 ]
M DI2b = 1 2 [ 1 j j 1 ][ Exp[ j β C L DL2b ]Exp[ j( +π/2 ) ] 0 0 T( β C L MRR2a ) ][ 1 j j 1 ]

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