Abstract

Highly efficient absorber is of particular importance in terahertz regime as naturally occurring materials with frequency-selective absorption in this frequency band is difficult to find. Here we present the design and characterization of a broadband terahertz absorber based on heavily Boron-doped silicon (0.7676 Ω cm) grating. It is numerically demonstrated by utilizing both the zero- and first order diffraction in the doped silicon wafer, relative absorption bandwidth larger than 100% can be achieved. Furthermore, the design can be easily extended to higher frequencies as the optical property of doped silicon is tunable through changing the doping concentration.

© 2012 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett.100(20), 207402 (2008).
    [CrossRef] [PubMed]
  2. H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
    [CrossRef]
  3. X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett.104(20), 207403 (2010).
    [CrossRef] [PubMed]
  4. M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B79(3), 033101 (2009).
    [CrossRef]
  5. M. Pu, C. Hu, M. Wang, C. Huang, Z. Zhao, C. Wang, Q. Feng, and X. Luo, “Design principles for infrared wide-angle perfect absorber based on plasmonic structure,” Opt. Express19(18), 17413–17420 (2011).
    [CrossRef] [PubMed]
  6. H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
    [CrossRef] [PubMed]
  7. Q.-Y. Wen, H.-W. Zhang, Y.-S. Xie, Q.-H. Yang, and Y.-L. Liu, “Dual band terahertz metamaterial absorber: Design, fabrication, and characterization,” Appl. Phys. Lett.95(24), 241111 (2009).
    [CrossRef]
  8. X. Shen, T. J. Cui, J. Zhao, H. F. Ma, W. X. Jiang, and H. Li, “Polarization-independent wide-angle triple-band metamaterial absorber,” Opt. Express19(10), 9401–9407 (2011).
    [CrossRef] [PubMed]
  9. Y. Q. Ye, Y. Jin, and S. He, “Omnidirectional, polarization-insensitive and broadband thin absorber in the terahertz regime,” J. Opt. Soc. Am. B27(3), 498–504 (2010).
    [CrossRef]
  10. J. Grant, Y. Ma, S. Saha, A. Khalid, and D. R. S. Cumming, “Polarization insensitive, broadband terahertz metamaterial absorber,” Opt. Lett.36(17), 3476–3478 (2011).
    [CrossRef] [PubMed]
  11. C. Wu and G. Shvets, “Design of metamaterial surfaces with broadband absorbance,” Opt. Lett.37(3), 308–310 (2012).
    [CrossRef] [PubMed]
  12. Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
    [CrossRef] [PubMed]
  13. D.-H. Kim, D.-S. Kim, S. Hwang, and J.-H. Jang, “Surface relief structures for a flexible broadband terahertz absorber,” Opt. Express20(15), 16815–16822 (2012).
    [CrossRef]
  14. K. B. Alici, A. B. Turhan, C. M. Soukoulis, and E. Ozbay, “Optically thin composite resonant absorber at the near-infrared band: a polarization independent and spectrally broadband configuration,” Opt. Express19(15), 14260–14267 (2011).
    [CrossRef] [PubMed]
  15. Q. Feng, M. Pu, C. Hu, and X. Luo, “Engineering the dispersion of metamaterial surface for broadband infrared absorption,” Opt. Lett.37(11), 2133–2135 (2012).
    [CrossRef] [PubMed]
  16. K. N. Rozanov, “Ultimate thickness to bandwidth ratio of radar absorbers,” IEEE Trans. Antenn. Propag.48(8), 1230–1234 (2000).
    [CrossRef]
  17. T. D. Corrigan, D. H. Park, H. D. Drew, S.-H. Guo, P. W. Kolb, W. N. Herman, and R. J. Phaneuf, “Broadband and mid-infrared absorber based on dielectric-thin metal film multilayers,” Appl. Opt.51(8), 1109–1114 (2012).
    [CrossRef] [PubMed]
  18. A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
    [CrossRef] [PubMed]
  19. G. V. Naik and A. Boltasseva,“ Semiconductors for plasmonics and metamaterials,” Phys. Status Solidi-R.4(10), 295–297 (2010).
    [CrossRef]
  20. M. Laroche, F. Marquier, R. Carminati, and J. Greffet, “Tailoring silicon radiative properties,” Opt. Commun.250(4-6), 316–320 (2005).
    [CrossRef]
  21. C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, and B. Jiang, “Templated fabrication of large area subwavelength antireflection gratings on silicon,” Appl. Phys. Lett.91(23), 231105 (2007).
    [CrossRef]
  22. M. Wang, C. Hu, M. Pu, C. Huang, Z. Zhao, Q. Feng, and X. Luo, “Truncated spherical voids for nearly omnidirectional optical absorption,” Opt. Express19(21), 20642–20649 (2011).
    [CrossRef] [PubMed]
  23. S. Nashima, O. Morikawa, K. Takata, and M. Hangyo, “Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy,” Appl. Phys. Lett.79(24), 3923–3925 (2001).
    [CrossRef]
  24. M. Pu, Q. Feng, M. Wang, C. Hu, C. Huang, X. Ma, Z. Zhao, C. Wang, and X. Luo, “Ultrathin broadband nearly perfect absorber with symmetrical coherent illumination,” Opt. Express20(3), 2246–2254 (2012).
    [CrossRef] [PubMed]
  25. B. V. Zeghbroeck, Principles of Semiconductor Devices (Boulder, 1997).
  26. J. Shin, J. Shen, P. B. Catrysse, and S. Fan, “Cut-through metal slit array as an anisotropic metamaterial film,” IEEE J. Sel. Top. Quantum Electron.12(6), 1116–1122 (2006).
    [CrossRef]

2012

2011

2010

Y. Q. Ye, Y. Jin, and S. He, “Omnidirectional, polarization-insensitive and broadband thin absorber in the terahertz regime,” J. Opt. Soc. Am. B27(3), 498–504 (2010).
[CrossRef]

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett.104(20), 207403 (2010).
[CrossRef] [PubMed]

G. V. Naik and A. Boltasseva,“ Semiconductors for plasmonics and metamaterials,” Phys. Status Solidi-R.4(10), 295–297 (2010).
[CrossRef]

2009

M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B79(3), 033101 (2009).
[CrossRef]

Q.-Y. Wen, H.-W. Zhang, Y.-S. Xie, Q.-H. Yang, and Y.-L. Liu, “Dual band terahertz metamaterial absorber: Design, fabrication, and characterization,” Appl. Phys. Lett.95(24), 241111 (2009).
[CrossRef]

2008

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett.100(20), 207402 (2008).
[CrossRef] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
[CrossRef] [PubMed]

2007

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, and B. Jiang, “Templated fabrication of large area subwavelength antireflection gratings on silicon,” Appl. Phys. Lett.91(23), 231105 (2007).
[CrossRef]

2006

J. Shin, J. Shen, P. B. Catrysse, and S. Fan, “Cut-through metal slit array as an anisotropic metamaterial film,” IEEE J. Sel. Top. Quantum Electron.12(6), 1116–1122 (2006).
[CrossRef]

2005

M. Laroche, F. Marquier, R. Carminati, and J. Greffet, “Tailoring silicon radiative properties,” Opt. Commun.250(4-6), 316–320 (2005).
[CrossRef]

2001

S. Nashima, O. Morikawa, K. Takata, and M. Hangyo, “Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy,” Appl. Phys. Lett.79(24), 3923–3925 (2001).
[CrossRef]

2000

K. N. Rozanov, “Ultimate thickness to bandwidth ratio of radar absorbers,” IEEE Trans. Antenn. Propag.48(8), 1230–1234 (2000).
[CrossRef]

Alekseyev, L.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Alici, K. B.

Averitt, R. D.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
[CrossRef] [PubMed]

Bingham, C. M.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
[CrossRef] [PubMed]

Boltasseva, A.

G. V. Naik and A. Boltasseva,“ Semiconductors for plasmonics and metamaterials,” Phys. Status Solidi-R.4(10), 295–297 (2010).
[CrossRef]

Carminati, R.

M. Laroche, F. Marquier, R. Carminati, and J. Greffet, “Tailoring silicon radiative properties,” Opt. Commun.250(4-6), 316–320 (2005).
[CrossRef]

Catrysse, P. B.

J. Shin, J. Shen, P. B. Catrysse, and S. Fan, “Cut-through metal slit array as an anisotropic metamaterial film,” IEEE J. Sel. Top. Quantum Electron.12(6), 1116–1122 (2006).
[CrossRef]

Corrigan, T. D.

Cui, T. J.

Cui, Y.

Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
[CrossRef] [PubMed]

Cumming, D. R. S.

Diem, M.

M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B79(3), 033101 (2009).
[CrossRef]

Drew, H. D.

Fan, K.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

Fan, S.

J. Shin, J. Shen, P. B. Catrysse, and S. Fan, “Cut-through metal slit array as an anisotropic metamaterial film,” IEEE J. Sel. Top. Quantum Electron.12(6), 1116–1122 (2006).
[CrossRef]

Fang, N. X.

Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
[CrossRef] [PubMed]

Feng, Q.

Franz, K. J.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Fung, K. H.

Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
[CrossRef] [PubMed]

Gmachl, C.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Grant, J.

Greffet, J.

M. Laroche, F. Marquier, R. Carminati, and J. Greffet, “Tailoring silicon radiative properties,” Opt. Commun.250(4-6), 316–320 (2005).
[CrossRef]

Guo, S.-H.

Hangyo, M.

S. Nashima, O. Morikawa, K. Takata, and M. Hangyo, “Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy,” Appl. Phys. Lett.79(24), 3923–3925 (2001).
[CrossRef]

He, S.

Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
[CrossRef] [PubMed]

Y. Q. Ye, Y. Jin, and S. He, “Omnidirectional, polarization-insensitive and broadband thin absorber in the terahertz regime,” J. Opt. Soc. Am. B27(3), 498–504 (2010).
[CrossRef]

Herman, W. N.

Hoffman, A. J.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Howard, S. S.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Hu, C.

Huang, C.

Hwang, S.

Jang, J.-H.

Jiang, B.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, and B. Jiang, “Templated fabrication of large area subwavelength antireflection gratings on silicon,” Appl. Phys. Lett.91(23), 231105 (2007).
[CrossRef]

Jiang, P.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, and B. Jiang, “Templated fabrication of large area subwavelength antireflection gratings on silicon,” Appl. Phys. Lett.91(23), 231105 (2007).
[CrossRef]

Jiang, W. X.

Jin, Y.

Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
[CrossRef] [PubMed]

Y. Q. Ye, Y. Jin, and S. He, “Omnidirectional, polarization-insensitive and broadband thin absorber in the terahertz regime,” J. Opt. Soc. Am. B27(3), 498–504 (2010).
[CrossRef]

Khalid, A.

Kim, D.-H.

Kim, D.-S.

Kolb, P. W.

Koschny, T.

M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B79(3), 033101 (2009).
[CrossRef]

Landy, N. I.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett.100(20), 207402 (2008).
[CrossRef] [PubMed]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
[CrossRef] [PubMed]

Laroche, M.

M. Laroche, F. Marquier, R. Carminati, and J. Greffet, “Tailoring silicon radiative properties,” Opt. Commun.250(4-6), 316–320 (2005).
[CrossRef]

Li, H.

Linn, N. C.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, and B. Jiang, “Templated fabrication of large area subwavelength antireflection gratings on silicon,” Appl. Phys. Lett.91(23), 231105 (2007).
[CrossRef]

Liu, X.

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett.104(20), 207403 (2010).
[CrossRef] [PubMed]

Liu, Y.-L.

Q.-Y. Wen, H.-W. Zhang, Y.-S. Xie, Q.-H. Yang, and Y.-L. Liu, “Dual band terahertz metamaterial absorber: Design, fabrication, and characterization,” Appl. Phys. Lett.95(24), 241111 (2009).
[CrossRef]

Luo, X.

Ma, H.

Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
[CrossRef] [PubMed]

Ma, H. F.

Ma, X.

Ma, Y.

Marquier, F.

M. Laroche, F. Marquier, R. Carminati, and J. Greffet, “Tailoring silicon radiative properties,” Opt. Commun.250(4-6), 316–320 (2005).
[CrossRef]

Min, W. L.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, and B. Jiang, “Templated fabrication of large area subwavelength antireflection gratings on silicon,” Appl. Phys. Lett.91(23), 231105 (2007).
[CrossRef]

Mock, J. J.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett.100(20), 207402 (2008).
[CrossRef] [PubMed]

Morikawa, O.

S. Nashima, O. Morikawa, K. Takata, and M. Hangyo, “Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy,” Appl. Phys. Lett.79(24), 3923–3925 (2001).
[CrossRef]

Naik, G. V.

G. V. Naik and A. Boltasseva,“ Semiconductors for plasmonics and metamaterials,” Phys. Status Solidi-R.4(10), 295–297 (2010).
[CrossRef]

Narimanov, E. E.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Nashima, S.

S. Nashima, O. Morikawa, K. Takata, and M. Hangyo, “Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy,” Appl. Phys. Lett.79(24), 3923–3925 (2001).
[CrossRef]

Ozbay, E.

Padilla, W. J.

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett.104(20), 207403 (2010).
[CrossRef] [PubMed]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
[CrossRef] [PubMed]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett.100(20), 207402 (2008).
[CrossRef] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

Park, D. H.

Phaneuf, R. J.

Pilon, D.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

Podolskiy, V. A.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Pu, M.

Rozanov, K. N.

K. N. Rozanov, “Ultimate thickness to bandwidth ratio of radar absorbers,” IEEE Trans. Antenn. Propag.48(8), 1230–1234 (2000).
[CrossRef]

Saha, S.

Sajuyigbe, S.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett.100(20), 207402 (2008).
[CrossRef] [PubMed]

Shen, J.

J. Shin, J. Shen, P. B. Catrysse, and S. Fan, “Cut-through metal slit array as an anisotropic metamaterial film,” IEEE J. Sel. Top. Quantum Electron.12(6), 1116–1122 (2006).
[CrossRef]

Shen, X.

Shin, J.

J. Shin, J. Shen, P. B. Catrysse, and S. Fan, “Cut-through metal slit array as an anisotropic metamaterial film,” IEEE J. Sel. Top. Quantum Electron.12(6), 1116–1122 (2006).
[CrossRef]

Shrekenhamer, D.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

Shvets, G.

Sivco, D. L.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Smith, D. R.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett.100(20), 207402 (2008).
[CrossRef] [PubMed]

Soukoulis, C. M.

Starr, A. F.

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett.104(20), 207403 (2010).
[CrossRef] [PubMed]

Starr, T.

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett.104(20), 207403 (2010).
[CrossRef] [PubMed]

Strikwerda, A. C.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

Sun, C. H.

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, and B. Jiang, “Templated fabrication of large area subwavelength antireflection gratings on silicon,” Appl. Phys. Lett.91(23), 231105 (2007).
[CrossRef]

Takata, K.

S. Nashima, O. Morikawa, K. Takata, and M. Hangyo, “Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy,” Appl. Phys. Lett.79(24), 3923–3925 (2001).
[CrossRef]

Tao, H.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
[CrossRef] [PubMed]

Turhan, A. B.

Wang, C.

Wang, M.

Wasserman, D.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Wen, Q.-Y.

Q.-Y. Wen, H.-W. Zhang, Y.-S. Xie, Q.-H. Yang, and Y.-L. Liu, “Dual band terahertz metamaterial absorber: Design, fabrication, and characterization,” Appl. Phys. Lett.95(24), 241111 (2009).
[CrossRef]

Wu, C.

Xie, Y.-S.

Q.-Y. Wen, H.-W. Zhang, Y.-S. Xie, Q.-H. Yang, and Y.-L. Liu, “Dual band terahertz metamaterial absorber: Design, fabrication, and characterization,” Appl. Phys. Lett.95(24), 241111 (2009).
[CrossRef]

Xu, J.

Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
[CrossRef] [PubMed]

Yang, Q.-H.

Q.-Y. Wen, H.-W. Zhang, Y.-S. Xie, Q.-H. Yang, and Y.-L. Liu, “Dual band terahertz metamaterial absorber: Design, fabrication, and characterization,” Appl. Phys. Lett.95(24), 241111 (2009).
[CrossRef]

Ye, Y. Q.

Zhang, H.-W.

Q.-Y. Wen, H.-W. Zhang, Y.-S. Xie, Q.-H. Yang, and Y.-L. Liu, “Dual band terahertz metamaterial absorber: Design, fabrication, and characterization,” Appl. Phys. Lett.95(24), 241111 (2009).
[CrossRef]

Zhang, X.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
[CrossRef] [PubMed]

Zhao, J.

Zhao, Z.

Appl. Opt.

Appl. Phys. Lett.

Q.-Y. Wen, H.-W. Zhang, Y.-S. Xie, Q.-H. Yang, and Y.-L. Liu, “Dual band terahertz metamaterial absorber: Design, fabrication, and characterization,” Appl. Phys. Lett.95(24), 241111 (2009).
[CrossRef]

C. H. Sun, W. L. Min, N. C. Linn, P. Jiang, and B. Jiang, “Templated fabrication of large area subwavelength antireflection gratings on silicon,” Appl. Phys. Lett.91(23), 231105 (2007).
[CrossRef]

S. Nashima, O. Morikawa, K. Takata, and M. Hangyo, “Measurement of optical properties of highly doped silicon by terahertz time domain reflection spectroscopy,” Appl. Phys. Lett.79(24), 3923–3925 (2001).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron.

J. Shin, J. Shen, P. B. Catrysse, and S. Fan, “Cut-through metal slit array as an anisotropic metamaterial film,” IEEE J. Sel. Top. Quantum Electron.12(6), 1116–1122 (2006).
[CrossRef]

IEEE Trans. Antenn. Propag.

K. N. Rozanov, “Ultimate thickness to bandwidth ratio of radar absorbers,” IEEE Trans. Antenn. Propag.48(8), 1230–1234 (2000).
[CrossRef]

J. Opt. Soc. Am. B

Nano Lett.

Y. Cui, K. H. Fung, J. Xu, H. Ma, Y. Jin, S. He, and N. X. Fang, “Ultrabroadband light absorption by a sawtooth anisotropic metamaterial slab,” Nano Lett.12(3), 1443–1447 (2012).
[CrossRef] [PubMed]

Nat. Mater.

A. J. Hoffman, L. Alekseyev, S. S. Howard, K. J. Franz, D. Wasserman, V. A. Podolskiy, E. E. Narimanov, D. L. Sivco, and C. Gmachl, “Negative refraction in semiconductor metamaterials,” Nat. Mater.6(12), 946–950 (2007).
[CrossRef] [PubMed]

Opt. Commun.

M. Laroche, F. Marquier, R. Carminati, and J. Greffet, “Tailoring silicon radiative properties,” Opt. Commun.250(4-6), 316–320 (2005).
[CrossRef]

Opt. Express

M. Wang, C. Hu, M. Pu, C. Huang, Z. Zhao, Q. Feng, and X. Luo, “Truncated spherical voids for nearly omnidirectional optical absorption,” Opt. Express19(21), 20642–20649 (2011).
[CrossRef] [PubMed]

M. Pu, Q. Feng, M. Wang, C. Hu, C. Huang, X. Ma, Z. Zhao, C. Wang, and X. Luo, “Ultrathin broadband nearly perfect absorber with symmetrical coherent illumination,” Opt. Express20(3), 2246–2254 (2012).
[CrossRef] [PubMed]

D.-H. Kim, D.-S. Kim, S. Hwang, and J.-H. Jang, “Surface relief structures for a flexible broadband terahertz absorber,” Opt. Express20(15), 16815–16822 (2012).
[CrossRef]

K. B. Alici, A. B. Turhan, C. M. Soukoulis, and E. Ozbay, “Optically thin composite resonant absorber at the near-infrared band: a polarization independent and spectrally broadband configuration,” Opt. Express19(15), 14260–14267 (2011).
[CrossRef] [PubMed]

X. Shen, T. J. Cui, J. Zhao, H. F. Ma, W. X. Jiang, and H. Li, “Polarization-independent wide-angle triple-band metamaterial absorber,” Opt. Express19(10), 9401–9407 (2011).
[CrossRef] [PubMed]

M. Pu, C. Hu, M. Wang, C. Huang, Z. Zhao, C. Wang, Q. Feng, and X. Luo, “Design principles for infrared wide-angle perfect absorber based on plasmonic structure,” Opt. Express19(18), 17413–17420 (2011).
[CrossRef] [PubMed]

H. Tao, N. I. Landy, C. M. Bingham, X. Zhang, R. D. Averitt, and W. J. Padilla, “A metamaterial absorber for the terahertz regime: Design, fabrication and characterization,” Opt. Express16(10), 7181–7188 (2008).
[CrossRef] [PubMed]

Opt. Lett.

Phys. Rev. B

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: Design, fabrication, and characterization,” Phys. Rev. B78(24), 241103 (2008).
[CrossRef]

M. Diem, T. Koschny, and C. M. Soukoulis, “Wide-angle perfect absorber/thermal emitter in the terahertz regime,” Phys. Rev. B79(3), 033101 (2009).
[CrossRef]

Phys. Rev. Lett.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett.100(20), 207402 (2008).
[CrossRef] [PubMed]

X. Liu, T. Starr, A. F. Starr, and W. J. Padilla, “Infrared spatial and frequency selective metamaterial with near-unity absorbance,” Phys. Rev. Lett.104(20), 207403 (2010).
[CrossRef] [PubMed]

Phys. Status Solidi-R.

G. V. Naik and A. Boltasseva,“ Semiconductors for plasmonics and metamaterials,” Phys. Status Solidi-R.4(10), 295–297 (2010).
[CrossRef]

Other

B. V. Zeghbroeck, Principles of Semiconductor Devices (Boulder, 1997).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (7)

Fig. 1
Fig. 1

Schematic of diffraction when illuminated at two different frequencies. (a) Only zero-order diffraction occurs in the substrate at low frequency. (b) First order diffraction in the substrate occurs at higher frequency. (c) and (d) are the front and side views of the structure. The rectangular region in (c) and (d) is the unit cell used in simulations.

Fig. 2
Fig. 2

Absorption spectra of samples with different periods. The cases for a bare doped silicon slab and an absorber based on quarter-wavelength antireflection layer are also shown.

Fig. 3
Fig. 3

(a) Absorption of the 2D grating structure. (b) Reflectance for different periods with the same thickness and filling ratio. (c) (d) Diffraction efficiency of the different order diffraction for p = 40 μm and 70 μm.

Fig. 4
Fig. 4

(a) Horizontal Electric fields distributions at different frequencies for an infinite thick grating. (b) Schematic of the impedance matching for 1st order diffraction.

Fig. 5
Fig. 5

Diffraction efficiencies of a two layer doped silicon grating as shown in the inset.

Fig. 6
Fig. 6

Dependences of the absorption with angle of incidences for (a) TE polarization and (b) TM polarization.

Fig. 7
Fig. 7

Absorption of the scaled absorber for mid-infrared frequencies.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

ε= ε ω p 2 ω(ω+iΓ) ,
sinθ=λ/(np).
ε eff = (1+η) ε si 1+η ε si ,

Metrics