Abstract

A scanning coherent diffraction imaging method was used to reconstruct the X-ray wavefronts produced by a Fresnel zone plate (FZP) and by Kirkpatrick-Baez (KB) focusing mirrors. The ptychographical measurement was conducted repeatedly by placing a lithographed test sample at different defocused planes. The wavefronts, recovered by phase-retrieval at well-separated planes, show good consistency with numerical propagation results, which provides a self-verification. The validity of the obtained FZP wavefront was further confirmed with theoretical predictions.

© 2012 OSA

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  1. C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
    [CrossRef]
  2. K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
    [CrossRef] [PubMed]
  3. H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
    [CrossRef]
  4. W. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, and P. Naulleau, “Real space soft x-ray imaging at 10 nm spatial resolution,” Opt. Express20(9), 9777–9783 (2012).
    [CrossRef] [PubMed]
  5. T. Chen, Y. Chen, C. Wang, I. Kempson, W. Lee, Y. Chu, Y. Hwu, and G. Margaritondo, “Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm,” Opt. Express19(21), 19919–19924 (2011).
    [CrossRef] [PubMed]
  6. H. Yan, V. Rose, D. Shu, E. Lima, H. Kang, R. Conley, C. Liu, N. Jahedi, A. Macrander, G. Stephenson, M. Holt, Y. Chu, M. Lu, and J. Maser, “Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses,” Opt. Express19(16), 15069–15076 (2011).
    [CrossRef] [PubMed]
  7. H. Quiney, A. Peele, Z. Cai, D. Paterson, and K. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006).
    [CrossRef]
  8. H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, and Y. Sano, “At-wavelength figure metrology of hard x-ray focusing mirrors,” Rev. Sci. Instrum.77, 063712 (2006).
    [CrossRef]
  9. H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
    [CrossRef]
  10. M. Guizar-Sicairos and J. Fienup, “Measurement of coherent x-ray focused beams by phase retrieval with transverse translation diversity,” Opt. Express17(4), 2670–2685 (2009).
    [CrossRef] [PubMed]
  11. C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
    [CrossRef] [PubMed]
  12. C. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. Khounsary, J. Vila-Comamala, O. Bunk, J. Fienup, A. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express18, 23420–23427 (2010).
    [CrossRef] [PubMed]
  13. A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
    [CrossRef]
  14. M. Guizar-Sicairos, K. Evans-Lutterodt, A. Isakovic, A. Stein, J. Warren, A. Sandy, S. Narayanan, and J. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express18(17), 18374–18382 (2010).
    [CrossRef] [PubMed]
  15. M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. Sandy, J. Fienup, and K. Evans-Lutterodt, “Measurement of hard x-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011).
    [CrossRef]
  16. F. Mastropietro, D. Carbone, A. Diaz, J. Eymery, A. Sentenac, T. H. Metzger, V. Chamard, and V. Favre-Nicolin, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Opt. Express19(20), 19223–19232 (2011).
    [CrossRef] [PubMed]
  17. A. Morgan, A. Martin, A. D’Alfonso, C. Putkunz, and L. Allen, “Direct exit-wave reconstruction from a single defocused image,” Ultramicroscopy111, 1455–1460 (2011).
    [CrossRef] [PubMed]
  18. G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
    [CrossRef] [PubMed]
  19. B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
    [CrossRef]
  20. J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
    [CrossRef] [PubMed]
  21. P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
    [CrossRef] [PubMed]
  22. P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009).
    [CrossRef] [PubMed]
  23. A. Maiden and J. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109, 1256–1262 (2009).
    [CrossRef] [PubMed]
  24. M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
    [CrossRef] [PubMed]
  25. K. Giewekemeyer, M. Beckers, T. Gorniak, M. Grunze, T. Salditt, and A. Rosenhahn, “Ptychographic coherent x-ray diffractive imaging in the water window,” Opt. Express19(2), 1037–1050 (2011).
    [CrossRef] [PubMed]
  26. Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
    [CrossRef]
  27. P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
    [CrossRef] [PubMed]
  28. APS Science 2011 (Argonne National Laboratory, 2012).
  29. K. Nugent, “Coherent methods in the x-ray sciences,” Adv. Phys.59, 1–99 (2010).
    [CrossRef]
  30. T. Kupp, B. Blank, A. Deyhim, C. Benson, I. Robinson, and P. Fuoss, “Development of a double crystal monochromator,” AIP Conf. Proc.CP705, 651–654 (2004).
    [CrossRef]
  31. ZonePlates Ltd, 8 South Way, Claverings Industrial Estate, London N9 OAB, UK., URL http://www.zoneplates.com .
  32. M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
    [CrossRef]
  33. J. Butler and A. Sumant, “The CVD of Nanodiamond Materials,” J. Chem. Vap. Deposition14, 145–160 (2008).
    [CrossRef]
  34. J. W. Goodman, Introduction to Fourier Optics, 3rd ed. (Roberts and Company, 2004).
  35. P. Eng, M. Newvile, M. Rivers, and S. Sutton, “Dynamicaly figured Kirkpatrick Baez X-ray micro-focusing optic,” Proc. SPIE3449, 145–156 (1998).
    [CrossRef]

2012 (1)

2011 (8)

K. Giewekemeyer, M. Beckers, T. Gorniak, M. Grunze, T. Salditt, and A. Rosenhahn, “Ptychographic coherent x-ray diffractive imaging in the water window,” Opt. Express19(2), 1037–1050 (2011).
[CrossRef] [PubMed]

H. Yan, V. Rose, D. Shu, E. Lima, H. Kang, R. Conley, C. Liu, N. Jahedi, A. Macrander, G. Stephenson, M. Holt, Y. Chu, M. Lu, and J. Maser, “Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses,” Opt. Express19(16), 15069–15076 (2011).
[CrossRef] [PubMed]

F. Mastropietro, D. Carbone, A. Diaz, J. Eymery, A. Sentenac, T. H. Metzger, V. Chamard, and V. Favre-Nicolin, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Opt. Express19(20), 19223–19232 (2011).
[CrossRef] [PubMed]

T. Chen, Y. Chen, C. Wang, I. Kempson, W. Lee, Y. Chu, Y. Hwu, and G. Margaritondo, “Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm,” Opt. Express19(21), 19919–19924 (2011).
[CrossRef] [PubMed]

M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. Sandy, J. Fienup, and K. Evans-Lutterodt, “Measurement of hard x-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011).
[CrossRef]

A. Morgan, A. Martin, A. D’Alfonso, C. Putkunz, and L. Allen, “Direct exit-wave reconstruction from a single defocused image,” Ultramicroscopy111, 1455–1460 (2011).
[CrossRef] [PubMed]

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

2010 (8)

K. Nugent, “Coherent methods in the x-ray sciences,” Adv. Phys.59, 1–99 (2010).
[CrossRef]

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

M. Guizar-Sicairos, K. Evans-Lutterodt, A. Isakovic, A. Stein, J. Warren, A. Sandy, S. Narayanan, and J. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express18(17), 18374–18382 (2010).
[CrossRef] [PubMed]

C. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. Khounsary, J. Vila-Comamala, O. Bunk, J. Fienup, A. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express18, 23420–23427 (2010).
[CrossRef] [PubMed]

2009 (3)

M. Guizar-Sicairos and J. Fienup, “Measurement of coherent x-ray focused beams by phase retrieval with transverse translation diversity,” Opt. Express17(4), 2670–2685 (2009).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009).
[CrossRef] [PubMed]

A. Maiden and J. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109, 1256–1262 (2009).
[CrossRef] [PubMed]

2008 (4)

J. Butler and A. Sumant, “The CVD of Nanodiamond Materials,” J. Chem. Vap. Deposition14, 145–160 (2008).
[CrossRef]

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
[CrossRef] [PubMed]

2007 (2)

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
[CrossRef] [PubMed]

2006 (3)

H. Quiney, A. Peele, Z. Cai, D. Paterson, and K. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006).
[CrossRef]

H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, and Y. Sano, “At-wavelength figure metrology of hard x-ray focusing mirrors,” Rev. Sci. Instrum.77, 063712 (2006).
[CrossRef]

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

2005 (1)

C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
[CrossRef]

2004 (1)

T. Kupp, B. Blank, A. Deyhim, C. Benson, I. Robinson, and P. Fuoss, “Development of a double crystal monochromator,” AIP Conf. Proc.CP705, 651–654 (2004).
[CrossRef]

1998 (1)

P. Eng, M. Newvile, M. Rivers, and S. Sutton, “Dynamicaly figured Kirkpatrick Baez X-ray micro-focusing optic,” Proc. SPIE3449, 145–156 (1998).
[CrossRef]

Abbey, B.

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

Ablett, J.

K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
[CrossRef] [PubMed]

Allain, M.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Allen, L.

A. Morgan, A. Martin, A. D’Alfonso, C. Putkunz, and L. Allen, “Direct exit-wave reconstruction from a single defocused image,” Ultramicroscopy111, 1455–1460 (2011).
[CrossRef] [PubMed]

Anderson, E.

Assoufid, L.

Beckers, M.

Benson, C.

Blank, B.

T. Kupp, B. Blank, A. Deyhim, C. Benson, I. Robinson, and P. Fuoss, “Development of a double crystal monochromator,” AIP Conf. Proc.CP705, 651–654 (2004).
[CrossRef]

Boye, P.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
[CrossRef]

Bozovic, N.

K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
[CrossRef] [PubMed]

Bunk, O.

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

C. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. Khounsary, J. Vila-Comamala, O. Bunk, J. Fienup, A. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express18, 23420–23427 (2010).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
[CrossRef] [PubMed]

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

Burghammer, M.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Butler, J.

J. Butler and A. Sumant, “The CVD of Nanodiamond Materials,” J. Chem. Vap. Deposition14, 145–160 (2008).
[CrossRef]

Cai, Z.

H. Quiney, A. Peele, Z. Cai, D. Paterson, and K. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006).
[CrossRef]

Capello, L.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Carbone, D.

Carbone, G.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Chamard, V.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

F. Mastropietro, D. Carbone, A. Diaz, J. Eymery, A. Sentenac, T. H. Metzger, V. Chamard, and V. Favre-Nicolin, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Opt. Express19(20), 19223–19232 (2011).
[CrossRef] [PubMed]

Chao, W.

Chen, G.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Chen, T.

Chen, Y.

Chu, Y.

Clark, J.

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

Conley, R.

Cullis, A.

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

D’Alfonso, A.

A. Morgan, A. Martin, A. D’Alfonso, C. Putkunz, and L. Allen, “Direct exit-wave reconstruction from a single defocused image,” Ultramicroscopy111, 1455–1460 (2011).
[CrossRef] [PubMed]

David, C.

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
[CrossRef] [PubMed]

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

de Jonge, M. D.

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

Deyhim, A.

T. Kupp, B. Blank, A. Deyhim, C. Benson, I. Robinson, and P. Fuoss, “Development of a double crystal monochromator,” AIP Conf. Proc.CP705, 651–654 (2004).
[CrossRef]

Dhal, B. B.

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

Diaz, A.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

F. Mastropietro, D. Carbone, A. Diaz, J. Eymery, A. Sentenac, T. H. Metzger, V. Chamard, and V. Favre-Nicolin, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Opt. Express19(20), 19223–19232 (2011).
[CrossRef] [PubMed]

Dierolf, M.

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
[CrossRef] [PubMed]

Divan, R.

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

Dobson, B.

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

Eng, P.

P. Eng, M. Newvile, M. Rivers, and S. Sutton, “Dynamicaly figured Kirkpatrick Baez X-ray micro-focusing optic,” Proc. SPIE3449, 145–156 (1998).
[CrossRef]

Evans-Lutterodt, K.

M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. Sandy, J. Fienup, and K. Evans-Lutterodt, “Measurement of hard x-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011).
[CrossRef]

M. Guizar-Sicairos, K. Evans-Lutterodt, A. Isakovic, A. Stein, J. Warren, A. Sandy, S. Narayanan, and J. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express18(17), 18374–18382 (2010).
[CrossRef] [PubMed]

K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
[CrossRef] [PubMed]

Eymery, J.

Favre-Nicolin, V.

Feldkamp, J.

C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
[CrossRef]

Feldkamp, J. M.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Fienup, J.

Fischer, P.

Fuoss, P.

T. Kupp, B. Blank, A. Deyhim, C. Benson, I. Robinson, and P. Fuoss, “Development of a double crystal monochromator,” AIP Conf. Proc.CP705, 651–654 (2004).
[CrossRef]

Giewekemeyer, K.

K. Giewekemeyer, M. Beckers, T. Gorniak, M. Grunze, T. Salditt, and A. Rosenhahn, “Ptychographic coherent x-ray diffractive imaging in the water window,” Opt. Express19(2), 1037–1050 (2011).
[CrossRef] [PubMed]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Godard, P.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Goodman, J. W.

J. W. Goodman, Introduction to Fourier Optics, 3rd ed. (Roberts and Company, 2004).

Gorniak, T.

Grunze, M.

Guizar-Sicairos, M.

Gulden, J.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Handa, S.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, and Y. Sano, “At-wavelength figure metrology of hard x-ray focusing mirrors,” Rev. Sci. Instrum.77, 063712 (2006).
[CrossRef]

Holt, M.

Hoppe, R.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Hurst, A.

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

Hwu, Y.

Inagaki, K.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

Isakovic, A.

Ishikawa, T.

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

Jahedi, N.

Jefimovs, K.

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

Johnson, I.

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

Jonge, M. D.

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

Joshi, V.

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

Kang, H.

Kempson, I.

Kewish, C.

C. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. Khounsary, J. Vila-Comamala, O. Bunk, J. Fienup, A. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express18, 23420–23427 (2010).
[CrossRef] [PubMed]

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

Khounsary, A.

Kimura, T.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

Kohmura, Y.

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

Kupp, T.

T. Kupp, B. Blank, A. Deyhim, C. Benson, I. Robinson, and P. Fuoss, “Development of a double crystal monochromator,” AIP Conf. Proc.CP705, 651–654 (2004).
[CrossRef]

Kurapova, O.

C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
[CrossRef]

Lee, W.

Lengeler, B.

C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
[CrossRef]

Lima, E.

Liu, C.

Lu, M.

H. Yan, V. Rose, D. Shu, E. Lima, H. Kang, R. Conley, C. Liu, N. Jahedi, A. Macrander, G. Stephenson, M. Holt, Y. Chu, M. Lu, and J. Maser, “Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses,” Opt. Express19(16), 15069–15076 (2011).
[CrossRef] [PubMed]

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

Macrander, A.

Maiden, A.

A. Maiden and J. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109, 1256–1262 (2009).
[CrossRef] [PubMed]

Mancini, D.

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

Mancuso, A. P.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Margaritondo, G.

Martin, A.

A. Morgan, A. Martin, A. D’Alfonso, C. Putkunz, and L. Allen, “Direct exit-wave reconstruction from a single defocused image,” Ultramicroscopy111, 1455–1460 (2011).
[CrossRef] [PubMed]

Maser, J.

Mastropietro, F.

F. Mastropietro, D. Carbone, A. Diaz, J. Eymery, A. Sentenac, T. H. Metzger, V. Chamard, and V. Favre-Nicolin, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Opt. Express19(20), 19223–19232 (2011).
[CrossRef] [PubMed]

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Matsuyama, S.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, and Y. Sano, “At-wavelength figure metrology of hard x-ray focusing mirrors,” Rev. Sci. Instrum.77, 063712 (2006).
[CrossRef]

McNulty, I.

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

Menzel, A.

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
[CrossRef] [PubMed]

Metzger, T.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Metzger, T. H.

Metzler, M.

M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. Sandy, J. Fienup, and K. Evans-Lutterodt, “Measurement of hard x-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011).
[CrossRef]

Mimura, H.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, and Y. Sano, “At-wavelength figure metrology of hard x-ray focusing mirrors,” Rev. Sci. Instrum.77, 063712 (2006).
[CrossRef]

Morgan, A.

A. Morgan, A. Martin, A. D’Alfonso, C. Putkunz, and L. Allen, “Direct exit-wave reconstruction from a single defocused image,” Ultramicroscopy111, 1455–1460 (2011).
[CrossRef] [PubMed]

Narayanan, S.

M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. Sandy, J. Fienup, and K. Evans-Lutterodt, “Measurement of hard x-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011).
[CrossRef]

M. Guizar-Sicairos, K. Evans-Lutterodt, A. Isakovic, A. Stein, J. Warren, A. Sandy, S. Narayanan, and J. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express18(17), 18374–18382 (2010).
[CrossRef] [PubMed]

Naulleau, P.

Newvile, M.

P. Eng, M. Newvile, M. Rivers, and S. Sutton, “Dynamicaly figured Kirkpatrick Baez X-ray micro-focusing optic,” Proc. SPIE3449, 145–156 (1998).
[CrossRef]

Nishino, Y.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

Nugent, K.

K. Nugent, “Coherent methods in the x-ray sciences,” Adv. Phys.59, 1–99 (2010).
[CrossRef]

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

H. Quiney, A. Peele, Z. Cai, D. Paterson, and K. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006).
[CrossRef]

Nugent, K. A.

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

Ocola, L.

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

Ohashi, H.

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

Paterson, D.

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

H. Quiney, A. Peele, Z. Cai, D. Paterson, and K. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006).
[CrossRef]

Patommel, J.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
[CrossRef]

Peele, A.

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

H. Quiney, A. Peele, Z. Cai, D. Paterson, and K. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006).
[CrossRef]

Peele, A. G.

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

Pfeifer, M.

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

Pfeiffer, F.

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
[CrossRef] [PubMed]

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

Putkunz, C.

A. Morgan, A. Martin, A. D’Alfonso, C. Putkunz, and L. Allen, “Direct exit-wave reconstruction from a single defocused image,” Ultramicroscopy111, 1455–1460 (2011).
[CrossRef] [PubMed]

Qian, J.

Quiney, H.

H. Quiney, A. Peele, Z. Cai, D. Paterson, and K. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006).
[CrossRef]

Quiney, H. M.

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

Rekawa, S.

Rivers, M.

P. Eng, M. Newvile, M. Rivers, and S. Sutton, “Dynamicaly figured Kirkpatrick Baez X-ray micro-focusing optic,” Proc. SPIE3449, 145–156 (1998).
[CrossRef]

Robinson, I.

T. Kupp, B. Blank, A. Deyhim, C. Benson, I. Robinson, and P. Fuoss, “Development of a double crystal monochromator,” AIP Conf. Proc.CP705, 651–654 (2004).
[CrossRef]

Rodenburg, J.

A. Maiden and J. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109, 1256–1262 (2009).
[CrossRef] [PubMed]

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

Rose, V.

Rosenhahn, A.

Salditt, T.

K. Giewekemeyer, M. Beckers, T. Gorniak, M. Grunze, T. Salditt, and A. Rosenhahn, “Ptychographic coherent x-ray diffractive imaging in the water window,” Opt. Express19(2), 1037–1050 (2011).
[CrossRef] [PubMed]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Samberg, D.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Sandy, A.

M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. Sandy, J. Fienup, and K. Evans-Lutterodt, “Measurement of hard x-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011).
[CrossRef]

M. Guizar-Sicairos, K. Evans-Lutterodt, A. Isakovic, A. Stein, J. Warren, A. Sandy, S. Narayanan, and J. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express18(17), 18374–18382 (2010).
[CrossRef] [PubMed]

Sano, Y.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, and Y. Sano, “At-wavelength figure metrology of hard x-ray focusing mirrors,” Rev. Sci. Instrum.77, 063712 (2006).
[CrossRef]

Schder, S.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Schneider, P.

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

Schroer, C.

C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
[CrossRef]

Schroer, C. G.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Schropp, A.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Senba, Y.

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

Sentenac, A.

Shi, B.

Shu, D.

Stangl, J.

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Stein, A.

M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. Sandy, J. Fienup, and K. Evans-Lutterodt, “Measurement of hard x-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011).
[CrossRef]

M. Guizar-Sicairos, K. Evans-Lutterodt, A. Isakovic, A. Stein, J. Warren, A. Sandy, S. Narayanan, and J. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express18(17), 18374–18382 (2010).
[CrossRef] [PubMed]

K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
[CrossRef] [PubMed]

Stephan, S.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Stephenson, G.

Sumant, A.

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

J. Butler and A. Sumant, “The CVD of Nanodiamond Materials,” J. Chem. Vap. Deposition14, 145–160 (2008).
[CrossRef]

Sutton, S.

P. Eng, M. Newvile, M. Rivers, and S. Sutton, “Dynamicaly figured Kirkpatrick Baez X-ray micro-focusing optic,” Proc. SPIE3449, 145–156 (1998).
[CrossRef]

Suzuki, A.

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

Takahashi, Y.

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

Tamasaku, K.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

Taylor, A.

K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
[CrossRef] [PubMed]

Tennant, D.

K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
[CrossRef] [PubMed]

Thibault, P.

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009).
[CrossRef] [PubMed]

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
[CrossRef] [PubMed]

Tran, C. Q.

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

Tyliszczak, T.

Vartanyants, I. A.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Vila-Comamala, J.

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

C. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. Khounsary, J. Vila-Comamala, O. Bunk, J. Fienup, A. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express18, 23420–23427 (2010).
[CrossRef] [PubMed]

Wang, C.

Warren, J.

Weckert, E.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Wepf, R.

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

Wilke, R. N.

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

Williams, G.

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

Williams, G. J.

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

Wojcik, M.

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

Yabashi, M.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

Yamakawa, D.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

Yamamura, K.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

Yamauchi, K.

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

Yan, H.

Yokoyama, H.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

Yumoto, H.

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, and Y. Sano, “At-wavelength figure metrology of hard x-ray focusing mirrors,” Rev. Sci. Instrum.77, 063712 (2006).
[CrossRef]

Zettsu, N.

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

Adv. Phys. (1)

K. Nugent, “Coherent methods in the x-ray sciences,” Adv. Phys.59, 1–99 (2010).
[CrossRef]

AIP Conf. Proc. (1)

T. Kupp, B. Blank, A. Deyhim, C. Benson, I. Robinson, and P. Fuoss, “Development of a double crystal monochromator,” AIP Conf. Proc.CP705, 651–654 (2004).
[CrossRef]

Appl. Phys. Lett. (3)

C. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, and B. Lengeler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87, 124103 (2005).
[CrossRef]

A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, A. P. Mancuso, I. A. Vartanyants, E. Weckert, S. Schder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96, 091102 (2010).
[CrossRef]

M. Guizar-Sicairos, S. Narayanan, A. Stein, M. Metzler, A. Sandy, J. Fienup, and K. Evans-Lutterodt, “Measurement of hard x-ray lens wavefront aberrations using phase retrieval,” Appl. Phys. Lett.98, 111108 (2011).
[CrossRef]

J. Chem. Vap. Deposition (1)

J. Butler and A. Sumant, “The CVD of Nanodiamond Materials,” J. Chem. Vap. Deposition14, 145–160 (2008).
[CrossRef]

J. Vac. Sci. Technol. B (1)

M. Wojcik, V. Joshi, A. Sumant, R. Divan, L. Ocola, M. Lu, and D. Mancini, “Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming,” J. Vac. Sci. Technol. B28(6), C6P30–C6P35 (2010).
[CrossRef]

Nat. Commun. (1)

P. Godard, G. Carbone, M. Allain, F. Mastropietro, G. Chen, L. Capello, A. Diaz, T. Metzger, J. Stangl, and V. Chamard, “Three-dimensional high-resolution quantitative microscopy of extended crystals,” Nat. Commun.2, 568 (2011).
[CrossRef] [PubMed]

Nat. Phys. (3)

B. Abbey, K. Nugent, G. Williams, J. Clark, A. Peele, M. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4, 394–398 (2008).
[CrossRef]

H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6, 122–125 (2010).
[CrossRef]

H. Quiney, A. Peele, Z. Cai, D. Paterson, and K. Nugent, “Diffractive imaging of highly focused X-ray fields,” Nat. Phys.2, 101–104 (2006).
[CrossRef]

Nature (1)

M. Dierolf, A. Menzel, P. Thibault, P. Schneider, C. Kewish, R. Wepf, O. Bunk, and F. Pfeiffer, “Ptychographic X-ray computed tomography at the nanoscale,” Nature467, 436–440 (2010).
[CrossRef] [PubMed]

Opt. Express (8)

M. Guizar-Sicairos and J. Fienup, “Measurement of coherent x-ray focused beams by phase retrieval with transverse translation diversity,” Opt. Express17(4), 2670–2685 (2009).
[CrossRef] [PubMed]

M. Guizar-Sicairos, K. Evans-Lutterodt, A. Isakovic, A. Stein, J. Warren, A. Sandy, S. Narayanan, and J. Fienup, “One-dimensional hard X-ray field retrieval using a moveable structure,” Opt. Express18(17), 18374–18382 (2010).
[CrossRef] [PubMed]

C. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. Khounsary, J. Vila-Comamala, O. Bunk, J. Fienup, A. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express18, 23420–23427 (2010).
[CrossRef] [PubMed]

K. Giewekemeyer, M. Beckers, T. Gorniak, M. Grunze, T. Salditt, and A. Rosenhahn, “Ptychographic coherent x-ray diffractive imaging in the water window,” Opt. Express19(2), 1037–1050 (2011).
[CrossRef] [PubMed]

H. Yan, V. Rose, D. Shu, E. Lima, H. Kang, R. Conley, C. Liu, N. Jahedi, A. Macrander, G. Stephenson, M. Holt, Y. Chu, M. Lu, and J. Maser, “Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses,” Opt. Express19(16), 15069–15076 (2011).
[CrossRef] [PubMed]

F. Mastropietro, D. Carbone, A. Diaz, J. Eymery, A. Sentenac, T. H. Metzger, V. Chamard, and V. Favre-Nicolin, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Opt. Express19(20), 19223–19232 (2011).
[CrossRef] [PubMed]

T. Chen, Y. Chen, C. Wang, I. Kempson, W. Lee, Y. Chu, Y. Hwu, and G. Margaritondo, “Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm,” Opt. Express19(21), 19919–19924 (2011).
[CrossRef] [PubMed]

W. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, and P. Naulleau, “Real space soft x-ray imaging at 10 nm spatial resolution,” Opt. Express20(9), 9777–9783 (2012).
[CrossRef] [PubMed]

Phys. Rev. A (1)

H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008).
[CrossRef]

Phys. Rev. B (1)

Y. Takahashi, A. Suzuki, N. Zettsu, Y. Kohmura, Y. Senba, H. Ohashi, K. Yamauchi, and T. Ishikawa, “Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate,” Phys. Rev. B83(21), 214109 (2011).
[CrossRef]

Phys. Rev. Lett. (3)

J. Rodenburg, A. Hurst, A. Cullis, B. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, and I. Johnson, “Hard-X-Ray Lensless Imaging of Extended Objects,” Phys. Rev. Lett.98, 034801 (2007).
[CrossRef] [PubMed]

K. Evans-Lutterodt, A. Stein, J. Ablett, N. Bozovic, A. Taylor, and D. Tennant, “Using Compound Kinoform Hard-X-Ray Lenses to Exceed the Critical Angle Limit,” Phys. Rev. Lett.99(13), 134801 (2007).
[CrossRef] [PubMed]

G. J. Williams, H. M. Quiney, B. B. Dhal, C. Q. Tran, K. A. Nugent, A. G. Peele, D. Paterson, and M. D. de Jonge, “Fresnel coherent diffractive imaging,” Phys. Rev. Lett.97(2), 025506 (2006).
[CrossRef] [PubMed]

Proc. SPIE (1)

P. Eng, M. Newvile, M. Rivers, and S. Sutton, “Dynamicaly figured Kirkpatrick Baez X-ray micro-focusing optic,” Proc. SPIE3449, 145–156 (1998).
[CrossRef]

Rev. Sci. Instrum. (1)

H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, and Y. Sano, “At-wavelength figure metrology of hard x-ray focusing mirrors,” Rev. Sci. Instrum.77, 063712 (2006).
[CrossRef]

Science (1)

P. Thibault, M. Dierolf, A. Menzel, O. Bunk, C. David, and F. Pfeiffer, “High-resolution scanning x-ray diffraction microscopy,” Science321, 379–382 (2008).
[CrossRef] [PubMed]

Ultramicroscopy (4)

P. Thibault, M. Dierolf, O. Bunk, A. Menzel, and F. Pfeiffer, “Probe retrieval in ptychographic coherent diffractive imaging,” Ultramicroscopy109, 338–343 (2009).
[CrossRef] [PubMed]

A. Maiden and J. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109, 1256–1262 (2009).
[CrossRef] [PubMed]

C. Kewish, P. Thibault, M. Dierolf, O. Bunk, A. Menzel, J. Vila-Comamala, K. Jefimovs, and F. Pfeiffer, “Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics,” Ultramicroscopy110, 325–329 (2010).
[CrossRef] [PubMed]

A. Morgan, A. Martin, A. D’Alfonso, C. Putkunz, and L. Allen, “Direct exit-wave reconstruction from a single defocused image,” Ultramicroscopy111, 1455–1460 (2011).
[CrossRef] [PubMed]

Other (3)

APS Science 2011 (Argonne National Laboratory, 2012).

J. W. Goodman, Introduction to Fourier Optics, 3rd ed. (Roberts and Company, 2004).

ZonePlates Ltd, 8 South Way, Claverings Industrial Estate, London N9 OAB, UK., URL http://www.zoneplates.com .

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Figures (9)

Fig. 1
Fig. 1

Sketch of the experimental setup with Fresnel zone plate (a) and KB mirrors (b). (c) SEM image of the test pattern. (d) (e) typical reconstructed magnitude and phase images using data measured with FZP.

Fig. 2
Fig. 2

(a)(b)(c) The phase-retrieved probe for FZP with the test sample placed at 0.0 mm, −6.0 mm and −12.32 mm. (e)(f) The simulated probes propagated from (a). (d) The propagation distances were determined by minimizing the standard deviation between propagated and phase-retrieved probes.

Fig. 3
Fig. 3

Comparison of phase-retrieved and numerically propagated probes along the central vertical lines: the amplitude (a) and phase (b) plots at z = −5.947 mm, the amplitude (c) and phase (d) plots at z = −12.401 mm.

Fig. 4
Fig. 4

Propagation of the phase-retrieved probe obtained at z = 0.0 mm: (a) intensity along the vertical direction, horizontally integrated, (b) intensity along the horizontal direction, vertically integrated.

Fig. 5
Fig. 5

Estimation of focal sizes of the phase-retrieved wavefront (a)(b) and the simulated wavefront (c)(d).

Fig. 6
Fig. 6

Comparison between the recovered wavefront (a) through phase-retrieval and the simulated wavefront of FZP focused beam (b). The central 8 ×8 μm area is shown. (c) The amplitude plotted along the horizontal central line. (d) The amplitude plotted along the vertical central line.

Fig. 7
Fig. 7

(a)(b)(c) The reconstructed probe of the KB mirrors with the sample placed at −10 mm, 0.0 mm and 10.5 mm. (d)(e) The simulated probes propagated from (b). (f)(g) The integrated vertical and horizontal amplitude through focus.

Fig. 8
Fig. 8

Typical images of the reconstructed magnitude (a) and phase (b) using data measured with KB mirrors.

Fig. 9
Fig. 9

Horizontal (a) and vertical (b) focal sizes of the Kirkpatrick-Baez (KB) mirror system at their corresponding focal planes.

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