Abstract

We experimentally demonstrate a new type of waveguide multiplexer device designed for silicon photonics, with a crosstalk level as low as −35 dB and an operational wavelength range of 300 nm. A compact device footprint of only 100 × 160 µm2 offers an excellent potential for integration with other silicon nanophotonic circuits.

© 2012 OSA

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  31. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
    [Crossref]
  32. P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
    [Crossref] [PubMed]
  33. P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett. 35(15), 2526–2528 (2010).
    [Crossref] [PubMed]
  34. R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
    [Crossref] [PubMed]
  35. U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
    [Crossref] [PubMed]
  36. J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
    [Crossref] [PubMed]
  37. F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
    [Crossref]

2011 (3)

2010 (5)

2008 (4)

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[Crossref] [PubMed]

F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
[Crossref]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
[Crossref] [PubMed]

2007 (9)

J. Brouckaert, W. Bogaerts, P. Dumon, D. Thourhout, and R. Baets, “Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform,” J. Lightwave Technol. 25(5), 1269–1275 (2007).
[Crossref]

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[Crossref] [PubMed]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[Crossref] [PubMed]

A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics 1(3), 153–155 (2007).
[Crossref]

B. Jalali, “Teaching silicon new tricks,” Nat. Photonics 1(4), 193–195 (2007).
[Crossref]

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics 1(6), 303–305 (2007).
[Crossref]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[Crossref]

2006 (6)

2005 (1)

X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE 6020, 60201Q (2005).
[Crossref]

2004 (2)

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

2000 (1)

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

1998 (1)

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

1882 (1)

H. A. Rowland, “Preliminary notice of results accomplished on the manufacture and theory of gratings for optical purposes,” Phil. Mag. Suppl. 13(84), 469–474 (1882).
[Crossref]

Abashin, M.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Alduino, A.

A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics 1(3), 153–155 (2007).
[Crossref]

Asghari, M.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Baba, T.

F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys. 45(8A), 6126–6131 (2006).
[Crossref]

Baets, R.

Balakrishnan, A.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Beckx, S.

Bedard, D.

Bergman, K.

Bezinger, A.

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

Biberman, A.

Bidnyk, S.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Bock, P. J.

Bogaerts, W.

Brouckaert, J.

Chang-Hasnain, C. J.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

Charbonneau, S.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Cheben, P.

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett. 35(15), 2526–2528 (2010).
[Crossref] [PubMed]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
[Crossref] [PubMed]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
[Crossref] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[Crossref] [PubMed]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Chen, L.

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[Crossref] [PubMed]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

Cloutier, M.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Corzine, S.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Costa, J.

Cunningham, J.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Cunningham, J. E.

Daqun, L.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Delâge, A.

DeMarco, J.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

Densmore, A.

Dentai, A.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Doerr, C. R.

Dossou, K.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Dumon, P.

Erickson, L.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Evans, P.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Fainman, Y.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Feng, D.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

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P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
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J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
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P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
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P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
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S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
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M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
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N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Yang, J.

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S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
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C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
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S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
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S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
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F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys. 45(8A), 6126–6131 (2006).
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Nat. Photonics (5)

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
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J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
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Opt. Eng. (1)

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Opt. Express (9)

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
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F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
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P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
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Y. Hao, Y. Wu, J. Yang, X. Jiang, and M. Wang, “Novel dispersive and focusing device configuration based on curved waveguide grating (CWG),” Opt. Express 14(19), 8630–8637 (2006).
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P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
[Crossref] [PubMed]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
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Figures (7)

Fig. 1
Fig. 1

Schematic of the discretized Kirchhoff-Huygens model of the sidewall grating spectrometer with N facets having a Roland radius of R. Coordinates x, y are relative to the focal curve.

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Fig. 2
Fig. 2

a) Schematic of the conventional split-path multiplexing approach used in an AWG where φ1, φj, φj+1 and φN are the phase errors accumulated along the first, jth, jth + 1 and Nth array waveguide (N is the total number of array waveguides). The relative phase error between the jth and the jth + 1 array waveguide is Δφ = φj+1 – φj, since phase error is accumulated independently between the different array waveguides. b) Schematic of the common-path multiplexing approach used in the sidewall grating. Since the light propagates along a common path, the relative phase error between adjacent facets will be Δφ = φj + 1 - φj = (Δφj,j + 1 + φj) - φj = Δφj,,j + 1, where Δφj,,j + 1 is the phase error accumulation between facet j and facet j + 1.

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Fig. 3
Fig. 3

a) Optical image of the sidewall grating spectrometer showing the input waveguide and the 21-channel output receiver waveguide array. b) Scanning electron microscope image close-up of the blazed waveguide grating and subwavelength grating (SWG) nanostructure detail.

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Fig. 4
Fig. 4

Comparison of the transmission spectra for TE polarization between a nominal (apodized and chirped) spectrometer (grey) and a test spectrometer (colored) a) without apodization for a constant modulation depth of 300 nm, indicating poor crosstalk performance and b) without the subwavelength anti-reflective nanostructure, indicating a 4 dB loss penalty.

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Fig. 5
Fig. 5

Transmission spectrum of the nominal spectrometer for TE polarization for a wavelength range of λ = 1340 – 1620 nm.

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Fig. 6
Fig. 6

Optical image of the two-pass spectral filter formed by cascading two 11 channel sidewall grating spectrometers.

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Fig. 7
Fig. 7

Transmission spectrum of the two-pass spectrometer for a wavelength range of λ = 1400 – 1600 nm (TE polarization).

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Equations (1)

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Ψ( x ′ , y ′ )= ∫ C ψ(x,y)exp[−i( ϕ w + ϕ s )] λd GdC

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