Abstract

We experimentally demonstrate a new type of waveguide multiplexer device designed for silicon photonics, with a crosstalk level as low as −35 dB and an operational wavelength range of 300 nm. A compact device footprint of only 100 × 160 µm2 offers an excellent potential for integration with other silicon nanophotonic circuits.

©2012 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • Article Order
  • |
  • Year
  • |
  • Author
  • |
  • Publication
  1. C. R. Doerr and K. Okamoto, “Advances in silica planar lightwave circuits,” J. Lightwave Technol. 24(12), 4763–4789 (2006).
    [Crossref]
  2. P. Cheben, “Wavelength dispersive planar waveguide devices: echelle gratings and arrayed waveguide gratings,” Optical waveguides: from theory to applied technologies, M. L. Calvo and V. Lakshminarayanan, Eds. (CRC Press, 2007), 173–230.
  3. A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics 1(3), 153–155 (2007).
    [Crossref]
  4. B. Jalali, “Teaching silicon new tricks,” Nat. Photonics 1(4), 193–195 (2007).
    [Crossref]
  5. R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics 1(6), 303–305 (2007).
    [Crossref]
  6. P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
    [Crossref] [PubMed]
  7. F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
    [Crossref]
  8. J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
    [Crossref]
  9. H. A. Rowland, “Preliminary notice of results accomplished on the manufacture and theory of gratings for optical purposes,” Phil. Mag. Suppl. 13(84), 469–474 (1882).
    [Crossref]
  10. R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
    [Crossref]
  11. X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE 6020, 60201Q (2005).
    [Crossref]
  12. M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
    [Crossref]
  13. F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys. 45(8A), 6126–6131 (2006).
    [Crossref]
  14. P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, R. Baets, J. Wouters, S. Beckx, and P. Jaenen, “Compact wavelength router based on a Silicon-on-insulator arrayed waveguide grating pigtailed to a fiber array,” Opt. Express 14(2), 664–669 (2006).
    [Crossref] [PubMed]
  15. X. Liu, I. Hsieh, X. Chen, M. Takekoshi, J. I. Dadap, N. C. Panoiu, R. M. Osgood Jr., W. M. Green, F. Xia, and Y. A. Vlasov, “Design and fabrication of an ultra-compact silicon on insulator demultiplexer based on arrayed waveguide gratings,” CLEO 2008, paper CTuNN1.
  16. S. Pathak, E. Lambert, P. Dumon, D. Thourhout, and W. Bogaerts, “Compact SOI-Based AWG With Flattened Spectral Response Using a MMI,” 8th International Conference in Group IV Photonics 2011, paper WC2.
  17. S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
    [Crossref]
  18. S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
    [Crossref]
  19. J. Brouckaert, W. Bogaerts, P. Dumon, D. Thourhout, and R. Baets, “Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform,” J. Lightwave Technol. 25(5), 1269–1275 (2007).
    [Crossref]
  20. D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
    [Crossref] [PubMed]
  21. K. Okamoto, “Fundamentals of optical waveguides,” Elsevier Inc., 2006.
  22. R. Soref, “Reconfigurable integrated optoelectronics,” Adv. Optoelectron. 2011, 1–15 (2011), doi:.
    [Crossref]
  23. F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
    [Crossref] [PubMed]
  24. N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).
  25. N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
    [Crossref] [PubMed]
  26. X. Zheng, I. Shubin, G. Li, T. Pinguet, A. Mekis, J. Yao, H. Thacker, Y. Luo, J. Costa, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “A tunable 1x4 silicon CMOS photonic wavelength multiplexer/demultiplexer for dense optical interconnects,” Opt. Express 18(5), 5151–5160 (2010).
    [Crossref] [PubMed]
  27. Y. H. Wen, O. Kuzucu, T. Hou, M. Lipson, and A. L. Gaeta, “All-optical switching of a single resonance in silicon ring resonators,” Opt. Lett. 36(8), 1413–1415 (2011).
    [Crossref] [PubMed]
  28. C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
    [Crossref]
  29. Y. Hao, Y. Wu, J. Yang, X. Jiang, and M. Wang, “Novel dispersive and focusing device configuration based on curved waveguide grating (CWG),” Opt. Express 14(19), 8630–8637 (2006).
    [Crossref] [PubMed]
  30. P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
    [Crossref] [PubMed]
  31. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
    [Crossref]
  32. P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
    [Crossref] [PubMed]
  33. P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett. 35(15), 2526–2528 (2010).
    [Crossref] [PubMed]
  34. R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
    [Crossref] [PubMed]
  35. U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
    [Crossref] [PubMed]
  36. J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
    [Crossref] [PubMed]
  37. F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
    [Crossref]

2011 (3)

2010 (5)

2008 (4)

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[Crossref] [PubMed]

F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
[Crossref]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
[Crossref] [PubMed]

2007 (9)

J. Brouckaert, W. Bogaerts, P. Dumon, D. Thourhout, and R. Baets, “Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform,” J. Lightwave Technol. 25(5), 1269–1275 (2007).
[Crossref]

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[Crossref] [PubMed]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[Crossref] [PubMed]

A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics 1(3), 153–155 (2007).
[Crossref]

B. Jalali, “Teaching silicon new tricks,” Nat. Photonics 1(4), 193–195 (2007).
[Crossref]

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics 1(6), 303–305 (2007).
[Crossref]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[Crossref]

2006 (6)

2005 (1)

X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE 6020, 60201Q (2005).
[Crossref]

2004 (2)

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

2000 (1)

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

1998 (1)

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

1882 (1)

H. A. Rowland, “Preliminary notice of results accomplished on the manufacture and theory of gratings for optical purposes,” Phil. Mag. Suppl. 13(84), 469–474 (1882).
[Crossref]

Abashin, M.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Alduino, A.

A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics 1(3), 153–155 (2007).
[Crossref]

Asghari, M.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Baba, T.

F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys. 45(8A), 6126–6131 (2006).
[Crossref]

Baets, R.

Balakrishnan, A.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Beckx, S.

Bedard, D.

Bergman, K.

Bezinger, A.

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

Biberman, A.

Bidnyk, S.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Bock, P. J.

Bogaerts, W.

Brouckaert, J.

Chang-Hasnain, C. J.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

Charbonneau, S.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Cheben, P.

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett. 35(15), 2526–2528 (2010).
[Crossref] [PubMed]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
[Crossref] [PubMed]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
[Crossref] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[Crossref] [PubMed]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Chen, L.

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[Crossref] [PubMed]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

Cloutier, M.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Corzine, S.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Costa, J.

Cunningham, J.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Cunningham, J. E.

Daqun, L.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Delâge, A.

DeMarco, J.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

Densmore, A.

Dentai, A.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Doerr, C. R.

Dossou, K.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Dumon, P.

Erickson, L.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Evans, P.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Fainman, Y.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Feng, D.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Feng, N.-N.

Fong, J.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Foster, M. A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Fraser, J. W.

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

Gaeta, A. L.

Y. H. Wen, O. Kuzucu, T. Hou, M. Lipson, and A. L. Gaeta, “All-optical switching of a single resonance in silicon ring resonators,” Opt. Lett. 36(8), 1413–1415 (2011).
[Crossref] [PubMed]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Gao, M.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Gondarenko, A.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Green, W. M.

F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
[Crossref]

Halir, R.

Hall, T. J.

Han-Yong, N.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Hao, Y.

Horst, F.

F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
[Crossref]

Hou, T.

Huang, M. C. Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

Hurtt, S.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Ikeda, K.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Jaenen, P.

Jalali, B.

B. Jalali, “Teaching silicon new tricks,” Nat. Photonics 1(4), 193–195 (2007).
[Crossref]

Janz, S.

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
[Crossref] [PubMed]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett. 35(15), 2526–2528 (2010).
[Crossref] [PubMed]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
[Crossref] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[Crossref] [PubMed]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

Jessop, P. E.

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

Jiang, X.

Jose, M.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Joyner, C.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Kachesh, P.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Kato, M.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Kimerling, L.

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics 1(6), 303–305 (2007).
[Crossref]

Kirchain, R.

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics 1(6), 303–305 (2007).
[Crossref]

Kish, F.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Krishnamoorthy, A.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Krishnamoorthy, A. V.

Krug, P. A.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Kung, C.-C.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Kuzucu, O.

Lamontagne, B.

Lapointe, J.

Laskowski, E. J.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

Lee, B. G.

Leijtens, X.

X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE 6020, 60201Q (2005).
[Crossref]

Levy, J. S.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Levy, U.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Li, G.

Liang, H.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Lipson, M.

Luff, B. J.

Luo, Y.

Ma, R.

Madsen, C. K.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

Mateus, C. F. R.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

Mekis, A.

Michael, R. W.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Milbrodt, M. A.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

Missey, M.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Molina-Fernández, I.

Motegi, A.

F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys. 45(8A), 6126–6131 (2006).
[Crossref]

Muehlner, D.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

Murthy, S.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Muthiah, R.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Nagarajan, R.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Offrein, B. J.

F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
[Crossref]

Ohno, F.

F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys. 45(8A), 6126–6131 (2006).
[Crossref]

Okamoto, K.

Packirisamy, M.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Paniccia, M.

A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics 1(3), 153–155 (2007).
[Crossref]

Pearson, M.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

Pearson, M. R. T.

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

Pinguet, T.

Pleumeekers, J.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Post, E.

Qian, W.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Raj, K.

Roberto, R. P.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Rooks, M.

Rowland, H. A.

H. A. Rowland, “Preliminary notice of results accomplished on the manufacture and theory of gratings for optical purposes,” Phil. Mag. Suppl. 13(84), 469–474 (1882).
[Crossref]

Salvatore, R. A.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Sasaki, K.

F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys. 45(8A), 6126–6131 (2006).
[Crossref]

Schmid, J. H.

Schneider, R.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Sekaric, L.

Sherwood-Droz, N.

Shubin, I.

Smit, M.

X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE 6020, 60201Q (2005).
[Crossref]

Soref, R.

R. Soref, “Reconfigurable integrated optoelectronics,” Adv. Optoelectron. 2011, 1–15 (2011), doi:.
[Crossref]

Strasser, T. A.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

Suzuki, Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

Taillaert, D.

Thacker, H.

Thourhout, D.

Turner-Foster, A. C.

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

Van Thourhout, D.

Vlasov, Y.

F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
[Crossref]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[Crossref] [PubMed]

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[Crossref]

Wagener, J.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

Waldron, P.

Wang, H.

Wang, M.

Welch, D.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Wen, Y. H.

Wouters, J.

Wu, Y.

Xia, F.

Xu, D.-X.

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett. 35(19), 3243–3245 (2010).
[Crossref] [PubMed]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett. 35(15), 2526–2528 (2010).
[Crossref] [PubMed]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
[Crossref] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett. 32(13), 1794–1796 (2007).
[Crossref] [PubMed]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

Xuan, W.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Yang, J.

Yao, J.

Yin, J.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

Zheng, X.

Ziari, M.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

Adv. Optoelectron. (1)

R. Soref, “Reconfigurable integrated optoelectronics,” Adv. Optoelectron. 2011, 1–15 (2011), doi:.
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (2)

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron. 16(5), 1113–1125 (2010).
[Crossref]

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron. 4(6), 925–929 (1998).
[Crossref]

IEEE Photon. Technol. Lett. (3)

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[Crossref]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett. 16(2), 503–505 (2004).
[Crossref]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett. 18(22), 2392–2394 (2006).
[Crossref]

J. Lightwave Technol. (2)

Jpn. J. Appl. Phys. (1)

F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys. 45(8A), 6126–6131 (2006).
[Crossref]

Nat. Photonics (5)

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics 1(1), 65–71 (2007).
[Crossref]

J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics 4(1), 37–40 (2010).
[Crossref]

A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics 1(3), 153–155 (2007).
[Crossref]

B. Jalali, “Teaching silicon new tricks,” Nat. Photonics 1(4), 193–195 (2007).
[Crossref]

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics 1(6), 303–305 (2007).
[Crossref]

Opt. Eng. (1)

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng. 47(4), 0446011–0666018 (2008).

Opt. Express (9)

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[Crossref] [PubMed]

X. Zheng, I. Shubin, G. Li, T. Pinguet, A. Mekis, J. Yao, H. Thacker, Y. Luo, J. Costa, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “A tunable 1x4 silicon CMOS photonic wavelength multiplexer/demultiplexer for dense optical interconnects,” Opt. Express 18(5), 5151–5160 (2010).
[Crossref] [PubMed]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express 15(19), 11934–11941 (2007).
[Crossref] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

Y. Hao, Y. Wu, J. Yang, X. Jiang, and M. Wang, “Novel dispersive and focusing device configuration based on curved waveguide grating (CWG),” Opt. Express 14(19), 8630–8637 (2006).
[Crossref] [PubMed]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express 16(22), 17616–17625 (2008).
[Crossref] [PubMed]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Dumon, W. Bogaerts, D. Van Thourhout, D. Taillaert, R. Baets, J. Wouters, S. Beckx, and P. Jaenen, “Compact wavelength router based on a Silicon-on-insulator arrayed waveguide grating pigtailed to a fiber array,” Opt. Express 14(2), 664–669 (2006).
[Crossref] [PubMed]

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express 19(7), 6125–6130 (2011).
[Crossref] [PubMed]

Opt. Lett. (4)

Phil. Mag. Suppl. (1)

H. A. Rowland, “Preliminary notice of results accomplished on the manufacture and theory of gratings for optical purposes,” Phil. Mag. Suppl. 13(84), 469–474 (1882).
[Crossref]

Phys. Rev. Lett. (1)

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett. 98(24), 243901 (2007).
[Crossref] [PubMed]

Proc. SPIE (3)

F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE 6996, 69960R, (2008).
[Crossref]

X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE 6020, 60201Q (2005).
[Crossref]

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE 3953, 11–18 (2000).
[Crossref]

Other (4)

P. Cheben, “Wavelength dispersive planar waveguide devices: echelle gratings and arrayed waveguide gratings,” Optical waveguides: from theory to applied technologies, M. L. Calvo and V. Lakshminarayanan, Eds. (CRC Press, 2007), 173–230.

K. Okamoto, “Fundamentals of optical waveguides,” Elsevier Inc., 2006.

X. Liu, I. Hsieh, X. Chen, M. Takekoshi, J. I. Dadap, N. C. Panoiu, R. M. Osgood Jr., W. M. Green, F. Xia, and Y. A. Vlasov, “Design and fabrication of an ultra-compact silicon on insulator demultiplexer based on arrayed waveguide gratings,” CLEO 2008, paper CTuNN1.

S. Pathak, E. Lambert, P. Dumon, D. Thourhout, and W. Bogaerts, “Compact SOI-Based AWG With Flattened Spectral Response Using a MMI,” 8th International Conference in Group IV Photonics 2011, paper WC2.

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (7)

Fig. 1
Fig. 1

Schematic of the discretized Kirchhoff-Huygens model of the sidewall grating spectrometer with N facets having a Roland radius of R. Coordinates x, y are relative to the focal curve.

Download Full Size | PPT Slide | PDF

Fig. 2
Fig. 2

a) Schematic of the conventional split-path multiplexing approach used in an AWG where φ1, φj, φj+1 and φN are the phase errors accumulated along the first, jth, jth + 1 and Nth array waveguide (N is the total number of array waveguides). The relative phase error between the jth and the jth + 1 array waveguide is Δφ = φj+1 – φj, since phase error is accumulated independently between the different array waveguides. b) Schematic of the common-path multiplexing approach used in the sidewall grating. Since the light propagates along a common path, the relative phase error between adjacent facets will be Δφ = φj + 1 - φj = (Δφj,j + 1 + φj) - φj = Δφj,,j + 1, where Δφj,,j + 1 is the phase error accumulation between facet j and facet j + 1.

Download Full Size | PPT Slide | PDF

Fig. 3
Fig. 3

a) Optical image of the sidewall grating spectrometer showing the input waveguide and the 21-channel output receiver waveguide array. b) Scanning electron microscope image close-up of the blazed waveguide grating and subwavelength grating (SWG) nanostructure detail.

Download Full Size | PPT Slide | PDF

Fig. 4
Fig. 4

Comparison of the transmission spectra for TE polarization between a nominal (apodized and chirped) spectrometer (grey) and a test spectrometer (colored) a) without apodization for a constant modulation depth of 300 nm, indicating poor crosstalk performance and b) without the subwavelength anti-reflective nanostructure, indicating a 4 dB loss penalty.

Download Full Size | PPT Slide | PDF

Fig. 5
Fig. 5

Transmission spectrum of the nominal spectrometer for TE polarization for a wavelength range of λ = 1340 – 1620 nm.

Download Full Size | PPT Slide | PDF

Fig. 6
Fig. 6

Optical image of the two-pass spectral filter formed by cascading two 11 channel sidewall grating spectrometers.

Download Full Size | PPT Slide | PDF

Fig. 7
Fig. 7

Transmission spectrum of the two-pass spectrometer for a wavelength range of λ = 1400 – 1600 nm (TE polarization).

Download Full Size | PPT Slide | PDF

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

Ψ( x ′ , y ′ )= ∫ C ψ(x,y)exp[−i( ϕ w + ϕ s )] λd GdC

Metrics