Abstract

We experimentally demonstrate a new type of waveguide multiplexer device designed for silicon photonics, with a crosstalk level as low as −35 dB and an operational wavelength range of 300 nm. A compact device footprint of only 100 × 160 µm2 offers an excellent potential for integration with other silicon nanophotonic circuits.

© 2012 OSA

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2011 (3)

2010 (5)

2008 (4)

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng.47(4), 0446011–0666018 (2008).

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express16(22), 17616–17625 (2008).
[CrossRef] [PubMed]

F. Horst, W. M. Green, B. J. Offrein, and Y. Vlasov, “Echelle grating WDM (de-)multiplexer in SOI technology, based on a design with two stigmatic points,” Proc. SPIE6996, 69960R, (2008).
[CrossRef]

2007 (9)

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express15(5), 2299–2306 (2007).
[CrossRef] [PubMed]

J. Brouckaert, W. Bogaerts, P. Dumon, D. Thourhout, and R. Baets, “Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform,” J. Lightwave Technol.25(5), 1269–1275 (2007).
[CrossRef]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

F. Xia, M. Rooks, L. Sekaric, and Y. Vlasov, “Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects,” Opt. Express15(19), 11934–11941 (2007).
[CrossRef] [PubMed]

F. Xia, L. Sekaric, and Y. Vlasov, “Ultracompact optical buffers on a silicon chip,” Nat. Photonics1(1), 65–71 (2007).
[CrossRef]

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics1(3), 153–155 (2007).
[CrossRef]

B. Jalali, “Teaching silicon new tricks,” Nat. Photonics1(4), 193–195 (2007).
[CrossRef]

R. Kirchain and L. Kimerling, “A roadmap for nanophotonics,” Nat. Photonics1(6), 303–305 (2007).
[CrossRef]

2006 (6)

2005 (1)

X. Leijtens and M. Smit, “Miniaturization of Passive Devices for Photonic Integration,” Proc. SPIE6020, 60201Q (2005).
[CrossRef]

2004 (2)

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

2000 (1)

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE3953, 11–18 (2000).
[CrossRef]

1998 (1)

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron.4(6), 925–929 (1998).
[CrossRef]

1882 (1)

H. A. Rowland, “Preliminary notice of results accomplished on the manufacture and theory of gratings for optical purposes,” Phil. Mag. Suppl.13(84), 469–474 (1882).
[CrossRef]

Abashin, M.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Alduino, A.

A. Alduino and M. Paniccia, “Interconnects: wiring electronics with light,” Nat. Photonics1(3), 153–155 (2007).
[CrossRef]

Asghari, M.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express19(7), 6125–6130 (2011).
[CrossRef] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett.18(22), 2392–2394 (2006).
[CrossRef]

Baba, T.

F. Ohno, K. Sasaki, A. Motegi, and T. Baba, “Reduction in Sidelobe Level in Ultracompact Arrayed Waveguide Grating Demultiplexer Based on Si Wire Waveguide,” Jpn. J. Appl. Phys.45(8A), 6126–6131 (2006).
[CrossRef]

Baets, R.

Balakrishnan, A.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett.18(22), 2392–2394 (2006).
[CrossRef]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004).
[CrossRef]

Beckx, S.

Bedard, D.

Bergman, K.

Bezinger, A.

M. R. T. Pearson, A. Bezinger, A. Delâge, J. W. Fraser, S. Janz, P. E. Jessop, and D.-X. Xu, “Arrayed waveguide grating demultiplexers in silicon-on-insulator,” Proc. SPIE3953, 11–18 (2000).
[CrossRef]

Biberman, A.

Bidnyk, S.

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett.18(22), 2392–2394 (2006).
[CrossRef]

Bock, P. J.

Bogaerts, W.

Brouckaert, J.

Chang-Hasnain, C. J.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Charbonneau, S.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004).
[CrossRef]

Cheben, P.

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexers,” Opt. Lett.35(15), 2526–2528 (2010).
[CrossRef] [PubMed]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
[CrossRef] [PubMed]

P. J. Bock, P. Cheben, A. Delâge, J. H. Schmid, D.-X. Xu, S. Janz, and T. J. Hall, “Demultiplexer with blazed waveguide sidewall grating and sub-wavelength grating structure,” Opt. Express16(22), 17616–17625 (2008).
[CrossRef] [PubMed]

P. Cheben, J. H. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D.-X. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides,” Opt. Express15(5), 2299–2306 (2007).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express14(11), 4695–4702 (2006).
[CrossRef] [PubMed]

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004).
[CrossRef]

Chen, L.

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4x4 hitless slicon router for optical networks-on-chip (NoC),” Opt. Express16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Cloutier, M.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004).
[CrossRef]

Corzine, S.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron.16(5), 1113–1125 (2010).
[CrossRef]

Costa, J.

Cunningham, J.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Cunningham, J. E.

Daqun, L.

N. Han-Yong, R. W. Michael, L. Daqun, W. Xuan, M. Jose, R. P. Roberto, and P. Kachesh, “4 x 4 wavelength reconfigurable photonic switch based on thermally tuned silicon microring resonators,” Opt. Eng.47(4), 0446011–0666018 (2008).

Delâge, A.

DeMarco, J.

C. K. Madsen, J. Wagener, T. A. Strasser, D. Muehlner, M. A. Milbrodt, E. J. Laskowski, and J. DeMarco, “Planar waveguide optical spectrum analyzer using a UV-induced grating,” IEEE J. Sel. Top. Quantum Electron.4(6), 925–929 (1998).
[CrossRef]

Densmore, A.

Dentai, A.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron.16(5), 1113–1125 (2010).
[CrossRef]

Doerr, C. R.

Dossou, K.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004).
[CrossRef]

Dumon, P.

Erickson, L.

S. Janz, A. Balakrishnan, S. Charbonneau, P. Cheben, M. Cloutier, A. Delâge, K. Dossou, L. Erickson, M. Gao, P. A. Krug, B. Lamontagne, M. Packirisamy, M. Pearson, and D.-X. Xu, “Planar waveguide echelle gratings in silica-on-silicon,” IEEE Photon. Technol. Lett.16(2), 503–505 (2004).
[CrossRef]

Evans, P.

R. Nagarajan, M. Kato, J. Pleumeekers, P. Evans, S. Corzine, S. Hurtt, A. Dentai, S. Murthy, M. Missey, R. Muthiah, R. A. Salvatore, C. Joyner, R. Schneider, M. Ziari, F. Kish, and D. Welch, “InP Photonic Integrated Circuits,” IEEE J. Sel. Top. Quantum Electron.16(5), 1113–1125 (2010).
[CrossRef]

Fainman, Y.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous Dielectric Metamaterials with Space-Variant Polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Feng, D.

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B. J. Luff, and M. Asghari, “Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,” Opt. Express19(7), 6125–6130 (2011).
[CrossRef] [PubMed]

S. Bidnyk, D. Feng, A. Balakrishnan, M. Pearson, M. Gao, H. Liang, W. Qian, C.-C. Kung, J. Fong, J. Yin, and M. Asghari, “Silicon-on-insulator-based planar circuit for passive optical network applications,” IEEE Photon. Technol. Lett.18(22), 2392–2394 (2006).
[CrossRef]

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