Abstract

In this paper, athermal silicon waveguides using bridged subwavelength grating (BSWG) structures are proposed and investigated. The realization of temperature-independent BSWG waveguides for both polarizations is demonstrated numerically and experimentally. SU-8 polymer is used as the cladding material to compensate for the positive thermo-optic (TO) coefficient (dn/dT) of silicon. We investigate the dependence of the effective TO coefficient of BSWG waveguides on both the bridge width and grating duty cycle. The BSWG waveguides have a width of 490 nm, a height of 260 nm, and a grating pitch of 250 nm. Athermal behavior is achieved for both the transverse-magnetic (TM) and the transverse-electric (TE) polarized light for a variety of bridge width and duty cycle combinations. Furthermore, the BSWGs can be designed to be athermal for both TE and TM polarization simultaneously.

© 2012 OSA

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  1. P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
    [CrossRef] [PubMed]
  2. P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
    [CrossRef] [PubMed]
  3. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
    [CrossRef]
  4. J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
    [CrossRef] [PubMed]
  5. P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express14(11), 4695–4702 (2006).
    [CrossRef] [PubMed]
  6. R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
  8. I. Glesk, P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, and S. Janz, “All-optical switching using nonlinear subwavelength Mach-Zehnder on silicon,” Opt. Express19(15), 14031–14039 (2011).
    [CrossRef] [PubMed]
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    [CrossRef]
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  16. D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
    [CrossRef] [PubMed]
  17. J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
    [CrossRef] [PubMed]

2011 (3)

2010 (4)

2009 (1)

2008 (3)

D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
[CrossRef] [PubMed]

W. N. Ye, J. Michel, and L. C. Kimerling, “Athermal high-index-contrast waveguide design,” IEEE Photon. Technol. Lett.20(11), 885–887 (2008).
[CrossRef]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

2007 (2)

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

2006 (1)

2004 (1)

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

1995 (1)

G. Ghosh, “Model for the thermo-optic coefficients of some standard optical glasses,” J. Non-Cryst. Solids189(1-2), 191–196 (1995).
[CrossRef]

Abashin, M.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Aers, G. C.

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

Bedard, D.

Bock, P. J.

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

I. Glesk, P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, and S. Janz, “All-optical switching using nonlinear subwavelength Mach-Zehnder on silicon,” Opt. Express19(15), 14031–14039 (2011).
[CrossRef] [PubMed]

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

Chang-Hasnain, C. J.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Cheben, P.

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

I. Glesk, P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, and S. Janz, “All-optical switching using nonlinear subwavelength Mach-Zehnder on silicon,” Opt. Express19(15), 14031–14039 (2011).
[CrossRef] [PubMed]

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
[CrossRef] [PubMed]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express14(11), 4695–4702 (2006).
[CrossRef] [PubMed]

Chen, L.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Cunningham, J.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Delâge, A.

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
[CrossRef] [PubMed]

Densmore, A.

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
[CrossRef] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express14(11), 4695–4702 (2006).
[CrossRef] [PubMed]

Fainman, Y.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Garcia, J.

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

García, J.

Ghosh, G.

G. Ghosh, “Model for the thermo-optic coefficients of some standard optical glasses,” J. Non-Cryst. Solids189(1-2), 191–196 (1995).
[CrossRef]

Glesk, I.

Halir, R.

Hall, T. J.

Huang, M. C. Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Ibrahim, M.

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

Ikeda, K.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Janz, S.

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

I. Glesk, P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, and S. Janz, “All-optical switching using nonlinear subwavelength Mach-Zehnder on silicon,” Opt. Express19(15), 14031–14039 (2011).
[CrossRef] [PubMed]

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
[CrossRef] [PubMed]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express14(11), 4695–4702 (2006).
[CrossRef] [PubMed]

Kimerling, L. C.

W. N. Ye, J. Michel, and L. C. Kimerling, “Athermal high-index-contrast waveguide design,” IEEE Photon. Technol. Lett.20(11), 885–887 (2008).
[CrossRef]

Krishnamoorthy, A.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Lamontagne, B.

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

Lapointe, J.

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

I. Glesk, P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, and S. Janz, “All-optical switching using nonlinear subwavelength Mach-Zehnder on silicon,” Opt. Express19(15), 14031–14039 (2011).
[CrossRef] [PubMed]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
[CrossRef] [PubMed]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Levy, U.

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Li, Y.

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

Lopinski, G.

Ma, R.

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

Mateus, C. F. R.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

McKinnon, R.

Michel, J.

W. N. Ye, J. Michel, and L. C. Kimerling, “Athermal high-index-contrast waveguide design,” IEEE Photon. Technol. Lett.20(11), 885–887 (2008).
[CrossRef]

Mischki, T.

Molina-Fernández, I.

Poitras, D.

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

Post, E.

Schmid, J. H.

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

I. Glesk, P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, and S. Janz, “All-optical switching using nonlinear subwavelength Mach-Zehnder on silicon,” Opt. Express19(15), 14031–14039 (2011).
[CrossRef] [PubMed]

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
[CrossRef] [PubMed]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

Sinclair, W.

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

Suzuki, Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

Waldron, P.

Xu, D.-X.

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

R. Halir, P. Cheben, J. H. Schmid, R. Ma, D. Bedard, S. Janz, D.-X. Xu, A. Densmore, J. Lapointe, and I. Molina-Fernández, “Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure,” Opt. Lett.35(19), 3243–3245 (2010).
[CrossRef] [PubMed]

P. Cheben, P. J. Bock, J. H. Schmid, J. Lapointe, S. Janz, D.-X. Xu, A. Densmore, A. Delâge, B. Lamontagne, and T. J. Hall, “Refractive index engineering with subwavelength gratings implemented in a highly efficient microphotonic coupler and a planar waveguide multiplexers,” Opt. Lett.35, 2526–2528 (2010).
[CrossRef] [PubMed]

P. J. Bock, P. Cheben, J. H. Schmid, J. Lapointe, A. Delâge, S. Janz, G. C. Aers, D.-X. Xu, A. Densmore, and T. J. Hall, “Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide,” Opt. Express18(19), 20251–20262 (2010).
[CrossRef] [PubMed]

J. H. Schmid, W. Sinclair, J. García, S. Janz, J. Lapointe, D. Poitras, Y. Li, T. Mischki, G. Lopinski, P. Cheben, A. Delâge, A. Densmore, P. Waldron, and D.-X. Xu, “Silicon-on-insulator guided mode resonant grating for evanescent field molecular sensing,” Opt. Express17(20), 18371–18380 (2009).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

D.-X. Xu, A. Densmore, A. Delâge, P. Waldron, R. McKinnon, S. Janz, J. Lapointe, G. Lopinski, T. Mischki, E. Post, P. Cheben, and J. H. Schmid, “Folded cavity SOI microring sensors for high sensitivity and real time measurement of biomolecular binding,” Opt. Express16(19), 15137–15148 (2008).
[CrossRef] [PubMed]

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, and D.-X. Xu, “Gradient-index antireflective subwavelength structures for planar waveguide facets,” Opt. Lett.32(13), 1794–1796 (2007).
[CrossRef] [PubMed]

P. Cheben, D.-X. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express14(11), 4695–4702 (2006).
[CrossRef] [PubMed]

Ye, W. N.

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

J. H. Schmid, M. Ibrahim, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, W. N. Ye, and D.-X. Xu, “Temperature-independent silicon subwavelength grating waveguides,” Opt. Lett.36(11), 2110–2112 (2011).
[CrossRef] [PubMed]

W. N. Ye, J. Michel, and L. C. Kimerling, “Athermal high-index-contrast waveguide design,” IEEE Photon. Technol. Lett.20(11), 885–887 (2008).
[CrossRef]

Adv. Opt. Technol. (1)

J. H. Schmid, P. Cheben, S. Janz, J. Lapointe, E. Post, A. Delâge, A. Densmore, B. Lamontagne, P. Waldron, and D.-X. Xu, “Subwavelength grating structures in silicon-on-insulator waveguides,” Adv. Opt. Technol.2008, 685489 (2008).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 um) using a subwavelength grating,” IEEE Photon. Technol. Lett.16(7), 1676–1678 (2004).
[CrossRef]

W. N. Ye, J. Michel, and L. C. Kimerling, “Athermal high-index-contrast waveguide design,” IEEE Photon. Technol. Lett.20(11), 885–887 (2008).
[CrossRef]

J. Non-Cryst. Solids (1)

G. Ghosh, “Model for the thermo-optic coefficients of some standard optical glasses,” J. Non-Cryst. Solids189(1-2), 191–196 (1995).
[CrossRef]

Opt. Express (5)

Opt. Lett. (4)

Phys. Rev. Lett. (1)

U. Levy, M. Abashin, K. Ikeda, A. Krishnamoorthy, J. Cunningham, and Y. Fainman, “Inhomogenous dielectric metamaterials with space-variant polarizability,” Phys. Rev. Lett.98(24), 243901 (2007).
[CrossRef] [PubMed]

Proc. SPIE (2)

M. Ibrahim, J. H. Schmid, P. Cheben, J. Lapointe, S. Janz, P. J. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, and W. N. Ye, “Athermal silicon subwavelength grating waveguides,” Proc. SPIE8707, 80071L (2011).
[CrossRef]

J. H. Schmid, P. J. Bock, P. Cheben, W. Sinclair, J. Garcia, S. Janz, J. Lapointe, G. C. Aers, D. Poitras, Y. Li, G. Lopinski, A. Delâge, A. Densmore, B. Lamontagne, R. Ma, and D.-X. Xu, “Applications of subwavelength grating structures in silicon-on-insulator waveguides,” Proc. SPIE7606, 76060F (2010).
[CrossRef]

Other (1)

S. G. Johnson, “The MIT Photonic-Bands Manual (MPB)”, Massachusetts Institute of Technology (MIT), http://ab-initio.mit.edu/mpb/doc/mpb.pdf

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Figures (6)

Fig. 1
Fig. 1

a) Schematic of a subwavelength grating (SWG) waveguide core: W is the waveguide width, H is the waveguide height, a is the length of a silicon core segment, Λ is the grating pitch (period), k is the wavevector, and n1 and n2 are the core and cladding indices, respectively. b) Schematic of an athermal SWG waveguide.

Fig. 2
Fig. 2

(a) A schematic top view of the athermal BSWG waveguide. W1 is the width of the wider silicon core segments, W2 is the width of the bridging silicon segments, a is the length of the wider segments, and Λ is the grating pitch. The grating duty cycle (DC) is defined as a/Λ. (b, c) SEM images of fabricated BSWG waveguides. These waveguides were designed with W1 = 450 nm, H = 260 nm, and Λ = 250 nm: (b) with DC = 50% and W2 = 140 nm; (c) with DC = 65% and W2 = 80 nm.

Fig. 3
Fig. 3

The bridge width (W2) dependence on the duty cycle (DC) in athermal BSWG waveguides with W1 = 450 nm, H = 260 nm, and Λ = 250 nm. The operating wavelength is 1550 nm.

Fig. 4
Fig. 4

The spectral transmittance of MZI with (a) photonic wire waveguides and (b) near athermal BSWGs. A wavelength shift dλ/dT ≈35 pm/°C is observed in (a). dλ/dT ≈-2.5 pm/°C is observed in (b). Waveguide dimensions are: (a) W = 490 nm and H = 260 nm; (b) W1 = 490 nm, H = 260 nm, Λ = 250 nm, DC = 42%, and W2 = 220 nm.

Fig. 5
Fig. 5

The thermo-optic coefficient dependence on the wavelength. The TO coefficient of athermal BSWG waveguides are compared with the PW waveguide. The BSWG waveguides were designed nominally athermal at the wavelength λ = 1550 nm.

Fig. 6
Fig. 6

BSWG thermo-optic coefficient dependence on the bridge width (W2), for DC = 58% (a, b) and DC = 42% (c, d) for TE and TM polarizations. Simulation results for waveguide dimensions measured by SEM are compared with the experimental data. Waveguide dimensions: W1 = 490 nm, H = 260 nm, and Λ = 250 nm. The operating wavelength is 1550 nm.

Tables (1)

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Table 1 Some SWG waveguide geometries yielding athermal operation

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