Photonic wire bonding: a novel concept for chip-scale interconnects

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
[Crossref] [PubMed]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

L. C. L. Chen, C. R. Doerr, Y.-K. C. Y.-K. Chen, and T.-Y. L. T.-Y. Liow, “Low-Loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[Crossref]

G. Schmid, W. R. Leeb, G. Langer, V. Schmidt, and R. Houbertz, “Gbit/s transmission via two-photon-absorption-inscribed optical waveguides on printed circuit boards,” Electron. Lett. 45(4), 219–221 (2009).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[Crossref] [PubMed]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref] [PubMed]

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
[Crossref] [PubMed]

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. D. L. Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett. 15(9), 1249–1251 (2003).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3µm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref] [PubMed]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[Crossref] [PubMed]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. D. L. Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett. 15(9), 1249–1251 (2003).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. D. L. Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett. 15(9), 1249–1251 (2003).
[Crossref]

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004).
[Crossref] [PubMed]

L. C. L. Chen, C. R. Doerr, Y.-K. C. Y.-K. Chen, and T.-Y. L. T.-Y. Liow, “Low-Loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[Crossref]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

L. C. L. Chen, C. R. Doerr, Y.-K. C. Y.-K. Chen, and T.-Y. L. T.-Y. Liow, “Low-Loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[Crossref]

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. D. L. Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett. 15(9), 1249–1251 (2003).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004).
[Crossref] [PubMed]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

L. C. L. Chen, C. R. Doerr, Y.-K. C. Y.-K. Chen, and T.-Y. L. T.-Y. Liow, “Low-Loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. D. L. Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett. 15(9), 1249–1251 (2003).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006).
[Crossref]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
[Crossref] [PubMed]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

G. Schmid, W. R. Leeb, G. Langer, V. Schmidt, and R. Houbertz, “Gbit/s transmission via two-photon-absorption-inscribed optical waveguides on printed circuit boards,” Electron. Lett. 45(4), 219–221 (2009).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

G. Schmid, W. R. Leeb, G. Langer, V. Schmidt, and R. Houbertz, “Gbit/s transmission via two-photon-absorption-inscribed optical waveguides on printed circuit boards,” Electron. Lett. 45(4), 219–221 (2009).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

G. Schmid, W. R. Leeb, G. Langer, V. Schmidt, and R. Houbertz, “Gbit/s transmission via two-photon-absorption-inscribed optical waveguides on printed circuit boards,” Electron. Lett. 45(4), 219–221 (2009).
[Crossref]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

L. C. L. Chen, C. R. Doerr, Y.-K. C. Y.-K. Chen, and T.-Y. L. T.-Y. Liow, “Low-Loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[Crossref]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref] [PubMed]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
[Crossref] [PubMed]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
[Crossref] [PubMed]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3µm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref] [PubMed]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004).
[Crossref] [PubMed]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. D. L. Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett. 15(9), 1249–1251 (2003).
[Crossref]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[Crossref] [PubMed]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

G. Schmid, W. R. Leeb, G. Langer, V. Schmidt, and R. Houbertz, “Gbit/s transmission via two-photon-absorption-inscribed optical waveguides on printed circuit boards,” Electron. Lett. 45(4), 219–221 (2009).
[Crossref]

G. Schmid, W. R. Leeb, G. Langer, V. Schmidt, and R. Houbertz, “Gbit/s transmission via two-photon-absorption-inscribed optical waveguides on printed circuit boards,” Electron. Lett. 45(4), 219–221 (2009).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[Crossref] [PubMed]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3µm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004).
[Crossref] [PubMed]

S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[Crossref] [PubMed]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. D. L. Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett. 15(9), 1249–1251 (2003).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
[Crossref] [PubMed]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3µm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[Crossref] [PubMed]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[Crossref] [PubMed]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
[Crossref] [PubMed]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004).
[Crossref] [PubMed]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
[Crossref] [PubMed]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3µm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004).
[Crossref] [PubMed]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
[Crossref] [PubMed]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
[Crossref] [PubMed]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3µm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, “Low loss mode size converter from 0.3µm square Si wire waveguides to singlemode fibres,” Electron. Lett. 38(25), 1669–1670 (2002).
[Crossref]

G. Schmid, W. R. Leeb, G. Langer, V. Schmidt, and R. Houbertz, “Gbit/s transmission via two-photon-absorption-inscribed optical waveguides on printed circuit boards,” Electron. Lett. 45(4), 219–221 (2009).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006).
[Crossref]

L. C. L. Chen, C. R. Doerr, Y.-K. C. Y.-K. Chen, and T.-Y. L. T.-Y. Liow, “Low-Loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides,” IEEE Photon. Technol. Lett. 22(23), 1744–1746 (2010).
[Crossref]

X. Chen, C. Li, C. K. Y. Fung, S. M. G. Lo, and H. K. Tsang, “Apodized waveguide grating couplers for efficient coupling to optical fibers,” IEEE Photon. Technol. Lett. 22(15), 1156–1158 (2010).
[Crossref]

D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. D. L. Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett. 15(9), 1249–1251 (2003).
[Crossref]

R. Schmogrow, B. Nebendahl, M. Winter, A. Josten, D. Hillerkuss, S. Koenig, J. Meyer, M. Dreschmann, M. Huebner, C. Koos, J. Becker, W. Freude, and J. Leuthold, “Error vector magnitude as a performance measure for advanced modulation formats,” IEEE Photon. Technol. Lett. 24(1), 61–63 (2012).
[Crossref]

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. van Campenhout, P. Bienstman, and D. van Thourhout, “Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology,” J. Lightwave Technol. 23(1), 401–412 (2005).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol. 25(1), 151–156 (2007).
[Crossref]

F. E. Doany, B. G. Lee, S. Assefa, W. M. J. Green, M. Yang, C. L. Schow, C. V. Jahnes, S. Zhang, J. Singer, V. I. Kopp, J. A. Kash, and Y. A. Vlasov, “Multichannel high-bandwidth coupling of ultradense silicon photonic waveguide array to standard-pitch fiber array,” J. Lightwave Technol. 29(4), 475–482 (2011).
[Crossref]

D. Taillaert, F. Van Laere, M. Ayre, W. Bogaerts, D. van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys. 45(8A), 6071–6077 (2006).
[Crossref]

M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004).
[Crossref] [PubMed]

D. Hillerkuss, R. Schmogrow, T. Schellinger, M. Jordan, M. Winter, G. Huber, T. Vallaitis, R. Bonk, P. Kleinow, F. Frey, M. Roeger, S. Koenig, A. Ludwig, A. Marculescu, J. Li, M. Hoh, M. Dreschmann, J. Meyer, S. Ben Ezra, N. Narkiss, B. Nebendahl, F. Parmigiani, P. Petropoulos, B. Resan, A. Oehler, K. Weingarten, T. Ellermeyer, J. Lutz, M. Moeller, M. Huebner, J. Becker, C. Koos, W. Freude, and J. Leuthold, “26 Tbit s−1 line-rate super-channel transmission utilizing all-optical fast Fourier transform processing,” Nat. Photonics 5(6), 364–371 (2011).
[Crossref]

S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature 412(6848), 697–698 (2001).
[Crossref] [PubMed]

S. McNab, N. Moll, and Y. Vlasov, “Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides,” Opt. Express 11(22), 2927–2939 (2003).
[Crossref] [PubMed]

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, and R. Baets, “Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides,” Opt. Express 15(15), 9625–9630 (2007).
[Crossref] [PubMed]

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible Silicon-On-Insulator platform,” Opt. Express 18(17), 18278–18283 (2010).
[Crossref] [PubMed]

Y. Tang, Z. Wang, L. Wosinski, U. Westergren, and S. He, “Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits,” Opt. Lett. 35(8), 1290–1292 (2010).
[Crossref] [PubMed]

S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett. 22(2), 132–134 (1997).
[Crossref] [PubMed]

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref] [PubMed]

R. A. Shafik, M. S. Rahman, and A. R. Islam, “On the extended relationships among EVM, BER and SNR as performance metrics”, in Proceedings of International Conference on Electrical and Computer Engineering (2006), pp. 408–411.

R. Schmogrow, S. Wolf, B. Baeuerle, D. Hillerkuss, B. Nebendahl, C. Koos, W. Freude, and J. Leuthold, “Nyquist frequency division multiplexing for coherent optical communications,” in CLEO (2012) paper CTh1H.2 (invited).

N. Lindenmann, G. Balthasar, R. Palmer, S. Schuele, J. Leuthold, W. Freude, and C. Koos, “Photonic wire bonding for single-mode chip-to-chip interconnects,” in Proceedings of IEEE International Conference on Group IV Photonics, (IEEE, 2011), 380–382.

N. Lindenmann, G. Balthasar, M. Jordan, D. Hillerkuss, R. Schmogrow, W. Freude, J. Leuthold, and C. Koos, “Low loss photonic wire bond interconnects enabling 5 TBit/s data transmission,” in Optical Fiber Communication Conference (Optical Society of America, 2012), paper OW4I.4.

H. Nanoscribe Gmb, www.nanoscribe.de .

N. Lindenmann, I. Kaiser, G. Balthasar, R. Bonk, D. Hillerkuss, W. Freude, J. Leuthold, and C. Koos, “Photonic waveguide bonds - a novel concept for chip-to-chip interconnects,” in Optical Fiber Communications Conference (Optical Society of America, 2011), paper PDPC1.

P. Evans, M. Fisher, R. Malendevich, A. James, P. Studenkov, G. Goldfarb, T. Vallaitis, M. Kato, P. Samra, S. Corzine, E. Strzelecka, R. Salvatore, F. Sedgwick, M. Kuntz, V. Lal, D. Lambert, A. Dentai, D. Pavinski, B. Behnia, J. Bostak, V. Dominic, A. Nilsson, B. Taylor, J. Rahn, S. Sanders, H. Sun, K.-T. Wu, J. Pleumeekers, R. Muthiah, M. Missey, R. Schneider, J. Stewart, M. Reffle, T. Butrie, R. Nagarajan, C. Joyner, M. Ziari, F. Kish, and D. Welch, “Multi-channel coherent PM-QPSK InP transmitter photonic integrated circuit (PIC) operating at 112 Gb/s per wavelength,” in Optical Fiber Communication Conference (Optical Society of America, 2011), paper PDPC7.

D. Feng, W. Qian, H. Liang, N.-N. Feng, S. Liao, C.-C. Kung, J. Fong, Y. Liu, R. Shafiiha, D. C. Lee, B. J. Luff, and M. Asghari, “Terabit/s single chip WDM receiver on the SOI platform,” in Proceedings of IEEE International Conference on Group IV Photonics, (IEEE, 2011), 320–322.

D. Miller, “Device requirements for optical interconnects to silicon chips,” Proceedings of the IEEE, (IEEE 97), 1166–1185.