Abstract

We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.

© 2012 OSA

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  1. A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
    [Crossref]
  2. D. Vantrease, R. Schreiber, M. Monchiero, M. McLaren, N. P. Jouppi, M. Fiorentino, A. Davis, N. Binkert, R. G. Beausoleil, and J. H. Ahn, “Corona: System implications of emerging nanophotonic technology,” Proc. 35th Annu. ISCA 2008, 153–164.
  3. C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
    [Crossref]
  4. M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro 29(4), 74–85 (2009).
    [Crossref]
  5. W. Bogaerts, P. Dumon, D. V. Thourhout, and R. Baets, “Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides,” Opt. Lett. 32(19), 2801–2803 (2007).
    [Crossref] [PubMed]
  6. X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express 16(19), 15052–15058 (2008).
    [Crossref] [PubMed]
  7. J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” Group IV Photonics 2011, 383–385.
  8. F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett. 16(7), 1661–1663 (2004).
    [Crossref]
  9. U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett. 8(5), 647–648 (1996).
    [Crossref]
  10. P. Dong, W. Qian, S. Liao, H. Liang, C.-C. Kung, N.-N. Feng, R. Shafiiha, J. Fong, D. Feng, A. V. Krishnamoorthy, and M. Asghari, “Low loss shallow-ridge silicon waveguides,” Opt. Express 18(14), 14474–14479 (2010).
    [Crossref] [PubMed]
  11. D. K. Sparacin, S. J. Spector, and L. C. Kimerling, “Silicon waveguide sidewall smoothing by wet chemical oxidation,” J. Lightwave Technol. 23(8), 2455–2461 (2005).
    [Crossref]
  12. J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express 17(6), 4752–4757 (2009).
    [Crossref] [PubMed]
  13. M. P. Nezhad, O. Bondarenko, M. Khajavikhan, A. Simic, and Y. Fainman, “Etch-free low loss silicon waveguides using hydrogen silsesquioxane oxidation masks,” Opt. Express 19(20), 18827–18832 (2011).
    [Crossref] [PubMed]
  14. J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express 19(24), 24090–24101 (2011).
    [Crossref] [PubMed]
  15. G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
    [Crossref] [PubMed]
  16. A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

2011 (4)

2010 (1)

2009 (4)

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro 29(4), 74–85 (2009).
[Crossref]

J. Cardenas, C. B. Poitras, J. T. Robinson, K. Preston, L. Chen, and M. Lipson, “Low loss etchless silicon photonic waveguides,” Opt. Express 17(6), 4752–4757 (2009).
[Crossref] [PubMed]

2008 (1)

2007 (1)

2005 (1)

2004 (1)

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett. 16(7), 1661–1663 (2004).
[Crossref]

1996 (1)

U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett. 8(5), 647–648 (1996).
[Crossref]

Arndt, F.

U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett. 8(5), 647–648 (1996).
[Crossref]

Asanovic, K.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Asghari, M.

Baets, R.

Barton, J. S.

Batten, C.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Bauters, J. F.

Bergman, K.

M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro 29(4), 74–85 (2009).
[Crossref]

Blumenthal, D. J.

Bogaerts, W.

Bondarenko, O.

Bowers, J. E.

Bruinink, C. M.

Cardenas, J.

Carloni, L. P.

M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro 29(4), 74–85 (2009).
[Crossref]

Cassan, E.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett. 16(7), 1661–1663 (2004).
[Crossref]

Chen, L.

Cohen, D.

Cunningham, J. E.

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[Crossref] [PubMed]

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express 16(19), 15052–15058 (2008).
[Crossref] [PubMed]

Dong, P.

Dumon, P.

Fainman, Y.

Feng, D.

Feng, N.-N.

Fischer, U.

U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett. 8(5), 647–648 (1996).
[Crossref]

Fong, J.

Grillot, F.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett. 16(7), 1661–1663 (2004).
[Crossref]

Heck, M. J. R.

Heideman, R. G.

Ho, R.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

Holzwarth, C. W.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Hoyt, J. L.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

John, D. D.

Joshi, A.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Kartner, F. X.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Khajavikhan, M.

Khilo, A.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Kimerling, L. C.

Koka, P.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

Krishnamoorthy, A. V.

Kropp, J.-R.

U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett. 8(5), 647–648 (1996).
[Crossref]

Kung, C. C.

Kung, C.-C.

Laval, S.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett. 16(7), 1661–1663 (2004).
[Crossref]

Lee, B. G.

M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro 29(4), 74–85 (2009).
[Crossref]

Lei, H.

Leinse, A.

Lexau, J.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

Li, G.

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[Crossref] [PubMed]

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

Li, H.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Liang, H.

Liao, S.

Lipson, M.

Luff, J.

Luo, Y.

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[Crossref] [PubMed]

Mekis, A.

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

Moss, B.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Nezhad, M. P.

Orcutt, J.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Pascal, D.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett. 16(7), 1661–1663 (2004).
[Crossref]

Petermann, K.

U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett. 8(5), 647–648 (1996).
[Crossref]

Petracca, M.

M. Petracca, B. G. Lee, K. Bergman, and L. P. Carloni, “Photonic NoCs: System-level design exploration,” IEEE Micro 29(4), 74–85 (2009).
[Crossref]

Pinguet, T.

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

Poitras, C. B.

Popovic, M. A.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Preston, K.

Qian, W.

Raj, K.

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[Crossref] [PubMed]

Ram, R. J.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Robinson, J. T.

Schwetman, H.

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

Shafiiha, R.

Shubin, I.

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[Crossref] [PubMed]

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express 16(19), 15052–15058 (2008).
[Crossref] [PubMed]

Simic, A.

Simons, J.

Smith, H. I.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Sparacin, D. K.

Spector, S. J.

Stojanovic, V.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building many-core processor-to-DRAM networks with monolithic CMOS silicon photonics,” IEEE Micro 29(4), 8–21 (2009).
[Crossref]

Sze, T.

Thacker, H.

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[Crossref] [PubMed]

Thourhout, D. V.

Vivien, L.

F. Grillot, L. Vivien, S. Laval, D. Pascal, and E. Cassan, “Size influence on the propagation loss induced by sidewall roughness in ultrasmall SOI waveguides,” IEEE Photon. Technol. Lett. 16(7), 1661–1663 (2004).
[Crossref]

Yao, J.

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[Crossref] [PubMed]

Zheng, D.

Zheng, X.

G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express 19(21), 20435–20443 (2011).
[Crossref] [PubMed]

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

X. Zheng, J. E. Cunningham, I. Shubin, J. Simons, M. Asghari, D. Feng, H. Lei, D. Zheng, H. Liang, C. C. Kung, J. Luff, T. Sze, D. Cohen, and A. V. Krishnamoorthy, “Optical proximity communication using reflective mirrors,” Opt. Express 16(19), 15052–15058 (2008).
[Crossref] [PubMed]

Zinke, T.

U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett. 8(5), 647–648 (1996).
[Crossref]

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[Crossref]

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[Crossref]

IEEE Photon. J. (1)

A. V. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photon. J. 3, 567–579 (2011).

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[Crossref]

U. Fischer, T. Zinke, J.-R. Kropp, F. Arndt, and K. Petermann, “0.1 dB/cm waveguide losses in single-mode SOI rib waveguides,” IEEE Photon. Technol. Lett. 8(5), 647–648 (1996).
[Crossref]

J. Lightwave Technol. (1)

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Proc. IEEE (1)

A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE 97(7), 1337–1361 (2009).
[Crossref]

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D. Vantrease, R. Schreiber, M. Monchiero, M. McLaren, N. P. Jouppi, M. Fiorentino, A. Davis, N. Binkert, R. G. Beausoleil, and J. H. Ahn, “Corona: System implications of emerging nanophotonic technology,” Proc. 35th Annu. ISCA 2008, 153–164.

J. Yao, X. Zheng, G. Li, I. Shubin, H. Thacker, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “Grating-coupler based low-loss optical interlayer coupling,” Group IV Photonics 2011, 383–385.

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Figures (3)

Fig. 1
Fig. 1

(a) Fundamental TE mode of the 3μm multimode waveguide. (b) Normalized TE mode field intensity at waveguide sidewall vs. waveguide width. (c) Crosstalk vs. center-to-center spacing between two parallel 3μm-wide waveguides after 10cm propagation.

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Fig. 2
Fig. 2

Waveguide loss test structure. Waveguides are green colored.

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Fig. 3
Fig. 3

(a) Measured loss spectrum of the three waveguide test structures with different multimode waveguide lengths. Grating coupler losses have been calibrated out. (b) Multi-reticle multi-wafer test data for single-mode and multimode waveguides on different wafers. The loss is averaged value over the wavelength. (c) Histogram of 68-reticle test data of multimode waveguide loss on two passive-split wafers, showing mean value of 0.026dB/cm and standard deviation of 0.0056dB/cm.

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