Abstract

Plasmonic or metamaterial nanostructures are usually fabricated on rigid substrate i.e. glass, silicon. Optical functionality of such kinds of nanostructures is limited by the planar surface and thus sensitive to the incident angle of light. In this work, we demonstrated that a tri-layer flexible metamaterials working at near infrared (NIR) regime can be fabricated on transparent PET substrate using flip chip transfer (FCT) technique. FCT technique is solution-free and can also be applied to fabricate other functional nanostructures device on flexible substrate. We demonstrated NIR metamaterial device can be transformed into various shapes by bending the PET substrate.

© 2011 OSA

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2011 (4)

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

Z. C. Chen, N. R. Han, Z. Y. Pan, Y. D. Gong, T. C. Chong, and M. H. Hong, “Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates,” Opt. Express 1(2), 151–157 (2011).
[CrossRef]

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

S. Xiao and N. A. Mortensen, “Surface-plasmon-polariton-induced suppressed transmission through ultrathin metal disk arrays,” Opt. Lett. 36(1), 37–39 (2011).
[CrossRef] [PubMed]

2010 (8)

N. Liu, M. Mesch, T. Weiss, M. Hentschel, and H. Giessen, “Infrared perfect absorber and its application as plasmonic sensor,” Nano Lett. 10(7), 2342–2348 (2010).
[CrossRef] [PubMed]

H. Gao, W. Zhou, and T. W. Odom, “Plasmonic crystals: a platform to catalog resonances from ultraviolet to near-infrared wavelengths in a plasmonic library,” Adv. Funct. Mater. 20, 523–529 (2010).

A. D. Falco, M. Ploschner, and T. F. Krauss, “Flexible metamaterials at visible wavelengths,” New J. Phys. 12(11), 113006 (2010).
[CrossRef]

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

I. M. Pryce, K. Aydin, Y. A. Kelaita, R. M. Briggs, and H. A. Atwater, “Highly strained compliant optical metamaterials with large frequency tunability,” Nano Lett. 10(10), 4222–4227 (2010).
[CrossRef] [PubMed]

K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
[CrossRef] [PubMed]

C. M. Soukoulis and M. Wegener, “Materials science. Optical metamaterials—more bulky and less lossy,” Science 330(6011), 1633–1634 (2010).
[CrossRef] [PubMed]

H. Chen, C. T. Chan, and P. Sheng, “Transformation optics and metamaterials,” Nat. Mater. 9(5), 387–396 (2010).
[CrossRef] [PubMed]

2009 (6)

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[CrossRef] [PubMed]

Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
[CrossRef] [PubMed]

F. Miyamaru, M. W. Taketa, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
[CrossRef]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

R. Melik, E. Unal, N. K. Perkgoz, C. Puttlitz, and H. V. Demir, “Flexible metamaterials for wireless strain sensing,” Appl. Phys. Lett. 95(18), 181105 (2009).
[CrossRef]

H. Liu, Y. M. Liu, T. Li, S. M. Wang, S. N. Zhu, and X. Zhang, “Coupled magnetic plasmons in metamaterials,” Phys. Status Solidi (B) 246(7), 1397–1406 (2009).
[CrossRef]

2008 (2)

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[CrossRef] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

2007 (4)

Z. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, “Far-field optical hyperlens magnifying sub-diffraction-limited objects,” Science 315(5819), 1686 (2007).
[CrossRef] [PubMed]

V. M. Shalaev, “Optical negative index metamaterial,” Nat. Photonics 1(1), 41–48 (2007).
[CrossRef]

C. M. Soukoulis, S. Linden, and M. Wegener, “Physics. Negative refractive index at optical wavelengths,” Science 315(5808), 47–49 (2007).
[CrossRef] [PubMed]

J. Henzie, M. H. Lee, and T. W. Odom, “Multiscale patterning of plasmonic metamaterials,” Nat. Nanotechnol. 2(9), 549–554 (2007).
[CrossRef] [PubMed]

2006 (1)

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[CrossRef] [PubMed]

2005 (2)

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

J. H. Lee, C. H. Kim, K. M. Ho, and K. Constant, “Two-polymer microtransfer molding for highly layered microstructures,” Adv. Mater. (Deerfield Beach Fla.) 17(20), 2481–2485 (2005).
[CrossRef]

1996 (1)

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

1995 (1)

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint of sub-25 nm vias and trenches in polymers,” Appl. Phys. Lett. 67(21), 3114–3116 (1995).
[CrossRef]

Amsden, J. J.

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

Arpin, K. A.

K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
[CrossRef] [PubMed]

Arrington, C. L.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

Atwater, H. A.

I. M. Pryce, K. Aydin, Y. A. Kelaita, R. M. Briggs, and H. A. Atwater, “Highly strained compliant optical metamaterials with large frequency tunability,” Nano Lett. 10(10), 4222–4227 (2010).
[CrossRef] [PubMed]

Averitt, R. D.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Aydin, K.

I. M. Pryce, K. Aydin, Y. A. Kelaita, R. M. Briggs, and H. A. Atwater, “Highly strained compliant optical metamaterials with large frequency tunability,” Nano Lett. 10(10), 4222–4227 (2010).
[CrossRef] [PubMed]

Baca, A. J.

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
[CrossRef] [PubMed]

Bartal, G.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[CrossRef] [PubMed]

Bingham, C. M.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Bogart, G. R.

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

Braun, P.

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

Braun, P. V.

K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
[CrossRef] [PubMed]

Brenckle, M. A.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

Brener, I.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

Briggs, R. M.

I. M. Pryce, K. Aydin, Y. A. Kelaita, R. M. Briggs, and H. A. Atwater, “Highly strained compliant optical metamaterials with large frequency tunability,” Nano Lett. 10(10), 4222–4227 (2010).
[CrossRef] [PubMed]

Cain, T.

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

Carlson, A.

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

Chan, C. T.

H. Chen, C. T. Chan, and P. Sheng, “Transformation optics and metamaterials,” Nat. Mater. 9(5), 387–396 (2010).
[CrossRef] [PubMed]

Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
[CrossRef] [PubMed]

Chanda, D.

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

Chen, H.

H. Chen, C. T. Chan, and P. Sheng, “Transformation optics and metamaterials,” Nat. Mater. 9(5), 387–396 (2010).
[CrossRef] [PubMed]

Chen, H. Y.

Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
[CrossRef] [PubMed]

Chen, Z. C.

Z. C. Chen, N. R. Han, Z. Y. Pan, Y. D. Gong, T. C. Chong, and M. H. Hong, “Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates,” Opt. Express 1(2), 151–157 (2011).
[CrossRef]

Chieffo, L. R.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

Chong, T. C.

Z. C. Chen, N. R. Han, Z. Y. Pan, Y. D. Gong, T. C. Chong, and M. H. Hong, “Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates,” Opt. Express 1(2), 151–157 (2011).
[CrossRef]

Chou, S. Y.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint of sub-25 nm vias and trenches in polymers,” Appl. Phys. Lett. 67(21), 3114–3116 (1995).
[CrossRef]

Constant, K.

J. H. Lee, C. H. Kim, K. M. Ho, and K. Constant, “Two-polymer microtransfer molding for highly layered microstructures,” Adv. Mater. (Deerfield Beach Fla.) 17(20), 2481–2485 (2005).
[CrossRef]

Cummer, S. A.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[CrossRef] [PubMed]

Demir, H. V.

R. Melik, E. Unal, N. K. Perkgoz, C. Puttlitz, and H. V. Demir, “Flexible metamaterials for wireless strain sensing,” Appl. Phys. Lett. 95(18), 181105 (2009).
[CrossRef]

Enkrich, C.

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
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Falco, A. D.

A. D. Falco, M. Ploschner, and T. F. Krauss, “Flexible metamaterials at visible wavelengths,” New J. Phys. 12(11), 113006 (2010).
[CrossRef]

Fan, K.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
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H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Gao, H.

H. Gao, W. Zhou, and T. W. Odom, “Plasmonic crystals: a platform to catalog resonances from ultraviolet to near-infrared wavelengths in a plasmonic library,” Adv. Funct. Mater. 20, 523–529 (2010).

Gerthsen, D.

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

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N. Liu, M. Mesch, T. Weiss, M. Hentschel, and H. Giessen, “Infrared perfect absorber and its application as plasmonic sensor,” Nano Lett. 10(7), 2342–2348 (2010).
[CrossRef] [PubMed]

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Z. C. Chen, N. R. Han, Z. Y. Pan, Y. D. Gong, T. C. Chong, and M. H. Hong, “Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates,” Opt. Express 1(2), 151–157 (2011).
[CrossRef]

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D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
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Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
[CrossRef] [PubMed]

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Z. C. Chen, N. R. Han, Z. Y. Pan, Y. D. Gong, T. C. Chong, and M. H. Hong, “Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates,” Opt. Express 1(2), 151–157 (2011).
[CrossRef]

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N. Liu, M. Mesch, T. Weiss, M. Hentschel, and H. Giessen, “Infrared perfect absorber and its application as plasmonic sensor,” Nano Lett. 10(7), 2342–2348 (2010).
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J. Henzie, M. H. Lee, and T. W. Odom, “Multiscale patterning of plasmonic metamaterials,” Nat. Nanotechnol. 2(9), 549–554 (2007).
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J. H. Lee, C. H. Kim, K. M. Ho, and K. Constant, “Two-polymer microtransfer molding for highly layered microstructures,” Adv. Mater. (Deerfield Beach Fla.) 17(20), 2481–2485 (2005).
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Hong, M. H.

Z. C. Chen, N. R. Han, Z. Y. Pan, Y. D. Gong, T. C. Chong, and M. H. Hong, “Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates,” Opt. Express 1(2), 151–157 (2011).
[CrossRef]

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K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
[CrossRef] [PubMed]

Justice, B. J.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[CrossRef] [PubMed]

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H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
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Kelaita, Y. A.

I. M. Pryce, K. Aydin, Y. A. Kelaita, R. M. Briggs, and H. A. Atwater, “Highly strained compliant optical metamaterials with large frequency tunability,” Nano Lett. 10(10), 4222–4227 (2010).
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J. H. Lee, C. H. Kim, K. M. Ho, and K. Constant, “Two-polymer microtransfer molding for highly layered microstructures,” Adv. Mater. (Deerfield Beach Fla.) 17(20), 2481–2485 (2005).
[CrossRef]

Koschny, T.

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

Krauss, P. R.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint of sub-25 nm vias and trenches in polymers,” Appl. Phys. Lett. 67(21), 3114–3116 (1995).
[CrossRef]

Krauss, T. F.

A. D. Falco, M. Ploschner, and T. F. Krauss, “Flexible metamaterials at visible wavelengths,” New J. Phys. 12(11), 113006 (2010).
[CrossRef]

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Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
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H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[CrossRef] [PubMed]

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Z. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, “Far-field optical hyperlens magnifying sub-diffraction-limited objects,” Science 315(5819), 1686 (2007).
[CrossRef] [PubMed]

Lee, J. H.

J. H. Lee, C. H. Kim, K. M. Ho, and K. Constant, “Two-polymer microtransfer molding for highly layered microstructures,” Adv. Mater. (Deerfield Beach Fla.) 17(20), 2481–2485 (2005).
[CrossRef]

Lee, M. H.

J. Henzie, M. H. Lee, and T. W. Odom, “Multiscale patterning of plasmonic metamaterials,” Nat. Nanotechnol. 2(9), 549–554 (2007).
[CrossRef] [PubMed]

Lewis, J. A.

K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
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J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
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H. Liu, Y. M. Liu, T. Li, S. M. Wang, S. N. Zhu, and X. Zhang, “Coupled magnetic plasmons in metamaterials,” Phys. Status Solidi (B) 246(7), 1397–1406 (2009).
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C. M. Soukoulis, S. Linden, and M. Wegener, “Physics. Negative refractive index at optical wavelengths,” Science 315(5808), 47–49 (2007).
[CrossRef] [PubMed]

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

Liu, H.

H. Liu, Y. M. Liu, T. Li, S. M. Wang, S. N. Zhu, and X. Zhang, “Coupled magnetic plasmons in metamaterials,” Phys. Status Solidi (B) 246(7), 1397–1406 (2009).
[CrossRef]

Liu, M.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

Liu, N.

N. Liu, M. Mesch, T. Weiss, M. Hentschel, and H. Giessen, “Infrared perfect absorber and its application as plasmonic sensor,” Nano Lett. 10(7), 2342–2348 (2010).
[CrossRef] [PubMed]

Liu, Y. M.

H. Liu, Y. M. Liu, T. Li, S. M. Wang, S. N. Zhu, and X. Zhang, “Coupled magnetic plasmons in metamaterials,” Phys. Status Solidi (B) 246(7), 1397–1406 (2009).
[CrossRef]

Liu, Z.

Z. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, “Far-field optical hyperlens magnifying sub-diffraction-limited objects,” Science 315(5819), 1686 (2007).
[CrossRef] [PubMed]

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R. Melik, E. Unal, N. K. Perkgoz, C. Puttlitz, and H. V. Demir, “Flexible metamaterials for wireless strain sensing,” Appl. Phys. Lett. 95(18), 181105 (2009).
[CrossRef]

Mesch, M.

N. Liu, M. Mesch, T. Weiss, M. Hentschel, and H. Giessen, “Infrared perfect absorber and its application as plasmonic sensor,” Nano Lett. 10(7), 2342–2348 (2010).
[CrossRef] [PubMed]

Mihi, A.

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
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F. Miyamaru, M. W. Taketa, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
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N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[CrossRef] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[CrossRef] [PubMed]

Mortensen, N. A.

Ng, J.

Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
[CrossRef] [PubMed]

Odom, T. W.

H. Gao, W. Zhou, and T. W. Odom, “Plasmonic crystals: a platform to catalog resonances from ultraviolet to near-infrared wavelengths in a plasmonic library,” Adv. Funct. Mater. 20, 523–529 (2010).

J. Henzie, M. H. Lee, and T. W. Odom, “Multiscale patterning of plasmonic metamaterials,” Nat. Nanotechnol. 2(9), 549–554 (2007).
[CrossRef] [PubMed]

Ohara, J. F.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

Omenetto, F. G.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

Padilla, W. J.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[CrossRef] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Pan, Z. Y.

Z. C. Chen, N. R. Han, Z. Y. Pan, Y. D. Gong, T. C. Chong, and M. H. Hong, “Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates,” Opt. Express 1(2), 151–157 (2011).
[CrossRef]

Pendry, J. B.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[CrossRef] [PubMed]

Peralta, X. G.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

Pérez-Willard, F.

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

Perkgoz, N. K.

R. Melik, E. Unal, N. K. Perkgoz, C. Puttlitz, and H. V. Demir, “Flexible metamaterials for wireless strain sensing,” Appl. Phys. Lett. 95(18), 181105 (2009).
[CrossRef]

Pilon, D.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Ploschner, M.

A. D. Falco, M. Ploschner, and T. F. Krauss, “Flexible metamaterials at visible wavelengths,” New J. Phys. 12(11), 113006 (2010).
[CrossRef]

Pryce, I. M.

I. M. Pryce, K. Aydin, Y. A. Kelaita, R. M. Briggs, and H. A. Atwater, “Highly strained compliant optical metamaterials with large frequency tunability,” Nano Lett. 10(10), 4222–4227 (2010).
[CrossRef] [PubMed]

Puttlitz, C.

R. Melik, E. Unal, N. K. Perkgoz, C. Puttlitz, and H. V. Demir, “Flexible metamaterials for wireless strain sensing,” Appl. Phys. Lett. 95(18), 181105 (2009).
[CrossRef]

Renstrom, P. J.

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
[CrossRef]

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint of sub-25 nm vias and trenches in polymers,” Appl. Phys. Lett. 67(21), 3114–3116 (1995).
[CrossRef]

Rogers, J. A.

D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
[CrossRef] [PubMed]

Sajuyigbe, S.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[CrossRef] [PubMed]

Schurig, D.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
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V. M. Shalaev, “Optical negative index metamaterial,” Nat. Photonics 1(1), 41–48 (2007).
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H. Chen, C. T. Chan, and P. Sheng, “Transformation optics and metamaterials,” Nat. Mater. 9(5), 387–396 (2010).
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D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
[CrossRef] [PubMed]

Shrekenhamer, D.

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Siebert, S. M.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

Smirnova, E.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

Smith, D. R.

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[CrossRef] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[CrossRef] [PubMed]

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C. M. Soukoulis and M. Wegener, “Materials science. Optical metamaterials—more bulky and less lossy,” Science 330(6011), 1633–1634 (2010).
[CrossRef] [PubMed]

C. M. Soukoulis, S. Linden, and M. Wegener, “Physics. Negative refractive index at optical wavelengths,” Science 315(5808), 47–49 (2007).
[CrossRef] [PubMed]

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

Starr, A. F.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
[CrossRef] [PubMed]

Strikwerda, A.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

Strikwerda, A. C.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Sun, C.

Z. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, “Far-field optical hyperlens magnifying sub-diffraction-limited objects,” Science 315(5819), 1686 (2007).
[CrossRef] [PubMed]

Taima, K.

F. Miyamaru, M. W. Taketa, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
[CrossRef]

Taketa, M. W.

F. Miyamaru, M. W. Taketa, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
[CrossRef]

Tao, H.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Taylor, A. J.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

Unal, E.

R. Melik, E. Unal, N. K. Perkgoz, C. Puttlitz, and H. V. Demir, “Flexible metamaterials for wireless strain sensing,” Appl. Phys. Lett. 95(18), 181105 (2009).
[CrossRef]

Valentine, J.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[CrossRef] [PubMed]

Wang, S. M.

H. Liu, Y. M. Liu, T. Li, S. M. Wang, S. N. Zhu, and X. Zhang, “Coupled magnetic plasmons in metamaterials,” Phys. Status Solidi (B) 246(7), 1397–1406 (2009).
[CrossRef]

Wanke, M. C.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

Wegener, M.

C. M. Soukoulis and M. Wegener, “Materials science. Optical metamaterials—more bulky and less lossy,” Science 330(6011), 1633–1634 (2010).
[CrossRef] [PubMed]

C. M. Soukoulis, S. Linden, and M. Wegener, “Physics. Negative refractive index at optical wavelengths,” Science 315(5808), 47–49 (2007).
[CrossRef] [PubMed]

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

Weiss, T.

N. Liu, M. Mesch, T. Weiss, M. Hentschel, and H. Giessen, “Infrared perfect absorber and its application as plasmonic sensor,” Nano Lett. 10(7), 2342–2348 (2010).
[CrossRef] [PubMed]

Williams, J. D.

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
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Xiao, J. J.

Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
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Xiao, S.

Xiong, Y.

Z. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, “Far-field optical hyperlens magnifying sub-diffraction-limited objects,” Science 315(5819), 1686 (2007).
[CrossRef] [PubMed]

Zentgraf, T.

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[CrossRef] [PubMed]

Zhang, X.

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

H. Liu, Y. M. Liu, T. Li, S. M. Wang, S. N. Zhu, and X. Zhang, “Coupled magnetic plasmons in metamaterials,” Phys. Status Solidi (B) 246(7), 1397–1406 (2009).
[CrossRef]

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[CrossRef] [PubMed]

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Z. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, “Far-field optical hyperlens magnifying sub-diffraction-limited objects,” Science 315(5819), 1686 (2007).
[CrossRef] [PubMed]

Zhang, Z. Q.

Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
[CrossRef] [PubMed]

Zhou, J. F.

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

Zhou, W.

H. Gao, W. Zhou, and T. W. Odom, “Plasmonic crystals: a platform to catalog resonances from ultraviolet to near-infrared wavelengths in a plasmonic library,” Adv. Funct. Mater. 20, 523–529 (2010).

Zhu, S. N.

H. Liu, Y. M. Liu, T. Li, S. M. Wang, S. N. Zhu, and X. Zhang, “Coupled magnetic plasmons in metamaterials,” Phys. Status Solidi (B) 246(7), 1397–1406 (2009).
[CrossRef]

Adv. Funct. Mater. (1)

H. Gao, W. Zhou, and T. W. Odom, “Plasmonic crystals: a platform to catalog resonances from ultraviolet to near-infrared wavelengths in a plasmonic library,” Adv. Funct. Mater. 20, 523–529 (2010).

Adv. Mater. (Deerfield Beach Fla.) (5)

H. Tao, J. J. Amsden, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterial silk composites at terahertz frequencies,” Adv. Mater. (Deerfield Beach Fla.) 22(32), 3527–3531 (2010).
[CrossRef] [PubMed]

H. Tao, L. R. Chieffo, M. A. Brenckle, S. M. Siebert, M. Liu, A. C. Strikwerda, K. Fan, D. L. Kaplan, X. Zhang, R. D. Averitt, and F. G. Omenetto, “Metamaterials on paper as a sensing platform,” Adv. Mater. (Deerfield Beach Fla.) 23(28), 3197–3201 (2011).
[CrossRef] [PubMed]

J. H. Lee, C. H. Kim, K. M. Ho, and K. Constant, “Two-polymer microtransfer molding for highly layered microstructures,” Adv. Mater. (Deerfield Beach Fla.) 17(20), 2481–2485 (2005).
[CrossRef]

K. A. Arpin, A. Mihi, H. T. Johnson, A. J. Baca, J. A. Rogers, J. A. Lewis, and P. V. Braun, “Multidimensional architectures for functional optical devices,” Adv. Mater. (Deerfield Beach Fla.) 22(10), 1084–1101 (2010).
[CrossRef] [PubMed]

C. Enkrich, F. Pérez-Willard, D. Gerthsen, J. F. Zhou, T. Koschny, C. M. Soukoulis, M. Wegener, and S. Linden, “Focused ion beam nanofabrication of near-infrared magnetic metamaterials,” Adv. Mater. (Deerfield Beach Fla.) 17(21), 2547–2549 (2005).
[CrossRef]

Appl. Phys. Express (1)

F. Miyamaru, M. W. Taketa, and K. Taima, “Characterization of terahertz metamaterials fabricated on flexible plastic films: toward fabrication of bulk metamaterials in terahertz region,” Appl. Phys. Express 2, 042001 (2009).
[CrossRef]

Appl. Phys. Lett. (3)

X. G. Peralta, M. C. Wanke, C. L. Arrington, J. D. Williams, I. Brener, A. Strikwerda, R. D. Averitt, W. J. Padilla, E. Smirnova, A. J. Taylor, and J. F. Ohara, “Large-area metamaterials on thin membranes for multilayer and curved applications at terahertz and higher frequencies,” Appl. Phys. Lett. 94(16), 161113 (2009).
[CrossRef]

R. Melik, E. Unal, N. K. Perkgoz, C. Puttlitz, and H. V. Demir, “Flexible metamaterials for wireless strain sensing,” Appl. Phys. Lett. 95(18), 181105 (2009).
[CrossRef]

S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint of sub-25 nm vias and trenches in polymers,” Appl. Phys. Lett. 67(21), 3114–3116 (1995).
[CrossRef]

Nano Lett. (2)

N. Liu, M. Mesch, T. Weiss, M. Hentschel, and H. Giessen, “Infrared perfect absorber and its application as plasmonic sensor,” Nano Lett. 10(7), 2342–2348 (2010).
[CrossRef] [PubMed]

I. M. Pryce, K. Aydin, Y. A. Kelaita, R. M. Briggs, and H. A. Atwater, “Highly strained compliant optical metamaterials with large frequency tunability,” Nano Lett. 10(10), 4222–4227 (2010).
[CrossRef] [PubMed]

Nat. Mater. (2)

J. Valentine, J. Li, T. Zentgraf, G. Bartal, and X. Zhang, “An optical cloak made of dielectrics,” Nat. Mater. 8(7), 568–571 (2009).
[CrossRef] [PubMed]

H. Chen, C. T. Chan, and P. Sheng, “Transformation optics and metamaterials,” Nat. Mater. 9(5), 387–396 (2010).
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Nat. Nanotechnol. (2)

J. Henzie, M. H. Lee, and T. W. Odom, “Multiscale patterning of plasmonic metamaterials,” Nat. Nanotechnol. 2(9), 549–554 (2007).
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D. Chanda, K. Shigeta, S. Gupta, T. Cain, A. Carlson, A. Mihi, A. J. Baca, G. R. Bogart, P. Braun, and J. A. Rogers, “Large-area flexible 3D optical negative index metamaterial formed by nanotransfer printing,” Nat. Nanotechnol. 6(7), 402–407 (2011).
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Nat. Photonics (1)

V. M. Shalaev, “Optical negative index metamaterial,” Nat. Photonics 1(1), 41–48 (2007).
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New J. Phys. (1)

A. D. Falco, M. Ploschner, and T. F. Krauss, “Flexible metamaterials at visible wavelengths,” New J. Phys. 12(11), 113006 (2010).
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Opt. Express (1)

Z. C. Chen, N. R. Han, Z. Y. Pan, Y. D. Gong, T. C. Chong, and M. H. Hong, “Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates,” Opt. Express 1(2), 151–157 (2011).
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Opt. Lett. (1)

Phys. Rev. B (1)

H. Tao, C. M. Bingham, A. C. Strikwerda, D. Pilon, D. Shrekenhamer, N. I. Landy, K. Fan, X. Zhang, W. J. Padilla, and R. D. Averitt, “Highly flexible wide angle of incidence terahertz metamaterial absorber: design, fabrication, and characterization,” Phys. Rev. B 78(24), 241103 (2008).
[CrossRef]

Phys. Rev. Lett. (2)

Y. Lai, J. Ng, H. Y. Chen, D. Z. Han, J. J. Xiao, Z. Q. Zhang, and C. T. Chan, “Illusion optics: the optical transformation of an object into another object,” Phys. Rev. Lett. 102(25), 253902 (2009).
[CrossRef] [PubMed]

N. I. Landy, S. Sajuyigbe, J. J. Mock, D. R. Smith, and W. J. Padilla, “Perfect metamaterial absorber,” Phys. Rev. Lett. 100(20), 207402 (2008).
[CrossRef] [PubMed]

Phys. Status Solidi (B) (1)

H. Liu, Y. M. Liu, T. Li, S. M. Wang, S. N. Zhu, and X. Zhang, “Coupled magnetic plasmons in metamaterials,” Phys. Status Solidi (B) 246(7), 1397–1406 (2009).
[CrossRef]

Science (5)

Z. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, “Far-field optical hyperlens magnifying sub-diffraction-limited objects,” Science 315(5819), 1686 (2007).
[CrossRef] [PubMed]

C. M. Soukoulis, S. Linden, and M. Wegener, “Physics. Negative refractive index at optical wavelengths,” Science 315(5808), 47–49 (2007).
[CrossRef] [PubMed]

C. M. Soukoulis and M. Wegener, “Materials science. Optical metamaterials—more bulky and less lossy,” Science 330(6011), 1633–1634 (2010).
[CrossRef] [PubMed]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science 314(5801), 977–980 (2006).
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S. Y. Chou, P. R. Krauss, and P. J. Renstrom, “Imprint lithography with 25-nanometer resolution,” Science 272(5258), 85–87 (1996).
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Figures (6)

Fig. 1
Fig. 1

(a) to (e) are the EBL steps to fabricate the absorber metamaterials, period of the disc-array device is 600 nm, disc diameter: 365 nm; thickness of gold: 50 nm; thickness of Cr: 30 nm; (f) is the scanning electron microscope (SEM) image of the two dimensional gold disc-array absorber metamaterials.

Fig. 2
Fig. 2

(a) to (e) is schematic diagram of flip chip transfer method, the tri-layer absorber metamaterial with an area of 500 µm by 500 µm was transferred to PET flexible substrate.

Fig. 3
Fig. 3

(a) and (b) Flexible NIR absorber metamaterials on transparent PET substrate. Each separated pattern has an area size of 500 µm by 500 µm.

Fig. 4
Fig. 4

Relative reflection spectrum of the absorber metamaterials on quartz substrate (gold disc/ITO/gold/Cr/quartz), NIR light was normally focused on the device and the reflection signal was collected by the 15X objective lens; blue line is experimental result and red line is simulated reflection spectrum using RCWA method.

Fig. 5
Fig. 5

(a) Angle resolved back reflection spectra measured on flexible metamaterial (with curved surface). The light is incident from PET side and the back reflection was collected by NIR detector; (b) Transmission spectra measured on the flexible absorber metamaterial, light was incident from the PMMA side and collected from the PET side. (c) and (d) are simulated reflection and transmission spectra on flexible absorber metamaterial using RCWA method.

Fig. 6
Fig. 6

Experiment diagram of measuring the reflection spectrum of metamaterial device under different bending condition. The flexible substrate is bent by adjusting the distance of A and B, and the incident angle 90° – φ (varying from 0 to 45 degrees) is defined by the slope of PET substrate and direction of incident light.

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