Abstract

We demonstrate a micro-resonator based on a channel waveguide terminated with metallic mirrors side coupled to a bus waveguide. Transmission through such a resonant structure implemented in a silicon-on-insulator platform is investigated theoretically and demonstrated experimentally. The resonator is 13.4 μm long, exhibits an unloaded Q-factor of ∼2100, and a free spectral range of 21 nm around the wavelength of 1.55 μm.

© 2011 Optical Society of America

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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
  4. M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
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  33. J. M. Gérard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, "Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity," Phys. Rev. Lett. 81(5), 1110-1113 (1998).
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  35. K. Preston and M. Lipson, "Slot waveguides with polycrystalline silicon for electrical injection," Opt. Express 17(3), 1527-1534 (2009).
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2010

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

S. Zamek, A. Mizrahi, L. Feng, A. Simic, and Y. Fainman, "On-chip waveguide resonator with metallic mirrors," Opt. Lett. 35(4), 598-600 (2010).
[CrossRef] [PubMed]

Y.-F. Xiao, C.-L. Zou, B.-B. Li, Y. Li, C.-H. Dong, Z.-F. Han, and Q. Gong, "High-Q Exterior Whispering-Gallery Modes in a Metal-Coated Microresonator," Phys. Rev. Lett. 105(15), 153902 (2010).
[CrossRef]

2009

K. Preston and M. Lipson, "Slot waveguides with polycrystalline silicon for electrical injection," Opt. Express 17(3), 1527-1534 (2009).
[CrossRef] [PubMed]

2008

T. Baba, "Slow light in photonic crystals," Nat. Photonics 2(8), 465-473 (2008).
[CrossRef]

A. Mizrahi, V. Lomakin, B. A. Slutsky, M. P. Nezhad, L. Feng, and Y. Fainman, "Low threshold gain metal coated laser nanoresonators," Opt. Lett. 33(11), 1261-1263 (2008).
[CrossRef] [PubMed]

2007

A. M. Armani, R. P. Kulkarni, S. E. Fraser, R. C. Flagan, and K. J. Vahala, "Label-free, single-molecule detection with optical microcavities," Science 317(5839), 783-787 (2007).
[CrossRef] [PubMed]

S. F. Preble, Q. Xu, and M. Lipson, "Changing the colour of light in a silicon resonator," Nat. Photonics 1(5), 293-296 (2007).
[CrossRef]

H.-C. Kim, K. Ikeda, and Y. Fainman, "Tunable transmission resonant filter and modulator with vertical gratings," J. Lightwave Technol. 25(5), 1147-1151 (2007).
[CrossRef]

H.-C. Kim, K. Ikeda, and Y. Fainman, "Resonant waveguide device with vertical gratings," Opt. Lett. 32(5), 539-541 (2007).
[CrossRef] [PubMed]

2006

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Q. Xu, and M. Lipson, "Carrier-induced optical bistability in silicon ring resonators," Opt. Lett. 31(3), 341-343 (2006).
[CrossRef] [PubMed]

2005

P. Koonath, T. Indukuri, and B. Jalali, "Add-drop filters utilizing vertically coupled microdisk resonators in silicon," Appl. Phys. Lett. 86(9), 091102 (2005).
[CrossRef]

2004

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Y. Shibata, T. Suzuki, and H. Tsuda, "Design and Evaluation of an N:N Optical Coupler Using an Integrated Waveguide Mirror," Opt. Rev. 11(3), 182-187 (2004).
[CrossRef]

M. Hammer, D. Yudistira, and R. Stoffer, "Modeling of grating assisted standing wave microresonators for filter applications in integrated optics," Opt. Quantum Electron. 36(1-3), 25-42 (2004).
[CrossRef]

2003

K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, "Experimental demonstration of a high quality factor photonic crystal microcavity," Appl. Phys. Lett. 83(10), 1915 (2003).
[CrossRef]

2002

M. Lohmeyer, "Mode expansion modeling of rectangular integrated optical microresonators," Opt. Quantum Electron. 34(5-6), 541-557 (2002).
[CrossRef]

2001

S. Wolff, A. R. Giehl, M. Renno, and H. Fouckhardt, "Metallic waveguide mirrors in polymer film waveguides," Appl. Phys. B 73(5-6), 623-627 (2001).
[CrossRef]

2000

Y. Xu, Y. Li, R. K. Lee, and A. Yariv, "Scattering-theory analysis of waveguide-resonator coupling," Phys. Rev. E Stat. Phys. Plasmas Fluids Relat. Interdiscip. Topics 62(5 5 Pt B), 7389-7404 (2000).
[CrossRef] [PubMed]

1999

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filters," IEEE J. Quantum Electron. 35(9), 1322-1331 (1999).
[CrossRef]

1998

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

J. M. Gérard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, "Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity," Phys. Rev. Lett. 81(5), 1110-1113 (1998).
[CrossRef]

1992

H. A. Haus, and Y. Lai, "Theory of Cascaded Quarter Wave Shifted Distributed Feedback Resonators," IEEE J. Quantum Electron. 28(1), 205-213 (1992).
[CrossRef]

1987

R. Kazarinov, C. Henry, and N. Olsson, "Narrow Band Resonant Optical Reflectors and Resonant Optical Transformers for Laser Stabilization and Wavelength Division Multiplexing," IEEE J. Quantum Electron. 23(9), 1419-1425 (1987).
[CrossRef]

Amans, D.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Armani, A. M.

A. M. Armani, R. P. Kulkarni, S. E. Fraser, R. C. Flagan, and K. J. Vahala, "Label-free, single-molecule detection with optical microcavities," Science 317(5839), 783-787 (2007).
[CrossRef] [PubMed]

Baba, T.

T. Baba, "Slow light in photonic crystals," Nat. Photonics 2(8), 465-473 (2008).
[CrossRef]

Baets, R.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Barclay, P. E.

K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, "Experimental demonstration of a high quality factor photonic crystal microcavity," Appl. Phys. Lett. 83(10), 1915 (2003).
[CrossRef]

Beckx, S.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Benech, P.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Bienstman, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Bogaerts, W.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Bondarenko, O.

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

Chen, J.

K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, "Experimental demonstration of a high quality factor photonic crystal microcavity," Appl. Phys. Lett. 83(10), 1915 (2003).
[CrossRef]

Cho, A. Y.

K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, "Experimental demonstration of a high quality factor photonic crystal microcavity," Appl. Phys. Lett. 83(10), 1915 (2003).
[CrossRef]

Chu, S. T.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

Costard, E.

J. M. Gérard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, "Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity," Phys. Rev. Lett. 81(5), 1110-1113 (1998).
[CrossRef]

Dong, C.-H.

Y.-F. Xiao, C.-L. Zou, B.-B. Li, Y. Li, C.-H. Dong, Z.-F. Han, and Q. Gong, "High-Q Exterior Whispering-Gallery Modes in a Metal-Coated Microresonator," Phys. Rev. Lett. 105(15), 153902 (2010).
[CrossRef]

Dumon, P.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Fainman, Y.

S. Zamek, A. Mizrahi, L. Feng, A. Simic, and Y. Fainman, "On-chip waveguide resonator with metallic mirrors," Opt. Lett. 35(4), 598-600 (2010).
[CrossRef] [PubMed]

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

A. Mizrahi, V. Lomakin, B. A. Slutsky, M. P. Nezhad, L. Feng, and Y. Fainman, "Low threshold gain metal coated laser nanoresonators," Opt. Lett. 33(11), 1261-1263 (2008).
[CrossRef] [PubMed]

H.-C. Kim, K. Ikeda, and Y. Fainman, "Resonant waveguide device with vertical gratings," Opt. Lett. 32(5), 539-541 (2007).
[CrossRef] [PubMed]

H.-C. Kim, K. Ikeda, and Y. Fainman, "Tunable transmission resonant filter and modulator with vertical gratings," J. Lightwave Technol. 25(5), 1147-1151 (2007).
[CrossRef]

Fan, S.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filters," IEEE J. Quantum Electron. 35(9), 1322-1331 (1999).
[CrossRef]

Fédéli, J. M.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Feng, L.

S. Zamek, A. Mizrahi, L. Feng, A. Simic, and Y. Fainman, "On-chip waveguide resonator with metallic mirrors," Opt. Lett. 35(4), 598-600 (2010).
[CrossRef] [PubMed]

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

A. Mizrahi, V. Lomakin, B. A. Slutsky, M. P. Nezhad, L. Feng, and Y. Fainman, "Low threshold gain metal coated laser nanoresonators," Opt. Lett. 33(11), 1261-1263 (2008).
[CrossRef] [PubMed]

Flagan, R. C.

A. M. Armani, R. P. Kulkarni, S. E. Fraser, R. C. Flagan, and K. J. Vahala, "Label-free, single-molecule detection with optical microcavities," Science 317(5839), 783-787 (2007).
[CrossRef] [PubMed]

Foresi, J. S.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

Fouckhardt, H.

S. Wolff, A. R. Giehl, M. Renno, and H. Fouckhardt, "Metallic waveguide mirrors in polymer film waveguides," Appl. Phys. B 73(5-6), 623-627 (2001).
[CrossRef]

Fraser, S. E.

A. M. Armani, R. P. Kulkarni, S. E. Fraser, R. C. Flagan, and K. J. Vahala, "Label-free, single-molecule detection with optical microcavities," Science 317(5839), 783-787 (2007).
[CrossRef] [PubMed]

Gayral, B.

J. M. Gérard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, "Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity," Phys. Rev. Lett. 81(5), 1110-1113 (1998).
[CrossRef]

Gérard, J. M.

J. M. Gérard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, "Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity," Phys. Rev. Lett. 81(5), 1110-1113 (1998).
[CrossRef]

Giehl, A. R.

S. Wolff, A. R. Giehl, M. Renno, and H. Fouckhardt, "Metallic waveguide mirrors in polymer film waveguides," Appl. Phys. B 73(5-6), 623-627 (2001).
[CrossRef]

Gmachl, C.

K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, "Experimental demonstration of a high quality factor photonic crystal microcavity," Appl. Phys. Lett. 83(10), 1915 (2003).
[CrossRef]

Gong, Q.

Y.-F. Xiao, C.-L. Zou, B.-B. Li, Y. Li, C.-H. Dong, Z.-F. Han, and Q. Gong, "High-Q Exterior Whispering-Gallery Modes in a Metal-Coated Microresonator," Phys. Rev. Lett. 105(15), 153902 (2010).
[CrossRef]

Greene, W.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

Hadji, E.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Hammer, M.

M. Hammer, D. Yudistira, and R. Stoffer, "Modeling of grating assisted standing wave microresonators for filter applications in integrated optics," Opt. Quantum Electron. 36(1-3), 25-42 (2004).
[CrossRef]

Han, Z.-F.

Y.-F. Xiao, C.-L. Zou, B.-B. Li, Y. Li, C.-H. Dong, Z.-F. Han, and Q. Gong, "High-Q Exterior Whispering-Gallery Modes in a Metal-Coated Microresonator," Phys. Rev. Lett. 105(15), 153902 (2010).
[CrossRef]

Haus, H. A.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filters," IEEE J. Quantum Electron. 35(9), 1322-1331 (1999).
[CrossRef]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

H. A. Haus, and Y. Lai, "Theory of Cascaded Quarter Wave Shifted Distributed Feedback Resonators," IEEE J. Quantum Electron. 28(1), 205-213 (1992).
[CrossRef]

Henry, C.

R. Kazarinov, C. Henry, and N. Olsson, "Narrow Band Resonant Optical Reflectors and Resonant Optical Transformers for Laser Stabilization and Wavelength Division Multiplexing," IEEE J. Quantum Electron. 23(9), 1419-1425 (1987).
[CrossRef]

Ikeda, K.

H.-C. Kim, K. Ikeda, and Y. Fainman, "Resonant waveguide device with vertical gratings," Opt. Lett. 32(5), 539-541 (2007).
[CrossRef] [PubMed]

H.-C. Kim, K. Ikeda, and Y. Fainman, "Tunable transmission resonant filter and modulator with vertical gratings," J. Lightwave Technol. 25(5), 1147-1151 (2007).
[CrossRef]

Indukuri, T.

P. Koonath, T. Indukuri, and B. Jalali, "Add-drop filters utilizing vertically coupled microdisk resonators in silicon," Appl. Phys. Lett. 86(9), 091102 (2005).
[CrossRef]

Ippen, E. P.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

Jalali, B.

P. Koonath, T. Indukuri, and B. Jalali, "Add-drop filters utilizing vertically coupled microdisk resonators in silicon," Appl. Phys. Lett. 86(9), 091102 (2005).
[CrossRef]

Joannopoulos, J. D.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filters," IEEE J. Quantum Electron. 35(9), 1322-1331 (1999).
[CrossRef]

Kazarinov, R.

R. Kazarinov, C. Henry, and N. Olsson, "Narrow Band Resonant Optical Reflectors and Resonant Optical Transformers for Laser Stabilization and Wavelength Division Multiplexing," IEEE J. Quantum Electron. 23(9), 1419-1425 (1987).
[CrossRef]

Khan, M. J.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filters," IEEE J. Quantum Electron. 35(9), 1322-1331 (1999).
[CrossRef]

Kim, H.-C.

H.-C. Kim, K. Ikeda, and Y. Fainman, "Resonant waveguide device with vertical gratings," Opt. Lett. 32(5), 539-541 (2007).
[CrossRef] [PubMed]

H.-C. Kim, K. Ikeda, and Y. Fainman, "Tunable transmission resonant filter and modulator with vertical gratings," J. Lightwave Technol. 25(5), 1147-1151 (2007).
[CrossRef]

Kimerling, L. C.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

Koonath, P.

P. Koonath, T. Indukuri, and B. Jalali, "Add-drop filters utilizing vertically coupled microdisk resonators in silicon," Appl. Phys. Lett. 86(9), 091102 (2005).
[CrossRef]

Kulkarni, R. P.

A. M. Armani, R. P. Kulkarni, S. E. Fraser, R. C. Flagan, and K. J. Vahala, "Label-free, single-molecule detection with optical microcavities," Science 317(5839), 783-787 (2007).
[CrossRef] [PubMed]

Lai, Y.

H. A. Haus, and Y. Lai, "Theory of Cascaded Quarter Wave Shifted Distributed Feedback Resonators," IEEE J. Quantum Electron. 28(1), 205-213 (1992).
[CrossRef]

Lee, R. K.

Y. Xu, Y. Li, R. K. Lee, and A. Yariv, "Scattering-theory analysis of waveguide-resonator coupling," Phys. Rev. E Stat. Phys. Plasmas Fluids Relat. Interdiscip. Topics 62(5 5 Pt B), 7389-7404 (2000).
[CrossRef] [PubMed]

Legrand, B.

J. M. Gérard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, "Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity," Phys. Rev. Lett. 81(5), 1110-1113 (1998).
[CrossRef]

Li, B.-B.

Y.-F. Xiao, C.-L. Zou, B.-B. Li, Y. Li, C.-H. Dong, Z.-F. Han, and Q. Gong, "High-Q Exterior Whispering-Gallery Modes in a Metal-Coated Microresonator," Phys. Rev. Lett. 105(15), 153902 (2010).
[CrossRef]

Li, Y.

Y.-F. Xiao, C.-L. Zou, B.-B. Li, Y. Li, C.-H. Dong, Z.-F. Han, and Q. Gong, "High-Q Exterior Whispering-Gallery Modes in a Metal-Coated Microresonator," Phys. Rev. Lett. 105(15), 153902 (2010).
[CrossRef]

Y. Xu, Y. Li, R. K. Lee, and A. Yariv, "Scattering-theory analysis of waveguide-resonator coupling," Phys. Rev. E Stat. Phys. Plasmas Fluids Relat. Interdiscip. Topics 62(5 5 Pt B), 7389-7404 (2000).
[CrossRef] [PubMed]

Lipson, M.

K. Preston and M. Lipson, "Slot waveguides with polycrystalline silicon for electrical injection," Opt. Express 17(3), 1527-1534 (2009).
[CrossRef] [PubMed]

S. F. Preble, Q. Xu, and M. Lipson, "Changing the colour of light in a silicon resonator," Nat. Photonics 1(5), 293-296 (2007).
[CrossRef]

Q. Xu, and M. Lipson, "Carrier-induced optical bistability in silicon ring resonators," Opt. Lett. 31(3), 341-343 (2006).
[CrossRef] [PubMed]

Little, B. E.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

Lohmeyer, M.

M. Lohmeyer, "Mode expansion modeling of rectangular integrated optical microresonators," Opt. Quantum Electron. 34(5-6), 541-557 (2002).
[CrossRef]

Lomakin, V.

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

A. Mizrahi, V. Lomakin, B. A. Slutsky, M. P. Nezhad, L. Feng, and Y. Fainman, "Low threshold gain metal coated laser nanoresonators," Opt. Lett. 33(11), 1261-1263 (2008).
[CrossRef] [PubMed]

Luyssaert, B.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Manolatou, C.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filters," IEEE J. Quantum Electron. 35(9), 1322-1331 (1999).
[CrossRef]

Martin, B.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Mizrahi, A.

S. Zamek, A. Mizrahi, L. Feng, A. Simic, and Y. Fainman, "On-chip waveguide resonator with metallic mirrors," Opt. Lett. 35(4), 598-600 (2010).
[CrossRef] [PubMed]

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

A. Mizrahi, V. Lomakin, B. A. Slutsky, M. P. Nezhad, L. Feng, and Y. Fainman, "Low threshold gain metal coated laser nanoresonators," Opt. Lett. 33(11), 1261-1263 (2008).
[CrossRef] [PubMed]

Morand, A.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Nezhad, M. P.

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

A. Mizrahi, V. Lomakin, B. A. Slutsky, M. P. Nezhad, L. Feng, and Y. Fainman, "Low threshold gain metal coated laser nanoresonators," Opt. Lett. 33(11), 1261-1263 (2008).
[CrossRef] [PubMed]

Olsson, N.

R. Kazarinov, C. Henry, and N. Olsson, "Narrow Band Resonant Optical Reflectors and Resonant Optical Transformers for Laser Stabilization and Wavelength Division Multiplexing," IEEE J. Quantum Electron. 23(9), 1419-1425 (1987).
[CrossRef]

Painter, O.

K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, "Experimental demonstration of a high quality factor photonic crystal microcavity," Appl. Phys. Lett. 83(10), 1915 (2003).
[CrossRef]

Phan Huy, K.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Preble, S. F.

S. F. Preble, Q. Xu, and M. Lipson, "Changing the colour of light in a silicon resonator," Nat. Photonics 1(5), 293-296 (2007).
[CrossRef]

Preston, K.

K. Preston and M. Lipson, "Slot waveguides with polycrystalline silicon for electrical injection," Opt. Express 17(3), 1527-1534 (2009).
[CrossRef] [PubMed]

Renno, M.

S. Wolff, A. R. Giehl, M. Renno, and H. Fouckhardt, "Metallic waveguide mirrors in polymer film waveguides," Appl. Phys. B 73(5-6), 623-627 (2001).
[CrossRef]

Sermage, B.

J. M. Gérard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, "Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity," Phys. Rev. Lett. 81(5), 1110-1113 (1998).
[CrossRef]

Shibata, Y.

Y. Shibata, T. Suzuki, and H. Tsuda, "Design and Evaluation of an N:N Optical Coupler Using an Integrated Waveguide Mirror," Opt. Rev. 11(3), 182-187 (2004).
[CrossRef]

Simic, A.

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

S. Zamek, A. Mizrahi, L. Feng, A. Simic, and Y. Fainman, "On-chip waveguide resonator with metallic mirrors," Opt. Lett. 35(4), 598-600 (2010).
[CrossRef] [PubMed]

Slutsky, B.

M. P. Nezhad, A. Simic, O. Bondarenko, B. Slutsky, A. Mizrahi, L. Feng, V. Lomakin, and Y. Fainman, "Room-temperature subwavelength metallo-dielectric lasers," Nat. Photonics 4(6), 395-399 (2010).
[CrossRef]

Slutsky, B. A.

A. Mizrahi, V. Lomakin, B. A. Slutsky, M. P. Nezhad, L. Feng, and Y. Fainman, "Low threshold gain metal coated laser nanoresonators," Opt. Lett. 33(11), 1261-1263 (2008).
[CrossRef] [PubMed]

Srinivasan, K.

K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, "Experimental demonstration of a high quality factor photonic crystal microcavity," Appl. Phys. Lett. 83(10), 1915 (2003).
[CrossRef]

Steinmeyer, G.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

Stoffer, R.

M. Hammer, D. Yudistira, and R. Stoffer, "Modeling of grating assisted standing wave microresonators for filter applications in integrated optics," Opt. Quantum Electron. 36(1-3), 25-42 (2004).
[CrossRef]

Suzuki, T.

Y. Shibata, T. Suzuki, and H. Tsuda, "Design and Evaluation of an N:N Optical Coupler Using an Integrated Waveguide Mirror," Opt. Rev. 11(3), 182-187 (2004).
[CrossRef]

Taillaert, D.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Thierry-Mieg, V.

J. M. Gérard, B. Sermage, B. Gayral, B. Legrand, E. Costard, and V. Thierry-Mieg, "Enhanced spontaneous emission by quantum boxes in a monolithic optical microcavity," Phys. Rev. Lett. 81(5), 1110-1113 (1998).
[CrossRef]

Thoen, E. R.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

Tsuda, H.

Y. Shibata, T. Suzuki, and H. Tsuda, "Design and Evaluation of an N:N Optical Coupler Using an Integrated Waveguide Mirror," Opt. Rev. 11(3), 182-187 (2004).
[CrossRef]

Vahala, K. J.

A. M. Armani, R. P. Kulkarni, S. E. Fraser, R. C. Flagan, and K. J. Vahala, "Label-free, single-molecule detection with optical microcavities," Science 317(5839), 783-787 (2007).
[CrossRef] [PubMed]

Van Campenhout, J.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Van Thourhout, D.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Verbert, J.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Villeneuve, P. R.

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filters," IEEE J. Quantum Electron. 35(9), 1322-1331 (1999).
[CrossRef]

Wiaux, V.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Wolff, S.

S. Wolff, A. R. Giehl, M. Renno, and H. Fouckhardt, "Metallic waveguide mirrors in polymer film waveguides," Appl. Phys. B 73(5-6), 623-627 (2001).
[CrossRef]

Wouters, J.

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouters, S. Beckx, J. Van Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. Van Thourhout, and R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16(5), 1328-1330 (2004).
[CrossRef]

Xiao, Y.-F.

Y.-F. Xiao, C.-L. Zou, B.-B. Li, Y. Li, C.-H. Dong, Z.-F. Han, and Q. Gong, "High-Q Exterior Whispering-Gallery Modes in a Metal-Coated Microresonator," Phys. Rev. Lett. 105(15), 153902 (2010).
[CrossRef]

Xu, Q.

S. F. Preble, Q. Xu, and M. Lipson, "Changing the colour of light in a silicon resonator," Nat. Photonics 1(5), 293-296 (2007).
[CrossRef]

Q. Xu, and M. Lipson, "Carrier-induced optical bistability in silicon ring resonators," Opt. Lett. 31(3), 341-343 (2006).
[CrossRef] [PubMed]

Xu, Y.

Y. Xu, Y. Li, R. K. Lee, and A. Yariv, "Scattering-theory analysis of waveguide-resonator coupling," Phys. Rev. E Stat. Phys. Plasmas Fluids Relat. Interdiscip. Topics 62(5 5 Pt B), 7389-7404 (2000).
[CrossRef] [PubMed]

Yariv, A.

Y. Xu, Y. Li, R. K. Lee, and A. Yariv, "Scattering-theory analysis of waveguide-resonator coupling," Phys. Rev. E Stat. Phys. Plasmas Fluids Relat. Interdiscip. Topics 62(5 5 Pt B), 7389-7404 (2000).
[CrossRef] [PubMed]

Yudistira, D.

M. Hammer, D. Yudistira, and R. Stoffer, "Modeling of grating assisted standing wave microresonators for filter applications in integrated optics," Opt. Quantum Electron. 36(1-3), 25-42 (2004).
[CrossRef]

Zamek, S.

S. Zamek, A. Mizrahi, L. Feng, A. Simic, and Y. Fainman, "On-chip waveguide resonator with metallic mirrors," Opt. Lett. 35(4), 598-600 (2010).
[CrossRef] [PubMed]

Zhang, Y.

A. Morand, Y. Zhang, B. Martin, K. Phan Huy, D. Amans, P. Benech, J. Verbert, E. Hadji, and J. M. Fédéli, "Ultra-compact microdisk resonator filters on SOI substrate," Opt. Express 14(26), 12814-12821 (2006).
[CrossRef] [PubMed]

Zou, C.-L.

Y.-F. Xiao, C.-L. Zou, B.-B. Li, Y. Li, C.-H. Dong, Z.-F. Han, and Q. Gong, "High-Q Exterior Whispering-Gallery Modes in a Metal-Coated Microresonator," Phys. Rev. Lett. 105(15), 153902 (2010).
[CrossRef]

Appl. Phys. B

S. Wolff, A. R. Giehl, M. Renno, and H. Fouckhardt, "Metallic waveguide mirrors in polymer film waveguides," Appl. Phys. B 73(5-6), 623-627 (2001).
[CrossRef]

Appl. Phys. Lett.

P. Koonath, T. Indukuri, and B. Jalali, "Add-drop filters utilizing vertically coupled microdisk resonators in silicon," Appl. Phys. Lett. 86(9), 091102 (2005).
[CrossRef]

K. Srinivasan, P. E. Barclay, O. Painter, J. Chen, A. Y. Cho, and C. Gmachl, "Experimental demonstration of a high quality factor photonic crystal microcavity," Appl. Phys. Lett. 83(10), 1915 (2003).
[CrossRef]

IEEE J. Quantum Electron.

R. Kazarinov, C. Henry, and N. Olsson, "Narrow Band Resonant Optical Reflectors and Resonant Optical Transformers for Laser Stabilization and Wavelength Division Multiplexing," IEEE J. Quantum Electron. 23(9), 1419-1425 (1987).
[CrossRef]

H. A. Haus, and Y. Lai, "Theory of Cascaded Quarter Wave Shifted Distributed Feedback Resonators," IEEE J. Quantum Electron. 28(1), 205-213 (1992).
[CrossRef]

C. Manolatou, M. J. Khan, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "Coupling of modes analysis of resonant channel add-drop filters," IEEE J. Quantum Electron. 35(9), 1322-1331 (1999).
[CrossRef]

IEEE Photon. Technol. Lett.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10(4), 549-551 (1998).
[CrossRef]

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Figures (5)

Fig. 1
Fig. 1

(a) Schematic of the studied device. (b) Illustration of the formalism used to construct the analytical model.

Fig 2
Fig 2

Confirmation of the model. (a) Q-factors as a function of normalized length of the resonator L/λ calculated from Eqs 4 and 5. Q-factor associated with the external coupling (QC), mirror losses (Q0), and the total Q-factor (QT) are shown by broken blue, dashed black, and solid black correspondingly. The black cross-marks show FEM simulation results of the coupled resonator. (b–d) Electric field |Ez| distribution as obtained from FEM simulations for L/λ=0.22, 1.33, and 3.54 (where L=Lr=Lc). All simulation used TE polarization with the following parameters: mirror reflectivity R=0.98, normalized coupling coefficient κλ=0.114, normalized separation distance between the resonator and the bus waveguide G/λ=0.26, and normalized thickness of the waveguides d/λ=0.13.

Fig. 3
Fig. 3

Theoretical investigation of the micro-resonator. (a) Schematic of an Au mirror inserted into a Si waveguide. (b) Mirror’s reflectance, R, (solid black) and the ratio of scattering loss to the total loss (broken blue) as a function of guide’s width, W. An inset shows the considered cross-section of the waveguide. The shaded area corresponds to W below 150nm, for which the results are inaccurate due to the high numerical error of FEM, associated with low mode confinement. (c) Effective and group index, ne and ng, as a function of waveguide’s width, W. (d) Coupling coefficient, κ, as a function of the gap, G, between the guides, for the geometry shown in the inset. All results pertain to TE-like mode and a wavelength of λ = 1.55µm.

Fig. 4
Fig. 4

Conceptual illustration of the fabrication process. The two panes show two different cross-sections of the device (XY in the upper pane and ZY in the lower pane, as shown). The dimensions are not up to scale.

Fig. 5
Fig. 5

Experimental results. (a) Micrograph obtained with a scanning electron microscope (SEM) of the fabricated device right after the lift-off and prior to the deposition of top cladding with PECVD. The device is tilted at 45 degrees with respect to the imaging axis. (b) Experimental (red dots) and simulated (solid black) transmission spectra of TE-like mode of the fabricated device in dB.

Equations (6)

Equations on this page are rendered with MathJax. Learn more.

t = ( 1 e 2 i β L R R ) cos ( κ L c ) exp ( i β L r ) 1 cos 2 ( κ L c ) exp ( 2 i β L r ) R
| t ( ω ) | 2 cos 2 ( κ L c ) ( R 1 1 ) 2 + ( 2 L r Δ ω / v g ) 2 ( R 1 cos 2 ( κ L c ) ) 2 + ( 2 L r Δ ω / v g ) 2
| t ( ω ) | 2 = ( Γ 0 ) 2 + ( Δ ω ) 2 ( Γ 0 + Γ C ) 2 + ( Δ ω ) 2
Q 0 = ω 2 Γ 0 = k 0 n g L r R 1 1 ,
Q C = ω 2 Γ c = k 0 n g L r sin 2 ( κ L c )
E R = [ 1 + R 1 R 1 R cos 2 ( κ L c ) 1 + R cos 2 ( κ L c ) ] 2

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