Abstract

We demonstrate low loss photonic crystal waveguides in chalcogenide (Ge33As12Se55) glasses. The measured losses are as low as 21dB/cm. We experimentally determine the refractive index of the thin film chalcogenide glass to be n = 2.6 and demonstrate that dispersion engineering can be performed up to a group index of ng = 40 in this relatively low refractive index contrast system.

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References

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  1. T. K. Liang, and H. K. Tsang, “Optical Limiting and Raman Amplification in Silicon Waveguides”, in Optical Fiber Communication Conference and Exposition and The National Fiber Optics Engineers Conference, Technical Digest (CD) (Optical Society of America, 2005), paper JWA15.
  2. M. Dinu, F. Quochi, and H. Garcia, “Third-order nonlinearities in silicon at telecom wavelengths,” Appl. Phys. Lett. 82(18), 2954–2956 (2003).
    [CrossRef]
  3. V. Mizrahi, K. W. Delong, G. I. Stegeman, M. A. Saifi, and M. J. Andrejco, “Two-photon absorption as a limitation to all-optical switching,” Opt. Lett. 14(20), 1140–1142 (1989).
    [CrossRef] [PubMed]
  4. D. Lezal, J. Pedlikova, and J. Zavadil, “Chalcogenide Glasses for optical and photonics applications,” Chalcogenide Lett. 1, 11–15 (2004).
  5. K. A. Cerqua-Richardson, J. M. McKinley, B. Lawrence, S. Joshi, and A. Villeneuve, “Comparison of nonlinear optical properties of sulfide glasses in bulk and thin film form,” Opt. Mater. 10(2), 155–159 (1998).
    [CrossRef]
  6. Y. Ruan, M. Kim, Y. Lee, B. Luther-Davies, and A. Rode, “Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography,” Appl. Phys. Lett. 90(7), 071102 (2007).
    [CrossRef]
  7. K. Suzuki, Y. Hamachi, and T. Baba, “Fabrication and characterization of chalcogenide glass photonic crystal waveguides,” Opt. Express 17(25), 22393–22400 (2009).
    [CrossRef]
  8. S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
    [CrossRef]
  9. M. Bass, ed., Handbook of Optics II, 2nd ed. (McGraw-Hill, 1994).
  10. T. P. White, L. O’Faolain, J. Li, L. C. Andreani, and T. F. Krauss, “Silica-embedded silicon photonic crystal waveguides,” Opt. Express 16(21), 17076–17081 (2008).
    [CrossRef] [PubMed]
  11. J. Li, T. P. White, L. O’Faolain, A. Gomez-Iglesias, and T. F. Krauss, “Systematic design of flat band slow light in photonic crystal waveguides,” Opt. Express 16(9), 6227–6232 (2008).
    [CrossRef] [PubMed]
  12. A. Gomez-Iglesias, D. O’Brien, L. O’Faolain, A. Miller, and T. F. Krauss, “Direct measurement of the group index of photonic crystal waveguides via Fourier transform spectral interferometry,” Appl. Phys. Lett. 90(26), 261107 (2007).
    [CrossRef]

2010 (1)

S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
[CrossRef]

2009 (1)

K. Suzuki, Y. Hamachi, and T. Baba, “Fabrication and characterization of chalcogenide glass photonic crystal waveguides,” Opt. Express 17(25), 22393–22400 (2009).
[CrossRef]

2008 (2)

T. P. White, L. O’Faolain, J. Li, L. C. Andreani, and T. F. Krauss, “Silica-embedded silicon photonic crystal waveguides,” Opt. Express 16(21), 17076–17081 (2008).
[CrossRef] [PubMed]

J. Li, T. P. White, L. O’Faolain, A. Gomez-Iglesias, and T. F. Krauss, “Systematic design of flat band slow light in photonic crystal waveguides,” Opt. Express 16(9), 6227–6232 (2008).
[CrossRef] [PubMed]

2007 (2)

A. Gomez-Iglesias, D. O’Brien, L. O’Faolain, A. Miller, and T. F. Krauss, “Direct measurement of the group index of photonic crystal waveguides via Fourier transform spectral interferometry,” Appl. Phys. Lett. 90(26), 261107 (2007).
[CrossRef]

Y. Ruan, M. Kim, Y. Lee, B. Luther-Davies, and A. Rode, “Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography,” Appl. Phys. Lett. 90(7), 071102 (2007).
[CrossRef]

2004 (1)

D. Lezal, J. Pedlikova, and J. Zavadil, “Chalcogenide Glasses for optical and photonics applications,” Chalcogenide Lett. 1, 11–15 (2004).

2003 (1)

M. Dinu, F. Quochi, and H. Garcia, “Third-order nonlinearities in silicon at telecom wavelengths,” Appl. Phys. Lett. 82(18), 2954–2956 (2003).
[CrossRef]

1998 (1)

K. A. Cerqua-Richardson, J. M. McKinley, B. Lawrence, S. Joshi, and A. Villeneuve, “Comparison of nonlinear optical properties of sulfide glasses in bulk and thin film form,” Opt. Mater. 10(2), 155–159 (1998).
[CrossRef]

1989 (1)

V. Mizrahi, K. W. Delong, G. I. Stegeman, M. A. Saifi, and M. J. Andrejco, “Two-photon absorption as a limitation to all-optical switching,” Opt. Lett. 14(20), 1140–1142 (1989).
[CrossRef] [PubMed]

Andreani, L. C.

T. P. White, L. O’Faolain, J. Li, L. C. Andreani, and T. F. Krauss, “Silica-embedded silicon photonic crystal waveguides,” Opt. Express 16(21), 17076–17081 (2008).
[CrossRef] [PubMed]

Andrejco, M. J.

V. Mizrahi, K. W. Delong, G. I. Stegeman, M. A. Saifi, and M. J. Andrejco, “Two-photon absorption as a limitation to all-optical switching,” Opt. Lett. 14(20), 1140–1142 (1989).
[CrossRef] [PubMed]

Baba, T.

K. Suzuki, Y. Hamachi, and T. Baba, “Fabrication and characterization of chalcogenide glass photonic crystal waveguides,” Opt. Express 17(25), 22393–22400 (2009).
[CrossRef]

Beggs, D. M.

S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
[CrossRef]

Cerqua-Richardson, K. A.

K. A. Cerqua-Richardson, J. M. McKinley, B. Lawrence, S. Joshi, and A. Villeneuve, “Comparison of nonlinear optical properties of sulfide glasses in bulk and thin film form,” Opt. Mater. 10(2), 155–159 (1998).
[CrossRef]

Delong, K. W.

V. Mizrahi, K. W. Delong, G. I. Stegeman, M. A. Saifi, and M. J. Andrejco, “Two-photon absorption as a limitation to all-optical switching,” Opt. Lett. 14(20), 1140–1142 (1989).
[CrossRef] [PubMed]

Dinu, M.

M. Dinu, F. Quochi, and H. Garcia, “Third-order nonlinearities in silicon at telecom wavelengths,” Appl. Phys. Lett. 82(18), 2954–2956 (2003).
[CrossRef]

Garcia, H.

M. Dinu, F. Quochi, and H. Garcia, “Third-order nonlinearities in silicon at telecom wavelengths,” Appl. Phys. Lett. 82(18), 2954–2956 (2003).
[CrossRef]

Gomez-Iglesias, A.

J. Li, T. P. White, L. O’Faolain, A. Gomez-Iglesias, and T. F. Krauss, “Systematic design of flat band slow light in photonic crystal waveguides,” Opt. Express 16(9), 6227–6232 (2008).
[CrossRef] [PubMed]

A. Gomez-Iglesias, D. O’Brien, L. O’Faolain, A. Miller, and T. F. Krauss, “Direct measurement of the group index of photonic crystal waveguides via Fourier transform spectral interferometry,” Appl. Phys. Lett. 90(26), 261107 (2007).
[CrossRef]

Hamachi, Y.

K. Suzuki, Y. Hamachi, and T. Baba, “Fabrication and characterization of chalcogenide glass photonic crystal waveguides,” Opt. Express 17(25), 22393–22400 (2009).
[CrossRef]

Joshi, S.

K. A. Cerqua-Richardson, J. M. McKinley, B. Lawrence, S. Joshi, and A. Villeneuve, “Comparison of nonlinear optical properties of sulfide glasses in bulk and thin film form,” Opt. Mater. 10(2), 155–159 (1998).
[CrossRef]

Kim, M.

Y. Ruan, M. Kim, Y. Lee, B. Luther-Davies, and A. Rode, “Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography,” Appl. Phys. Lett. 90(7), 071102 (2007).
[CrossRef]

Krauss, T. F.

S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
[CrossRef]

J. Li, T. P. White, L. O’Faolain, A. Gomez-Iglesias, and T. F. Krauss, “Systematic design of flat band slow light in photonic crystal waveguides,” Opt. Express 16(9), 6227–6232 (2008).
[CrossRef] [PubMed]

T. P. White, L. O’Faolain, J. Li, L. C. Andreani, and T. F. Krauss, “Silica-embedded silicon photonic crystal waveguides,” Opt. Express 16(21), 17076–17081 (2008).
[CrossRef] [PubMed]

A. Gomez-Iglesias, D. O’Brien, L. O’Faolain, A. Miller, and T. F. Krauss, “Direct measurement of the group index of photonic crystal waveguides via Fourier transform spectral interferometry,” Appl. Phys. Lett. 90(26), 261107 (2007).
[CrossRef]

Lawrence, B.

K. A. Cerqua-Richardson, J. M. McKinley, B. Lawrence, S. Joshi, and A. Villeneuve, “Comparison of nonlinear optical properties of sulfide glasses in bulk and thin film form,” Opt. Mater. 10(2), 155–159 (1998).
[CrossRef]

Lee, Y.

Y. Ruan, M. Kim, Y. Lee, B. Luther-Davies, and A. Rode, “Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography,” Appl. Phys. Lett. 90(7), 071102 (2007).
[CrossRef]

Lezal, D.

D. Lezal, J. Pedlikova, and J. Zavadil, “Chalcogenide Glasses for optical and photonics applications,” Chalcogenide Lett. 1, 11–15 (2004).

Li, J.

T. P. White, L. O’Faolain, J. Li, L. C. Andreani, and T. F. Krauss, “Silica-embedded silicon photonic crystal waveguides,” Opt. Express 16(21), 17076–17081 (2008).
[CrossRef] [PubMed]

J. Li, T. P. White, L. O’Faolain, A. Gomez-Iglesias, and T. F. Krauss, “Systematic design of flat band slow light in photonic crystal waveguides,” Opt. Express 16(9), 6227–6232 (2008).
[CrossRef] [PubMed]

Luther-Davies, B.

Y. Ruan, M. Kim, Y. Lee, B. Luther-Davies, and A. Rode, “Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography,” Appl. Phys. Lett. 90(7), 071102 (2007).
[CrossRef]

McKinley, J. M.

K. A. Cerqua-Richardson, J. M. McKinley, B. Lawrence, S. Joshi, and A. Villeneuve, “Comparison of nonlinear optical properties of sulfide glasses in bulk and thin film form,” Opt. Mater. 10(2), 155–159 (1998).
[CrossRef]

Melloni, A.

S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
[CrossRef]

Miller, A.

A. Gomez-Iglesias, D. O’Brien, L. O’Faolain, A. Miller, and T. F. Krauss, “Direct measurement of the group index of photonic crystal waveguides via Fourier transform spectral interferometry,” Appl. Phys. Lett. 90(26), 261107 (2007).
[CrossRef]

Mizrahi, V.

V. Mizrahi, K. W. Delong, G. I. Stegeman, M. A. Saifi, and M. J. Andrejco, “Two-photon absorption as a limitation to all-optical switching,” Opt. Lett. 14(20), 1140–1142 (1989).
[CrossRef] [PubMed]

O’Brien, D.

A. Gomez-Iglesias, D. O’Brien, L. O’Faolain, A. Miller, and T. F. Krauss, “Direct measurement of the group index of photonic crystal waveguides via Fourier transform spectral interferometry,” Appl. Phys. Lett. 90(26), 261107 (2007).
[CrossRef]

O’Faolain, L.

S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
[CrossRef]

T. P. White, L. O’Faolain, J. Li, L. C. Andreani, and T. F. Krauss, “Silica-embedded silicon photonic crystal waveguides,” Opt. Express 16(21), 17076–17081 (2008).
[CrossRef] [PubMed]

J. Li, T. P. White, L. O’Faolain, A. Gomez-Iglesias, and T. F. Krauss, “Systematic design of flat band slow light in photonic crystal waveguides,” Opt. Express 16(9), 6227–6232 (2008).
[CrossRef] [PubMed]

A. Gomez-Iglesias, D. O’Brien, L. O’Faolain, A. Miller, and T. F. Krauss, “Direct measurement of the group index of photonic crystal waveguides via Fourier transform spectral interferometry,” Appl. Phys. Lett. 90(26), 261107 (2007).
[CrossRef]

Pedlikova, J.

D. Lezal, J. Pedlikova, and J. Zavadil, “Chalcogenide Glasses for optical and photonics applications,” Chalcogenide Lett. 1, 11–15 (2004).

Quochi, F.

M. Dinu, F. Quochi, and H. Garcia, “Third-order nonlinearities in silicon at telecom wavelengths,” Appl. Phys. Lett. 82(18), 2954–2956 (2003).
[CrossRef]

Rode, A.

Y. Ruan, M. Kim, Y. Lee, B. Luther-Davies, and A. Rode, “Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography,” Appl. Phys. Lett. 90(7), 071102 (2007).
[CrossRef]

Ruan, Y.

Y. Ruan, M. Kim, Y. Lee, B. Luther-Davies, and A. Rode, “Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography,” Appl. Phys. Lett. 90(7), 071102 (2007).
[CrossRef]

Saifi, M. A.

V. Mizrahi, K. W. Delong, G. I. Stegeman, M. A. Saifi, and M. J. Andrejco, “Two-photon absorption as a limitation to all-optical switching,” Opt. Lett. 14(20), 1140–1142 (1989).
[CrossRef] [PubMed]

Schulz, S. A.

S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
[CrossRef]

Stegeman, G. I.

V. Mizrahi, K. W. Delong, G. I. Stegeman, M. A. Saifi, and M. J. Andrejco, “Two-photon absorption as a limitation to all-optical switching,” Opt. Lett. 14(20), 1140–1142 (1989).
[CrossRef] [PubMed]

Suzuki, K.

K. Suzuki, Y. Hamachi, and T. Baba, “Fabrication and characterization of chalcogenide glass photonic crystal waveguides,” Opt. Express 17(25), 22393–22400 (2009).
[CrossRef]

Villeneuve, A.

K. A. Cerqua-Richardson, J. M. McKinley, B. Lawrence, S. Joshi, and A. Villeneuve, “Comparison of nonlinear optical properties of sulfide glasses in bulk and thin film form,” Opt. Mater. 10(2), 155–159 (1998).
[CrossRef]

White, T. P.

S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
[CrossRef]

T. P. White, L. O’Faolain, J. Li, L. C. Andreani, and T. F. Krauss, “Silica-embedded silicon photonic crystal waveguides,” Opt. Express 16(21), 17076–17081 (2008).
[CrossRef] [PubMed]

J. Li, T. P. White, L. O’Faolain, A. Gomez-Iglesias, and T. F. Krauss, “Systematic design of flat band slow light in photonic crystal waveguides,” Opt. Express 16(9), 6227–6232 (2008).
[CrossRef] [PubMed]

Zavadil, J.

D. Lezal, J. Pedlikova, and J. Zavadil, “Chalcogenide Glasses for optical and photonics applications,” Chalcogenide Lett. 1, 11–15 (2004).

Appl. Phys. Lett. (3)

M. Dinu, F. Quochi, and H. Garcia, “Third-order nonlinearities in silicon at telecom wavelengths,” Appl. Phys. Lett. 82(18), 2954–2956 (2003).
[CrossRef]

Y. Ruan, M. Kim, Y. Lee, B. Luther-Davies, and A. Rode, “Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography,” Appl. Phys. Lett. 90(7), 071102 (2007).
[CrossRef]

A. Gomez-Iglesias, D. O’Brien, L. O’Faolain, A. Miller, and T. F. Krauss, “Direct measurement of the group index of photonic crystal waveguides via Fourier transform spectral interferometry,” Appl. Phys. Lett. 90(26), 261107 (2007).
[CrossRef]

Chalcogenide Lett. (1)

D. Lezal, J. Pedlikova, and J. Zavadil, “Chalcogenide Glasses for optical and photonics applications,” Chalcogenide Lett. 1, 11–15 (2004).

J. Opt. (1)

S. A. Schulz, L. O’Faolain, D. M. Beggs, T. P. White, A. Melloni, and T. F. Krauss, “Dispersion engineered slow light in photonic crystals: a comparison,” J. Opt. 12(10), 104004 (2010).
[CrossRef]

Opt. Express (3)

K. Suzuki, Y. Hamachi, and T. Baba, “Fabrication and characterization of chalcogenide glass photonic crystal waveguides,” Opt. Express 17(25), 22393–22400 (2009).
[CrossRef]

T. P. White, L. O’Faolain, J. Li, L. C. Andreani, and T. F. Krauss, “Silica-embedded silicon photonic crystal waveguides,” Opt. Express 16(21), 17076–17081 (2008).
[CrossRef] [PubMed]

J. Li, T. P. White, L. O’Faolain, A. Gomez-Iglesias, and T. F. Krauss, “Systematic design of flat band slow light in photonic crystal waveguides,” Opt. Express 16(9), 6227–6232 (2008).
[CrossRef] [PubMed]

Opt. Lett. (1)

V. Mizrahi, K. W. Delong, G. I. Stegeman, M. A. Saifi, and M. J. Andrejco, “Two-photon absorption as a limitation to all-optical switching,” Opt. Lett. 14(20), 1140–1142 (1989).
[CrossRef] [PubMed]

Opt. Mater. (1)

K. A. Cerqua-Richardson, J. M. McKinley, B. Lawrence, S. Joshi, and A. Villeneuve, “Comparison of nonlinear optical properties of sulfide glasses in bulk and thin film form,” Opt. Mater. 10(2), 155–159 (1998).
[CrossRef]

Other (2)

M. Bass, ed., Handbook of Optics II, 2nd ed. (McGraw-Hill, 1994).

T. K. Liang, and H. K. Tsang, “Optical Limiting and Raman Amplification in Silicon Waveguides”, in Optical Fiber Communication Conference and Exposition and The National Fiber Optics Engineers Conference, Technical Digest (CD) (Optical Society of America, 2005), paper JWA15.

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Figures (6)

Fig. 1
Fig. 1

Band diagram for the fundamental mode of a W1 photonic crystal waveguide for silicon (solid curve, n = 3.48) and AMTIR-1 (Ge33As12Se55, n = 2.6, dashed curve). The light cone is outlined as the light grey area which is delimited with the straight dashed line. The dark grey areas outline the useful frequency range that is accessible below the light line and above the cut-off frequency. The corresponding accessible k-range lies between the crossing point of the dispersion curve of the respective material (denoted by the vertical solid lines) and the band edge at k = π/a. It is obvious that the operating range for the lower index contrast chalcogenide system is much smaller than that for the higher contrast silicon system.

Fig. 2
Fig. 2

Scanning electron micrographs of AMTIR-1 photonic crystal waveguides at the coupling section to the taper for the access waveguides. The smooth and vertical sidewalls of the holes are shown. (a) The access taper is collapsed due to stress acting on the waveguide and membrane during the liquid HF process. (b) An intact photonic crystal coupling section due to the use of vapour HF.

Fig. 3
Fig. 3

(a) Sketch of the taper which allows performing the HF undercut without an additional masking step. The 6μm wide waveguide is tapered down to the waveguide width of 909nm within 50μm. The supporting, not-etched pedestal can be seen. (b) Cleaved facet of the access waveguide after underetching also showing the remaining silica which acts as a supporting pedestal under the access waveguide.

Fig. 4
Fig. 4

a) Transmission measurements of the chalcogenide W1 photonic crystal waveguides for the determination of the refractive index. b) Losses extracted from cut-back measurements.

Fig. 5
Fig. 5

(a) Map of 3D calculations for the group-index-bandwidth-product (as a function of s1 and s2). The color map displays the calculated GIBP whilst the contours map the achievable group index. (b) Calculated group index curves for modified W1 modes for certain values for s1 and s2. The red areas indicate the constant (ng ± 10%) group index regions.

Fig. 6
Fig. 6

Measured group indices (blue) and calculated group indices (green) for different lattice shifts. (a) s1/a = −0.1 s2/a = 0.02, (b) s1/a = −0.1 s2/a = 0.03, (c) s1/a = −0.1 s2/a = 0.05, (d) s1/a = −0.1 s2/a = 0.06.

Equations (1)

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4HF + SiO 2 -> SiF 4 ( g )  + 2H 2 O .

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