X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Nanomechanically tunable photonic crystal resonators utilizing triple-beam coupled nanocavities,” IEEE Photon. Technol. Lett. 23(18), 1310–1312 (2011).
[Crossref]
T. Ikeda, K. Takahashi, Y. Kanamori, and K. Hane, “Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator,” Opt. Express 18(7), 7031–7037 (2010).
[Crossref]
[PubMed]
X. Chew, G. Zhou, F. S. Chau, J. Deng, X. Tang, and Y. C. Loke, “Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities,” Opt. Lett. 35(15), 2517–2519 (2010).
[Crossref]
[PubMed]
K. Takahashi, E. Bulgan, Y. Kanamori, and K. Hane, “Submicron comb-drive actuators fabricated on thin single crystalline silicon layer,” IEEE Trans. Ind. Electron. 56(4), 991–995 (2009).
[Crossref]
K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express 16(19), 14421–14428 (2008).
[Crossref]
[PubMed]
E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92(10), 101110 (2008).
[Crossref]
J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[Crossref]
W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express 15(25), 17106–17113 (2007).
[Crossref]
[PubMed]
P. Koonath, T. Indukuri, and B. Jalali, “Monolithic 3-D silicon photonics,” J. Lightwave Technol. 24(4), 1796–1804 (2006).
[Crossref]
B. Jalali and S. Fathpour, “Silicon photonics,” J. Lightwave Technol. 24(12), 4600–4615 (2006).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1371–1379 (2006).
[Crossref]
M.-C. M. Lee, D. D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Optical directional coupler based on Si-wire waveguides,” IEEE Photon. Technol. Lett. 17(3), 585–587 (2005).
[Crossref]
K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70×60μm2 size based on Si photonic wire waveguides,” Electron. Lett. 41(14), 801–802 (2005).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh-Δ optical waveguide on silicon-oninsulator substrate,” Jpn. J. Appl. Phys. 40(Part 2, No. 4B), L383–L385 (2001).
[Crossref]
E. A. J. Marcatili, “Dielectric rectangular waveguide and dielectric coupler for integrated optics,” Bell Syst. Tech. J. 47(7), 2071–2102 (1969).
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1371–1379 (2006).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Optical directional coupler based on Si-wire waveguides,” IEEE Photon. Technol. Lett. 17(3), 585–587 (2005).
[Crossref]
K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70×60μm2 size based on Si photonic wire waveguides,” Electron. Lett. 41(14), 801–802 (2005).
[Crossref]
A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh-Δ optical waveguide on silicon-oninsulator substrate,” Jpn. J. Appl. Phys. 40(Part 2, No. 4B), L383–L385 (2001).
[Crossref]
K. Takahashi, E. Bulgan, Y. Kanamori, and K. Hane, “Submicron comb-drive actuators fabricated on thin single crystalline silicon layer,” IEEE Trans. Ind. Electron. 56(4), 991–995 (2009).
[Crossref]
E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92(10), 101110 (2008).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Nanomechanically tunable photonic crystal resonators utilizing triple-beam coupled nanocavities,” IEEE Photon. Technol. Lett. 23(18), 1310–1312 (2011).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, J. Deng, X. Tang, and Y. C. Loke, “Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities,” Opt. Lett. 35(15), 2517–2519 (2010).
[Crossref]
[PubMed]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Nanomechanically tunable photonic crystal resonators utilizing triple-beam coupled nanocavities,” IEEE Photon. Technol. Lett. 23(18), 1310–1312 (2011).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, J. Deng, X. Tang, and Y. C. Loke, “Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities,” Opt. Lett. 35(15), 2517–2519 (2010).
[Crossref]
[PubMed]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1371–1379 (2006).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Optical directional coupler based on Si-wire waveguides,” IEEE Photon. Technol. Lett. 17(3), 585–587 (2005).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Nanomechanically tunable photonic crystal resonators utilizing triple-beam coupled nanocavities,” IEEE Photon. Technol. Lett. 23(18), 1310–1312 (2011).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, J. Deng, X. Tang, and Y. C. Loke, “Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities,” Opt. Lett. 35(15), 2517–2519 (2010).
[Crossref]
[PubMed]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006).
[Crossref]
M.-C. M. Lee, D. D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[Crossref]
T. Ikeda, K. Takahashi, Y. Kanamori, and K. Hane, “Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator,” Opt. Express 18(7), 7031–7037 (2010).
[Crossref]
[PubMed]
K. Takahashi, E. Bulgan, Y. Kanamori, and K. Hane, “Submicron comb-drive actuators fabricated on thin single crystalline silicon layer,” IEEE Trans. Ind. Electron. 56(4), 991–995 (2009).
[Crossref]
K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express 16(19), 14421–14428 (2008).
[Crossref]
[PubMed]
E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92(10), 101110 (2008).
[Crossref]
A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh-Δ optical waveguide on silicon-oninsulator substrate,” Jpn. J. Appl. Phys. 40(Part 2, No. 4B), L383–L385 (2001).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1371–1379 (2006).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Optical directional coupler based on Si-wire waveguides,” IEEE Photon. Technol. Lett. 17(3), 585–587 (2005).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
T. Ikeda, K. Takahashi, Y. Kanamori, and K. Hane, “Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator,” Opt. Express 18(7), 7031–7037 (2010).
[Crossref]
[PubMed]
K. Takahashi, E. Bulgan, Y. Kanamori, and K. Hane, “Submicron comb-drive actuators fabricated on thin single crystalline silicon layer,” IEEE Trans. Ind. Electron. 56(4), 991–995 (2009).
[Crossref]
K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express 16(19), 14421–14428 (2008).
[Crossref]
[PubMed]
E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92(10), 101110 (2008).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
M.-C. M. Lee, D. D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[Crossref]
J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[Crossref]
M.-C. M. Lee, D. D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[Crossref]
J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[Crossref]
E. A. J. Marcatili, “Dielectric rectangular waveguide and dielectric coupler for integrated optics,” Bell Syst. Tech. J. 47(7), 2071–2102 (1969).
K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70×60μm2 size based on Si photonic wire waveguides,” Electron. Lett. 41(14), 801–802 (2005).
[Crossref]
K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70×60μm2 size based on Si photonic wire waveguides,” Electron. Lett. 41(14), 801–802 (2005).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh-Δ optical waveguide on silicon-oninsulator substrate,” Jpn. J. Appl. Phys. 40(Part 2, No. 4B), L383–L385 (2001).
[Crossref]
K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70×60μm2 size based on Si photonic wire waveguides,” Electron. Lett. 41(14), 801–802 (2005).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
T. Ikeda, K. Takahashi, Y. Kanamori, and K. Hane, “Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator,” Opt. Express 18(7), 7031–7037 (2010).
[Crossref]
[PubMed]
K. Takahashi, E. Bulgan, Y. Kanamori, and K. Hane, “Submicron comb-drive actuators fabricated on thin single crystalline silicon layer,” IEEE Trans. Ind. Electron. 56(4), 991–995 (2009).
[Crossref]
K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express 16(19), 14421–14428 (2008).
[Crossref]
[PubMed]
M.-C. M. Lee, D. D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
M.-C. M. Lee, D. D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[Crossref]
J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1371–1379 (2006).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Optical directional coupler based on Si-wire waveguides,” IEEE Photon. Technol. Lett. 17(3), 585–587 (2005).
[Crossref]
J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Nanomechanically tunable photonic crystal resonators utilizing triple-beam coupled nanocavities,” IEEE Photon. Technol. Lett. 23(18), 1310–1312 (2011).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, J. Deng, X. Tang, and Y. C. Loke, “Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities,” Opt. Lett. 35(15), 2517–2519 (2010).
[Crossref]
[PubMed]
E. Bulgan, Y. Kanamori, and K. Hane, “Submicron silicon waveguide optical switch driven by microelectromechanical actuator,” Appl. Phys. Lett. 92(10), 101110 (2008).
[Crossref]
E. A. J. Marcatili, “Dielectric rectangular waveguide and dielectric coupler for integrated optics,” Bell Syst. Tech. J. 47(7), 2071–2102 (1969).
K. Sasaki, F. Ohno, A. Motegi, and T. Baba, “Arrayed waveguide grating of 70×60μm2 size based on Si photonic wire waveguides,” Electron. Lett. 41(14), 801–802 (2005).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Si photonic wire waveguide devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1371–1379 (2006).
[Crossref]
S. Janz, P. Cheben, D. Dalacu, A. Delge, A. Densmore, B. Lamontagne, M.-J. Picard, E. Post, J. H. Schmid, P. Waldron, D.-X. Xu, K. P. Yap, and W. N. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]
J. Yao, D. Leuenberger, M.-C. M. Lee, and M. C. Wu, “Silicon microtoroidal resonators with integrated MEMS tunable coupler,” IEEE J. Sel. Top. Quantum Electron. 13(2), 202–208 (2007).
[Crossref]
C. Gunn, “CMOS photonics for high-speed interconnects,” IEEE Micro 26(2), 58–66 (2006).
[Crossref]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Optical directional coupler based on Si-wire waveguides,” IEEE Photon. Technol. Lett. 17(3), 585–587 (2005).
[Crossref]
X. Chew, G. Zhou, F. S. Chau, and J. Deng, “Nanomechanically tunable photonic crystal resonators utilizing triple-beam coupled nanocavities,” IEEE Photon. Technol. Lett. 23(18), 1310–1312 (2011).
[Crossref]
M.-C. M. Lee, D. D. Hah, E. K. Lau, H. Toshiyoshi, and M. Wu, “MEMS-actuated photonic crystal switches,” IEEE Photon. Technol. Lett. 18(2), 358–360 (2006).
[Crossref]
K. Takahashi, E. Bulgan, Y. Kanamori, and K. Hane, “Submicron comb-drive actuators fabricated on thin single crystalline silicon layer,” IEEE Trans. Ind. Electron. 56(4), 991–995 (2009).
[Crossref]
M. W. Pruessner, K. Amarnath, M. Datta, D. P. Kelly, S. Kanakaraju, P.-T. Ho, and R. Ghodssi, “InP-based optical waqveguide MEMS switches with evanescent coupling mechanism,” J. Micromech. Syst. 14(5), 1070–1081 (2005).
[Crossref]
A. Sakai, G. Hara, and T. Baba, “Propagation characteristics of ultrahigh-Δ optical waveguide on silicon-oninsulator substrate,” Jpn. J. Appl. Phys. 40(Part 2, No. 4B), L383–L385 (2001).
[Crossref]
W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, “Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator,” Opt. Express 15(25), 17106–17113 (2007).
[Crossref]
[PubMed]
K. Takahashi, Y. Kanamori, Y. Kokubun, and K. Hane, “A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator,” Opt. Express 16(19), 14421–14428 (2008).
[Crossref]
[PubMed]
T. Ikeda, K. Takahashi, Y. Kanamori, and K. Hane, “Phase-shifter using submicron silicon waveguide couplers with ultra-small electro-mechanical actuator,” Opt. Express 18(7), 7031–7037 (2010).
[Crossref]
[PubMed]
K. Okamoto, Basis of Optical Waveguides Coronasha Ltd. (Tokyo) (1992).