Abstract

We demonstrate a 16-channel, independently tuned waveguide surface grating optical phased array in silicon for two dimensional beam steering with a total field of view of 20° x 14°, beam width of 0.6° x 1.6°, and full-window background peak suppression of 10 dB.

© 2011 OSA

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  1. N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
    [CrossRef]
  2. D. M. Burns, V. M. Bright, S. Gustafson, and E. A. Watson, “Optical beam steering using surface micromachined gratings and optical phased arrays,” Proc. SPIE 3131, 99–110 (1997).
    [CrossRef]
  3. K. Van Acoleyen, W. Bogaerts, J. Jágerská, N. Le Thomas, R. Houdré, and R. Baets, “Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator,” Opt. Lett. 34(9), 1477–1479 (2009).
    [CrossRef] [PubMed]
  4. K. Van Acoleyen, H. Rogier, and R. Baets, “Two-dimensional optical phased array antenna on silicon-on-insulator,” Opt. Express 18(13), 13655–13660 (2010).
    [CrossRef] [PubMed]
  5. D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, “1?×?12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane,” Appl. Phys. Lett. 99(5), 051104 (2011).
    [CrossRef]
  6. K. Van Acoleyen, W. Bogaerts, and R. Baets, “Two-Dimensional Dispersive Off-Chip Beam Scanner Fabricated on Silicon-On-Insulator,” IEEE Photon. Technol. Lett. 23(17), 1270–1272 (2011).
    [CrossRef]
  7. A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
    [CrossRef]
  8. M. N. Sysak, J. O. Anthes, D. Liang, J. E. Bowers, O. Raday, and R. Jones, “A hybrid silicon sampled grating DBR tunable laser,” in Group IV Photonics, 2008 5th IEEE International Conference on, (Cardiff, Wales, 2008), pp. 55–57.
  9. H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
    [CrossRef]
  10. H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
    [CrossRef]
  11. N. Le Thomas, R. Houdré, D. O’Brien, and T. F. Krauss, “Exploring light propagating in photonic crystals with Fourier optics,” J. Opt. Soc. Am. B 24(12), 2964–2971 (2007).
    [CrossRef]
  12. V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, “Optimization and control of grating coupling to or from a silicon?based optical waveguide,” Opt. Eng. 35(11), 3092–3100 (1996).
    [CrossRef]

2011 (3)

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, “1?×?12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane,” Appl. Phys. Lett. 99(5), 051104 (2011).
[CrossRef]

K. Van Acoleyen, W. Bogaerts, and R. Baets, “Two-Dimensional Dispersive Off-Chip Beam Scanner Fabricated on Silicon-On-Insulator,” IEEE Photon. Technol. Lett. 23(17), 1270–1272 (2011).
[CrossRef]

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

2010 (1)

2009 (1)

2007 (2)

N. Le Thomas, R. Houdré, D. O’Brien, and T. F. Krauss, “Exploring light propagating in photonic crystals with Fourier optics,” J. Opt. Soc. Am. B 24(12), 2964–2971 (2007).
[CrossRef]

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

2006 (1)

A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
[CrossRef]

1997 (1)

D. M. Burns, V. M. Bright, S. Gustafson, and E. A. Watson, “Optical beam steering using surface micromachined gratings and optical phased arrays,” Proc. SPIE 3131, 99–110 (1997).
[CrossRef]

1996 (1)

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, “Optimization and control of grating coupling to or from a silicon?based optical waveguide,” Opt. Eng. 35(11), 3092–3100 (1996).
[CrossRef]

1988 (1)

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Amantea, R.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Baets, R.

Bogaerts, W.

K. Van Acoleyen, W. Bogaerts, and R. Baets, “Two-Dimensional Dispersive Off-Chip Beam Scanner Fabricated on Silicon-On-Insulator,” IEEE Photon. Technol. Lett. 23(17), 1270–1272 (2011).
[CrossRef]

K. Van Acoleyen, W. Bogaerts, J. Jágerská, N. Le Thomas, R. Houdré, and R. Baets, “Off-chip beam steering with a one-dimensional optical phased array on silicon-on-insulator,” Opt. Lett. 34(9), 1477–1479 (2009).
[CrossRef] [PubMed]

Bovington, J.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Bowers, J. E.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
[CrossRef]

Bright, V. M.

D. M. Burns, V. M. Bright, S. Gustafson, and E. A. Watson, “Optical beam steering using surface micromachined gratings and optical phased arrays,” Proc. SPIE 3131, 99–110 (1997).
[CrossRef]

Burns, D. M.

D. M. Burns, V. M. Bright, S. Gustafson, and E. A. Watson, “Optical beam steering using surface micromachined gratings and optical phased arrays,” Proc. SPIE 3131, 99–110 (1997).
[CrossRef]

Carlson, N. W.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Carr, L. A.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Chen, H.-W.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Chen, R. T.

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, “1?×?12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane,” Appl. Phys. Lett. 99(5), 051104 (2011).
[CrossRef]

Cohen, O.

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
[CrossRef]

Evans, G. A.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Fang, A. W.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
[CrossRef]

Gustafson, S.

D. M. Burns, V. M. Bright, S. Gustafson, and E. A. Watson, “Optical beam steering using surface micromachined gratings and optical phased arrays,” Proc. SPIE 3131, 99–110 (1997).
[CrossRef]

Hammer, J. M.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Hawrylo, F. Z.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Hosseini, A.

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, “1?×?12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane,” Appl. Phys. Lett. 99(5), 051104 (2011).
[CrossRef]

Houdré, R.

Jacob-Mitos, M.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Jágerská, J.

James, E. A.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Jones, R.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
[CrossRef]

Kaiser, C. J.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Kirk, J. B.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Koch, B. R.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Krauss, T. F.

Kuo, Y.-H.

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

Kwong, D.

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, “1?×?12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane,” Appl. Phys. Lett. 99(5), 051104 (2011).
[CrossRef]

Le Thomas, N.

Liang, D.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Liao, L.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Lurie, M.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

O’Brien, D.

Palfrey, S. L.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Paniccia, M.

A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
[CrossRef]

Paniccia, M. J.

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

Park, H.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
[CrossRef]

Parriaux, O.

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, “Optimization and control of grating coupling to or from a silicon?based optical waveguide,” Opt. Eng. 35(11), 3092–3100 (1996).
[CrossRef]

Reichert, W. F.

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

Rogier, H.

Sychugov, V. A.

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, “Optimization and control of grating coupling to or from a silicon?based optical waveguide,” Opt. Eng. 35(11), 3092–3100 (1996).
[CrossRef]

Sysak, M. N.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Tang, Y.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Tishchenko, A. V.

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, “Optimization and control of grating coupling to or from a silicon?based optical waveguide,” Opt. Eng. 35(11), 3092–3100 (1996).
[CrossRef]

Usievich, B. A.

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, “Optimization and control of grating coupling to or from a silicon?based optical waveguide,” Opt. Eng. 35(11), 3092–3100 (1996).
[CrossRef]

Van Acoleyen, K.

Watson, E. A.

D. M. Burns, V. M. Bright, S. Gustafson, and E. A. Watson, “Optical beam steering using surface micromachined gratings and optical phased arrays,” Proc. SPIE 3131, 99–110 (1997).
[CrossRef]

Wong, K.

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

Zhang, Y.

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, “1?×?12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane,” Appl. Phys. Lett. 99(5), 051104 (2011).
[CrossRef]

Appl. Phys. Lett. (2)

N. W. Carlson, G. A. Evans, R. Amantea, S. L. Palfrey, J. M. Hammer, M. Lurie, L. A. Carr, F. Z. Hawrylo, E. A. James, C. J. Kaiser, J. B. Kirk, and W. F. Reichert, “Electronic beam steering in monolithic grating?surface? emitting diode laser arrays,” Appl. Phys. Lett. 53(23), 2275–2277 (1988).
[CrossRef]

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, “1?×?12 Unequally spaced waveguide array for actively tuned optical phased array on a silicon nanomembrane,” Appl. Phys. Lett. 99(5), 051104 (2011).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

H. Park, M. N. Sysak, H.-W. Chen, A. W. Fang, D. Liang, L. Liao, B. R. Koch, J. Bovington, Y. Tang, K. Wong, M. Jacob-Mitos, R. Jones, and J. E. Bowers, “Device and Integration Technology for Silicon Photonic Transmitters,” IEEE J. Sel. Top. Quantum Electron. 17(3), 671–688 (2011).
[CrossRef]

IEEE Photon. Technol. Lett. (3)

H. Park, Y.-H. Kuo, A. W. Fang, R. Jones, O. Cohen, M. J. Paniccia, and J. E. Bowers, “A Hybrid AlGaInAs–Silicon Evanescent Amplifier,” IEEE Photon. Technol. Lett. 19(4), 230–232 (2007).
[CrossRef]

K. Van Acoleyen, W. Bogaerts, and R. Baets, “Two-Dimensional Dispersive Off-Chip Beam Scanner Fabricated on Silicon-On-Insulator,” IEEE Photon. Technol. Lett. 23(17), 1270–1272 (2011).
[CrossRef]

A. W. Fang, H. Park, R. Jones, O. Cohen, M. Paniccia, and J. E. Bowers, “A Continuous Wave Hybrid AlGaInAs-Silicon Evanescent Laser,” IEEE Photon. Technol. Lett. 18(10), 1143–1145 (2006).
[CrossRef]

J. Opt. Soc. Am. B (1)

Opt. Eng. (1)

V. A. Sychugov, A. V. Tishchenko, B. A. Usievich, and O. Parriaux, “Optimization and control of grating coupling to or from a silicon?based optical waveguide,” Opt. Eng. 35(11), 3092–3100 (1996).
[CrossRef]

Opt. Express (1)

Opt. Lett. (1)

Proc. SPIE (1)

D. M. Burns, V. M. Bright, S. Gustafson, and E. A. Watson, “Optical beam steering using surface micromachined gratings and optical phased arrays,” Proc. SPIE 3131, 99–110 (1997).
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Other (1)

M. N. Sysak, J. O. Anthes, D. Liang, J. E. Bowers, O. Raday, and R. Jones, “A hybrid silicon sampled grating DBR tunable laser,” in Group IV Photonics, 2008 5th IEEE International Conference on, (Cardiff, Wales, 2008), pp. 55–57.

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