Abstract

Compared with an optical modulator based on lithium niobate, the total loss of the current high speed silicon modulator is still too high for commercial use. Reduction of the total loss always comes along with the degradation of the other two characteristics including modulation efficiency or switching speed. In this paper, we reduce the phase shifter loss through optimizing the doping level out of the depletion region while keeping the modulation efficiency and switching speed at a high level. Compensated doping method is utilized to optimize the doping level on the cross section of the phase shift. With doping compensation, the Loss·Efficiency figure-of-merit (FOM) of 4 mm phase shifter is reduced from 25.8 dB·V to 19.4 dB·V while still keeping the small signal 3 dB-bandwidth at about 10 GHz. After doping profile optimizing, the measured bandwidth of the phase shifter with doping compensation can even reaches 17 GHz with a Loss·Efficiency FOM of about 25.4 dB·V.

© 2011 OSA

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  1. L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
    [CrossRef]
  2. M. Paniccia, “Integrating silicon photonics,” Nat. Photonics 4(8), 498–499 (2010).
    [CrossRef]
  3. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
    [CrossRef]
  4. J. Michel, J. F. Liu, and L. C. Kimerling, “High performance Ge-on-Si photodetectors,” Nat. Photonics 4(8), 527–534 (2010).
    [CrossRef]
  5. R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
    [CrossRef]
  6. S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, “Simulation studies of silicon electro-optic waveguide decices,” J. Appl. Phys. 68(10), 4964–4970 (1990).
    [CrossRef]
  7. J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
    [CrossRef]
  8. T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
    [CrossRef]
  9. N. N. Feng, S. R. Liao, D. Z. Feng, P. Dong, D. W. Zheng, H. Liang, R. Shafiiha, G. L. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010).
    [CrossRef] [PubMed]
  10. D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express 16(1), 334–339 (2008).
    [CrossRef] [PubMed]
  11. G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes,” IEEE J. Quantum Electron. 16(1), 179–184 (2010).
    [CrossRef]
  12. U. Littmark and J. F. Ziegler, “Ranges of energetic ions in matter,” Phys. Rev. A 23(1), 64–72 (1981).
    [CrossRef]
  13. Q. Fang, T. Y. Liow, J. F. Song, C. W. Tan, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Suspended optical fiber-to-waveguide mode size converter for silicon photonics,” Opt. Express 18(8), 7763–7769 (2010).
    [CrossRef] [PubMed]
  14. X. Tu, S. Chen, L. Zhao, F. Sun, J. Yu, and Q. Wang, “A high performance Si based MOS electrooptic phase modulator with a shunt capacitor configuration,” J. Lightwave Technol. 24(2), 1000–1007 (2006).
    [CrossRef]

2010 (7)

M. Paniccia, “Integrating silicon photonics,” Nat. Photonics 4(8), 498–499 (2010).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

J. Michel, J. F. Liu, and L. C. Kimerling, “High performance Ge-on-Si photodetectors,” Nat. Photonics 4(8), 527–534 (2010).
[CrossRef]

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

N. N. Feng, S. R. Liao, D. Z. Feng, P. Dong, D. W. Zheng, H. Liang, R. Shafiiha, G. L. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25µm silicon-on-insulator waveguides,” Opt. Express 18(8), 7994–7999 (2010).
[CrossRef] [PubMed]

G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes,” IEEE J. Quantum Electron. 16(1), 179–184 (2010).
[CrossRef]

Q. Fang, T. Y. Liow, J. F. Song, C. W. Tan, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Suspended optical fiber-to-waveguide mode size converter for silicon photonics,” Opt. Express 18(8), 7763–7769 (2010).
[CrossRef] [PubMed]

2008 (2)

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express 16(1), 334–339 (2008).
[CrossRef] [PubMed]

2006 (2)

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

X. Tu, S. Chen, L. Zhao, F. Sun, J. Yu, and Q. Wang, “A high performance Si based MOS electrooptic phase modulator with a shunt capacitor configuration,” J. Lightwave Technol. 24(2), 1000–1007 (2006).
[CrossRef]

1990 (1)

S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, “Simulation studies of silicon electro-optic waveguide decices,” J. Appl. Phys. 68(10), 4964–4970 (1990).
[CrossRef]

1987 (1)

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
[CrossRef]

1981 (1)

U. Littmark and J. F. Ziegler, “Ranges of energetic ions in matter,” Phys. Rev. A 23(1), 64–72 (1981).
[CrossRef]

Ahn, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Ang, K.-W.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

Apsel, A. B.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Asghari, M.

Basak, J.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Beals, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Bennett, B. R.

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
[CrossRef]

Carothers, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Cassan, E.

G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes,” IEEE J. Quantum Electron. 16(1), 179–184 (2010).
[CrossRef]

D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express 16(1), 334–339 (2008).
[CrossRef] [PubMed]

Chen, S.

Chen, Y.-K.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Chetrit, Y.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Cohen, R.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Conway, T.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Cunningham, J. E.

Dong, P.

Fang, Q.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

Q. Fang, T. Y. Liow, J. F. Song, C. W. Tan, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Suspended optical fiber-to-waveguide mode size converter for silicon photonics,” Opt. Express 18(8), 7763–7769 (2010).
[CrossRef] [PubMed]

Fédéli, J. M.

Feng, D. Z.

Feng, N. N.

Friedman, L.

S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, “Simulation studies of silicon electro-optic waveguide decices,” J. Appl. Phys. 68(10), 4964–4970 (1990).
[CrossRef]

Gardes, F. Y.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

Giguere, S. R.

S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, “Simulation studies of silicon electro-optic waveguide decices,” J. Appl. Phys. 68(10), 4964–4970 (1990).
[CrossRef]

Gill, D. M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Grove, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Hong, C.-Y.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Izhaky, N.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Kimerling, L. C.

J. Michel, J. F. Liu, and L. C. Kimerling, “High performance Ge-on-Si photodetectors,” Nat. Photonics 4(8), 527–534 (2010).
[CrossRef]

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Krishnamoorthy, A. V.

Kwong, D. L.

Kwong, D.-L.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

Laval, S.

Li, G. L.

Liang, H.

Liao, L.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Liao, S. R.

Liow, T. Y.

Liow, T.-Y.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

Lipson, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Littmark, U.

U. Littmark and J. F. Ziegler, “Ranges of energetic ions in matter,” Phys. Rev. A 23(1), 64–72 (1981).
[CrossRef]

Liu, A.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Liu, J.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Liu, J. F.

J. Michel, J. F. Liu, and L. C. Kimerling, “High performance Ge-on-Si photodetectors,” Nat. Photonics 4(8), 527–534 (2010).
[CrossRef]

Lo, G. Q.

Lo, G.-Q.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

Lorenzo, J. P.

S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, “Simulation studies of silicon electro-optic waveguide decices,” J. Appl. Phys. 68(10), 4964–4970 (1990).
[CrossRef]

Lyan, P.

Marris-Morini, D.

G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes,” IEEE J. Quantum Electron. 16(1), 179–184 (2010).
[CrossRef]

D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express 16(1), 334–339 (2008).
[CrossRef] [PubMed]

Mashanovich, G.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

Michel, J.

J. Michel, J. F. Liu, and L. C. Kimerling, “High performance Ge-on-Si photodetectors,” Nat. Photonics 4(8), 527–534 (2010).
[CrossRef]

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Nguyen, H.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Pan, D.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Paniccia, M.

M. Paniccia, “Integrating silicon photonics,” Nat. Photonics 4(8), 498–499 (2010).
[CrossRef]

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Patel, S. S.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Pomerene, A. T.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Rasigade, G.

G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes,” IEEE J. Quantum Electron. 16(1), 179–184 (2010).
[CrossRef]

Rasras, M.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Reed, G. T.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

Rubin, D.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Samara-Rubio, D.

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

Shafiiha, R.

Song, J. F.

Song, J.-F.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

Soref, R. A.

S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, “Simulation studies of silicon electro-optic waveguide decices,” J. Appl. Phys. 68(10), 4964–4970 (1990).
[CrossRef]

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
[CrossRef]

Sparacin, D. K.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Sun, F.

Tan, C. W.

Thomson, D. J.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

Tu, K.-Y.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Tu, X.

Vivien, L.

G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes,” IEEE J. Quantum Electron. 16(1), 179–184 (2010).
[CrossRef]

D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, “Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure,” Opt. Express 16(1), 334–339 (2008).
[CrossRef] [PubMed]

Wang, Q.

White, A. E.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Wong, C. W.

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

Xiong, Y.-Z.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

Yu, J.

Yu, M. B.

Yu, M.-B.

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

Zhao, L.

Zheng, D. W.

Ziegler, J. F.

U. Littmark and J. F. Ziegler, “Ranges of energetic ions in matter,” Phys. Rev. A 23(1), 64–72 (1981).
[CrossRef]

Adv. Opt. Technol. (1)

J. Basak, L. Liao, A. Liu, D. Rubin, Y. Chetrit, H. Nguyen, D. Samara-Rubio, R. Cohen, N. Izhaky, and M. Paniccia, “Developments in gigascale silicon optical modulators using free carrier dispersion mechanisms,” Adv. Opt. Technol. 2008, 678948 (2008).
[CrossRef]

IEEE J. Quantum Electron. (2)

R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quantum Electron. 23(1), 123–129 (1987).
[CrossRef]

G. Rasigade, D. Marris-Morini, L. Vivien, and E. Cassan, “Performance evolutions of carrier depletion silicon optical modulators: From p-n to p-i-p-i-n diodes,” IEEE J. Quantum Electron. 16(1), 179–184 (2010).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

T.-Y. Liow, K.-W. Ang, Q. Fang, J.-F. Song, Y.-Z. Xiong, M.-B. Yu, G.-Q. Lo, and D.-L. Kwong, “Silicon modulators and germanium photodetectors on SOI: Monolithic integration, compatibility, and performance optimization,” IEEE J. Sel. Top. Quantum Electron. 16(1), 307–315 (2010).
[CrossRef]

J. Appl. Phys. (1)

S. R. Giguere, L. Friedman, R. A. Soref, and J. P. Lorenzo, “Simulation studies of silicon electro-optic waveguide decices,” J. Appl. Phys. 68(10), 4964–4970 (1990).
[CrossRef]

J. Lightwave Technol. (1)

Nat. Photonics (3)

M. Paniccia, “Integrating silicon photonics,” Nat. Photonics 4(8), 498–499 (2010).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics 4(8), 518–526 (2010).
[CrossRef]

J. Michel, J. F. Liu, and L. C. Kimerling, “High performance Ge-on-Si photodetectors,” Nat. Photonics 4(8), 527–534 (2010).
[CrossRef]

Opt. Express (3)

Phys. Rev. A (1)

U. Littmark and J. F. Ziegler, “Ranges of energetic ions in matter,” Phys. Rev. A 23(1), 64–72 (1981).
[CrossRef]

Proc. SPIE (1)

L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE 6125, 612502, 612502-10 (2006).
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

The structures and doping level on the cross sections of optical modulator with (a) a general reversed biased PN junction (b) The present structure in which we choose Wp = Wn.

Fig. 2
Fig. 2

The fabrication processes of the compensated doping optical modulator.

Fig. 3
Fig. 3

The phase shift of the 4mm-long phase shifter with different Wp.

Fig. 4
Fig. 4

Simulated (a) and Experimental (b) absorption loss and phase shifter efficiency of phase shift with different Wp. The phase shifter efficiency of different Wp were chosen at Vdc = −9 V.

Fig. 5
Fig. 5

The FOM of silicon modulator under different doping conditions with different Wp.

Fig. 6
Fig. 6

The optical response of the phase shifter with Wp = 90 nm under 10 Gbit/s pattern generator. The 5Vpp RF signal is added with a dc bias tee Vdc = −3 V.

Fig. 7
Fig. 7

Frequency response of MZI optical modulator with 4mm long phase shifter and Wp = 90 nm (a) 3 dB bandwidth and (b) 10 Gbit/s eye-diagram of the modulator with compensation and optimized doping level.

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