Abstract

We present a 4x4 spatially non-blocking Mach-Zehnder based silicon optical switch fabricated using processes fully compatible with standard CMOS. We successfully demonstrate operation in all 9 unique switch states and 12 possible I/O routing configurations, with worst-case cross-talk levels lower than −9 dB, and common spectral bandwidth of 7 nm. High-speed 40 Gbps data transmission experiments verify optical data integrity for all input-output channels.

© 2010 OSA

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  1. F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, “Exploitation of optical interconnects in future server architectures,” IBM J. Res. Develop. 49(4), 755–775 (2005).
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    [CrossRef]
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    [CrossRef]
  4. C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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  11. B. G. Lee, A. Biberman, J. Chan, and K. Bergman, “High-performance modulators and switches for silicon photonic networks-on-chip,” IEEE J. Sel. Top. Quantum Electron. 16(1), 6–22 (2010).
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  15. H. Chen and A. W. Poon, “Low-loss multimode-interference-based crossings for silicon wire waveguides,” IEEE Photon. Technol. Lett. 18(21), 2260–2262 (2006).
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  16. S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010).
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2010 (4)

B. G. Lee, A. Biberman, J. Chan, and K. Bergman, “High-performance modulators and switches for silicon photonic networks-on-chip,” IEEE J. Sel. Top. Quantum Electron. 16(1), 6–22 (2010).
[CrossRef]

A. Biberman, B. G. Lee, N. Sherwood-Droz, M. Lipson, and K. Bergman, “Broadband operation of nanophotonic router for silicon photonic networks-on-chip,” IEEE Photon. Technol. Lett. 22(12), 926–928 (2010).
[CrossRef]

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010).
[CrossRef]

J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Integrated NiSi waveguide heaters for CMOS-compatible silicon thermo-optic devices,” Opt. Lett. 35(7), 1013–1015 (2010).
[CrossRef] [PubMed]

2009 (4)

2008 (4)

B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, “All optical comb switch for multi-wavelength message routing in silicon photonic networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

K. Shacham, K. Bergman, and L. P. Carloni, “Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4×4 hitless silicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

2007 (2)

2006 (1)

H. Chen and A. W. Poon, “Low-loss multimode-interference-based crossings for silicon wire waveguides,” IEEE Photon. Technol. Lett. 18(21), 2260–2262 (2006).
[CrossRef]

2005 (2)

F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, “Exploitation of optical interconnects in future server architectures,” IBM J. Res. Develop. 49(4), 755–775 (2005).
[CrossRef]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

2004 (1)

H. Liu, H. Tam, P. K. A. Wai, and E. Pun, “Low-loss waveguide crossing using a multimode interference structure,” Opt. Commun. 241(1-3), 99–104 (2004).
[CrossRef]

Asanovic, K.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

Assefa, S.

Baets, R.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010).
[CrossRef]

Barwicz, T.

Batten, C.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

Benner, F.

F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, “Exploitation of optical interconnects in future server architectures,” IBM J. Res. Develop. 49(4), 755–775 (2005).
[CrossRef]

Bergman, K.

B. G. Lee, A. Biberman, J. Chan, and K. Bergman, “High-performance modulators and switches for silicon photonic networks-on-chip,” IEEE J. Sel. Top. Quantum Electron. 16(1), 6–22 (2010).
[CrossRef]

A. Biberman, B. G. Lee, N. Sherwood-Droz, M. Lipson, and K. Bergman, “Broadband operation of nanophotonic router for silicon photonic networks-on-chip,” IEEE Photon. Technol. Lett. 22(12), 926–928 (2010).
[CrossRef]

B. G. Lee, A. Biberman, N. Sherwood-Droz, C. B. Poitras, M. Lipson, and K. Bergman, “High-speed 2x2 switch for multiwavelength siliconphotonic networks-on-chip,” J. Lightwave Technol. 27(14), 2900–2907 (2009).
[CrossRef]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4×4 hitless silicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, “All optical comb switch for multi-wavelength message routing in silicon photonic networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

K. Shacham, K. Bergman, and L. P. Carloni, “Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Biberman, A.

B. G. Lee, A. Biberman, J. Chan, and K. Bergman, “High-performance modulators and switches for silicon photonic networks-on-chip,” IEEE J. Sel. Top. Quantum Electron. 16(1), 6–22 (2010).
[CrossRef]

A. Biberman, B. G. Lee, N. Sherwood-Droz, M. Lipson, and K. Bergman, “Broadband operation of nanophotonic router for silicon photonic networks-on-chip,” IEEE Photon. Technol. Lett. 22(12), 926–928 (2010).
[CrossRef]

B. G. Lee, A. Biberman, N. Sherwood-Droz, C. B. Poitras, M. Lipson, and K. Bergman, “High-speed 2x2 switch for multiwavelength siliconphotonic networks-on-chip,” J. Lightwave Technol. 27(14), 2900–2907 (2009).
[CrossRef]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4×4 hitless silicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, “All optical comb switch for multi-wavelength message routing in silicon photonic networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

Bogaerts, W.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010).
[CrossRef]

Byun, H.

Carloni, L. P.

K. Shacham, K. Bergman, and L. P. Carloni, “Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Chan, J.

B. G. Lee, A. Biberman, J. Chan, and K. Bergman, “High-performance modulators and switches for silicon photonic networks-on-chip,” IEEE J. Sel. Top. Quantum Electron. 16(1), 6–22 (2010).
[CrossRef]

Chen, H.

H. Chen and A. W. Poon, “Low-loss multimode-interference-based crossings for silicon wire waveguides,” IEEE Photon. Technol. Lett. 18(21), 2260–2262 (2006).
[CrossRef]

Chen, L.

Dong, P.

B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, “All optical comb switch for multi-wavelength message routing in silicon photonic networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

Dumon, P.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010).
[CrossRef]

Gan, F.

Geis, M.

Green, W. M. J.

Grein, M.

Holzwarth, C. W.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, “Silicon photonics for compact, energy-efficient interconnects [Invited],” J. Opt. Netw. 6(1), 63–73 (2007).
[CrossRef]

Hoyt, J. L.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, “Silicon photonics for compact, energy-efficient interconnects [Invited],” J. Opt. Netw. 6(1), 63–73 (2007).
[CrossRef]

Ignatowski, M.

F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, “Exploitation of optical interconnects in future server architectures,” IBM J. Res. Develop. 49(4), 755–775 (2005).
[CrossRef]

Ippen, E. P.

Joshi, A.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

Kartner, F. X.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, “Silicon photonics for compact, energy-efficient interconnects [Invited],” J. Opt. Netw. 6(1), 63–73 (2007).
[CrossRef]

Kash, J. A.

F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, “Exploitation of optical interconnects in future server architectures,” IBM J. Res. Develop. 49(4), 755–775 (2005).
[CrossRef]

Khilo, A.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

Kuchta, D. M.

F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, “Exploitation of optical interconnects in future server architectures,” IBM J. Res. Develop. 49(4), 755–775 (2005).
[CrossRef]

Lee, B. G.

B. G. Lee, A. Biberman, J. Chan, and K. Bergman, “High-performance modulators and switches for silicon photonic networks-on-chip,” IEEE J. Sel. Top. Quantum Electron. 16(1), 6–22 (2010).
[CrossRef]

A. Biberman, B. G. Lee, N. Sherwood-Droz, M. Lipson, and K. Bergman, “Broadband operation of nanophotonic router for silicon photonic networks-on-chip,” IEEE Photon. Technol. Lett. 22(12), 926–928 (2010).
[CrossRef]

B. G. Lee, A. Biberman, N. Sherwood-Droz, C. B. Poitras, M. Lipson, and K. Bergman, “High-speed 2x2 switch for multiwavelength siliconphotonic networks-on-chip,” J. Lightwave Technol. 27(14), 2900–2907 (2009).
[CrossRef]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4×4 hitless silicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, “All optical comb switch for multi-wavelength message routing in silicon photonic networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

Li, H. Q.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

Lipson, M.

A. Biberman, B. G. Lee, N. Sherwood-Droz, M. Lipson, and K. Bergman, “Broadband operation of nanophotonic router for silicon photonic networks-on-chip,” IEEE Photon. Technol. Lett. 22(12), 926–928 (2010).
[CrossRef]

B. G. Lee, A. Biberman, N. Sherwood-Droz, C. B. Poitras, M. Lipson, and K. Bergman, “High-speed 2x2 switch for multiwavelength siliconphotonic networks-on-chip,” J. Lightwave Technol. 27(14), 2900–2907 (2009).
[CrossRef]

N. Sherwood-Droz, H. Wang, L. Chen, B. G. Lee, A. Biberman, K. Bergman, and M. Lipson, “Optical 4×4 hitless silicon router for optical networks-on-chip (NoC),” Opt. Express 16(20), 15915–15922 (2008).
[CrossRef] [PubMed]

B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, “All optical comb switch for multi-wavelength message routing in silicon photonic networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Liu, H.

H. Liu, H. Tam, P. K. A. Wai, and E. Pun, “Low-loss waveguide crossing using a multimode interference structure,” Opt. Commun. 241(1-3), 99–104 (2004).
[CrossRef]

Lyszczarz, T.

Moss, B.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

Olubuyide, O. O.

Orcutt, J.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

Orcutt, J. S.

Poitras, C. B.

Poon, A. W.

H. Chen and A. W. Poon, “Low-loss multimode-interference-based crossings for silicon wire waveguides,” IEEE Photon. Technol. Lett. 18(21), 2260–2262 (2006).
[CrossRef]

Popovic, M. A.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, “Silicon photonics for compact, energy-efficient interconnects [Invited],” J. Opt. Netw. 6(1), 63–73 (2007).
[CrossRef]

Pradhan, S.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Pun, E.

H. Liu, H. Tam, P. K. A. Wai, and E. Pun, “Low-loss waveguide crossing using a multimode interference structure,” Opt. Commun. 241(1-3), 99–104 (2004).
[CrossRef]

Rakich, P. T.

Ram, R. J.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, “Silicon photonics for compact, energy-efficient interconnects [Invited],” J. Opt. Netw. 6(1), 63–73 (2007).
[CrossRef]

Ritter, M. B.

F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, “Exploitation of optical interconnects in future server architectures,” IBM J. Res. Develop. 49(4), 755–775 (2005).
[CrossRef]

Rooks, M. J.

Schmidt, B.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Sekaric, L.

Selvaraja, S. K.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010).
[CrossRef]

Shacham, K.

K. Shacham, K. Bergman, and L. P. Carloni, “Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
[CrossRef]

Sherwood-Droz, N.

Smith, H. I.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, “Silicon photonics for compact, energy-efficient interconnects [Invited],” J. Opt. Netw. 6(1), 63–73 (2007).
[CrossRef]

Spector, S.

Stojanovic, V.

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

T. Barwicz, H. Byun, F. Gan, C. W. Holzwarth, M. A. Popovic, P. T. Rakich, M. R. Watts, E. P. Ippen, F. X. Kartner, H. I. Smith, J. S. Orcutt, R. J. Ram, V. Stojanovic, O. O. Olubuyide, J. L. Hoyt, S. Spector, M. Geis, M. Grein, T. Lyszczarz, and J. U. Yoon, “Silicon photonics for compact, energy-efficient interconnects [Invited],” J. Opt. Netw. 6(1), 63–73 (2007).
[CrossRef]

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H. Liu, H. Tam, P. K. A. Wai, and E. Pun, “Low-loss waveguide crossing using a multimode interference structure,” Opt. Commun. 241(1-3), 99–104 (2004).
[CrossRef]

Van Campenhout, J.

Van Thourhout, D.

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Subnanometer linewidth uniformity in silicon nanophotonic waveguide devices using CMOS fabrication technology,” IEEE J. Sel. Top. Quantum Electron. 16(1), 316–324 (2010).
[CrossRef]

Vlasov, Y.

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

Vlasov, Y. A.

Wai, P. K. A.

H. Liu, H. Tam, P. K. A. Wai, and E. Pun, “Low-loss waveguide crossing using a multimode interference structure,” Opt. Commun. 241(1-3), 99–104 (2004).
[CrossRef]

Wang, H.

Watts, M. R.

Xia, F.

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

Xu, Q.

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Yoon, J. U.

IBM J. Res. Develop. (1)

F. Benner, M. Ignatowski, J. A. Kash, D. M. Kuchta, and M. B. Ritter, “Exploitation of optical interconnects in future server architectures,” IBM J. Res. Develop. 49(4), 755–775 (2005).
[CrossRef]

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B. G. Lee, A. Biberman, J. Chan, and K. Bergman, “High-performance modulators and switches for silicon photonic networks-on-chip,” IEEE J. Sel. Top. Quantum Electron. 16(1), 6–22 (2010).
[CrossRef]

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[CrossRef]

IEEE Micro (1)

C. Batten, A. Joshi, J. Orcutt, A. Khilo, B. Moss, C. W. Holzwarth, M. A. Popovic, H. Q. Li, H. I. Smith, J. L. Hoyt, F. X. Kartner, R. J. Ram, V. Stojanovic, and K. Asanovic, “Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics,” IEEE Micro 29(4), 8–21 (2009).
[CrossRef]

IEEE Photon. Technol. Lett. (3)

B. G. Lee, A. Biberman, P. Dong, M. Lipson, and K. Bergman, “All optical comb switch for multi-wavelength message routing in silicon photonic networks,” IEEE Photon. Technol. Lett. 20(10), 767–769 (2008).
[CrossRef]

A. Biberman, B. G. Lee, N. Sherwood-Droz, M. Lipson, and K. Bergman, “Broadband operation of nanophotonic router for silicon photonic networks-on-chip,” IEEE Photon. Technol. Lett. 22(12), 926–928 (2010).
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H. Chen and A. W. Poon, “Low-loss multimode-interference-based crossings for silicon wire waveguides,” IEEE Photon. Technol. Lett. 18(21), 2260–2262 (2006).
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IEEE Trans. Comput. (1)

K. Shacham, K. Bergman, and L. P. Carloni, “Bergman, and L. P. Carloni, “Photonic networks-on-chip for future generations of chip multiprocessors,” IEEE Trans. Comput. 57(9), 1246–1260 (2008).
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J. Lightwave Technol. (1)

J. Opt. Netw. (1)

Nat. Photonics (1)

Y. Vlasov, W. M. J. Green, and F. Xia, “High-throughput silicon nanophotonic wavelength-insensitive switch for on-chip optical networks,” Nat. Photonics 2(4), 242–246 (2008).
[CrossRef]

Nature (1)

Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature 435(7040), 325–327 (2005).
[CrossRef] [PubMed]

Opt. Commun. (1)

H. Liu, H. Tam, P. K. A. Wai, and E. Pun, “Low-loss waveguide crossing using a multimode interference structure,” Opt. Commun. 241(1-3), 99–104 (2004).
[CrossRef]

Opt. Express (4)

Opt. Lett. (1)

Other (2)

W. M. Green, H. F. Hamann, and Y. Vlasov, “Silicide thermal heaters for silicon-on-insulator nanophotonic devices”, U.S. patent application 11/849591 (2007).

J. Van Campenhout, W. M. J. Green, S. Assefa, and Y. A. Vlasov, “Digital noise-tolerant silicon nanophotonic switch”, in Conference on Lasers and Electro-Optics, Technical Digest (CD) (Optical Society of America, 2010), paper CPDA12.

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Figures (6)

Fig. 1
Fig. 1

Schematic of the 4x4 non-blocking photonic switch with six broadband 2x2 Mach-Zehnder-based electro-optic switching elements (blue boxes labeled as M1-M6) and six waveguide crossings (yellow crosses).

Fig. 2
Fig. 2

(a) Schematic of the 2x2 Mach-Zehnder switching element used in the 4x4 optical switch. (b) Microscope image of the fabricated 2x2 MZ switching element. (c) Spectral switching response of the 2x2 MZ switching element in the “off” and “on” states.

Fig. 3
Fig. 3

Microscope image of the fabricated 4x4 silicon photonic switch. The input ports, output ports, and individual Mach-Zehnder switching elements are labeled in accordance with the schematic of Fig. 1.

Fig. 4
Fig. 4

Transmittance spectra from each input port to every output port as a function of wavelength for the “off” state of the 4x4 switch, where all MZ switching elements are in the tuned “off” (cross) states with power consumption listed in Table 2. Cross-talk less than −10 dB with a bandwidth of 10 nm (1524-1534 nm) is achieved for all input ports simultaneously.

Fig. 5
Fig. 5

Transmittance spectra of the 4x4 non-blocking silicon photonic switch in states #1 to #8 defined in Table 3. The horizontal wavelength axis ranges from 1505 nm to 1555 nm, and the vertical axis of normalized transmittance is plotted from −30 dB to 5 dB. The red, black, green, and blue traces represent transmission to the South, West, North, and East output ports, respectively. The four columns respectively represent transmittance spectra from the East, South, West and North input ports. The steady-state power consumption (P1-P8), collective optical bandwidth (BW) and cross-talk (XT) for each state are listed on the right side.

Fig. 6
Fig. 6

Eye diagrams taken at the output ports for the 12 possible input-output routings through the 4x4 non-blocking silicon photonic switch, using 40 Gbps 27-1 PRBS optical data at a wavelength of 1530 nm.

Tables (3)

Tables Icon

Table 1 Router Paths of the 4x4 Non-Blocking Switch

Tables Icon

Table 2 Steady State Power Consumption for Each MZ Switching Element

Tables Icon

Table 3 States of the 4x4 Non-Blocking Photonic Switch

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