Abstract

We report on the absorption of a 100nm thick hydrogenated amorphous silicon layer patterned as a planar photonic crystal (PPC), using laser holography and reactive ion etching. Compared to an unpatterned layer, electromagnetic simulation and optical measurements both show a 50% increase of the absorption over the 0.38-0.75micron spectral range, in the case of a one-dimensional PPC. Such absorbing photonic crystals, combined with transparent and conductive layers, may be at the basis of new photovoltaic solar cells.

© 2010 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. F. J. Beck, A. Polman, and K. R. Catchpole, “Tunable light trapping for solar cells using localized surface plasmons,” J. Appl. Phys. 105(11), 114310 (2009).
    [CrossRef]
  2. R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of Plasmonic Thin-Film Solar Cells with Broadband Absorption Enhancements,” Adv. Mater. 21(34), 3504–3509 (2009).
    [CrossRef]
  3. L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
    [CrossRef]
  4. A. Bielawny, C. Rockstuhl, F. Lederer, and R. B. Wehrspohn, “Intermediate reflectors for enhanced top cell performance in photovoltaic thin-film tandem cells,” Opt. Express 17(10), 8439–8446 (2009).
    [CrossRef] [PubMed]
  5. Y. Park, E. Drouard, O. El Daif, X. Letartre, P. Viktorovitch, A. Fave, A. Kaminski, M. Lemiti, and C. Seassal, “Absorption enhancement using photonic crystals for silicon thin film solar cells,” Opt. Express 17(16), 14312–14321 (2009).
    [CrossRef] [PubMed]
  6. Y.-C. Lee, C.-F. Huang, J.-Y. Chang, and M.-L. Wu, “Enhanced light trapping based on guided mode resonance effect for thin-film silicon solar cells with two filling-factor gratings,” Opt. Express 16(11), 7969–7975 (2008).
    [CrossRef] [PubMed]
  7. C. Lin and M. L. Povinelli, “Optical absorption enhancement in silicon nanowire arrays with a large lattice constant for photovoltaic applications,” Opt. Express 17(22), 19371–19381 (2009).
    [CrossRef] [PubMed]
  8. O. El Daif, E. Drouard, G. Gomard, A. Fave, A. Kaminski, M. Lemiti, Y. Park, X. Letartre, P. Viktorovitch, S. Ahn, H. Jeon, and C. Seassal, “Photonic Crystal Enhanced Absorption of Amorphous Silicon for Solar Cells,” Proc. 24th European Photovoltaic Solar Energy Conference, p. 548–552 (2009).
  9. S. B. Mallick, M. Agrawal, and P. Peumans, “Optimal light trapping in ultra-thin photonic crystal crystalline silicon solar cells,” Opt. Express 18(6), 5691–5706 (2010).
    [CrossRef] [PubMed]
  10. S. Zanotto, M. Liscidini, and L. C. Andreani, “Light trapping regimes in thin-film silicon solar cells with a photonic pattern,” Opt. Express 18(5), 4260–4274 (2010).
    [CrossRef] [PubMed]
  11. A. Fontcuberta i Morral, P. Roca i Cabarrocas, and C. Clerc, “Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements,” Phys. Rev. B 69(12), 125307 (2004).
    [CrossRef]
  12. Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
    [CrossRef]
  13. S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 mu m vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
    [CrossRef]
  14. L. Ferrier, O. El Daif, X. Letartre, P. Rojo Romeo, C. Seassal, R. Mazurczyk, and P. Viktorovitch, “Surface emitting microlaser based on 2D photonic crystal rod lattices,” Opt. Express 17(12), 9780–9788 (2009).
    [CrossRef] [PubMed]
  15. M. G. Moharam and T. K. Gaylord, “Rigorous coupled-wave analysis of planar-grating diffraction,” J. Opt. Soc. Am. 71(7), 811–818 (1981).
    [CrossRef]
  16. P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
    [CrossRef]
  17. C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
    [CrossRef]
  18. D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
    [CrossRef]
  19. A. Chutinan and S. John, “Light trapping and absorption optimization in certain thin-film photonic crystal architectures,” Phys. Rev. A 78(2), 023825 (2008).
    [CrossRef]
  20. V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
    [CrossRef]
  21. S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
    [CrossRef]

2010

2009

F. J. Beck, A. Polman, and K. R. Catchpole, “Tunable light trapping for solar cells using localized surface plasmons,” J. Appl. Phys. 105(11), 114310 (2009).
[CrossRef]

R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of Plasmonic Thin-Film Solar Cells with Broadband Absorption Enhancements,” Adv. Mater. 21(34), 3504–3509 (2009).
[CrossRef]

V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
[CrossRef]

A. Bielawny, C. Rockstuhl, F. Lederer, and R. B. Wehrspohn, “Intermediate reflectors for enhanced top cell performance in photovoltaic thin-film tandem cells,” Opt. Express 17(10), 8439–8446 (2009).
[CrossRef] [PubMed]

L. Ferrier, O. El Daif, X. Letartre, P. Rojo Romeo, C. Seassal, R. Mazurczyk, and P. Viktorovitch, “Surface emitting microlaser based on 2D photonic crystal rod lattices,” Opt. Express 17(12), 9780–9788 (2009).
[CrossRef] [PubMed]

Y. Park, E. Drouard, O. El Daif, X. Letartre, P. Viktorovitch, A. Fave, A. Kaminski, M. Lemiti, and C. Seassal, “Absorption enhancement using photonic crystals for silicon thin film solar cells,” Opt. Express 17(16), 14312–14321 (2009).
[CrossRef] [PubMed]

C. Lin and M. L. Povinelli, “Optical absorption enhancement in silicon nanowire arrays with a large lattice constant for photovoltaic applications,” Opt. Express 17(22), 19371–19381 (2009).
[CrossRef] [PubMed]

2008

S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
[CrossRef]

A. Chutinan and S. John, “Light trapping and absorption optimization in certain thin-film photonic crystal architectures,” Phys. Rev. A 78(2), 023825 (2008).
[CrossRef]

Y.-C. Lee, C.-F. Huang, J.-Y. Chang, and M.-L. Wu, “Enhanced light trapping based on guided mode resonance effect for thin-film silicon solar cells with two filling-factor gratings,” Opt. Express 16(11), 7969–7975 (2008).
[CrossRef] [PubMed]

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

2007

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 mu m vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

2005

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

2004

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

A. Fontcuberta i Morral, P. Roca i Cabarrocas, and C. Clerc, “Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements,” Phys. Rev. B 69(12), 125307 (2004).
[CrossRef]

1991

P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
[CrossRef]

1981

Abramov, A.

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

Agrawal, M.

Alamariu, B. A.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Andreani, L. C.

Bandiera, S.

S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
[CrossRef]

Barnard, E.

R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of Plasmonic Thin-Film Solar Cells with Broadband Absorption Enhancements,” Adv. Mater. 21(34), 3504–3509 (2009).
[CrossRef]

Beaucarne, G.

V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
[CrossRef]

Beck, F. J.

F. J. Beck, A. Polman, and K. R. Catchpole, “Tunable light trapping for solar cells using localized surface plasmons,” J. Appl. Phys. 105(11), 114310 (2009).
[CrossRef]

Benbakir, B.

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 mu m vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

Bermel, P.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Bielawny, A.

Boutami, S.

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 mu m vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

Broderick, K. A.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Brongersma, M. L.

R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of Plasmonic Thin-Film Solar Cells with Broadband Absorption Enhancements,” Adv. Mater. 21(34), 3504–3509 (2009).
[CrossRef]

Catchpole, K. R.

F. J. Beck, A. Polman, and K. R. Catchpole, “Tunable light trapping for solar cells using localized surface plasmons,” J. Appl. Phys. 105(11), 114310 (2009).
[CrossRef]

Celis, J.-P.

V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
[CrossRef]

Chang, J.-Y.

Chevrier, J. B.

P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
[CrossRef]

Cho, C.-O.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

Cho, J.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

Choe, Y.-H.

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

Choi, W. J.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

Chutinan, A.

A. Chutinan and S. John, “Light trapping and absorption optimization in certain thin-film photonic crystal architectures,” Phys. Rev. A 78(2), 023825 (2008).
[CrossRef]

Clerc, C.

A. Fontcuberta i Morral, P. Roca i Cabarrocas, and C. Clerc, “Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements,” Phys. Rev. B 69(12), 125307 (2004).
[CrossRef]

Depauw, V.

V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
[CrossRef]

Drouard, E.

Duan, X.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

El Daif, O.

Fave, A.

Ferrier, L.

Fontcuberta i Morral, A.

A. Fontcuberta i Morral, P. Roca i Cabarrocas, and C. Clerc, “Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements,” Phys. Rev. B 69(12), 125307 (2004).
[CrossRef]

Gaylord, T. K.

Gordon, I.

V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
[CrossRef]

Greffet, J.-J.

S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
[CrossRef]

Gueunier-Farret, M. E.

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

Hong, C.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Huang, C.-F.

Huc, J.

P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
[CrossRef]

Jacob, D.

S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
[CrossRef]

Jeon, H.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

Joannopoulos, J.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

John, S.

A. Chutinan and S. John, “Light trapping and absorption optimization in certain thin-film photonic crystal architectures,” Phys. Rev. A 78(2), 023825 (2008).
[CrossRef]

Johnson, E. V.

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

Kaminski, A.

Kim, D.-H.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

Kim, H.-W.

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

Kimerling, L. C.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Kleider, J. P.

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

Laroche, M.

S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
[CrossRef]

Leclercq, J. L.

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 mu m vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

Lederer, F.

Lee, B.-S.

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

Lee, Y.-C.

Lemiti, M.

Letartre, X.

Lin, C.

Liscidini, M.

Liu, J.

R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of Plasmonic Thin-Film Solar Cells with Broadband Absorption Enhancements,” Adv. Mater. 21(34), 3504–3509 (2009).
[CrossRef]

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Lloret, A.

P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
[CrossRef]

Longeaud, C.

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

Mallick, S. B.

Marquier, F.

S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
[CrossRef]

Mazurczyk, R.

Mertensa, R.

V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
[CrossRef]

Moharam, M. G.

Muller, T.

S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
[CrossRef]

Pala, R. A.

R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of Plasmonic Thin-Film Solar Cells with Broadband Absorption Enhancements,” Adv. Mater. 21(34), 3504–3509 (2009).
[CrossRef]

Parey, J. Y.

P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
[CrossRef]

Park, Q.-H.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

Park, Y.

Y. Park, E. Drouard, O. El Daif, X. Letartre, P. Viktorovitch, A. Fave, A. Kaminski, M. Lemiti, and C. Seassal, “Absorption enhancement using photonic crystals for silicon thin film solar cells,” Opt. Express 17(16), 14312–14321 (2009).
[CrossRef] [PubMed]

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

Peumans, P.

Polman, A.

F. J. Beck, A. Polman, and K. R. Catchpole, “Tunable light trapping for solar cells using localized surface plasmons,” J. Appl. Phys. 105(11), 114310 (2009).
[CrossRef]

Poortmans, J.

V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
[CrossRef]

Povinelli, M. L.

Roca i Cabarrocas, P.

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

A. Fontcuberta i Morral, P. Roca i Cabarrocas, and C. Clerc, “Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements,” Phys. Rev. B 69(12), 125307 (2004).
[CrossRef]

P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
[CrossRef]

Rockstuhl, C.

Roh, Y.-G.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

Rojo Romeo, P.

Schmitt, J. P. M.

P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
[CrossRef]

Seassal, C.

Seo Im, J.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

Sone, C.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

Soo Park, Y.

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

Soro, Y. M.

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

Viktorovitch, P.

Wehrspohn, R. B.

White, J.

R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of Plasmonic Thin-Film Solar Cells with Broadband Absorption Enhancements,” Adv. Mater. 21(34), 3504–3509 (2009).
[CrossRef]

Wu, M.-L.

Yi, Y.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Zanotto, S.

Zeng, L.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Adv. Mater.

R. A. Pala, J. White, E. Barnard, J. Liu, and M. L. Brongersma, “Design of Plasmonic Thin-Film Solar Cells with Broadband Absorption Enhancements,” Adv. Mater. 21(34), 3504–3509 (2009).
[CrossRef]

Appl. Phys. Lett.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

S. Boutami, B. Benbakir, J. L. Leclercq, and P. Viktorovitch, “Compact and polarization controlled 1.55 mu m vertical-cavity surface-emitting laser using single-layer photonic crystal mirror,” Appl. Phys. Lett. 91(7), 071105 (2007).
[CrossRef]

D.-H. Kim, C.-O. Cho, Y.-G. Roh, H. Jeon, Y. Soo Park, J. Cho, J. Seo Im, C. Sone, Y. Park, W. J. Choi, and Q.-H. Park, “Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns,” Appl. Phys. Lett. 87(20), 203508 (2005).
[CrossRef]

S. Bandiera, D. Jacob, T. Muller, F. Marquier, M. Laroche, and J.-J. Greffet, “Enhanced absorption by nanostructured silicon,” Appl. Phys. Lett. 93(19), 193103 (2008).
[CrossRef]

J. Appl. Phys.

F. J. Beck, A. Polman, and K. R. Catchpole, “Tunable light trapping for solar cells using localized surface plasmons,” J. Appl. Phys. 105(11), 114310 (2009).
[CrossRef]

J. Non-Cryst. Solids

Y. M. Soro, A. Abramov, M. E. Gueunier-Farret, E. V. Johnson, C. Longeaud, P. Roca i Cabarrocas, and J. P. Kleider, ““Device grade hydrogenated polymorphous silicon deposited at high rates,” J. Non-Cryst. Solids 354(19-25), 2092–2095 (2008).
[CrossRef]

J. Opt. Soc. Am.

J. Vac. Sci. Technol. A

P. Roca i Cabarrocas, J. B. Chevrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, “A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition,” J. Vac. Sci. Technol. A 9(4), 2331–2341 (1991).
[CrossRef]

Jpn. J. Appl. Phys.

C.-O. Cho, Y.-G. Roh, Y. Park, H. Jeon, B.-S. Lee, H.-W. Kim, and Y.-H. Choe, “Photonic crystal slab waveguides fabricated by the combination of holography and photolithography,” Jpn. J. Appl. Phys. 43(No. 4A), 1384–1387 (2004).
[CrossRef]

Mater. Sci. Eng. B

V. Depauw, I. Gordon, G. Beaucarne, J. Poortmans, R. Mertensa, and J.-P. Celis, “Proof of concept of an epitaxy-free layer-transfer process for silicon solar cells based on the reorganisation of macropores upon annealing,” Mater. Sci. Eng. B 159–160, 286–290 (2009).
[CrossRef]

Opt. Express

Y.-C. Lee, C.-F. Huang, J.-Y. Chang, and M.-L. Wu, “Enhanced light trapping based on guided mode resonance effect for thin-film silicon solar cells with two filling-factor gratings,” Opt. Express 16(11), 7969–7975 (2008).
[CrossRef] [PubMed]

A. Bielawny, C. Rockstuhl, F. Lederer, and R. B. Wehrspohn, “Intermediate reflectors for enhanced top cell performance in photovoltaic thin-film tandem cells,” Opt. Express 17(10), 8439–8446 (2009).
[CrossRef] [PubMed]

L. Ferrier, O. El Daif, X. Letartre, P. Rojo Romeo, C. Seassal, R. Mazurczyk, and P. Viktorovitch, “Surface emitting microlaser based on 2D photonic crystal rod lattices,” Opt. Express 17(12), 9780–9788 (2009).
[CrossRef] [PubMed]

Y. Park, E. Drouard, O. El Daif, X. Letartre, P. Viktorovitch, A. Fave, A. Kaminski, M. Lemiti, and C. Seassal, “Absorption enhancement using photonic crystals for silicon thin film solar cells,” Opt. Express 17(16), 14312–14321 (2009).
[CrossRef] [PubMed]

C. Lin and M. L. Povinelli, “Optical absorption enhancement in silicon nanowire arrays with a large lattice constant for photovoltaic applications,” Opt. Express 17(22), 19371–19381 (2009).
[CrossRef] [PubMed]

S. Zanotto, M. Liscidini, and L. C. Andreani, “Light trapping regimes in thin-film silicon solar cells with a photonic pattern,” Opt. Express 18(5), 4260–4274 (2010).
[CrossRef] [PubMed]

S. B. Mallick, M. Agrawal, and P. Peumans, “Optimal light trapping in ultra-thin photonic crystal crystalline silicon solar cells,” Opt. Express 18(6), 5691–5706 (2010).
[CrossRef] [PubMed]

Phys. Rev. A

A. Chutinan and S. John, “Light trapping and absorption optimization in certain thin-film photonic crystal architectures,” Phys. Rev. A 78(2), 023825 (2008).
[CrossRef]

Phys. Rev. B

A. Fontcuberta i Morral, P. Roca i Cabarrocas, and C. Clerc, “Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements,” Phys. Rev. B 69(12), 125307 (2004).
[CrossRef]

Other

O. El Daif, E. Drouard, G. Gomard, A. Fave, A. Kaminski, M. Lemiti, Y. Park, X. Letartre, P. Viktorovitch, S. Ahn, H. Jeon, and C. Seassal, “Photonic Crystal Enhanced Absorption of Amorphous Silicon for Solar Cells,” Proc. 24th European Photovoltaic Solar Energy Conference, p. 548–552 (2009).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (5)

Fig. 1
Fig. 1

(a) Schematics of a 1D PPC patterned in an absorbing layer (violet) deposited on a glass substrate (clear blue). (b) The material surface filling factor (ff) and the lattice parameter (L) of the 1DPC are indicated. Incoming light is normal to the layer, the two orientations of the electric field are shown.

Fig. 2
Fig. 2

Contour mapping of the integrated absorbency of a 100nm patterned aSi:H layer deposited on glass. The proportion of absorbed solar light intensity, integrated over 380-750nm, is shown as a function of the PC parameters (L, ff, see Fig. 1).

Fig. 3
Fig. 3

Close-up (a) and general scanning electron microscope (SEM) view (b) of a 400nm thick processed sample, covered by a thin chromium layer to increase the image quality.

Fig. 4
Fig. 4

(a) Reflection and transmission spectra of the 95nm thick 1D PPC (shown for unpolarized light). (b) Derived absorption spectra of the same structure for Ex and Ey polarizations. (c) Absorption spectra of the 1D PPC structure (blue squares), of an unpatterned layer with the same thickness (red crosses), and of an unpatterned layer of 400nm (black plain circles with line). Simulations are also shown for the 1D PPC (blue continuous line) and the corresponding unpatterned structure (red continuous line).

Fig. 5
Fig. 5

Experimental absorption ratio between the 95nm-thick patterned and unpatterned layers. No points are shown above 700nm as error bars are larger than the ratio, given the extremely small measured absolute values.

Metrics