Abstract

This paper presents an all-silica miniature optical fiber pressure/acoustic sensor based on the Fabry-Perot (FP) interferometric principle. The endface of the etched optical fiber tip and silica thin diaphragm on it form the FP structure. The uniform and thin silica diaphragm was fabricated by etching away the silicon substrate from a commercial silicon wafer that has a thermal oxide layer. The thin film was directly thermally bonded to the endface of the optical fiber thus creating the Fabry-Perot cavity. Thin films with a thickness from 1µm to 3µm have been bonded successfully. The sensor shows good linearity and hysteresis during measurement. A sensor with 0.75 µm-thick diaphragm thinned by post silica etching was demonstrated to have a sensitivity of 11 nm/kPa. The new sensor has great potential to be used as a non-intrusive pressure sensor in a variety of sensing applications.

© 2010 OSA

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  1. O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, “A fiber-optic pressure microsensor for biomedical applications,” Sens. Actuators A Phys. 66(1-3), 150–154 (1998).
    [CrossRef]
  2. W. Wang, N. Wu, Y. Tian, X. Wang, C. Niezrecki, and J. Chen, “Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber,” Opt. Express 17(19), 16613–16618 (2009).
    [CrossRef] [PubMed]
  3. D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, “A novel MEMS pressure sensor fabricated on an optical fiber,” IEEE Photon. Technol. Lett. 13(9), 993–995 (2001).
    [CrossRef]
  4. D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, “Novel MEMS pressure and temperature sensors fabricated on optical fibers,” J. Micromech. Microeng. 12(3), 229–235 (2002).
    [CrossRef]
  5. M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
    [CrossRef]
  6. Y. Zhu and A. Wang, “Miniature fiber-optic pressure sensor,” IEEE Photon. Technol. Lett. 17, 1–3 (2005).
  7. M. Han, X. Wang, J. Xu, K. L. Cooper, and A. Wang, “A diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure,” Opt. Eng. 44(6), 060506 (2005).
    [CrossRef]
  8. J. Xu, X. Wang, K. L. Cooper, and A. Wang, “Miniature all-silica fiber optic pressure and acoustic sensors,” Opt. Lett. 30(24), 3269–3271 (2005).
    [CrossRef]
  9. J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
    [CrossRef]
  10. Y. Zhu, K. L. Cooper, G. R. Pickrell, and A. Wang, “High-temperature fiber-tip pressure sensor,” J. Lightwave Technol. 24(2), 861–869 (2006).
    [CrossRef]
  11. X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, “All-fused-silica miniature optical fiber tip pressure sensor,” Opt. Lett. 31(7), 885–887 (2006).
    [CrossRef] [PubMed]
  12. S. H. Aref, H. Latifi, M. I. Zibaii, and M. Afshari, “Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application,” Opt. Commun. 269(2), 322–330 (2007).
    [CrossRef]
  13. Z. L. Ran, Y. J. Rao, W. J. Liu, X. Liao, and K. S. Chiang, “Laser-micromachined Fabry-Perot optical fiber tip sensor for high-resolution temperature-independent measurement of refractive index,” Opt. Express 16(3), 2252–2263 (2008).
    [CrossRef] [PubMed]
  14. T. Bae, R. A. Atkins, H. F. Taylor, and W. N. Gibler, “Interferometric fiber-optic sensor embedded in a spark plug for in-cylinder pressure measurement in engines,” Appl. Opt. 42(6), 1003–1007 (2003).
    [CrossRef] [PubMed]
  15. T. Rice, R. Duncan, D. Gifford, and B. Childers, “Fiber optic distributed strain, acoustic emission, and moisture detection sensors for health maintenance,” in IEEE Systems Readiness Technology Conference, 505- 514 (2003).
  16. E. Cibula, S. Pevec, B. Lenardic, E. Pinet, and D. Donlagic, “Miniature all-glass robust pressure sensor,” Opt. Express 17(7), 5098–5106 (2009).
    [CrossRef] [PubMed]
  17. D. Donlagic and E. Cibula, “All-fiber high-sensitivity pressure sensor with SiO2 diaphragm,” Opt. Lett. 30(16), 2071–2073 (2005).
    [CrossRef] [PubMed]
  18. K. Totsu, Y. Haga, and M. Esashi, “Ultra-miniature fiber-optic pressure sensor using white light interferometry,” J. Micromech. Microeng. 15(1), 71–75 (2005).
    [CrossRef]
  19. E. Cibula and D. Donlagić, “Miniature fiber-optic pressure sensor with a polymer diaphragm,” Appl. Opt. 44(14), 2736–2744 (2005).
    [CrossRef] [PubMed]
  20. A. Saran, D. C. Abeysinghe, R. Flenniken, and J. T. Boyd, “Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers,” J. Micromech. Microeng. 13(2), 346–351 (2003).
    [CrossRef]

2009 (2)

2008 (1)

2007 (1)

S. H. Aref, H. Latifi, M. I. Zibaii, and M. Afshari, “Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application,” Opt. Commun. 269(2), 322–330 (2007).
[CrossRef]

2006 (2)

2005 (7)

J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
[CrossRef]

E. Cibula and D. Donlagić, “Miniature fiber-optic pressure sensor with a polymer diaphragm,” Appl. Opt. 44(14), 2736–2744 (2005).
[CrossRef] [PubMed]

D. Donlagic and E. Cibula, “All-fiber high-sensitivity pressure sensor with SiO2 diaphragm,” Opt. Lett. 30(16), 2071–2073 (2005).
[CrossRef] [PubMed]

J. Xu, X. Wang, K. L. Cooper, and A. Wang, “Miniature all-silica fiber optic pressure and acoustic sensors,” Opt. Lett. 30(24), 3269–3271 (2005).
[CrossRef]

K. Totsu, Y. Haga, and M. Esashi, “Ultra-miniature fiber-optic pressure sensor using white light interferometry,” J. Micromech. Microeng. 15(1), 71–75 (2005).
[CrossRef]

Y. Zhu and A. Wang, “Miniature fiber-optic pressure sensor,” IEEE Photon. Technol. Lett. 17, 1–3 (2005).

M. Han, X. Wang, J. Xu, K. L. Cooper, and A. Wang, “A diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure,” Opt. Eng. 44(6), 060506 (2005).
[CrossRef]

2003 (3)

A. Saran, D. C. Abeysinghe, R. Flenniken, and J. T. Boyd, “Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers,” J. Micromech. Microeng. 13(2), 346–351 (2003).
[CrossRef]

T. Bae, R. A. Atkins, H. F. Taylor, and W. N. Gibler, “Interferometric fiber-optic sensor embedded in a spark plug for in-cylinder pressure measurement in engines,” Appl. Opt. 42(6), 1003–1007 (2003).
[CrossRef] [PubMed]

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

2002 (1)

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, “Novel MEMS pressure and temperature sensors fabricated on optical fibers,” J. Micromech. Microeng. 12(3), 229–235 (2002).
[CrossRef]

2001 (1)

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, “A novel MEMS pressure sensor fabricated on an optical fiber,” IEEE Photon. Technol. Lett. 13(9), 993–995 (2001).
[CrossRef]

1998 (1)

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, “A fiber-optic pressure microsensor for biomedical applications,” Sens. Actuators A Phys. 66(1-3), 150–154 (1998).
[CrossRef]

Abeysinghe, D. C.

A. Saran, D. C. Abeysinghe, R. Flenniken, and J. T. Boyd, “Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers,” J. Micromech. Microeng. 13(2), 346–351 (2003).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, “Novel MEMS pressure and temperature sensors fabricated on optical fibers,” J. Micromech. Microeng. 12(3), 229–235 (2002).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, “A novel MEMS pressure sensor fabricated on an optical fiber,” IEEE Photon. Technol. Lett. 13(9), 993–995 (2001).
[CrossRef]

Afshari, M.

S. H. Aref, H. Latifi, M. I. Zibaii, and M. Afshari, “Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application,” Opt. Commun. 269(2), 322–330 (2007).
[CrossRef]

Anderson, S. J.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Aref, S. H.

S. H. Aref, H. Latifi, M. I. Zibaii, and M. Afshari, “Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application,” Opt. Commun. 269(2), 322–330 (2007).
[CrossRef]

Atkins, R. A.

Bae, T.

Barton, J. S.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Boyd, J. T.

A. Saran, D. C. Abeysinghe, R. Flenniken, and J. T. Boyd, “Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers,” J. Micromech. Microeng. 13(2), 346–351 (2003).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, “Novel MEMS pressure and temperature sensors fabricated on optical fibers,” J. Micromech. Microeng. 12(3), 229–235 (2002).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, “A novel MEMS pressure sensor fabricated on an optical fiber,” IEEE Photon. Technol. Lett. 13(9), 993–995 (2001).
[CrossRef]

Chana, K. S.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Chen, J.

Chiang, K. S.

Cibula, E.

Cooper, K. L.

Y. Zhu, K. L. Cooper, G. R. Pickrell, and A. Wang, “High-temperature fiber-tip pressure sensor,” J. Lightwave Technol. 24(2), 861–869 (2006).
[CrossRef]

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, “All-fused-silica miniature optical fiber tip pressure sensor,” Opt. Lett. 31(7), 885–887 (2006).
[CrossRef] [PubMed]

M. Han, X. Wang, J. Xu, K. L. Cooper, and A. Wang, “A diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure,” Opt. Eng. 44(6), 060506 (2005).
[CrossRef]

J. Xu, X. Wang, K. L. Cooper, and A. Wang, “Miniature all-silica fiber optic pressure and acoustic sensors,” Opt. Lett. 30(24), 3269–3271 (2005).
[CrossRef]

J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
[CrossRef]

Dasgupta, S.

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, “Novel MEMS pressure and temperature sensors fabricated on optical fibers,” J. Micromech. Microeng. 12(3), 229–235 (2002).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, “A novel MEMS pressure sensor fabricated on an optical fiber,” IEEE Photon. Technol. Lett. 13(9), 993–995 (2001).
[CrossRef]

Donlagic, D.

Esashi, M.

K. Totsu, Y. Haga, and M. Esashi, “Ultra-miniature fiber-optic pressure sensor using white light interferometry,” J. Micromech. Microeng. 15(1), 71–75 (2005).
[CrossRef]

Flenniken, R.

A. Saran, D. C. Abeysinghe, R. Flenniken, and J. T. Boyd, “Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers,” J. Micromech. Microeng. 13(2), 346–351 (2003).
[CrossRef]

Gander, M. J.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Gibler, W. N.

Haga, Y.

K. Totsu, Y. Haga, and M. Esashi, “Ultra-miniature fiber-optic pressure sensor using white light interferometry,” J. Micromech. Microeng. 15(1), 71–75 (2005).
[CrossRef]

Han, M.

M. Han, X. Wang, J. Xu, K. L. Cooper, and A. Wang, “A diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure,” Opt. Eng. 44(6), 060506 (2005).
[CrossRef]

Itoh, H.

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, “A fiber-optic pressure microsensor for biomedical applications,” Sens. Actuators A Phys. 66(1-3), 150–154 (1998).
[CrossRef]

Jackson, H. E.

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, “Novel MEMS pressure and temperature sensors fabricated on optical fibers,” J. Micromech. Microeng. 12(3), 229–235 (2002).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, “A novel MEMS pressure sensor fabricated on an optical fiber,” IEEE Photon. Technol. Lett. 13(9), 993–995 (2001).
[CrossRef]

Jones, J. D. C.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Jones, T. V.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Kohashi, M.

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, “A fiber-optic pressure microsensor for biomedical applications,” Sens. Actuators A Phys. 66(1-3), 150–154 (1998).
[CrossRef]

Latifi, H.

S. H. Aref, H. Latifi, M. I. Zibaii, and M. Afshari, “Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application,” Opt. Commun. 269(2), 322–330 (2007).
[CrossRef]

Lenardic, B.

Liao, X.

Liu, W. J.

Macpherson, W. N.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Niezrecki, C.

Peng, W.

J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
[CrossRef]

Pevec, S.

Pickrell, G. R.

Y. Zhu, K. L. Cooper, G. R. Pickrell, and A. Wang, “High-temperature fiber-tip pressure sensor,” J. Lightwave Technol. 24(2), 861–869 (2006).
[CrossRef]

J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
[CrossRef]

Pinet, E.

Ran, Z. L.

Rao, Y. J.

Reuben, R. L.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Saran, A.

A. Saran, D. C. Abeysinghe, R. Flenniken, and J. T. Boyd, “Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers,” J. Micromech. Microeng. 13(2), 346–351 (2003).
[CrossRef]

Stevens, R.

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

Sugihara, M.

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, “A fiber-optic pressure microsensor for biomedical applications,” Sens. Actuators A Phys. 66(1-3), 150–154 (1998).
[CrossRef]

Taylor, H. F.

Tian, Y.

Tohyama, O.

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, “A fiber-optic pressure microsensor for biomedical applications,” Sens. Actuators A Phys. 66(1-3), 150–154 (1998).
[CrossRef]

Totsu, K.

K. Totsu, Y. Haga, and M. Esashi, “Ultra-miniature fiber-optic pressure sensor using white light interferometry,” J. Micromech. Microeng. 15(1), 71–75 (2005).
[CrossRef]

Wang, A.

Y. Zhu, K. L. Cooper, G. R. Pickrell, and A. Wang, “High-temperature fiber-tip pressure sensor,” J. Lightwave Technol. 24(2), 861–869 (2006).
[CrossRef]

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, “All-fused-silica miniature optical fiber tip pressure sensor,” Opt. Lett. 31(7), 885–887 (2006).
[CrossRef] [PubMed]

M. Han, X. Wang, J. Xu, K. L. Cooper, and A. Wang, “A diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure,” Opt. Eng. 44(6), 060506 (2005).
[CrossRef]

Y. Zhu and A. Wang, “Miniature fiber-optic pressure sensor,” IEEE Photon. Technol. Lett. 17, 1–3 (2005).

J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
[CrossRef]

J. Xu, X. Wang, K. L. Cooper, and A. Wang, “Miniature all-silica fiber optic pressure and acoustic sensors,” Opt. Lett. 30(24), 3269–3271 (2005).
[CrossRef]

Wang, W.

Wang, X.

W. Wang, N. Wu, Y. Tian, X. Wang, C. Niezrecki, and J. Chen, “Optical pressure/acoustic sensor with precise Fabry-Perot cavity length control using angle polished fiber,” Opt. Express 17(19), 16613–16618 (2009).
[CrossRef] [PubMed]

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, “All-fused-silica miniature optical fiber tip pressure sensor,” Opt. Lett. 31(7), 885–887 (2006).
[CrossRef] [PubMed]

M. Han, X. Wang, J. Xu, K. L. Cooper, and A. Wang, “A diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure,” Opt. Eng. 44(6), 060506 (2005).
[CrossRef]

J. Xu, X. Wang, K. L. Cooper, and A. Wang, “Miniature all-silica fiber optic pressure and acoustic sensors,” Opt. Lett. 30(24), 3269–3271 (2005).
[CrossRef]

J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
[CrossRef]

Wu, N.

Xu, J.

X. Wang, J. Xu, Y. Zhu, K. L. Cooper, and A. Wang, “All-fused-silica miniature optical fiber tip pressure sensor,” Opt. Lett. 31(7), 885–887 (2006).
[CrossRef] [PubMed]

M. Han, X. Wang, J. Xu, K. L. Cooper, and A. Wang, “A diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure,” Opt. Eng. 44(6), 060506 (2005).
[CrossRef]

J. Xu, X. Wang, K. L. Cooper, and A. Wang, “Miniature all-silica fiber optic pressure and acoustic sensors,” Opt. Lett. 30(24), 3269–3271 (2005).
[CrossRef]

J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
[CrossRef]

Zhu, Y.

Zibaii, M. I.

S. H. Aref, H. Latifi, M. I. Zibaii, and M. Afshari, “Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application,” Opt. Commun. 269(2), 322–330 (2007).
[CrossRef]

Appl. Opt. (2)

IEEE Photon. Technol. Lett. (3)

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, “A novel MEMS pressure sensor fabricated on an optical fiber,” IEEE Photon. Technol. Lett. 13(9), 993–995 (2001).
[CrossRef]

Y. Zhu and A. Wang, “Miniature fiber-optic pressure sensor,” IEEE Photon. Technol. Lett. 17, 1–3 (2005).

J. Xu, G. R. Pickrell, X. Wang, W. Peng, K. L. Cooper, and A. Wang, “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photon. Technol. Lett. 17(4), 870–872 (2005).
[CrossRef]

IEEE Sens. J (1)

M. J. Gander, W. N. Macpherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, “Embedded micromachined fiber-optic Fabry–Perot pressure sensors in aerodynamics applications,” IEEE Sens. J 3(1), 102–107 (2003).
[CrossRef]

J. Lightwave Technol. (1)

J. Micromech. Microeng. (3)

K. Totsu, Y. Haga, and M. Esashi, “Ultra-miniature fiber-optic pressure sensor using white light interferometry,” J. Micromech. Microeng. 15(1), 71–75 (2005).
[CrossRef]

A. Saran, D. C. Abeysinghe, R. Flenniken, and J. T. Boyd, “Anodic bonding of optical fibers-to-silicon for integrating MEMS devices and optical fibers,” J. Micromech. Microeng. 13(2), 346–351 (2003).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, “Novel MEMS pressure and temperature sensors fabricated on optical fibers,” J. Micromech. Microeng. 12(3), 229–235 (2002).
[CrossRef]

Opt. Commun. (1)

S. H. Aref, H. Latifi, M. I. Zibaii, and M. Afshari, “Fiber optic Fabry-Perot pressure sensor with low sensitivity to temperature changes for downhole application,” Opt. Commun. 269(2), 322–330 (2007).
[CrossRef]

Opt. Eng. (1)

M. Han, X. Wang, J. Xu, K. L. Cooper, and A. Wang, “A diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure,” Opt. Eng. 44(6), 060506 (2005).
[CrossRef]

Opt. Express (3)

Opt. Lett. (3)

Sens. Actuators A Phys. (1)

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, “A fiber-optic pressure microsensor for biomedical applications,” Sens. Actuators A Phys. 66(1-3), 150–154 (1998).
[CrossRef]

Other (1)

T. Rice, R. Duncan, D. Gifford, and B. Childers, “Fiber optic distributed strain, acoustic emission, and moisture detection sensors for health maintenance,” in IEEE Systems Readiness Technology Conference, 505- 514 (2003).

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Figures (8)

Fig. 1
Fig. 1

Schematic process of the direct bonding of silica thin film.

Fig. 2
Fig. 2

Photomicrograph of the fiber tip with bonded diaphragm. (a) fiber tip with a 1 µm-thick diaphragm and (b) fiber tip with a 3 µm-thick diaphragm.

Fig. 3
Fig. 3

FIB image of the cross-section of the diaphragm and the bonding interface of the intermediate stage sensor. (a) the enlarged image of the bonding area between diaphragm and optical fiber (b) the whole picture of the milling area and the sensor head.

Fig. 4
Fig. 4

The reflection spectrum of the sensor with approximately a 2.2 um thick diaphragm.

Fig. 5
Fig. 5

The gauge pressure by calibrated optical fiber sensor for two pressure changing cycles (dotted line). Red curve shows the residual between optical sensor and reference sensor which is very small.

Fig. 6
Fig. 6

Linearity and hysteresis of the sensor after 20 minutes of BOE etching.

Fig. 7
Fig. 7

Sensitivity of the pressure sensor for different etching times in 7:1 BOE.

Fig. 8
Fig. 8

Temperature dependant diaphragm displacement.

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