Abstract

Mesa-structuring of InGaAs/InAlAs photoconductive layers is performed employing a chemical assisted ion beam etching (CAIBE) process. Terahertz photoconductive antennas for 1.5 µm operation are fabricated and evaluated in a time domain spectrometer. Order-of-magnitude improvements versus planar antennas are demonstrated in terms of emitter power, dark current and receiver sensitivity.

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  1. M. Suzuki and M. Tonouchi, “Fe-implanted InGaAs photoconductive terahertz detectors triggered by 1.56 µm femtosecond optical pulses,” Appl. Phys. Lett. 86(16), 163504 (2005).
    [CrossRef]
  2. N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
    [CrossRef]
  3. B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
    [CrossRef] [PubMed]
  4. E. R. Brown, “A photoconductive model for superior GaAs THz photomixers,” Appl. Phys. Lett. 75(6), 769 (1999).
    [CrossRef]
  5. L. Duvillaret, F. Garet, J.-F. Roux, and J.-L. Coutaz, “Analytical modeling and optimization of terahertz time-domain spectroscopy experiments, using photoswitches as antennas,” IEEE J. Sel. Top. Quantum Electron. 7(4), 615–623 (2001).
    [CrossRef]

2008 (1)

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

2005 (2)

M. Suzuki and M. Tonouchi, “Fe-implanted InGaAs photoconductive terahertz detectors triggered by 1.56 µm femtosecond optical pulses,” Appl. Phys. Lett. 86(16), 163504 (2005).
[CrossRef]

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

2001 (1)

L. Duvillaret, F. Garet, J.-F. Roux, and J.-L. Coutaz, “Analytical modeling and optimization of terahertz time-domain spectroscopy experiments, using photoswitches as antennas,” IEEE J. Sel. Top. Quantum Electron. 7(4), 615–623 (2001).
[CrossRef]

1999 (1)

E. R. Brown, “A photoconductive model for superior GaAs THz photomixers,” Appl. Phys. Lett. 75(6), 769 (1999).
[CrossRef]

Bernas, H.

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

Blary, K.

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

Böttcher, J.

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

Brown, E. R.

E. R. Brown, “A photoconductive model for superior GaAs THz photomixers,” Appl. Phys. Lett. 75(6), 769 (1999).
[CrossRef]

Chimot, N.

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

Coutaz, J.-L.

L. Duvillaret, F. Garet, J.-F. Roux, and J.-L. Coutaz, “Analytical modeling and optimization of terahertz time-domain spectroscopy experiments, using photoswitches as antennas,” IEEE J. Sel. Top. Quantum Electron. 7(4), 615–623 (2001).
[CrossRef]

Crozat, P.

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

Duvillaret, L.

L. Duvillaret, F. Garet, J.-F. Roux, and J.-L. Coutaz, “Analytical modeling and optimization of terahertz time-domain spectroscopy experiments, using photoswitches as antennas,” IEEE J. Sel. Top. Quantum Electron. 7(4), 615–623 (2001).
[CrossRef]

Garet, F.

L. Duvillaret, F. Garet, J.-F. Roux, and J.-L. Coutaz, “Analytical modeling and optimization of terahertz time-domain spectroscopy experiments, using photoswitches as antennas,” IEEE J. Sel. Top. Quantum Electron. 7(4), 615–623 (2001).
[CrossRef]

Joulaud, L.

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

Künzel, H.

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

Lampin, J. F.

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

Mangeney, J.

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

Roehle, H.

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

Roux, J.-F.

L. Duvillaret, F. Garet, J.-F. Roux, and J.-L. Coutaz, “Analytical modeling and optimization of terahertz time-domain spectroscopy experiments, using photoswitches as antennas,” IEEE J. Sel. Top. Quantum Electron. 7(4), 615–623 (2001).
[CrossRef]

Sartorius, B.

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

Schell, M.

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

Schlak, M.

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

Stanze, D.

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

Suzuki, M.

M. Suzuki and M. Tonouchi, “Fe-implanted InGaAs photoconductive terahertz detectors triggered by 1.56 µm femtosecond optical pulses,” Appl. Phys. Lett. 86(16), 163504 (2005).
[CrossRef]

Tonouchi, M.

M. Suzuki and M. Tonouchi, “Fe-implanted InGaAs photoconductive terahertz detectors triggered by 1.56 µm femtosecond optical pulses,” Appl. Phys. Lett. 86(16), 163504 (2005).
[CrossRef]

Venghaus, H.

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

Appl. Phys. Lett. (3)

M. Suzuki and M. Tonouchi, “Fe-implanted InGaAs photoconductive terahertz detectors triggered by 1.56 µm femtosecond optical pulses,” Appl. Phys. Lett. 86(16), 163504 (2005).
[CrossRef]

N. Chimot, J. Mangeney, L. Joulaud, P. Crozat, H. Bernas, K. Blary, and J. F. Lampin, “Terahertz radiation from heavy-ion-irradiated In0.53Ga0.47As photoconductive antenna excited at 1.55 µm,” Appl. Phys. Lett. 87(19), 193510 (2005).
[CrossRef]

E. R. Brown, “A photoconductive model for superior GaAs THz photomixers,” Appl. Phys. Lett. 75(6), 769 (1999).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

L. Duvillaret, F. Garet, J.-F. Roux, and J.-L. Coutaz, “Analytical modeling and optimization of terahertz time-domain spectroscopy experiments, using photoswitches as antennas,” IEEE J. Sel. Top. Quantum Electron. 7(4), 615–623 (2001).
[CrossRef]

Opt. Express (1)

B. Sartorius, H. Roehle, H. Künzel, J. Böttcher, M. Schlak, D. Stanze, H. Venghaus, and M. Schell, “All-fiber terahertz time-domain spectrometer operating at 1.5 microm telecom wavelengths,” Opt. Express 16(13), 9565–9570 (2008).
[CrossRef] [PubMed]

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Figures (6)

Fig. 1
Fig. 1

Planar (a, b) versus mesa (c, d) structured antennas. Side view (a, c) and top view (b, d)

Fig. 2
Fig. 2

(a) Scheme of the CAIBE Process, (b) SEM picture of a mesa-structured stripline antenna

Fig. 3
Fig. 3

Comparison of planar versus mesa antennas (dipole 25/10 µm):
dark and photo current: (a) planar antenna (b) mesa antenna 
planar and mesa structure: (c) dark current (d) photo current at 10 mW minus dark current

Fig. 4
Fig. 4

THz output power measured with a Golay cell in dependence
(a) on bias voltage, at 40 mW optical power, and (b) on optical power, at 14 V bias voltage

Fig. 5
Fig. 5

Scheme of the THz Time Domain System

Fig. 6
Fig. 6

Detected TD signal traces applying mesa antennas versus planar antennas:
(a) mesa emitter, (b) mesa receiver, (c) mesa system, (d) FFT spectrum of mesa system

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