A new method for the measurement of anisotropic stress in thin films based on 2-D fast Fourier transform (FFT) is presented. A modified Twyman-Green interferometer was used for surface topography measurement. A fringe normalization technique was also used to improve the phase extraction technique efficiently. The measurement of anisotropic stress in obliquely deposited MgF2 thin film was demonstrated.
© 2010 OSAFull Article | PDF Article
OSA Recommended Articles
Chuen-Lin Tien and Tsai-Wei Lin
Appl. Opt. 51(30) 7229-7235 (2012)
Xuelin Dong, Xue Feng, Keh-Chih Hwang, Shaopeng Ma, and Qinwei Ma
Opt. Express 19(14) 13201-13208 (2011)
Appl. Opt. 50(9) C159-C163 (2011)