Abstract

Grating couplers are an efficient means for fiber to chip coupling, as they require no facet preparation and enable wafer scale testing. While grating couplers are commonly used in silicon wire waveguides, their application to micrometric silicon-on-insulator rib waveguides is complicated due to the presence of high-order Bloch modes. We study the Bloch modes behavior and their excitation determined by access waveguide design. The latter is implemented to enable single Bloch mode excitation. The use of a design process based on modal analysis is proposed. A grating coupler is proposed in silicon-on-insulator with 1.5µm thick silicon layer that achieves a coupling efficiency of 65.6% at 1.55µm. The structure, including interconnection waveguides, access waveguide and grating can be fabricated using a single lithography step.

© 2010 OSA

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    [Crossref] [PubMed]
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2009 (1)

2008 (2)

R. Halir, I. Molina-Fernández, A. Ortega-Moñux, J. Wangüemert-Pérez, D. Xu, P. Cheben, and S. Janz, “A design procedure for high-performance, rib-waveguide-based multimode interference couplers in silicon-on-insulator,” J. Lightwave Technol. 26(16), 2928–2936 (2008).
[Crossref]

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

2007 (1)

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

2006 (4)

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency silicon-on-insulator grating coupler based on a poly-silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[Crossref] [PubMed]

R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[Crossref]

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

P. Cheben, D. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

2005 (1)

2004 (1)

2003 (1)

2002 (2)

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

A. Sure, T. Dillon, J. Murakowski, C. Lin, D. Pustai, and D. Prather, “Fabrication and characterization of three-dimensional silicon tapers,” Opt. Express 11(26), 3555–3561 (2002).
[Crossref]

Almeida, V.

Alonso-Ramos, C. A.

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. G. Wangüemert-Pérez, and I. Molina-Fernández, “A tool for automatic grating design,” in XVIII International Workshop Optical Waveguide Theory and Numerical Modeling (OWTNM 2009), 2009, p. 45.

Ayre, M.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

Baets, R.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency silicon-on-insulator grating coupler based on a poly-silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[Crossref] [PubMed]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Bienstman, P.

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Blasco, J.

P. Sanchis, J. Blasco, and J. Marti, “Study of high efficiency grating couplers for silicon-based horizontal slot waveguides,” IEEE Photonics Technol. Lett. 20(12), 985–987 (2008).

Bogaerts, W.

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Bogdanov, A.

A. Delâge, S. Janz, D. Xu, D. Dalacu, B. Lamontagne, and A. Bogdanov, “Graded-index coupler for microphotonic SOI waveguides” in Proc. of SPIE Photonics North 2004: Optical Components and Devices, vol. 5577, pp. 204–212, 2004.

Brision, S.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

Bruns, J.

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

M. Schnarrenberger, L. Zimmermann, T. Mitze, K. Voigt, J. Bruns, and K. Petermann, “Low loss star coupler concept for AWGs in rib waveguide technology,” IEEE Photonics Technol. Lett. 18(23), 2469–2471 (2006).
[Crossref]

Cao, Q.

Q. Cao, P. Lalanne, and J. Hugonin, “Stable and efficient Bloch-mode computational method for one-dimensional grating waveguides,” J. Opt. Soc. Am. A 19(2), 335–338 (2002).
[Crossref]

Cheben, P.

R. Halir, I. Molina-Fernández, A. Ortega-Moñux, J. Wangüemert-Pérez, D. Xu, P. Cheben, and S. Janz, “A design procedure for high-performance, rib-waveguide-based multimode interference couplers in silicon-on-insulator,” J. Lightwave Technol. 26(16), 2928–2936 (2008).
[Crossref]

P. Cheben, D. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

W. Ye, D. Xu, S. Janz, P. Cheben, M. Picard, B. Lamontagne, and N. Tarr, “Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides,” J. Lightwave Technol. 23(3), 1308–1318 (2005).
[Crossref]

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

P. Cheben, A. Delâge, S. Janz, and D. Xu, Echelle gratings and arrayed waveguide gratings for WDM and spectral analysis in Advances in Information Optics and Photonics, A.T. Friberg and R. Dandliker, eds. (SPIE Press, Billingham, Washington, 2008), pp. 599–632.

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

R. Halir, P. Cheben, S. Janz, D. Xu, I. Molina-Fernández, and J. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
[Crossref] [PubMed]

P. Cheben, R. Soref, D. Lockwood, and G. Reed, “Silicon Photonics,” Adv. Opt. Technol. (2008) Article ID 510937, 2 pages, 2008. doi:10.1155/2008/510937
[Crossref]

Coppinger, F.

P. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, “Silicon-on-insulator (SOI) phased-array wavelength multi/demultiplexer with extremely low polarization sensitivity,” IEEE Photonics Technol. Lett. 9(7), 940–942 (1997).
[Crossref]

Dalacu, D.

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

A. Delâge, S. Janz, D. Xu, D. Dalacu, B. Lamontagne, and A. Bogdanov, “Graded-index coupler for microphotonic SOI waveguides” in Proc. of SPIE Photonics North 2004: Optical Components and Devices, vol. 5577, pp. 204–212, 2004.

Dalacu, P.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

De Mesel, K.

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Delâge, A.

A. Delâge, S. Janz, D. Xu, D. Dalacu, B. Lamontagne, and A. Bogdanov, “Graded-index coupler for microphotonic SOI waveguides” in Proc. of SPIE Photonics North 2004: Optical Components and Devices, vol. 5577, pp. 204–212, 2004.

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Cheben, A. Delâge, S. Janz, and D. Xu, Echelle gratings and arrayed waveguide gratings for WDM and spectral analysis in Advances in Information Optics and Photonics, A.T. Friberg and R. Dandliker, eds. (SPIE Press, Billingham, Washington, 2008), pp. 599–632.

Delâge, D.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

Densmore, A.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

P. Cheben, D. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

Dillon, T.

Eich, M.

Fedeli, J.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

Gautier, P.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

Halir, R.

R. Halir, I. Molina-Fernández, A. Ortega-Moñux, J. Wangüemert-Pérez, D. Xu, P. Cheben, and S. Janz, “A design procedure for high-performance, rib-waveguide-based multimode interference couplers in silicon-on-insulator,” J. Lightwave Technol. 26(16), 2928–2936 (2008).
[Crossref]

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. G. Wangüemert-Pérez, and I. Molina-Fernández, “A tool for automatic grating design,” in XVIII International Workshop Optical Waveguide Theory and Numerical Modeling (OWTNM 2009), 2009, p. 45.

R. Halir, P. Cheben, S. Janz, D. Xu, I. Molina-Fernández, and J. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
[Crossref] [PubMed]

Helfert, S.

S. Helfert and R. Pregla, “Efficient analysis of periodic structures,” J. Lightwave Technol. 16(9), 1694–1702 (1998).
[Crossref]

Hill, K.

K. Hill and G. Meltz, “Fiber Bragg grating technology fundamentals and overview,” J. Lightwave Technol. 15(8), 1263–1276 (1997).
[Crossref]

Hugonin, J.

Q. Cao, P. Lalanne, and J. Hugonin, “Stable and efficient Bloch-mode computational method for one-dimensional grating waveguides,” J. Opt. Soc. Am. A 19(2), 335–338 (2002).
[Crossref]

Huttl, B.

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

Jalali, B.

P. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, “Silicon-on-insulator (SOI) phased-array wavelength multi/demultiplexer with extremely low polarization sensitivity,” IEEE Photonics Technol. Lett. 9(7), 940–942 (1997).
[Crossref]

Janz, S.

R. Halir, I. Molina-Fernández, A. Ortega-Moñux, J. Wangüemert-Pérez, D. Xu, P. Cheben, and S. Janz, “A design procedure for high-performance, rib-waveguide-based multimode interference couplers in silicon-on-insulator,” J. Lightwave Technol. 26(16), 2928–2936 (2008).
[Crossref]

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

P. Cheben, D. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

W. Ye, D. Xu, S. Janz, P. Cheben, M. Picard, B. Lamontagne, and N. Tarr, “Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides,” J. Lightwave Technol. 23(3), 1308–1318 (2005).
[Crossref]

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Cheben, A. Delâge, S. Janz, and D. Xu, Echelle gratings and arrayed waveguide gratings for WDM and spectral analysis in Advances in Information Optics and Photonics, A.T. Friberg and R. Dandliker, eds. (SPIE Press, Billingham, Washington, 2008), pp. 599–632.

R. Halir, P. Cheben, S. Janz, D. Xu, I. Molina-Fernández, and J. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
[Crossref] [PubMed]

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

A. Delâge, S. Janz, D. Xu, D. Dalacu, B. Lamontagne, and A. Bogdanov, “Graded-index coupler for microphotonic SOI waveguides” in Proc. of SPIE Photonics North 2004: Optical Components and Devices, vol. 5577, pp. 204–212, 2004.

Krauss, T.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Lalanne, P.

Q. Cao, P. Lalanne, and J. Hugonin, “Stable and efficient Bloch-mode computational method for one-dimensional grating waveguides,” J. Opt. Soc. Am. A 19(2), 335–338 (2002).
[Crossref]

Lamontagne, A.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

Lamontagne, B.

W. Ye, D. Xu, S. Janz, P. Cheben, M. Picard, B. Lamontagne, and N. Tarr, “Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides,” J. Lightwave Technol. 23(3), 1308–1318 (2005).
[Crossref]

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

A. Delâge, S. Janz, D. Xu, D. Dalacu, B. Lamontagne, and A. Bogdanov, “Graded-index coupler for microphotonic SOI waveguides” in Proc. of SPIE Photonics North 2004: Optical Components and Devices, vol. 5577, pp. 204–212, 2004.

Lapointe, J.

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

Lin, C.

Lipson, M.

Lockwood, D.

P. Cheben, R. Soref, D. Lockwood, and G. Reed, “Silicon Photonics,” Adv. Opt. Technol. (2008) Article ID 510937, 2 pages, 2008. doi:10.1155/2008/510937
[Crossref]

Lyan, P.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

Marti, J.

P. Sanchis, J. Blasco, and J. Marti, “Study of high efficiency grating couplers for silicon-based horizontal slot waveguides,” IEEE Photonics Technol. Lett. 20(12), 985–987 (2008).

Meltz, G.

K. Hill and G. Meltz, “Fiber Bragg grating technology fundamentals and overview,” J. Lightwave Technol. 15(8), 1263–1276 (1997).
[Crossref]

Mitze, T.

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

M. Schnarrenberger, L. Zimmermann, T. Mitze, K. Voigt, J. Bruns, and K. Petermann, “Low loss star coupler concept for AWGs in rib waveguide technology,” IEEE Photonics Technol. Lett. 18(23), 2469–2471 (2006).
[Crossref]

Moerman, I.

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Molina-Fernández, I.

R. Halir, I. Molina-Fernández, A. Ortega-Moñux, J. Wangüemert-Pérez, D. Xu, P. Cheben, and S. Janz, “A design procedure for high-performance, rib-waveguide-based multimode interference couplers in silicon-on-insulator,” J. Lightwave Technol. 26(16), 2928–2936 (2008).
[Crossref]

R. Halir, P. Cheben, S. Janz, D. Xu, I. Molina-Fernández, and J. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
[Crossref] [PubMed]

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. G. Wangüemert-Pérez, and I. Molina-Fernández, “A tool for automatic grating design,” in XVIII International Workshop Optical Waveguide Theory and Numerical Modeling (OWTNM 2009), 2009, p. 45.

A. Ortega-Moñux, I. Molina-Fernández, and J. Wangüemert-Pérez, “3D-Scalar Fourier eigenvector expansion method (Fourier-EEM) for analyzing optical waveguide discontinuities,” Opt. Quantum Electron. 37(1), 213–228 (2005).
[Crossref]

Murakowski, J.

Ortega-Moñux, A.

R. Halir, I. Molina-Fernández, A. Ortega-Moñux, J. Wangüemert-Pérez, D. Xu, P. Cheben, and S. Janz, “A design procedure for high-performance, rib-waveguide-based multimode interference couplers in silicon-on-insulator,” J. Lightwave Technol. 26(16), 2928–2936 (2008).
[Crossref]

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

A. Ortega-Moñux, I. Molina-Fernández, and J. Wangüemert-Pérez, “3D-Scalar Fourier eigenvector expansion method (Fourier-EEM) for analyzing optical waveguide discontinuities,” Opt. Quantum Electron. 37(1), 213–228 (2005).
[Crossref]

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. G. Wangüemert-Pérez, and I. Molina-Fernández, “A tool for automatic grating design,” in XVIII International Workshop Optical Waveguide Theory and Numerical Modeling (OWTNM 2009), 2009, p. 45.

Panepucci, R.

Peng, S.

T. Tamir and S. Peng, “Analysis and design of grating couplers,” Appl. Phys. A-Mater. 14(3), 235–254 (1977).

Petermann, K.

M. Schnarrenberger, L. Zimmermann, T. Mitze, K. Voigt, J. Bruns, and K. Petermann, “Low loss star coupler concept for AWGs in rib waveguide technology,” IEEE Photonics Technol. Lett. 18(23), 2469–2471 (2006).
[Crossref]

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

R. Soref, J. Schmidtchen, and K. Petermann, “Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2,” IEEE J. Quantum Electron. 27(8), 1971–1974 (1991).
[Crossref]

Petrov, A.

Picard, B.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

Picard, M.

W. Ye, D. Xu, S. Janz, P. Cheben, M. Picard, B. Lamontagne, and N. Tarr, “Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides,” J. Lightwave Technol. 23(3), 1308–1318 (2005).
[Crossref]

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

Post, E.

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

Post, M.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

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Pregla, R.

S. Helfert and R. Pregla, “Efficient analysis of periodic structures,” J. Lightwave Technol. 16(9), 1694–1702 (1998).
[Crossref]

Pustai, D.

Reed, G.

P. Cheben, R. Soref, D. Lockwood, and G. Reed, “Silicon Photonics,” Adv. Opt. Technol. (2008) Article ID 510937, 2 pages, 2008. doi:10.1155/2008/510937
[Crossref]

Roelkens, G.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency silicon-on-insulator grating coupler based on a poly-silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[Crossref] [PubMed]

Sanchis, P.

P. Sanchis, J. Blasco, and J. Marti, “Study of high efficiency grating couplers for silicon-based horizontal slot waveguides,” IEEE Photonics Technol. Lett. 20(12), 985–987 (2008).

Schmid, B.

Schmid, E.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

Schmid, J.

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

Schmidtchen, J.

R. Soref, J. Schmidtchen, and K. Petermann, “Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2,” IEEE J. Quantum Electron. 27(8), 1971–1974 (1991).
[Crossref]

Schnarrenberger, M.

M. Schnarrenberger, L. Zimmermann, T. Mitze, K. Voigt, J. Bruns, and K. Petermann, “Low loss star coupler concept for AWGs in rib waveguide technology,” IEEE Photonics Technol. Lett. 18(23), 2469–2471 (2006).
[Crossref]

Schrauwen, J.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

Schubert, C.

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

Soref, R.

R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[Crossref]

P. Cheben, R. Soref, D. Lockwood, and G. Reed, “Silicon Photonics,” Adv. Opt. Technol. (2008) Article ID 510937, 2 pages, 2008. doi:10.1155/2008/510937
[Crossref]

R. Soref, J. Schmidtchen, and K. Petermann, “Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2,” IEEE J. Quantum Electron. 27(8), 1971–1974 (1991).
[Crossref]

Sure, A.

Taillaert, D.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett. 29(23), 2749–2751 (2004).
[Crossref] [PubMed]

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Tamir, T.

T. Tamir and S. Peng, “Analysis and design of grating couplers,” Appl. Phys. A-Mater. 14(3), 235–254 (1977).

Tarr, N.

Trinh, P.

P. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, “Silicon-on-insulator (SOI) phased-array wavelength multi/demultiplexer with extremely low polarization sensitivity,” IEEE Photonics Technol. Lett. 9(7), 940–942 (1997).
[Crossref]

Van Daele, P.

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Van Laere, F.

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

Van Thourhout, D.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

G. Roelkens, D. Van Thourhout, and R. Baets, “High efficiency silicon-on-insulator grating coupler based on a poly-silicon overlay,” Opt. Express 14(24), 11622–11630 (2006).
[Crossref] [PubMed]

Vermeulen, D.

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

Verstuyft, S.

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

Voigt, K.

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

M. Schnarrenberger, L. Zimmermann, T. Mitze, K. Voigt, J. Bruns, and K. Petermann, “Low loss star coupler concept for AWGs in rib waveguide technology,” IEEE Photonics Technol. Lett. 18(23), 2469–2471 (2006).
[Crossref]

Waldron, J.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

Waldron, P.

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

Wangüemert-Pérez, J.

R. Halir, I. Molina-Fernández, A. Ortega-Moñux, J. Wangüemert-Pérez, D. Xu, P. Cheben, and S. Janz, “A design procedure for high-performance, rib-waveguide-based multimode interference couplers in silicon-on-insulator,” J. Lightwave Technol. 26(16), 2928–2936 (2008).
[Crossref]

R. Halir, P. Cheben, S. Janz, D. Xu, I. Molina-Fernández, and J. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
[Crossref] [PubMed]

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

A. Ortega-Moñux, I. Molina-Fernández, and J. Wangüemert-Pérez, “3D-Scalar Fourier eigenvector expansion method (Fourier-EEM) for analyzing optical waveguide discontinuities,” Opt. Quantum Electron. 37(1), 213–228 (2005).
[Crossref]

Wangüemert-Pérez, J. G.

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. G. Wangüemert-Pérez, and I. Molina-Fernández, “A tool for automatic grating design,” in XVIII International Workshop Optical Waveguide Theory and Numerical Modeling (OWTNM 2009), 2009, p. 45.

Winzer, G.

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

Xu, D.

R. Halir, I. Molina-Fernández, A. Ortega-Moñux, J. Wangüemert-Pérez, D. Xu, P. Cheben, and S. Janz, “A design procedure for high-performance, rib-waveguide-based multimode interference couplers in silicon-on-insulator,” J. Lightwave Technol. 26(16), 2928–2936 (2008).
[Crossref]

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

P. Cheben, D. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14(11), 4695–4702 (2006).
[Crossref] [PubMed]

W. Ye, D. Xu, S. Janz, P. Cheben, M. Picard, B. Lamontagne, and N. Tarr, “Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides,” J. Lightwave Technol. 23(3), 1308–1318 (2005).
[Crossref]

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Cheben, A. Delâge, S. Janz, and D. Xu, Echelle gratings and arrayed waveguide gratings for WDM and spectral analysis in Advances in Information Optics and Photonics, A.T. Friberg and R. Dandliker, eds. (SPIE Press, Billingham, Washington, 2008), pp. 599–632.

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

R. Halir, P. Cheben, S. Janz, D. Xu, I. Molina-Fernández, and J. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
[Crossref] [PubMed]

A. Delâge, S. Janz, D. Xu, D. Dalacu, B. Lamontagne, and A. Bogdanov, “Graded-index coupler for microphotonic SOI waveguides” in Proc. of SPIE Photonics North 2004: Optical Components and Devices, vol. 5577, pp. 204–212, 2004.

Yap, K.P.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

Ye, W.

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

W. Ye, D. Xu, S. Janz, P. Cheben, M. Picard, B. Lamontagne, and N. Tarr, “Birefringence control using stress engineering in silicon-on-insulator (SOI) waveguides,” J. Lightwave Technol. 23(3), 1308–1318 (2005).
[Crossref]

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

Yegnanarayanan, S.

P. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, “Silicon-on-insulator (SOI) phased-array wavelength multi/demultiplexer with extremely low polarization sensitivity,” IEEE Photonics Technol. Lett. 9(7), 940–942 (1997).
[Crossref]

Zavargo-Peche, L.

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. G. Wangüemert-Pérez, and I. Molina-Fernández, “A tool for automatic grating design,” in XVIII International Workshop Optical Waveguide Theory and Numerical Modeling (OWTNM 2009), 2009, p. 45.

Zimmermann, L.

M. Schnarrenberger, L. Zimmermann, T. Mitze, K. Voigt, J. Bruns, and K. Petermann, “Low loss star coupler concept for AWGs in rib waveguide technology,” IEEE Photonics Technol. Lett. 18(23), 2469–2471 (2006).
[Crossref]

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

Appl. Phys. Lett. (1)

G. Roelkens, D. Vermeulen, D. Van Thourhout, R. Baets, S. Brision, P. Lyan, P. Gautier, and J. Fedeli, “High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit,” Appl. Phys. Lett. 92131101 (2008).
[Crossref]

IEEE J. Quantum Electron. (1)

D. Taillaert, W. Bogaerts, P. Bienstman, T. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, “An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers,” IEEE J. Quantum Electron. 38(7), 949–955 (2002).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (2)

R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1678–1687 (2006).
[Crossref]

S. Janz, P. Dalacu, D. Delâge, A. Densmore, A. Lamontagne, B. Picard, M. Post, E. Schmid, J. Waldron, D. Xu, K.P. Yap, and W. Ye, “Microphotonic elements for integration on the silicon-on-insulator waveguide platform,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1402–1415 (2006).
[Crossref]

J. Light-wave Technol. (1)

F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. Krauss, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Light-wave Technol. 25(1), 151–156 (2007).
[Crossref]

J. Lightwave Technol. (2)

Opt. Express (4)

Opt. Lett. (2)

Other (19)

D. Xu, P. Cheben, D. Dalacu, A. Delâge, S. Janz, B. Lamontagne, M. Picard, and W. Ye, “Eliminating the birefringence in silicon-on-insulator ridge waveguides by use of cladding stress,” Opt. Lett. 29(20), 2384–2386 (2004).
[Crossref] [PubMed]

P. Sanchis, J. Blasco, and J. Marti, “Study of high efficiency grating couplers for silicon-based horizontal slot waveguides,” IEEE Photonics Technol. Lett. 20(12), 985–987 (2008).

L. Pavesi. and D. J. Lockwood, eds., Silicon Photonics (Springer, Berlin, 2004)

P. Cheben, R. Soref, D. Lockwood, and G. Reed, “Silicon Photonics,” Adv. Opt. Technol. (2008) Article ID 510937, 2 pages, 2008. doi:10.1155/2008/510937
[Crossref]

A. Delâge, S. Janz, D. Xu, D. Dalacu, B. Lamontagne, and A. Bogdanov, “Graded-index coupler for microphotonic SOI waveguides” in Proc. of SPIE Photonics North 2004: Optical Components and Devices, vol. 5577, pp. 204–212, 2004.

P. Trinh, S. Yegnanarayanan, F. Coppinger, and B. Jalali, “Silicon-on-insulator (SOI) phased-array wavelength multi/demultiplexer with extremely low polarization sensitivity,” IEEE Photonics Technol. Lett. 9(7), 940–942 (1997).
[Crossref]

P. Cheben, J. Schmid, A. Delâge, A. Densmore, S. Janz, B. Lamontagne, J. Lapointe, E. Post, P. Waldron, and D. Xu, “A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with submicrometer aperture waveguides,” Opt. Express 15(5), 2299–2306 (2007).
[Crossref] [PubMed]

P. Cheben, A. Delâge, S. Janz, and D. Xu, Echelle gratings and arrayed waveguide gratings for WDM and spectral analysis in Advances in Information Optics and Photonics, A.T. Friberg and R. Dandliker, eds. (SPIE Press, Billingham, Washington, 2008), pp. 599–632.

K. Voigt, L. Zimmermann, G. Winzer, T. Mitze, J. Bruns, K. Petermann, B. Huttl, and C. Schubert, “Performance of 40-Gb/s DPSK demodulator in SOI-technology,” IEEE Photonics Technol. Lett. 20(8), 614–616 (2008).
[Crossref]

R. Soref, J. Schmidtchen, and K. Petermann, “Large single-mode rib waveguides in GeSi-Si and Si-on-SiO2,” IEEE J. Quantum Electron. 27(8), 1971–1974 (1991).
[Crossref]

R. Halir, A. Ortega-Moñux, I. Molina-Fernández, J. Wangüemert-Pérez, P. Cheben, D. Xu, B. Lamontagne, and S. Janz, “Compact high performance multi-mode interference couplers in silicon-on-insulator,” IEEE Photonics Technol. Lett. 21(21), 1600–1602 (2009).
[Crossref]

R. Halir, P. Cheben, S. Janz, D. Xu, I. Molina-Fernández, and J. Wangüemert-Pérez, “Waveguide grating coupler with subwavelength microstructures,” Opt. Lett. 34(9), 1408–1410 (2009).
[Crossref] [PubMed]

K. Hill and G. Meltz, “Fiber Bragg grating technology fundamentals and overview,” J. Lightwave Technol. 15(8), 1263–1276 (1997).
[Crossref]

S. Helfert and R. Pregla, “Efficient analysis of periodic structures,” J. Lightwave Technol. 16(9), 1694–1702 (1998).
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T. Tamir and S. Peng, “Analysis and design of grating couplers,” Appl. Phys. A-Mater. 14(3), 235–254 (1977).

M. Schnarrenberger, L. Zimmermann, T. Mitze, K. Voigt, J. Bruns, and K. Petermann, “Low loss star coupler concept for AWGs in rib waveguide technology,” IEEE Photonics Technol. Lett. 18(23), 2469–2471 (2006).
[Crossref]

Q. Cao, P. Lalanne, and J. Hugonin, “Stable and efficient Bloch-mode computational method for one-dimensional grating waveguides,” J. Opt. Soc. Am. A 19(2), 335–338 (2002).
[Crossref]

L. Zavargo-Peche, C. A. Alonso-Ramos, A. Ortega-Moñux, R. Halir, J. G. Wangüemert-Pérez, and I. Molina-Fernández, “A tool for automatic grating design,” in XVIII International Workshop Optical Waveguide Theory and Numerical Modeling (OWTNM 2009), 2009, p. 45.

A. Ortega-Moñux, I. Molina-Fernández, and J. Wangüemert-Pérez, “3D-Scalar Fourier eigenvector expansion method (Fourier-EEM) for analyzing optical waveguide discontinuities,” Opt. Quantum Electron. 37(1), 213–228 (2005).
[Crossref]

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Figures (9)

Fig. 1.
Fig. 1.

(a) SOI Rib waveguide transverse geometry. (b) schematic top view of the coupler, including access waveguide, inverse taper and grating.

Fig. 2.
Fig. 2.

Schematic view of a fiber-chip grating coupler.

Fig. 3.
Fig. 3.

Bloch modes for one grating period, their transversal profile at z = 0 and input fundamental mode for the grating studied in section 5.

Fig. 4.
Fig. 4.

(a) Inner product ∣〈ϕIN , ϑi 〉∣2 for Bloch modes BMi for gratings with different etch depths tg varying the access waveguide height, taw . (b) Optimum access waveguide height, topt aw , as a function of wavelength, for an etch depth tg = 750nm.

Fig. 5.
Fig. 5.

Complete device 3D model including interconnection waveguide, excitation stage and grating coupler.

Fig. 6.
Fig. 6.

Regions of interest for different etch depths: a) tg = 750nm b) tg = 650nm c) tg = 550nm.

Fig. 7.
Fig. 7.

(a) ∣E(y, z)| for the proposed grating excited with an optimized access waveguide. (b) Gaussian field profile of a standard (SMF-28) optical fiber and near field distribution of the grating (cut along the dashed line shown in Fig. 7a) (c) Misalignment tolerance of the coupler (in-plane displacement).

Fig. 8.
Fig. 8.

(a) Interconnection rib waveguide and fundamental mode (b) Objective field (c) Rib waveguide at the end of inverse taper and fundamental mode.

Fig. 9.
Fig. 9.

(a) Inner product for objective field (Eobj ) and excitation field (Erib ) for inversely tapered rib of width xend (b) Loss of the inverse taper as a function of taper length Ltaper (c) Alignment tolerance between the grating coupler and the inverse taper.

Equations (20)

Equations on this page are rendered with MathJax. Learn more.

P fiber = P IN η air η fiber ,
ϑ ( y , z ) = k f k ( y ) e Γ k z = ϑ ( y , z + d ) e Γ o d ,
Γ k = α + j β k = α + j ( 2 π λ n g + 2 π d k ) = Γ o + j 2 π d k ,
θ k = arcsin ( 1 n a ( n g + k λ d ) ) .
d λ ( n a + n g ) < k < d λ ( n a n g ) ,
E ( y , z ) = i c i · ϑ i ( y , z ) ,
ϕ IN ( y ) , ϑ i ( y , 0 ) = ϕ IN ( y ) · ϑ i * ( y , 0 ) d y ,
ϕ IN ( y ) , ϑ i ( y , 0 ) 0 for i 1
t aw opt t w t g .
ϕ 1 + k ρ 1 k ϕ k = i c i ϑ i ( y , 0 )
Y o 1 ϕ ϕ 1 k ρ 1 k Y o k ϕ ϕ k = i c i Y o i ϑ ϑ i ( y , 0 )
c i = ϕ 1 , ϑ i ( y , 0 ) ( 1 + ρ 11 ) +
+ k 1 ρ 1 k ϕ k , ϑ i ( y , 0 )
ρ 1 k = ϕ k , ϕ 1 Y o 1 ϕ Y ok ϕ
k c i ϕ k , ϑ i ( x , 0 ) Y oi ϑ Y ok ϕ
ϕ k , ϑ i ( y , 0 ) 0 k i
c 1 ϕ IN , ϑ 1 ( y , 0 ) ( 1 + ρ 11 )
c i 1 0
ρ 11 Y o 1 ϕ ϕ IN , ϑ 1 2 Y o 1 ϑ Y o 1 ϕ + ϕ IN , ϑ 1 2 Y o 1 ϑ .
E obj ( x , y ) = E ( x ) E ( y ) ,

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