Abstract

We present a beam steering system based on microelectromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5×5 array with 4 μs settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.

© 2009 Optical Society of America

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2008 (3)

2007 (2)

H. J. Shin, M. C. Pierce, D. Lee, H. Ra, O. Solgaard, and R. Richards-Kortum, "Fiber-optic confocal microscope using a MEMS scanner and miniature objective lens," Opt. Express 15, 9113-9122 (2007).
[PubMed]

C. Kim, C. Knoernschild, B. Liu, and J. Kim, "Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation," IEEE J. Sel. Top. Quantum Electron. 13, 322-329 (2007).

2005 (2)

W. Jung, D. T. McCormick, J. Zhang, N. C. Tien, and Z. Chen, "Optical coherence tomography based on highspeed scanning MEMS mirror," Proc. SPIE 5690, 342-348 (2005).

M. Saffman and T. G. Walker, "Analysis of a quantum logic device based on dipole-dipole interactions of optically trapped Rydberg atoms," Phys. Rev. A 72, 042302 (2005).

2003 (5)

V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

A. J. Wallash and L. Levit, "Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps," Proc. SPIE 4980, 87-96 (2003).

2001 (1)

G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett. 13, 606-608 (2001).

1998 (2)

A. M. Rollins, M. D. Kulkarni, S. Yazdanfar, R. Ung-arunyawee, and J. A. Izatt, "In vivo video rate optical coherence tomography," Opt. Express 3, 219-229 (1998).
[PubMed]

P. Van Kessel, L. Hornbeck, R. Meier, and M. Douglass, "A MEMS-based projection display," Proceedings of the IEEE 86, 1687-1704 (1998).

Aksyuk, V.

Aksyuk, V. A.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Arney, S.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

Barrett, M.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Basavanhally, N. R.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Becher, C.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Bishop, D.

Blatt, R.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Bolle, C.

Bolle, C. A.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Britton, J.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Carr, D.

Chan, H.

Chan, H. B.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Chen, Z.

W. Jung, D. T. McCormick, J. Zhang, N. C. Tien, and Z. Chen, "Optical coherence tomography based on highspeed scanning MEMS mirror," Proc. SPIE 5690, 342-348 (2005).

DeMarco, B.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Deuschle, T.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Douglass, M.

P. Van Kessel, L. Hornbeck, R. Meier, and M. Douglass, "A MEMS-based projection display," Proceedings of the IEEE 86, 1687-1704 (1998).

Eschner, J.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Frahm, R.

Frahm, R. E.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Gasparyan, A.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

Gates, J. V.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Giles, C.

Greywall, D.

Gulde, S.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Haffner, H.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Haueis, M.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

Henage, T.

T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008).
[PubMed]

Hornbeck, L.

P. Van Kessel, L. Hornbeck, R. Meier, and M. Douglass, "A MEMS-based projection display," Proceedings of the IEEE 86, 1687-1704 (1998).

Isenhower, L.

T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008).
[PubMed]

Itano, W. M.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Izatt, J. A.

Jelenkovic, B.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Johnson, T. A.

T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008).
[PubMed]

Jung, W.

W. Jung, D. T. McCormick, J. Zhang, N. C. Tien, and Z. Chen, "Optical coherence tomography based on highspeed scanning MEMS mirror," Proc. SPIE 5690, 342-348 (2005).

Kim, C.

C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, "MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems," Opt. Lett. 33, 273-275 (2008).
[PubMed]

C. Kim, C. Knoernschild, B. Liu, and J. Kim, "Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation," IEEE J. Sel. Top. Quantum Electron. 13, 322-329 (2007).

Kim, J.

C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, "MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems," Opt. Lett. 33, 273-275 (2008).
[PubMed]

C. Kim, C. Knoernschild, B. Liu, and J. Kim, "Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation," IEEE J. Sel. Top. Quantum Electron. 13, 322-329 (2007).

V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Kim, S.

Knoernschild, C.

C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, "MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems," Opt. Lett. 33, 273-275 (2008).
[PubMed]

C. Kim, C. Knoernschild, B. Liu, and J. Kim, "Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation," IEEE J. Sel. Top. Quantum Electron. 13, 322-329 (2007).

Kolodner, P. R.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Kraus, J. S.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Kulkarni, M. D.

Kumar, B.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Lancaster, G. P. T.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Langer, C.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Lee, D.

Leibfried, D.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Levit, L.

A. J. Wallash and L. Levit, "Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps," Proc. SPIE 4980, 87-96 (2003).

Lichtenwalner, C. P.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Lieuwen, D. F.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Lifton, V.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

Liu, B.

C. Knoernschild, C. Kim, B. Liu, F. P. Lu, and J. Kim, "MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems," Opt. Lett. 33, 273-275 (2008).
[PubMed]

C. Kim, C. Knoernschild, B. Liu, and J. Kim, "Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation," IEEE J. Sel. Top. Quantum Electron. 13, 322-329 (2007).

Lu, F. P.

Lucas, D.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

McCormick, D. T.

W. Jung, D. T. McCormick, J. Zhang, N. C. Tien, and Z. Chen, "Optical coherence tomography based on highspeed scanning MEMS mirror," Proc. SPIE 5690, 342-348 (2005).

Mcleod, R. R.

Meier, R.

P. Van Kessel, L. Hornbeck, R. Meier, and M. Douglass, "A MEMS-based projection display," Proceedings of the IEEE 86, 1687-1704 (1998).

Meyer, V.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Neilson, D.

Neilson, D. T.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Nuzman, C. J.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Paczkowski, M.

Papazian, A. R.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Pardo, F.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

Pierce, M. C.

Ra, H.

Ramsey, D. A.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Richards-Kortum, R.

Riebe, M.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Rollins, A. M.

Roos, C. F.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Rosenband, T.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Ryf, R.

V. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. Chan, M. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. Neilson, J. Kim, C. Giles, and D. Bishop, "Beamsteering micromirrors for large optical cross-connects," J. Lightwave Technol. 21, 634-642 (2003).

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Saffman, M.

T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008).
[PubMed]

S. Kim, R. R. Mcleod, M. Saffman, and K. H. Wagner, "Doppler-free, multiwavelength acousto-optic deflector for two-photon addressing arrays of Rb atoms in a quantum information processor," Appl. Opt. 47, 1816-1831 (2008).
[PubMed]

M. Saffman and T. G. Walker, "Analysis of a quantum logic device based on dipole-dipole interactions of optically trapped Rydberg atoms," Phys. Rev. A 72, 042302 (2005).

Schmidt-Kaler, F.

F. Schmidt-Kaler, H. Haffner, M. Riebe, S. Gulde, G. P. T. Lancaster, T. Deuschle, C. Becher, C. F. Roos, J. Eschner, and R. Blatt, "Realization of the Cirac-Zoller controlled-NOT quantum gate," Nature 422, 408-411 (2003).
[PubMed]

Shea, H.

Shea, H. R.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Shin, H. J.

Simon, M.

Simon, M. E.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Solgaard, O.

Su, G. D. J.

G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett. 13, 606-608 (2001).

Tien, N. C.

W. Jung, D. T. McCormick, J. Zhang, N. C. Tien, and Z. Chen, "Optical coherence tomography based on highspeed scanning MEMS mirror," Proc. SPIE 5690, 342-348 (2005).

Toshiyoshi, H.

G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett. 13, 606-608 (2001).

Ung-arunyawee, R.

Urban, E.

T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008).
[PubMed]

Van Kessel, P.

P. Van Kessel, L. Hornbeck, R. Meier, and M. Douglass, "A MEMS-based projection display," Proceedings of the IEEE 86, 1687-1704 (1998).

Wagner, K. H.

Walker, T. G.

T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008).
[PubMed]

M. Saffman and T. G. Walker, "Analysis of a quantum logic device based on dipole-dipole interactions of optically trapped Rydberg atoms," Phys. Rev. A 72, 042302 (2005).

Wallash, A. J.

A. J. Wallash and L. Levit, "Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps," Proc. SPIE 4980, 87-96 (2003).

Weiss, A.

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

Wineland, D. J.

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

Wu, M. C.

G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett. 13, 606-608 (2001).

Yavuz, D. D.

T. A. Johnson, E. Urban, T. Henage, L. Isenhower, D. D. Yavuz, T. G. Walker, and M. Saffman, "Rabi oscillations between ground and rydberg states with dipole-dipole atomic interactions," Phys. Rev. Lett. 100, 113003 (2008).
[PubMed]

Yazdanfar, S.

Zhang, J.

W. Jung, D. T. McCormick, J. Zhang, N. C. Tien, and Z. Chen, "Optical coherence tomography based on highspeed scanning MEMS mirror," Proc. SPIE 5690, 342-348 (2005).

Appl. Opt. (1)

IEEE J. Sel. Top. Quantum Electron. (1)

C. Kim, C. Knoernschild, B. Liu, and J. Kim, "Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation," IEEE J. Sel. Top. Quantum Electron. 13, 322-329 (2007).

IEEE Photon. Technol. Lett. (2)

G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors," IEEE Photon. Technol. Lett. 13, 606-608 (2001).

J. Kim, C. J. Nuzman, B. Kumar, D. F. Lieuwen, J. S. Kraus, A. Weiss, C. P. Lichtenwalner, A. R. Papazian, R. E. Frahm, N. R. Basavanhally, D. A. Ramsey, V. A. Aksyuk, F. Pardo, M. E. Simon, V. Lifton, H. B. Chan, M. Haueis, A. Gasparyan, H. R. Shea, S. Arney, C. A. Bolle, P. R. Kolodner, R. Ryf, D. T. Neilson, and J. V. Gates, "1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum loss," IEEE Photon. Technol. Lett. 15, 1537-1539 (2003).

J. Lightwave Technol. (1)

Nature (2)

D. Leibfried, B. DeMarco, V. Meyer, D. Lucas, M. Barrett, J. Britton, W. M. Itano, B. Jelenkovic, C. Langer, T. Rosenband, and D. J. Wineland, "Experimental demonstration of a robust, high-fidelity geometric two ionqubit phase gate," Nature 422, 412-415 (2003).
[PubMed]

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Supplementary Material (1)

» Media 1: MOV (1785 KB)     

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Figures (7)

Fig. 1.
Fig. 1.

(a) Schematic of a two beam steering system. (b) 2f-2f folding imaging optics to combine decoupled tilt motion for a single bounce system (n = 1). The dotted line indicates the optical axis. (c) Double bounce system (n = 2). (d) Top view a MEMS device for a two beam layout. One beam utilizes the solid white mirrors while the second beam uses the patterned mirror set. Horizontal and vertical separations from the optical axis are labeled as h and v respectively.

Fig. 2.
Fig. 2.

Scanning electronic micrographs with electrode print-through shape indicated by dotted red line. (a) shows an image of a 75 μm radius mirror. This mirror has a reflective gold coating and “D”-shaped mirror electrodes. (b) shows an image of a 90 μm mirror with “U”-shaped electrodes.

Fig. 3.
Fig. 3.

Plot shows each reflection spot off the MEMS mirrors for a single 780 nm wavelength as the Gaussian beam propagates through the 2D tilting subsystem (columns). Each of the 25 mirror tilt configurations is plotted on the same set of axis and displayed in different colors. The circle represents a 75 μm radius MEMS mirror. (a) System with v = 2 μm with maximum decentering of 57 μm. (b) System with v = 0.25 mm with maximum decentering of 27 mm. (c) System with v = 2 mm and compensation lens with maximum decentering of 10 μm.

Fig. 4.
Fig. 4.

Gaussian beam profile data for 635 nm (left) and 780 nm (right) in a system with vertical mirror separation of v = 0.25. (a) Random beam intensity data overlaid on the same set of axes showing addressability of the 5×5 array. (b) Intensity profile data indicating a complete beam waist shift to neighboring location. The dashed red line indicates the 1/e 2 level.

Fig. 5.
Fig. 5.

This clip shows the measured beam profiles for the two beam system (Media 1). Initially, both wavelengths are focused on the center lattice site. As the movie plays, the 780 nm laser and 635 nm laser separate and move independently of one another. The yellow profile plots along the bottom and right of the screen are taken along the yellow crosshairs. Because of instrument averaging, the profiles lag the motion of the beams.

Fig. 6.
Fig. 6.

Intensity plots of Gaussian beam at the Fourier plane of a double bounce system. The top plots show a log plot of the intensity data while the bottom plot shows a cross section taken along the black dotted line plotted against the ideal Gaussian shape. (a) is the data taken from a system with a “D”-shaped electrode and (b) shows data from a “U”-shaped electrode.

Fig. 7.
Fig. 7.

Transient response for a 100 μm radius system mirror with a resonant frequency of 247 kHz. Left plot shows “tilt” case while the right side shows the “release” case. The red line represents the input signal and the blue line indicates the generated tilt angle data from the PSD.

Equations (1)

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ϕ .. ( τ ) + 2 ζ ϕ . ( τ ) + ϕ ( τ ) = 1 2 I ω R 2 C ( ϕ ) ϕ V 2 ( τ ) .

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