Abstract

Local wet etching technique was proposed to fabricate high-performance aspherical mirrors. In this process, only the limited area facing to the small nozzle is removed by etching on objective surface. The desired objective shape is deterministically fabricated by performing the numerically controlled scanning of the nozzle head. Using the technique, a plano-elliptical mirror to focus the neutron beam was successfully fabricated with the figure accuracy of less than 0.5μm and the focusing gain of 6. The strong and thin focused neutron beam is expected to be a useful tool for the analyses of various material properties.

© 2009 Optical Society of America

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References

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  1. G. E. Ice, “The future of spatially-resolved polychromatic neutron and X-ray microdiffraction,” Metall. Mater. Trans. A  39, 3058–3064 (2008).
    [Crossref]
  2. Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
    [Crossref]
  3. Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, “Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels,” Annals of the CIRP 48/1, 277–280 (1999).
    [Crossref]
  4. A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, “Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method,” Rev. Sci. Instrum. 76, 093708_1–093708_4 (2005).
    [Crossref]
  5. K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
    [Crossref]
  6. L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, “Surfaces in Precision Engineering, Microengineering and Nanotechnology,” Annals of the CIRP 52/2, 561–577 (2003).
    [Crossref]
  7. K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
    [Crossref]
  8. K. Yamamura, “Development of numerically controlled local wet etching,” Sci. Technol. Adv. Mater. 8, 158–161 (2007).
    [Crossref]
  9. K. Yamamura, “Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching,” Annals of the CIRP 56/1, 541–544 (2007).
    [Crossref]
  10. K. Yamamura and H. Takai, “Figuring of ultraprecision aspherical focusing mirror using numerically controlled local wet etching,” Proc. 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, 448–451 (2008).
  11. F. Mezei, “Novel polarized neutron devices: supermirror and spin component amplifier,” Commun. Phys. 1, 81–85 (1976).
  12. R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirror with large-scale ion-beam sputtering instrument,” Physica B 385–386, 1256–1258 (2006).
    [Crossref]
  13. R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirrors with large critical angle,” Thin Solid Films 515, 5704–5706 (2007).
    [Crossref]
  14. R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, “Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique,” Nucl. Instr. Meth. A 600, 68–70 (2009).
    [Crossref]

2009 (1)

R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, “Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique,” Nucl. Instr. Meth. A 600, 68–70 (2009).
[Crossref]

2008 (3)

G. E. Ice, “The future of spatially-resolved polychromatic neutron and X-ray microdiffraction,” Metall. Mater. Trans. A  39, 3058–3064 (2008).
[Crossref]

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

K. Yamamura and H. Takai, “Figuring of ultraprecision aspherical focusing mirror using numerically controlled local wet etching,” Proc. 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, 448–451 (2008).

2007 (3)

K. Yamamura, “Development of numerically controlled local wet etching,” Sci. Technol. Adv. Mater. 8, 158–161 (2007).
[Crossref]

K. Yamamura, “Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching,” Annals of the CIRP 56/1, 541–544 (2007).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirrors with large critical angle,” Thin Solid Films 515, 5704–5706 (2007).
[Crossref]

2006 (2)

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirror with large-scale ion-beam sputtering instrument,” Physica B 385–386, 1256–1258 (2006).
[Crossref]

2005 (1)

A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, “Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method,” Rev. Sci. Instrum. 76, 093708_1–093708_4 (2005).
[Crossref]

2003 (2)

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, “Surfaces in Precision Engineering, Microengineering and Nanotechnology,” Annals of the CIRP 52/2, 561–577 (2003).
[Crossref]

1999 (1)

Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, “Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels,” Annals of the CIRP 48/1, 277–280 (1999).
[Crossref]

1976 (1)

F. Mezei, “Novel polarized neutron devices: supermirror and spin component amplifier,” Commun. Phys. 1, 81–85 (1976).

Beaucamp, A.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

De Chiffre, L.

L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, “Surfaces in Precision Engineering, Microengineering and Nanotechnology,” Annals of the CIRP 52/2, 561–577 (2003).
[Crossref]

Ebisawa, T.

R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, “Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique,” Nucl. Instr. Meth. A 600, 68–70 (2009).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirrors with large critical angle,” Thin Solid Films 515, 5704–5706 (2007).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirror with large-scale ion-beam sputtering instrument,” Physica B 385–386, 1256–1258 (2006).
[Crossref]

Endo, K.

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Fushiki, A.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

Hino, M.

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirrors with large critical angle,” Thin Solid Films 515, 5704–5706 (2007).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirror with large-scale ion-beam sputtering instrument,” Physica B 385–386, 1256–1258 (2006).
[Crossref]

Ice, G. E.

G. E. Ice, “The future of spatially-resolved polychromatic neutron and X-ray microdiffraction,” Metall. Mater. Trans. A  39, 3058–3064 (2008).
[Crossref]

Inasaki, I.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

Ishikawa, T.

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Kobayashi, H.

Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, “Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels,” Annals of the CIRP 48/1, 277–280 (1999).
[Crossref]

Kunieda, H.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

Kunzmann, H.

L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, “Surfaces in Precision Engineering, Microengineering and Nanotechnology,” Annals of the CIRP 52/2, 561–577 (2003).
[Crossref]

Lucca, D.-A.

L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, “Surfaces in Precision Engineering, Microengineering and Nanotechnology,” Annals of the CIRP 52/2, 561–577 (2003).
[Crossref]

Maruyama, R.

R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, “Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique,” Nucl. Instr. Meth. A 600, 68–70 (2009).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirrors with large critical angle,” Thin Solid Films 515, 5704–5706 (2007).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirror with large-scale ion-beam sputtering instrument,” Physica B 385–386, 1256–1258 (2006).
[Crossref]

Mezei, F.

F. Mezei, “Novel polarized neutron devices: supermirror and spin component amplifier,” Commun. Phys. 1, 81–85 (1976).

Mimura, H.

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Mori, Y.

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Namba, Y.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, “Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels,” Annals of the CIRP 48/1, 277–280 (1999).
[Crossref]

Ogasaka, Y.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

Peggs, G.-N.

L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, “Surfaces in Precision Engineering, Microengineering and Nanotechnology,” Annals of the CIRP 52/2, 561–577 (2003).
[Crossref]

Saito, A.

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Sano, Y.

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Shibahara, M.

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

Shimomura, T.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

Souvorov, A.

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Soyama, K.

R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, “Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique,” Nucl. Instr. Meth. A 600, 68–70 (2009).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirrors with large critical angle,” Thin Solid Films 515, 5704–5706 (2007).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirror with large-scale ion-beam sputtering instrument,” Physica B 385–386, 1256–1258 (2006).
[Crossref]

Suzuki, H.

Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, “Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels,” Annals of the CIRP 48/1, 277–280 (1999).
[Crossref]

Suzuki, Y.

A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, “Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method,” Rev. Sci. Instrum. 76, 093708_1–093708_4 (2005).
[Crossref]

Takai, H.

K. Yamamura and H. Takai, “Figuring of ultraprecision aspherical focusing mirror using numerically controlled local wet etching,” Proc. 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, 448–451 (2008).

Takano, H.

A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, “Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method,” Rev. Sci. Instrum. 76, 093708_1–093708_4 (2005).
[Crossref]

Takeuchi, A.

A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, “Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method,” Rev. Sci. Instrum. 76, 093708_1–093708_4 (2005).
[Crossref]

Tamasaku, M. K.

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Terada, Y.

A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, “Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method,” Rev. Sci. Instrum. 76, 093708_1–093708_4 (2005).
[Crossref]

Yabashi, M.

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Yamamura, K.

K. Yamamura and H. Takai, “Figuring of ultraprecision aspherical focusing mirror using numerically controlled local wet etching,” Proc. 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, 448–451 (2008).

K. Yamamura, “Development of numerically controlled local wet etching,” Sci. Technol. Adv. Mater. 8, 158–161 (2007).
[Crossref]

K. Yamamura, “Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching,” Annals of the CIRP 56/1, 541–544 (2007).
[Crossref]

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Yamashita, K.

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, “Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels,” Annals of the CIRP 48/1, 277–280 (1999).
[Crossref]

Yamauchi, K.

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Yamazaki, D.

R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, “Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique,” Nucl. Instr. Meth. A 600, 68–70 (2009).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirrors with large critical angle,” Thin Solid Films 515, 5704–5706 (2007).
[Crossref]

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirror with large-scale ion-beam sputtering instrument,” Physica B 385–386, 1256–1258 (2006).
[Crossref]

Annals of the CIRP (4)

Y. Namba, T. Shimomura, A. Fushiki, A. Beaucamp, I. Inasaki, H. Kunieda, Y. Ogasaka, and K. Yamashita, “Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications,” Annals of the CIRP 57/1, 337–340 (2008).
[Crossref]

Y. Namba, H. Kobayashi, H. Suzuki, and K. Yamashita, “Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels,” Annals of the CIRP 48/1, 277–280 (1999).
[Crossref]

L. De Chiffre, H. Kunzmann, G.-N. Peggs, and D.-A. Lucca, “Surfaces in Precision Engineering, Microengineering and Nanotechnology,” Annals of the CIRP 52/2, 561–577 (2003).
[Crossref]

K. Yamamura, “Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching,” Annals of the CIRP 56/1, 541–544 (2007).
[Crossref]

Commun. Phys. (1)

F. Mezei, “Novel polarized neutron devices: supermirror and spin component amplifier,” Commun. Phys. 1, 81–85 (1976).

Jpn. J. Appl. Phys. (1)

K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo, and Y. Mori, “Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma,” Jpn. J. Appl. Phys. 45, 8270–8276 (2006).
[Crossref]

Metall. Mater. Trans. A (1)

G. E. Ice, “The future of spatially-resolved polychromatic neutron and X-ray microdiffraction,” Metall. Mater. Trans. A  39, 3058–3064 (2008).
[Crossref]

Nucl. Instr. Meth. A (1)

R. Maruyama, D. Yamazaki, T. Ebisawa, and K. Soyama, “Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique,” Nucl. Instr. Meth. A 600, 68–70 (2009).
[Crossref]

Physica B (1)

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirror with large-scale ion-beam sputtering instrument,” Physica B 385–386, 1256–1258 (2006).
[Crossref]

Rev. Sci. Instrum. (2)

A. Takeuchi, Y. Suzuki, H. Takano, and Y. Terada, “Kirkpatrick-Baez type X-ray focusing mirror fabricated by the bent-polishing method,” Rev. Sci. Instrum. 76, 093708_1–093708_4 (2005).
[Crossref]

K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, M. K. Tamasaku, T. Ishikawa, and Y. Mori, “Fabrication of elliptical mirror at nanometer-level accuracy for hard X-ray focusing by numerically controlled plasma chemical vaporization machining,” Rev. Sci. Instrum. 74, 4549–4553 (2003).
[Crossref]

Sci. Technol. Adv. Mater. (1)

K. Yamamura, “Development of numerically controlled local wet etching,” Sci. Technol. Adv. Mater. 8, 158–161 (2007).
[Crossref]

Thin Solid Films (1)

R. Maruyama, D. Yamazaki, T. Ebisawa, M. Hino, and K. Soyama, “Development of neutron supermirrors with large critical angle,” Thin Solid Films 515, 5704–5706 (2007).
[Crossref]

Other (1)

K. Yamamura and H. Takai, “Figuring of ultraprecision aspherical focusing mirror using numerically controlled local wet etching,” Proc. 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, 448–451 (2008).

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Figures (7)

Fig. 1.
Fig. 1.

Schematic diagram of the NC-LWE system.

Fig. 2.
Fig. 2.

Photograph of the NC-LWE machine.

Fig. 3.
Fig. 3.

Conceptual diagram of the two-stage figuring process in the NC-LWE process. (a) Coarse figuring (1st stage) and (b) Fine finishing (2nd stage).

Fig. 4.
Fig. 4.

Distribution of figure error of the fabricated elliptical mirror. (a) Cross-sectional figure of the fabricated elliptical mirror. (b) Distribution of figure error after first stage. (c) Distribution of figure error after second stage.

Fig. 5.
Fig. 5.

Shape of footprint in longitudinal direction formed by rectangular nozzle used in first rough figuring stage. (a) Cross-section of A-A. (b) Closeup view of B section.

Fig. 6.
Fig. 6.

Residual tool-mark on the mirror surface by raster scanning.

Fig. 7.
Fig. 7.

Neutron focusing performance of the fabricated plano-elliptical supermirror.

Equations (1)

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x 2 ( 1050.31 ) 2 + z 2 ( 25.66 ) 2 = 1 ( unit : mm )

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