Abstract

A novel type of a combined (or multiplex) computer-generated hologram (CGH) and a method for interferometric testing of steep axially symmetric aspheres is presented. The method is based on a hybrid CGH containing two different diffractive structures. The presented new type of Diffractive Fizeau Null Lens (DFNL) design eliminates the transmitted wavefront distortion (TWD) of the CGH substrate and increases the accuracy of the surface test. The method was approved by testing a spherical reference mirror with an f-number of f/0.65.

© 2009 Optical Society of America

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  1. S. M. Arnold, L. C. Maxey, J. E. Rogers, and R. C. Yoder, "Figure metrology of deep aspherics using a conventional interferometer with CGH null," Proc. SPIE 2536, 106-116 (1996).
  2. A. G. Poleshchuk and V. P. Korolkov, "Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical element," Proc. SPIE 6732, 67320X (2007).
  3. A. G. Poleshchuk, V. P Korolkov, V. V. Cherkashin, S. Reichelt, and J. H. Burge, "Polar coordinate laser writing system: error analysis of fabricated DOEs," Proc. SPIE 4440, 161-172 (2001).
  4. R. Zehnder, J. H. Burge, and C. Zhao, "Use of computer generated holograms for alignment of complex null correctors," Proc. SPIE 6273, 62732S (2006).
  5. J.-M. Asfour and A. G. Poleshchuk, "Asphere testing with a Fizeau interferometer based on a combined computer-generated hologram," J. Opt. Soc. Am. A 23, 172-178 (2006).
  6. T. Kim, J. H. Burge, Y. Lee, and S. Kim, "Null Test for a Highly Paraboloidal Mirror," Appl. Opt. 43, 3614-3618 (2004).
    [PubMed]
  7. Yu-C. Chang and J. H. Burge, "Error analysis for CGH optical testing," Proc. SPIE 3782, 358-366 (1999).
  8. R. Schreiner, J. Schwider, N. Lindlein, and K. Mantel, "Absolute testing of the reference surface of a Fizeau interferometer through even/odd decompositions," Appl. Opt. 47, 6134-6141 (2008).
    [PubMed]

2008 (1)

2007 (1)

A. G. Poleshchuk and V. P. Korolkov, "Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical element," Proc. SPIE 6732, 67320X (2007).

2006 (2)

R. Zehnder, J. H. Burge, and C. Zhao, "Use of computer generated holograms for alignment of complex null correctors," Proc. SPIE 6273, 62732S (2006).

J.-M. Asfour and A. G. Poleshchuk, "Asphere testing with a Fizeau interferometer based on a combined computer-generated hologram," J. Opt. Soc. Am. A 23, 172-178 (2006).

2004 (1)

2001 (1)

A. G. Poleshchuk, V. P Korolkov, V. V. Cherkashin, S. Reichelt, and J. H. Burge, "Polar coordinate laser writing system: error analysis of fabricated DOEs," Proc. SPIE 4440, 161-172 (2001).

1999 (1)

Yu-C. Chang and J. H. Burge, "Error analysis for CGH optical testing," Proc. SPIE 3782, 358-366 (1999).

1996 (1)

S. M. Arnold, L. C. Maxey, J. E. Rogers, and R. C. Yoder, "Figure metrology of deep aspherics using a conventional interferometer with CGH null," Proc. SPIE 2536, 106-116 (1996).

Arnold, S. M.

S. M. Arnold, L. C. Maxey, J. E. Rogers, and R. C. Yoder, "Figure metrology of deep aspherics using a conventional interferometer with CGH null," Proc. SPIE 2536, 106-116 (1996).

Asfour, J.-M.

Burge, J. H.

R. Zehnder, J. H. Burge, and C. Zhao, "Use of computer generated holograms for alignment of complex null correctors," Proc. SPIE 6273, 62732S (2006).

T. Kim, J. H. Burge, Y. Lee, and S. Kim, "Null Test for a Highly Paraboloidal Mirror," Appl. Opt. 43, 3614-3618 (2004).
[PubMed]

A. G. Poleshchuk, V. P Korolkov, V. V. Cherkashin, S. Reichelt, and J. H. Burge, "Polar coordinate laser writing system: error analysis of fabricated DOEs," Proc. SPIE 4440, 161-172 (2001).

Yu-C. Chang and J. H. Burge, "Error analysis for CGH optical testing," Proc. SPIE 3782, 358-366 (1999).

Chang, Yu-C.

Yu-C. Chang and J. H. Burge, "Error analysis for CGH optical testing," Proc. SPIE 3782, 358-366 (1999).

Cherkashin, V. V.

A. G. Poleshchuk, V. P Korolkov, V. V. Cherkashin, S. Reichelt, and J. H. Burge, "Polar coordinate laser writing system: error analysis of fabricated DOEs," Proc. SPIE 4440, 161-172 (2001).

Kim, S.

Kim, T.

Korolkov, V. P

A. G. Poleshchuk, V. P Korolkov, V. V. Cherkashin, S. Reichelt, and J. H. Burge, "Polar coordinate laser writing system: error analysis of fabricated DOEs," Proc. SPIE 4440, 161-172 (2001).

Korolkov, V. P.

A. G. Poleshchuk and V. P. Korolkov, "Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical element," Proc. SPIE 6732, 67320X (2007).

Lee, Y.

Lindlein, N.

Mantel, K.

Maxey, L. C.

S. M. Arnold, L. C. Maxey, J. E. Rogers, and R. C. Yoder, "Figure metrology of deep aspherics using a conventional interferometer with CGH null," Proc. SPIE 2536, 106-116 (1996).

Poleshchuk, A. G.

A. G. Poleshchuk and V. P. Korolkov, "Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical element," Proc. SPIE 6732, 67320X (2007).

J.-M. Asfour and A. G. Poleshchuk, "Asphere testing with a Fizeau interferometer based on a combined computer-generated hologram," J. Opt. Soc. Am. A 23, 172-178 (2006).

A. G. Poleshchuk, V. P Korolkov, V. V. Cherkashin, S. Reichelt, and J. H. Burge, "Polar coordinate laser writing system: error analysis of fabricated DOEs," Proc. SPIE 4440, 161-172 (2001).

Reichelt, S.

A. G. Poleshchuk, V. P Korolkov, V. V. Cherkashin, S. Reichelt, and J. H. Burge, "Polar coordinate laser writing system: error analysis of fabricated DOEs," Proc. SPIE 4440, 161-172 (2001).

Rogers, J. E.

S. M. Arnold, L. C. Maxey, J. E. Rogers, and R. C. Yoder, "Figure metrology of deep aspherics using a conventional interferometer with CGH null," Proc. SPIE 2536, 106-116 (1996).

Schreiner, R.

Schwider, J.

Yoder, R. C.

S. M. Arnold, L. C. Maxey, J. E. Rogers, and R. C. Yoder, "Figure metrology of deep aspherics using a conventional interferometer with CGH null," Proc. SPIE 2536, 106-116 (1996).

Zehnder, R.

R. Zehnder, J. H. Burge, and C. Zhao, "Use of computer generated holograms for alignment of complex null correctors," Proc. SPIE 6273, 62732S (2006).

Zhao, C.

R. Zehnder, J. H. Burge, and C. Zhao, "Use of computer generated holograms for alignment of complex null correctors," Proc. SPIE 6273, 62732S (2006).

Appl. Opt. (2)

J. Opt. Soc. Am. A (1)

Proc. SPIE (5)

S. M. Arnold, L. C. Maxey, J. E. Rogers, and R. C. Yoder, "Figure metrology of deep aspherics using a conventional interferometer with CGH null," Proc. SPIE 2536, 106-116 (1996).

A. G. Poleshchuk and V. P. Korolkov, "Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical element," Proc. SPIE 6732, 67320X (2007).

A. G. Poleshchuk, V. P Korolkov, V. V. Cherkashin, S. Reichelt, and J. H. Burge, "Polar coordinate laser writing system: error analysis of fabricated DOEs," Proc. SPIE 4440, 161-172 (2001).

R. Zehnder, J. H. Burge, and C. Zhao, "Use of computer generated holograms for alignment of complex null correctors," Proc. SPIE 6273, 62732S (2006).

Yu-C. Chang and J. H. Burge, "Error analysis for CGH optical testing," Proc. SPIE 3782, 358-366 (1999).

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Figures (5)

Fig.1.
Fig.1.

Layout of a CGH test of an asphere. BS is a beam splitter, TS is a transmission sphere or any focusing objective.

Fig. 2.
Fig. 2.

Phase diffractive structures for the generation of the test wavefront (a), amplitude diffractive structures for the generation of the reference wavefront (b) in reflection, combination of two structures (c), fabricated diffractive amplitude-phase structure (d).

Fig. 3.
Fig. 3.

The dotted lines are the normalized intensities of the test beam due to the surface refractive index Rsurf=20% (a), Rsurf=10% (b), Rsurf=5% (c). The solid line is the normalized intensity of the reference beam.

Fig.4.
Fig.4.

3D images (a, c) and plots (b, d) of the central part and periphery of the fabricated combined CGH. Zygo NewView 6000 microscope, objectives 20x (a,b) and 50x (c,d) Mirau.

Fig. 5.
Fig. 5.

Ref. wavefront generated by combined CGH, measured with TS (a), Ref. sphere measured with combined CGH (b), Ref. wavefront generated by combined CGH and artificial TWD, measured with TS (c), Ref. sphere measured with combined CGH and artificial TWD (d). White arrows show the border of the fused silica plate, which covers the right part of the field.

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