Abstract

We report the design and fabrication of nanoscale resonant gratings which is of interest for narrow bandwidth filtering application. The linear/circular grating structures, of which the grating width is 200nm and the grating height is 260nm, are generated on silicon-on-insulator wafer. Nanoscale gratings are fabricated on the silicon device layer by a combination of electron beam lithography and fast atom beam etching. The silicon handle layer under grating region is removed by deep reactive ion etching, and the buried oxide layer is kept. The reflectance measurements are performed to characterize the optical response of fabricated freestanding nanoscale gratings. The resonant behavior of linear gratings agrees with the theoretical predication, and the polarization-independent responses of circular gratings are also experimentally demonstrated.

© 2009 Optical Society of America

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    [CrossRef]
  5. N. Ganesh, A. Xiang, N.B. Beltran, D.W. Dobbs, B.T. Cunningham, "Compact wavelength detection system incorporating a guided-mode resonance filter," Appl. Phys.Lett. 90, 081103(2007).
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  9. C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006)
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    [CrossRef]
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2008 (6)

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008)
[CrossRef]

Y. Kanamori, N. Matsuyama, K. Hane, "Resonant-wavelength tuning of a pitch-variable 1-D photonic crystal filter at telecom frequencies," IEEE Photon. Technol. Lett. 20, 1136(2008)
[CrossRef]

J.-S. Ye, N. Matsuyama, Y. Kanamori, and K. Hane, "Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer," IEEE Photon. Technol. Lett. 20, 851(2008)
[CrossRef]

Q2. Eric Laux, Cyriaque Genet, Torbjorn Skauli, Thomas W. Ebbesen, "Plasmonic photon sorters for spectral and polarimetric imaging," Nature Photonics 2, 161-164(2008)
[CrossRef]

R. D. Bhat, N. C. Panoiu, S. R. Brueck, R. M. Osgood, "Enhancing the signal-to-noise ratio of an infrared photodetector with a circular metal grating," Opt. Express 16, 4588-4596 (2008) http://www.opticsinfobase.org/abstract.cfm?URI=oe-16-7-4588
[CrossRef] [PubMed]

Y. -C. Lee, C. -F. Huang, J. -Y. Chang, and M. -L. Wu, "Enhanced light trapping based on guided mode resonance effect for thin-film silicon solar cells with two filling-factor gratings," Opt. Express 16, 7969-7975 (2008) http://www.opticsinfobase.org/abstract.cfm?URI=oe-16-11-7969
[CrossRef] [PubMed]

2007 (4)

A.-L. Fehrembach, A. Talneau, O. Boyko, F. Lemarchand and A. Sentenac, "Experimental demonstration of a narrow-band, angular tolerant, polarization independent, doubly periodic resonant grating filter," Opt. Lett. 32, 2269-2271(2007)
[CrossRef] [PubMed]

Y. Kanamori, T. Kitani, K. Hane, "Control of guided resonance in a photonic crystal slab using microelectromechanical actuators," Appl. Phys. Lett. 90, 031911(2007)
[CrossRef]

Q1. Alok. A.Mehta, Raymond C.Rumpf, Zachary A.Roth, Eric G.Johnson, "Guided mode resonance filter as a spectrally selective feedback element in a double-cladding optical fiber laser," IEEE Photon.Technol.Lett. 19,2030-2032(2007)
[CrossRef]

N. Ganesh, A. Xiang, N.B. Beltran, D.W. Dobbs, B.T. Cunningham, "Compact wavelength detection system incorporating a guided-mode resonance filter," Appl. Phys.Lett. 90, 081103(2007).
[CrossRef]

2006 (4)

D. Dobbs, I. Gershkovich, B.T. Cunningham, "Fabrication of a graded wavelength guided mode resonant filter photonic crystal," Appl. Phys. Lett. 89, 123113(2006).
[CrossRef]

C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006)
[CrossRef]

K. B. Crozier, Virginie Lousse, Onur Kilic, Sora Kim, Shanhui Fan, and Olav Solgaard, "Air-bridged photonic crystal slabs at visible and near-infrared wavelengths," Phys. Rev. B 73, 115126 (2006)
[CrossRef]

Che-Lung Hsu; Yung-Chih Liu; Chih-Ming Wang; Mount-Learn Wu; Ya-Lun Tsai; Yue-Hong Chou; Chien-Chieh Lee; Jenq-Yang Chang, "Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane," J. Lightwave Technol. 24, 1922-1928(2006)
[CrossRef]

2005 (2)

2004 (1)

W. Suh, S. Fan, "All-pass transmission or flattop reflection filters using a single photonic crystal slab," Appl. Phys. Lett. 84, 4905(2004)
[CrossRef]

2002 (1)

H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
[CrossRef] [PubMed]

1998 (1)

1997 (1)

D. Rosenblatt, A. Sharon, A.A. Friesem, "Resonant grating waveguide structures," IEEE J.Quantum Electron. 33, 2038-2059(1997)
[CrossRef]

1996 (1)

A. Sharon, D. Rosenblatt, A. A. Friesem, "Narrow spectral bandwidths with grating waveguide structures," Appl.Phys.Lett. 69, 4154-4156(1996)
[CrossRef]

1981 (1)

Arguel, P.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008)
[CrossRef]

Beltran, N.B.

N. Ganesh, A. Xiang, N.B. Beltran, D.W. Dobbs, B.T. Cunningham, "Compact wavelength detection system incorporating a guided-mode resonance filter," Appl. Phys.Lett. 90, 081103(2007).
[CrossRef]

Bhat, R. D.

Bonnefont, S.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008)
[CrossRef]

Boyko, O.

Brueck, S. R.

Brundrett, D. L.

Chang, J. Y.

C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006)
[CrossRef]

Chang, J. -Y.

Crozier, K. B.

K. B. Crozier, Virginie Lousse, Onur Kilic, Sora Kim, Shanhui Fan, and Olav Solgaard, "Air-bridged photonic crystal slabs at visible and near-infrared wavelengths," Phys. Rev. B 73, 115126 (2006)
[CrossRef]

Cunningham, B.T.

N. Ganesh, A. Xiang, N.B. Beltran, D.W. Dobbs, B.T. Cunningham, "Compact wavelength detection system incorporating a guided-mode resonance filter," Appl. Phys.Lett. 90, 081103(2007).
[CrossRef]

D. Dobbs, I. Gershkovich, B.T. Cunningham, "Fabrication of a graded wavelength guided mode resonant filter photonic crystal," Appl. Phys. Lett. 89, 123113(2006).
[CrossRef]

Degiron, A.

H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
[CrossRef] [PubMed]

Devaux, E.

H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
[CrossRef] [PubMed]

Dobbs, D.

D. Dobbs, I. Gershkovich, B.T. Cunningham, "Fabrication of a graded wavelength guided mode resonant filter photonic crystal," Appl. Phys. Lett. 89, 123113(2006).
[CrossRef]

Dobbs, D.W.

N. Ganesh, A. Xiang, N.B. Beltran, D.W. Dobbs, B.T. Cunningham, "Compact wavelength detection system incorporating a guided-mode resonance filter," Appl. Phys.Lett. 90, 081103(2007).
[CrossRef]

Ebbesen, T. W.

H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
[CrossRef] [PubMed]

Ebbesen, Thomas W.

Q2. Eric Laux, Cyriaque Genet, Torbjorn Skauli, Thomas W. Ebbesen, "Plasmonic photon sorters for spectral and polarimetric imaging," Nature Photonics 2, 161-164(2008)
[CrossRef]

Fan, S.

W. Suh, S. Fan, "All-pass transmission or flattop reflection filters using a single photonic crystal slab," Appl. Phys. Lett. 84, 4905(2004)
[CrossRef]

Fehrembach, A.L.

A.L. Fehrembach and A. Sentenac, "Unpolarized narrow-band filtering with resonant gratings," Appl. Phys. Lett.,  86, 121105(2005)
[CrossRef]

Fehrembach, A.-L.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008)
[CrossRef]

A.-L. Fehrembach, A. Talneau, O. Boyko, F. Lemarchand and A. Sentenac, "Experimental demonstration of a narrow-band, angular tolerant, polarization independent, doubly periodic resonant grating filter," Opt. Lett. 32, 2269-2271(2007)
[CrossRef] [PubMed]

Friesem, A. A.

A. Sharon, D. Rosenblatt, A. A. Friesem, "Narrow spectral bandwidths with grating waveguide structures," Appl.Phys.Lett. 69, 4154-4156(1996)
[CrossRef]

Friesem, A.A.

D. Rosenblatt, A. Sharon, A.A. Friesem, "Resonant grating waveguide structures," IEEE J.Quantum Electron. 33, 2038-2059(1997)
[CrossRef]

Ganesh, N.

N. Ganesh, A. Xiang, N.B. Beltran, D.W. Dobbs, B.T. Cunningham, "Compact wavelength detection system incorporating a guided-mode resonance filter," Appl. Phys.Lett. 90, 081103(2007).
[CrossRef]

Garcia-Vidal, F. J.

H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
[CrossRef] [PubMed]

Gauthier-Lafaye, O.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008)
[CrossRef]

Gaylord, T. K.

Genet, Cyriaque

Q2. Eric Laux, Cyriaque Genet, Torbjorn Skauli, Thomas W. Ebbesen, "Plasmonic photon sorters for spectral and polarimetric imaging," Nature Photonics 2, 161-164(2008)
[CrossRef]

Gershkovich, I.

D. Dobbs, I. Gershkovich, B.T. Cunningham, "Fabrication of a graded wavelength guided mode resonant filter photonic crystal," Appl. Phys. Lett. 89, 123113(2006).
[CrossRef]

Glytsis, E. N.

Hane, K.

Y. Kanamori, N. Matsuyama, K. Hane, "Resonant-wavelength tuning of a pitch-variable 1-D photonic crystal filter at telecom frequencies," IEEE Photon. Technol. Lett. 20, 1136(2008)
[CrossRef]

J.-S. Ye, N. Matsuyama, Y. Kanamori, and K. Hane, "Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer," IEEE Photon. Technol. Lett. 20, 851(2008)
[CrossRef]

Y. Kanamori, T. Kitani, K. Hane, "Control of guided resonance in a photonic crystal slab using microelectromechanical actuators," Appl. Phys. Lett. 90, 031911(2007)
[CrossRef]

Hernandez, S.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008)
[CrossRef]

Herzig, H.

Hsu, C. L.

C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006)
[CrossRef]

Huang, C. -F.

Kanamori, Y.

Y. Kanamori, N. Matsuyama, K. Hane, "Resonant-wavelength tuning of a pitch-variable 1-D photonic crystal filter at telecom frequencies," IEEE Photon. Technol. Lett. 20, 1136(2008)
[CrossRef]

J.-S. Ye, N. Matsuyama, Y. Kanamori, and K. Hane, "Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer," IEEE Photon. Technol. Lett. 20, 851(2008)
[CrossRef]

Y. Kanamori, T. Kitani, K. Hane, "Control of guided resonance in a photonic crystal slab using microelectromechanical actuators," Appl. Phys. Lett. 90, 031911(2007)
[CrossRef]

Kitani, T.

Y. Kanamori, T. Kitani, K. Hane, "Control of guided resonance in a photonic crystal slab using microelectromechanical actuators," Appl. Phys. Lett. 90, 031911(2007)
[CrossRef]

Laux, Eric

Q2. Eric Laux, Cyriaque Genet, Torbjorn Skauli, Thomas W. Ebbesen, "Plasmonic photon sorters for spectral and polarimetric imaging," Nature Photonics 2, 161-164(2008)
[CrossRef]

Lee, Y. C.

C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006)
[CrossRef]

Lee, Y. -C.

Lemarchand, F.

Lezec, H. J.

H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
[CrossRef] [PubMed]

Linke, R. A.

H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
[CrossRef] [PubMed]

Liu, Y. C.

C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006)
[CrossRef]

Lozes-Dupuy, F.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008)
[CrossRef]

Martin-Moreno, L.

H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
[CrossRef] [PubMed]

Matsuyama, N.

J.-S. Ye, N. Matsuyama, Y. Kanamori, and K. Hane, "Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer," IEEE Photon. Technol. Lett. 20, 851(2008)
[CrossRef]

Y. Kanamori, N. Matsuyama, K. Hane, "Resonant-wavelength tuning of a pitch-variable 1-D photonic crystal filter at telecom frequencies," IEEE Photon. Technol. Lett. 20, 1136(2008)
[CrossRef]

Moharam, M. G.

Nakagawa, W.

Niederer, G.

Osgood, R. M.

Panoiu, N. C.

Rosenblatt, D.

D. Rosenblatt, A. Sharon, A.A. Friesem, "Resonant grating waveguide structures," IEEE J.Quantum Electron. 33, 2038-2059(1997)
[CrossRef]

A. Sharon, D. Rosenblatt, A. A. Friesem, "Narrow spectral bandwidths with grating waveguide structures," Appl.Phys.Lett. 69, 4154-4156(1996)
[CrossRef]

Sentenac, A.

S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of ~60," Appl.Phys.Lett. 92, 131112(2008)
[CrossRef]

A.-L. Fehrembach, A. Talneau, O. Boyko, F. Lemarchand and A. Sentenac, "Experimental demonstration of a narrow-band, angular tolerant, polarization independent, doubly periodic resonant grating filter," Opt. Lett. 32, 2269-2271(2007)
[CrossRef] [PubMed]

A.L. Fehrembach and A. Sentenac, "Unpolarized narrow-band filtering with resonant gratings," Appl. Phys. Lett.,  86, 121105(2005)
[CrossRef]

Sharon, A.

D. Rosenblatt, A. Sharon, A.A. Friesem, "Resonant grating waveguide structures," IEEE J.Quantum Electron. 33, 2038-2059(1997)
[CrossRef]

A. Sharon, D. Rosenblatt, A. A. Friesem, "Narrow spectral bandwidths with grating waveguide structures," Appl.Phys.Lett. 69, 4154-4156(1996)
[CrossRef]

Skauli, Torbjorn

Q2. Eric Laux, Cyriaque Genet, Torbjorn Skauli, Thomas W. Ebbesen, "Plasmonic photon sorters for spectral and polarimetric imaging," Nature Photonics 2, 161-164(2008)
[CrossRef]

Suh, W.

W. Suh, S. Fan, "All-pass transmission or flattop reflection filters using a single photonic crystal slab," Appl. Phys. Lett. 84, 4905(2004)
[CrossRef]

Talneau, A.

Thiele, H.

Wu, M. L.

C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006)
[CrossRef]

Wu, M. -L.

Xiang, A.

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Figures (4)

Fig. 1.
Fig. 1.

(a) Reflection spectra (TM mode) of the nanoscale resonant gratings calculated by RCWA. The grating filling factor is 0.1, and the grating height is 260nm. The grating period is 1410nm, 1420nm, and 1430nm, respectively. (b) A schematic of fabrication process for the nanoscale resonant gratings.

Fig. 2.
Fig. 2.

SEM micrographs of fabricated resonant gratings. (a) the whole image of fabricated linear grating,(b)&(c) the magnified view of linear grating, (d) the fabricated circular grating; (e) the cross sectional image of the fabricated grating on a referenced wafer.

Fig. 3.
Fig. 3.

(a) Measured reflection spectra of fabricated linear gratings versus wavelength; (b) Simulated reflection spectra of linear gratings with different buried oxide layer.

Fig. 4.
Fig. 4.

(a) Measured reflection spectra of fabricated circular gratings versus wavelength; (b) Measured reflection spectra of sample by rotating 90 degree with respect to measurements in Fig.4(a).

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